Patent
US 8,865,105Duration | 1–30 minutes | — |
Duration | 30–100 minutes | — |
Pressure | 0.01–1000 mTorr | — |
Pressure | 1–100 mTorr | — |
Pressure | 20–60 mTorr | — |
Duration | 0.1–1000 minutes | — |
Duration | 0.5–1000 minutes | — |
Pressure | 0.005–0.06 Torr | — |
Pressure | 10–60 mTorr | — |
Duration | 0.5–30 minutes | — |
Duration | 1–30 minutes | — |
Duration | 30–100 minutes | — |
Pressure | 0.01–1000 mTorr | — |
Pressure | 1–100 mTorr | — |
Pressure | 20–60 mTorr | — |
Duration | 0.1–1000 minutes | — |
Duration | 0.5–1000 minutes | — |
Pressure | 0.005–0.06 Torr | — |
Pressure | 10–60 mTorr | — |
Duration | 0.5–30 minutes | — |
Duration | 1–30 minutes | — |
Duration | 30–100 minutes | — |
Pressure | 0.01–1000 mTorr | — |
Pressure | 1–100 mTorr | — |
Pressure | 20–60 mTorr | — |
Duration | 0.1–1000 minutes | — |
Duration | 0.5–1000 minutes | — |
Pressure | 0.005–0.06 Torr | — |
Pressure | 10–60 mTorr | — |
Duration | 0.5–30 minutes | — |
Duration | 1–30 minutes | — |
Duration | 30–100 minutes | — |
Pressure | 0.01–1000 mTorr | — |
Pressure | 1–100 mTorr | — |
Pressure | 20–60 mTorr | — |
Duration | 0.1–1000 minutes | — |
Duration | 0.5–1000 minutes | — |
Pressure | 0.005–0.06 Torr | — |
Pressure | 10–60 mTorr | — |
Duration | 0.5–30 minutes | — |