LISTING OF CLAIMS 1. (Withdrawn-Currently Amended) A method of manufacturing a graphene device, the method comprising: forming an insulating material layer on a substrate; forming a first metal pad and a second metal pad on the insulating material layer to be spaced apart from each other; forming a graphene layer between the first metal pad and the second metal pad on the insulating material layer, the graphene layer having a portion def in ed as an active area; forming a third metal pad and a fourth metal pad on the graphene layer to be spaced apart from each other with the active area therebetween, the third metal pad extending from the graphene la v er between the first metal pad and the second metal pad to an upper surface of the first metal pad and the fourth metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper surface of a bove the first meta pa an the second metal pad r--eep eeti vely; forming a first protection l ayer having a first portion t o cove rng the active area and a second portion covering all-the first metal pad, the second metal pad, the gra phene lay er-, the third metal pad, and the fourth metal pad; and etching an entire surface of the first protection layer until only a residual layer made of a material for the forming a first protection layer remains on the active area l U.S. Application No. 13/856,022 Atty. Dkt. No. 2557S I -001896 -US Page 4 of 13 wherein a thickness of the first portion of the first protection la y er is thicker than the second portion of the first protection la y er.

. canceled

(Withdrawn-Currently Amended) The method of claim -141, further comprising: etching the seeen protectie layer, the first protection layer, the active area, SVG 13856022.07-17-2014.HY₅OXRS₇PXXIFW4.CLM.1.svg 0.16 6.66 Black and white l aye r- the first protection layer, the active area, and the insulating material layer.

A graphene device comprising:. an insulating material layer on a substrate; a first metal pad and a second metal pad on the insulating material layer, the first metal pad and the second metal pad spaced apart from each other; a graphene layer between the first metal pad and the second metal pad on the insulating material layer, the graphene layer having a portion defined as an active U.S. Application No. 13/856,022 Atty. Dkt. No. 2557S I -001896- US Page 7 of 13 area; a nd a third metal pad and a fourth metal pad on the graphene layer and spaced apart from each other with the active area therebetween, the third metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper surface of the first metal pad and the fourth metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper SVG 13856022.07-17-2014.HY₅OXRS₇PXXIFW4.CLM.2.svg 0.17 6.15 Black and white a first protection la y er having a first portion confi g ured to cover the active area and a second portion configured to cover the first metal pad, the second metal pad, third metal pad and the fourth metal pad, wherein a thickness of the first portion of the first protection la y er is thicker than the second portion of the first protection la y er.

. canceled

LISTING OF CLAIMS 1. (Withdrawn-Currently Amended) A method of manufacturing a graphene device, the method comprising: forming an insulating material layer on a substrate; forming a first metal pad and a second metal pad on the insulating material layer to be spaced apart from each other; forming a graphene layer between the first metal pad and the second metal pad on the insulating material layer, the graphene layer having a portion def in ed as an active area; forming a third metal pad and a fourth metal pad on the graphene layer to be spaced apart from each other with the active area therebetween, the third metal pad extending from the graphene la v er between the first metal pad and the second metal pad to an upper surface of the first metal pad and the fourth metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper surface of a bove the first meta pa an the second metal pad r--eep eeti vely; forming a first protection l ayer having a first portion t o cove rng the active area and a second portion covering all-the first metal pad, the second metal pad, the gra phene lay er-, the third metal pad, and the fourth metal pad; and etching an entire surface of the first protection layer until only a residual layer made of a material for the forming a first protection layer remains on the active area l U.S. Application No. 13/856,022 Atty. Dkt. No. 2557S I -001896 -US Page 4 of 13 wherein a thickness of the first portion of the first protection la y er is thicker than the second portion of the first protection la y er.

. canceled

(Withdrawn-Currently Amended) The method of claim -141, further comprising: etching the seeen protectie layer, the first protection layer, the active area, SVG 13856022.07-17-2014.HY₅OXRS₇PXXIFW4.CLM.1.svg 0.16 6.66 Black and white l aye r- the first protection layer, the active area, and the insulating material layer.

A graphene device comprising:. an insulating material layer on a substrate; a first metal pad and a second metal pad on the insulating material layer, the first metal pad and the second metal pad spaced apart from each other; a graphene layer between the first metal pad and the second metal pad on the insulating material layer, the graphene layer having a portion defined as an active U.S. Application No. 13/856,022 Atty. Dkt. No. 2557S I -001896- US Page 7 of 13 area; a nd a third metal pad and a fourth metal pad on the graphene layer and spaced apart from each other with the active area therebetween, the third metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper surface of the first metal pad and the fourth metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper SVG 13856022.07-17-2014.HY₅OXRS₇PXXIFW4.CLM.2.svg 0.17 6.15 Black and white a first protection la y er having a first portion confi g ured to cover the active area and a second portion configured to cover the first metal pad, the second metal pad, third metal pad and the fourth metal pad, wherein a thickness of the first portion of the first protection la y er is thicker than the second portion of the first protection la y er.

. canceled

LISTING OF CLAIMS 1. (Withdrawn-Currently Amended) A method of manufacturing a graphene device, the method comprising: forming an insulating material layer on a substrate; forming a first metal pad and a second metal pad on the insulating material layer to be spaced apart from each other; forming a graphene layer between the first metal pad and the second metal pad on the insulating material layer, the graphene layer having a portion def in ed as an active area; forming a third metal pad and a fourth metal pad on the graphene layer to be spaced apart from each other with the active area therebetween, the third metal pad extending from the graphene la v er between the first metal pad and the second metal pad to an upper surface of the first metal pad and the fourth metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper surface of a bove the first meta pa an the second metal pad r--eep eeti vely; forming a first protection l ayer having a first portion t o cove rng the active area and a second portion covering all-the first metal pad, the second metal pad, the gra phene lay er-, the third metal pad, and the fourth metal pad; and etching an entire surface of the first protection layer until only a residual layer made of a material for the forming a first protection layer remains on the active area l U.S. Application No. 13/856,022 Atty. Dkt. No. 2557S I -001896 -US Page 4 of 13 wherein a thickness of the first portion of the first protection la y er is thicker than the second portion of the first protection la y er.

. canceled

(Withdrawn-Currently Amended) The method of claim -141, further comprising: etching the seeen protectie layer, the first protection layer, the active area, SVG 13856022.07-17-2014.HY₅OXRS₇PXXIFW4.CLM.1.svg 0.16 6.66 Black and white l aye r- the first protection layer, the active area, and the insulating material layer.

A graphene device comprising:. an insulating material layer on a substrate; a first metal pad and a second metal pad on the insulating material layer, the first metal pad and the second metal pad spaced apart from each other; a graphene layer between the first metal pad and the second metal pad on the insulating material layer, the graphene layer having a portion defined as an active U.S. Application No. 13/856,022 Atty. Dkt. No. 2557S I -001896- US Page 7 of 13 area; a nd a third metal pad and a fourth metal pad on the graphene layer and spaced apart from each other with the active area therebetween, the third metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper surface of the first metal pad and the fourth metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper SVG 13856022.07-17-2014.HY₅OXRS₇PXXIFW4.CLM.2.svg 0.17 6.15 Black and white a first protection la y er having a first portion confi g ured to cover the active area and a second portion configured to cover the first metal pad, the second metal pad, third metal pad and the fourth metal pad, wherein a thickness of the first portion of the first protection la y er is thicker than the second portion of the first protection la y er.

. canceled

LISTING OF CLAIMS 1. (Withdrawn-Currently Amended) A method of manufacturing a graphene device, the method comprising: forming an insulating material layer on a substrate; forming a first metal pad and a second metal pad on the insulating material layer to be spaced apart from each other; forming a graphene layer between the first metal pad and the second metal pad on the insulating material layer, the graphene layer having a portion def in ed as an active area; forming a third metal pad and a fourth metal pad on the graphene layer to be spaced apart from each other with the active area therebetween, the third metal pad extending from the graphene la v er between the first metal pad and the second metal pad to an upper surface of the first metal pad and the fourth metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper surface of a bove the first meta pa an the second metal pad r--eep eeti vely; forming a first protection l ayer having a first portion t o cove rng the active area and a second portion covering all-the first metal pad, the second metal pad, the gra phene lay er-, the third metal pad, and the fourth metal pad; and etching an entire surface of the first protection layer until only a residual layer made of a material for the forming a first protection layer remains on the active area l U.S. Application No. 13/856,022 Atty. Dkt. No. 2557S I -001896 -US Page 4 of 13 wherein a thickness of the first portion of the first protection la y er is thicker than the second portion of the first protection la y er.

. canceled

(Withdrawn-Currently Amended) The method of claim -141, further comprising: etching the seeen protectie layer, the first protection layer, the active area, SVG 13856022.07-17-2014.HY₅OXRS₇PXXIFW4.CLM.1.svg 0.16 6.66 Black and white l aye r- the first protection layer, the active area, and the insulating material layer.

A graphene device comprising:. an insulating material layer on a substrate; a first metal pad and a second metal pad on the insulating material layer, the first metal pad and the second metal pad spaced apart from each other; a graphene layer between the first metal pad and the second metal pad on the insulating material layer, the graphene layer having a portion defined as an active U.S. Application No. 13/856,022 Atty. Dkt. No. 2557S I -001896- US Page 7 of 13 area; a nd a third metal pad and a fourth metal pad on the graphene layer and spaced apart from each other with the active area therebetween, the third metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper surface of the first metal pad and the fourth metal pad extending from the graphene la y er between the first metal pad and the second metal pad to an upper SVG 13856022.07-17-2014.HY₅OXRS₇PXXIFW4.CLM.2.svg 0.17 6.15 Black and white a first protection la y er having a first portion confi g ured to cover the active area and a second portion configured to cover the first metal pad, the second metal pad, third metal pad and the fourth metal pad, wherein a thickness of the first portion of the first protection la y er is thicker than the second portion of the first protection la y er.

. canceled