Patent
US 10,153,064copper monoxide
CuO
gold, titanium, or silver
polyethylene naphthalate
polyethylene terephthalate
polyimide
| — |
Thickness | 50–100 µm | — |
Thickness | 1–5 µm | — |
Thickness | 20–50 nm | — |
Duration | 2–20 minutes | — |
Thickness | 25–100 µm | — |
Thickness | 5–10 µm | — |
Duration | 10–30 minutes | — |
Thickness | 20–100 µm | — |
Temperature | 100–130 °C | — |
Thickness | 200–700 nm | — |
Thickness | 3–7 cm | — |
Temperature | 60–90 °C | — |
Duration | 30–30 minutes | — |
Thickness | ≥ 30 nm | — |
HIGH QUALITY LARGE SCALE SINGLE AND MULTILAYER GRAPHENE PRODUCTION BY CHEMICAL VAPOR DEPOSITION
copper monoxide
CuO
gold, titanium, or silver
polyethylene naphthalate
polyethylene terephthalate
polyimide
| — |
Thickness | 50–100 µm | — |
Thickness | 1–5 µm | — |
Thickness | 20–50 nm | — |
Duration | 2–20 minutes | — |
Thickness | 25–100 µm | — |
Thickness | 5–10 µm | — |
Duration | 10–30 minutes | — |
Thickness | 20–100 µm | — |
Temperature | 100–130 °C | — |
Thickness | 200–700 nm | — |
Thickness | 3–7 cm | — |
Temperature | 60–90 °C | — |
Duration | 30–30 minutes | — |
Thickness | ≥ 30 nm | — |
HIGH QUALITY LARGE SCALE SINGLE AND MULTILAYER GRAPHENE PRODUCTION BY CHEMICAL VAPOR DEPOSITION
copper monoxide
CuO
gold, titanium, or silver
polyethylene naphthalate
polyethylene terephthalate
polyimide
| — |
Thickness | 50–100 µm | — |
Thickness | 1–5 µm | — |
Thickness | 20–50 nm | — |
Duration | 2–20 minutes | — |
Thickness | 25–100 µm | — |
Thickness | 5–10 µm | — |
Duration | 10–30 minutes | — |
Thickness | 20–100 µm | — |
Temperature | 100–130 °C | — |
Thickness | 200–700 nm | — |
Thickness | 3–7 cm | — |
Temperature | 60–90 °C | — |
Duration | 30–30 minutes | — |
Thickness | ≥ 30 nm | — |
HIGH QUALITY LARGE SCALE SINGLE AND MULTILAYER GRAPHENE PRODUCTION BY CHEMICAL VAPOR DEPOSITION
copper monoxide
CuO
gold, titanium, or silver
polyethylene naphthalate
polyethylene terephthalate
polyimide
| — |
Thickness | 50–100 µm | — |
Thickness | 1–5 µm | — |
Thickness | 20–50 nm | — |
Duration | 2–20 minutes | — |
Thickness | 25–100 µm | — |
Thickness | 5–10 µm | — |
Duration | 10–30 minutes | — |
Thickness | 20–100 µm | — |
Temperature | 100–130 °C | — |
Thickness | 200–700 nm | — |
Thickness | 3–7 cm | — |
Temperature | 60–90 °C | — |
Duration | 30–30 minutes | — |
Thickness | ≥ 30 nm | — |
HIGH QUALITY LARGE SCALE SINGLE AND MULTILAYER GRAPHENE PRODUCTION BY CHEMICAL VAPOR DEPOSITION