GRAPHENE DEVICE INCLUDING A PVA LAYER OR FORMED USING A PVA LAYER | Matter42 Literature
Patent details
Patent
US 8,735,209
GRAPHENE DEVICE INCLUDING A PVA LAYER OR FORMED USING A PVA LAYER
Inanc Meric, Kenneth Shepard, Noah J. Tremblay, Philip Kim et al.
2014-05-27·US
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
6 independent · 15 dependent
1
Independentgraphenepolyvinyl alcohol (PVA)HfO₂graphene device with PVA dielectric stack
A method, comprising: forming a graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; forming a dielectric layer upon the functionalized portion of the PVA layer; [[and]] forming a first electrode located upon and conductively coupled to the working surface of the graphene laver; and layeir forming a second electrode located upon and conductively coup led to the working surface of the gr a phene la y er, the second electrode formed at a location laterally separated from the first electrode along the working surface of the gr a phene la ver; wherein at least a portion of the PVA la y er is located upon the working surface of the gra phene la y er between the first and second electrodes.
2
Dependent← claim 1HfO₂
The method of claim 1, wherein the dielectric layer comprises haf n ium oxide.
3
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein forming the PVA layer upon the graphene includes treating the graphene layer with an aqueous solution including PVA.
4
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein activating the PVA layer includes exposing the PVA layer to ultraviolet light.
5
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein activating the PVA layer includes treating the PVA layer with ozone.
6
Dependent← claim 1HfO₂
The method of claim 1, wherein forming the dielectric layer includes depositing the dielectric layer using atomic layer deposition (ALD).
7
Independent
canceled
8
Independentpolyvinyl alcohol (PVA)HfO₂graphene device with PVA dielectric stack
The method of claim [[7,]] L wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
9
Dependent← claim 8HfO₂graphene device with PVA dielectric stack
The method of claim 8, comprising forming a third electrode upon the dielectric layer in the lateral region between the first and second electrodes.
14
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene field-effect transistor with top-gate and bottom-gate
The method of claim [[7,]] L comprising: forming an oxide layer upon a conductive substrate; wherein the graphene layer is formed upon the oxide layer; wherein at least a portion of the graphene layer, at least a portion of the PVA layer, at least a portion of the dielectric layer, and at least a portion of the respective first and second electrodes are formed to establish a field-effect transistor; wherein the first and second electrodes are formed to establish respective source electrode and a respective drain electrode of the field-effect transistor; and wherein the conductive substrate is formed to provide a bottom-gate electrode.
15
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene device with PVA dielectric stack
A method, comprising: forming an oxide layer upon a conductive substrate; forming a graphene layer upon the oxide layer, the graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; depositing a dielectric layer upon the functionalized portion of the PVA layer using atomic layer deposition (ALD); forming a first electrode located upon and conductively coupled to the working surface of the graphene layer; and forming a second electrode located upon and conductive coupled to the working surface of the graphene layer, the second electrode formed at a location laterally separated from the first electrode along the working surface of the graphene layer.
16
Dependent← claim 15polyvinyl alcohol (PVA)HfO₂
The method of claim 15, wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
17
Dependent← claim 15HfO₂
The method of claim 15, wherein the dielectric layer comprises haf n ium oxide.
18
Dependent← claim 15HfO₂graphene device with PVA dielectric stack
The method of claim 15, comprising forming a third electrode upon the dielectric layer in the lateral region between the first and second electrodes.
20
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene device with PVA dielectric stack
A method, comprising: forming an oxide layer upon a conductive substrate; forming a graphene layer upon the oxide layer, the graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; [[and]] depositing a dielectric layer comprising haf n ium oxide upon the functionalized portion of the PVA layer using atomic layer deposition (ALD) (A-L-D) forming a first electrode located upon and conductively coup led to the working surface of the g raphene la ver; and forming a second electrode located upon and conductive coupled to the working surface of the gr a phene la y er, the second electrode formed at a location laterally separated from the first electrode along the working surface of the gr a phene la yer.
21
Dependent← claim 20polyvinyl alcohol (PVA)HfO₂
The method of claim 20, wherein at least a portion of the PVA layer is located upon the working surface of the graphene layer between the first and second electrodes; and wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
graphene device with PVA dielectric stack
HfO₂gate dielectric
polyvinyl alcohol (PVA)functionalization layer
graphenechannel
oxide layersubstrate oxide
conductive substratesubstrate
graphene field-effect transistor with top-gate and bottom-gate
Materials
Materials described outside the worked examples.
graphene
Claimed Channel Material
polyvinyl alcohol (PVA)
Functionalization Layer
dielectric layer (hafnium oxide)
Process steps
Additional fabrication and treatment steps described in the patent.
1
Ald Deposition
Step 1
Process details
method:atomic layer deposition (ALD)
precursor layer:functionalized PVA
Materials:HfO₂
2
Why these are connected
Related documents with shared materials, methods, properties, or citations.
GRAPHENE DEVICE INCLUDING A PVA LAYER OR FORMED USING A PVA LAYER
Inanc Meric, Kenneth Shepard, Noah J. Tremblay, Philip Kim et al.
2014-05-27·US
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
6 independent · 15 dependent
1
Independentgraphenepolyvinyl alcohol (PVA)HfO₂graphene device with PVA dielectric stack
A method, comprising: forming a graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; forming a dielectric layer upon the functionalized portion of the PVA layer; [[and]] forming a first electrode located upon and conductively coupled to the working surface of the graphene laver; and layeir forming a second electrode located upon and conductively coup led to the working surface of the gr a phene la y er, the second electrode formed at a location laterally separated from the first electrode along the working surface of the gr a phene la ver; wherein at least a portion of the PVA la y er is located upon the working surface of the gra phene la y er between the first and second electrodes.
2
Dependent← claim 1HfO₂
The method of claim 1, wherein the dielectric layer comprises haf n ium oxide.
3
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein forming the PVA layer upon the graphene includes treating the graphene layer with an aqueous solution including PVA.
4
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein activating the PVA layer includes exposing the PVA layer to ultraviolet light.
5
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein activating the PVA layer includes treating the PVA layer with ozone.
6
Dependent← claim 1HfO₂
The method of claim 1, wherein forming the dielectric layer includes depositing the dielectric layer using atomic layer deposition (ALD).
7
Independent
canceled
8
Independentpolyvinyl alcohol (PVA)HfO₂graphene device with PVA dielectric stack
The method of claim [[7,]] L wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
9
Dependent← claim 8HfO₂graphene device with PVA dielectric stack
The method of claim 8, comprising forming a third electrode upon the dielectric layer in the lateral region between the first and second electrodes.
14
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene field-effect transistor with top-gate and bottom-gate
The method of claim [[7,]] L comprising: forming an oxide layer upon a conductive substrate; wherein the graphene layer is formed upon the oxide layer; wherein at least a portion of the graphene layer, at least a portion of the PVA layer, at least a portion of the dielectric layer, and at least a portion of the respective first and second electrodes are formed to establish a field-effect transistor; wherein the first and second electrodes are formed to establish respective source electrode and a respective drain electrode of the field-effect transistor; and wherein the conductive substrate is formed to provide a bottom-gate electrode.
15
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene device with PVA dielectric stack
A method, comprising: forming an oxide layer upon a conductive substrate; forming a graphene layer upon the oxide layer, the graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; depositing a dielectric layer upon the functionalized portion of the PVA layer using atomic layer deposition (ALD); forming a first electrode located upon and conductively coupled to the working surface of the graphene layer; and forming a second electrode located upon and conductive coupled to the working surface of the graphene layer, the second electrode formed at a location laterally separated from the first electrode along the working surface of the graphene layer.
16
Dependent← claim 15polyvinyl alcohol (PVA)HfO₂
The method of claim 15, wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
17
Dependent← claim 15HfO₂
The method of claim 15, wherein the dielectric layer comprises haf n ium oxide.
18
Dependent← claim 15HfO₂graphene device with PVA dielectric stack
The method of claim 15, comprising forming a third electrode upon the dielectric layer in the lateral region between the first and second electrodes.
20
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene device with PVA dielectric stack
A method, comprising: forming an oxide layer upon a conductive substrate; forming a graphene layer upon the oxide layer, the graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; [[and]] depositing a dielectric layer comprising haf n ium oxide upon the functionalized portion of the PVA layer using atomic layer deposition (ALD) (A-L-D) forming a first electrode located upon and conductively coup led to the working surface of the g raphene la ver; and forming a second electrode located upon and conductive coupled to the working surface of the gr a phene la y er, the second electrode formed at a location laterally separated from the first electrode along the working surface of the gr a phene la yer.
21
Dependent← claim 20polyvinyl alcohol (PVA)HfO₂
The method of claim 20, wherein at least a portion of the PVA layer is located upon the working surface of the graphene layer between the first and second electrodes; and wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
graphene device with PVA dielectric stack
HfO₂gate dielectric
polyvinyl alcohol (PVA)functionalization layer
graphenechannel
oxide layersubstrate oxide
conductive substratesubstrate
graphene field-effect transistor with top-gate and bottom-gate
Materials
Materials described outside the worked examples.
graphene
Claimed Channel Material
polyvinyl alcohol (PVA)
Functionalization Layer
dielectric layer (hafnium oxide)
Process steps
Additional fabrication and treatment steps described in the patent.
1
Ald Deposition
Step 1
Process details
method:atomic layer deposition (ALD)
precursor layer:functionalized PVA
Materials:HfO₂
2
Why these are connected
Related documents with shared materials, methods, properties, or citations.
GRAPHENE DEVICE INCLUDING A PVA LAYER OR FORMED USING A PVA LAYER
Inanc Meric, Kenneth Shepard, Noah J. Tremblay, Philip Kim et al.
2014-05-27·US
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
6 independent · 15 dependent
1
Independentgraphenepolyvinyl alcohol (PVA)HfO₂graphene device with PVA dielectric stack
A method, comprising: forming a graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; forming a dielectric layer upon the functionalized portion of the PVA layer; [[and]] forming a first electrode located upon and conductively coupled to the working surface of the graphene laver; and layeir forming a second electrode located upon and conductively coup led to the working surface of the gr a phene la y er, the second electrode formed at a location laterally separated from the first electrode along the working surface of the gr a phene la ver; wherein at least a portion of the PVA la y er is located upon the working surface of the gra phene la y er between the first and second electrodes.
2
Dependent← claim 1HfO₂
The method of claim 1, wherein the dielectric layer comprises haf n ium oxide.
3
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein forming the PVA layer upon the graphene includes treating the graphene layer with an aqueous solution including PVA.
4
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein activating the PVA layer includes exposing the PVA layer to ultraviolet light.
5
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein activating the PVA layer includes treating the PVA layer with ozone.
6
Dependent← claim 1HfO₂
The method of claim 1, wherein forming the dielectric layer includes depositing the dielectric layer using atomic layer deposition (ALD).
7
Independent
canceled
8
Independentpolyvinyl alcohol (PVA)HfO₂graphene device with PVA dielectric stack
The method of claim [[7,]] L wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
9
Dependent← claim 8HfO₂graphene device with PVA dielectric stack
The method of claim 8, comprising forming a third electrode upon the dielectric layer in the lateral region between the first and second electrodes.
14
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene field-effect transistor with top-gate and bottom-gate
The method of claim [[7,]] L comprising: forming an oxide layer upon a conductive substrate; wherein the graphene layer is formed upon the oxide layer; wherein at least a portion of the graphene layer, at least a portion of the PVA layer, at least a portion of the dielectric layer, and at least a portion of the respective first and second electrodes are formed to establish a field-effect transistor; wherein the first and second electrodes are formed to establish respective source electrode and a respective drain electrode of the field-effect transistor; and wherein the conductive substrate is formed to provide a bottom-gate electrode.
15
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene device with PVA dielectric stack
A method, comprising: forming an oxide layer upon a conductive substrate; forming a graphene layer upon the oxide layer, the graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; depositing a dielectric layer upon the functionalized portion of the PVA layer using atomic layer deposition (ALD); forming a first electrode located upon and conductively coupled to the working surface of the graphene layer; and forming a second electrode located upon and conductive coupled to the working surface of the graphene layer, the second electrode formed at a location laterally separated from the first electrode along the working surface of the graphene layer.
16
Dependent← claim 15polyvinyl alcohol (PVA)HfO₂
The method of claim 15, wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
17
Dependent← claim 15HfO₂
The method of claim 15, wherein the dielectric layer comprises haf n ium oxide.
18
Dependent← claim 15HfO₂graphene device with PVA dielectric stack
The method of claim 15, comprising forming a third electrode upon the dielectric layer in the lateral region between the first and second electrodes.
20
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene device with PVA dielectric stack
A method, comprising: forming an oxide layer upon a conductive substrate; forming a graphene layer upon the oxide layer, the graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; [[and]] depositing a dielectric layer comprising haf n ium oxide upon the functionalized portion of the PVA layer using atomic layer deposition (ALD) (A-L-D) forming a first electrode located upon and conductively coup led to the working surface of the g raphene la ver; and forming a second electrode located upon and conductive coupled to the working surface of the gr a phene la y er, the second electrode formed at a location laterally separated from the first electrode along the working surface of the gr a phene la yer.
21
Dependent← claim 20polyvinyl alcohol (PVA)HfO₂
The method of claim 20, wherein at least a portion of the PVA layer is located upon the working surface of the graphene layer between the first and second electrodes; and wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
graphene device with PVA dielectric stack
HfO₂gate dielectric
polyvinyl alcohol (PVA)functionalization layer
graphenechannel
oxide layersubstrate oxide
conductive substratesubstrate
graphene field-effect transistor with top-gate and bottom-gate
Materials
Materials described outside the worked examples.
graphene
Claimed Channel Material
polyvinyl alcohol (PVA)
Functionalization Layer
dielectric layer (hafnium oxide)
Process steps
Additional fabrication and treatment steps described in the patent.
1
Ald Deposition
Step 1
Process details
method:atomic layer deposition (ALD)
precursor layer:functionalized PVA
Materials:HfO₂
2
Why these are connected
Related documents with shared materials, methods, properties, or citations.
GRAPHENE DEVICE INCLUDING A PVA LAYER OR FORMED USING A PVA LAYER
Inanc Meric, Kenneth Shepard, Noah J. Tremblay, Philip Kim et al.
2014-05-27·US
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
6 independent · 15 dependent
1
Independentgraphenepolyvinyl alcohol (PVA)HfO₂graphene device with PVA dielectric stack
A method, comprising: forming a graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; forming a dielectric layer upon the functionalized portion of the PVA layer; [[and]] forming a first electrode located upon and conductively coupled to the working surface of the graphene laver; and layeir forming a second electrode located upon and conductively coup led to the working surface of the gr a phene la y er, the second electrode formed at a location laterally separated from the first electrode along the working surface of the gr a phene la ver; wherein at least a portion of the PVA la y er is located upon the working surface of the gra phene la y er between the first and second electrodes.
2
Dependent← claim 1HfO₂
The method of claim 1, wherein the dielectric layer comprises haf n ium oxide.
3
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein forming the PVA layer upon the graphene includes treating the graphene layer with an aqueous solution including PVA.
4
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein activating the PVA layer includes exposing the PVA layer to ultraviolet light.
5
Dependent← claim 1polyvinyl alcohol (PVA)
The method of claim 1, wherein activating the PVA layer includes treating the PVA layer with ozone.
6
Dependent← claim 1HfO₂
The method of claim 1, wherein forming the dielectric layer includes depositing the dielectric layer using atomic layer deposition (ALD).
7
Independent
canceled
8
Independentpolyvinyl alcohol (PVA)HfO₂graphene device with PVA dielectric stack
The method of claim [[7,]] L wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
9
Dependent← claim 8HfO₂graphene device with PVA dielectric stack
The method of claim 8, comprising forming a third electrode upon the dielectric layer in the lateral region between the first and second electrodes.
14
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene field-effect transistor with top-gate and bottom-gate
The method of claim [[7,]] L comprising: forming an oxide layer upon a conductive substrate; wherein the graphene layer is formed upon the oxide layer; wherein at least a portion of the graphene layer, at least a portion of the PVA layer, at least a portion of the dielectric layer, and at least a portion of the respective first and second electrodes are formed to establish a field-effect transistor; wherein the first and second electrodes are formed to establish respective source electrode and a respective drain electrode of the field-effect transistor; and wherein the conductive substrate is formed to provide a bottom-gate electrode.
15
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene device with PVA dielectric stack
A method, comprising: forming an oxide layer upon a conductive substrate; forming a graphene layer upon the oxide layer, the graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; depositing a dielectric layer upon the functionalized portion of the PVA layer using atomic layer deposition (ALD); forming a first electrode located upon and conductively coupled to the working surface of the graphene layer; and forming a second electrode located upon and conductive coupled to the working surface of the graphene layer, the second electrode formed at a location laterally separated from the first electrode along the working surface of the graphene layer.
16
Dependent← claim 15polyvinyl alcohol (PVA)HfO₂
The method of claim 15, wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
17
Dependent← claim 15HfO₂
The method of claim 15, wherein the dielectric layer comprises haf n ium oxide.
18
Dependent← claim 15HfO₂graphene device with PVA dielectric stack
The method of claim 15, comprising forming a third electrode upon the dielectric layer in the lateral region between the first and second electrodes.
20
Independentgraphenepolyvinyl alcohol (PVA)HfO₂oxide layerconductive substrategraphene device with PVA dielectric stack
A method, comprising: forming an oxide layer upon a conductive substrate; forming a graphene layer upon the oxide layer, the graphene layer defining a working surface; forming a polyvinyl alcohol (PVA) layer upon the working surface of the grapheme layer; activating the PVA layer to provide a functionalized portion of the PVA layer; [[and]] depositing a dielectric layer comprising haf n ium oxide upon the functionalized portion of the PVA layer using atomic layer deposition (ALD) (A-L-D) forming a first electrode located upon and conductively coup led to the working surface of the g raphene la ver; and forming a second electrode located upon and conductive coupled to the working surface of the gr a phene la y er, the second electrode formed at a location laterally separated from the first electrode along the working surface of the gr a phene la yer.
21
Dependent← claim 20polyvinyl alcohol (PVA)HfO₂
The method of claim 20, wherein at least a portion of the PVA layer is located upon the working surface of the graphene layer between the first and second electrodes; and wherein the dielectric layer is formed upon the first and second electrodes and is formed laterally between the first and second electrodes upon the functionalized portion of the PVA layer.
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
graphene device with PVA dielectric stack
HfO₂gate dielectric
polyvinyl alcohol (PVA)functionalization layer
graphenechannel
oxide layersubstrate oxide
conductive substratesubstrate
graphene field-effect transistor with top-gate and bottom-gate
Materials
Materials described outside the worked examples.
graphene
Claimed Channel Material
polyvinyl alcohol (PVA)
Functionalization Layer
dielectric layer (hafnium oxide)
Process steps
Additional fabrication and treatment steps described in the patent.
1
Ald Deposition
Step 1
Process details
method:atomic layer deposition (ALD)
precursor layer:functionalized PVA
Materials:HfO₂
2
Why these are connected
Related documents with shared materials, methods, properties, or citations.