Patent
US 8,805,148GENERATION OF TERAHERTZ ELECTROMAGNETIC WAVES IN GRAPHENE BY COHERENT PHOTON-MIXING
PHAEDON AVOURIS
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 8,805,148Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view of a substrate having a graphene layer formed thereon in accordance with the present principles; [0012]
FIG. 2 is a top view of the substrate with the graphene layer having a coplanar waveguide metallization structure formed thereon in accordance with the present …
FIG. 3 is a top view of the substrate with the graphene layer having an antenna metallization structure formed thereon in accordance with the present …
FIG. 4 is a top view of a substrate with a patterned graphene layer formed into a shape by selective removal of graphene in accordance with the present …
FIG. 5 is a top view of the substrate with the shaped graphene layer of
FIG. 6 is a top view of the substrate with the shaped graphene layer of
FIG. 7 is a top view of a terahertz emitter device with a waveguide integrated therein in accordance with one illustrative embodiment; [0018]
FIG. 8 is a cross-sectional view taken at section line 8-8 of
FIG. 9 is a top view of a terahertz emitter device array with a waveguide integrated therein in accordance with another illustrative embodiment; [0020]
FIG. 10 is a perspective view of the terahertz emitter device array of
FIG. 11 is a block/flow diagram showing an illustrative method for fabricating an electromagnetic device with terahertz capabilities in accordance with one …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An electromagnetic device, comprising: a substrate; a layer of graphene formed on the substrate; and a metallization layer patterned on the graphene, the metallization layer forming electrodes directly on the g raphene such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The device as recited in claim 1, wherein the metallization layer forms a coplanar waveguide over the graphene.
The device as recited in claim 1, wherein the metallization layer forms an antenna over the graphene.
The device as recited in claim 1, wherein the layer of graphene is patterned to form a shape.
The device as recited in claim 1, further comprising an optical waveguide integrated with graphene.
The device as recited in claim 1, wherein the electrodes are formed as fingers over a position of the graphene.
The device as recited in claim 1, further comprising an insulator layer formed on the substrate and an optical waveguide formed over the substrate within the insulator layer.
An electromagnetic device, comprising: a substrate; a waveguide formed on or in the substrate; a layer of graphene formed over the waveguide; and a metallization layer patterned on the graphene wherein the metallization layer forms electrodes directly on the graphene corresponding to an intersection region between the -3- graphene and the waveguide such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The device as recited in claim 11, wherein the metallization layer forms a coplanar waveguide over the graphene.
The device as recited in claim 11, wherein the metallization layer forms an antenna over the graphene.
The device as recited in claim 11, wherein the layer of graphene is patterned to form a shape.
The device as recited in claim 11, wherein the optical waveguide is integrated into the substrate.
The device as recited in claim 11, further comprising an insulator layer formed on the substrate and the optical waveguide being formed within the insulator layer.
The device as recited in claim 11, wherein the electrodes are formed as fingers over a position of the graphene.
A method for fabricating an electromagnetic device, comprising: providing a layer of graphene on a substrate; and patterning a metallization layer on the graphene to form electrodes directly on the -4- graphene such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The method as recited in claim 17, further comprising forming an optical waveguide in or on the substrate at a position where the graphene is excited.
The method as recited in claim 17, wherein forming a layer of graphene includes patterning the layer of graphene to form a shape.
The device as recited in claim 17, wherein patterning the metallization layer includes forming the electrodes as fingers over a position of the graphene. -5-
Layer stacks claimed or described, ordered top of device to substrate.
graphene THz electromagnetic device (substrate-only configuration)
graphene THz electromagnetic device with integrated waveguide
Materials described outside the worked examples.
graphene
metallization layer
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,805,148Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view of a substrate having a graphene layer formed thereon in accordance with the present principles; [0012]
FIG. 2 is a top view of the substrate with the graphene layer having a coplanar waveguide metallization structure formed thereon in accordance with the present …
FIG. 3 is a top view of the substrate with the graphene layer having an antenna metallization structure formed thereon in accordance with the present …
FIG. 4 is a top view of a substrate with a patterned graphene layer formed into a shape by selective removal of graphene in accordance with the present …
FIG. 5 is a top view of the substrate with the shaped graphene layer of
FIG. 6 is a top view of the substrate with the shaped graphene layer of
FIG. 7 is a top view of a terahertz emitter device with a waveguide integrated therein in accordance with one illustrative embodiment; [0018]
FIG. 8 is a cross-sectional view taken at section line 8-8 of
FIG. 9 is a top view of a terahertz emitter device array with a waveguide integrated therein in accordance with another illustrative embodiment; [0020]
FIG. 10 is a perspective view of the terahertz emitter device array of
FIG. 11 is a block/flow diagram showing an illustrative method for fabricating an electromagnetic device with terahertz capabilities in accordance with one …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An electromagnetic device, comprising: a substrate; a layer of graphene formed on the substrate; and a metallization layer patterned on the graphene, the metallization layer forming electrodes directly on the g raphene such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The device as recited in claim 1, wherein the metallization layer forms a coplanar waveguide over the graphene.
The device as recited in claim 1, wherein the metallization layer forms an antenna over the graphene.
The device as recited in claim 1, wherein the layer of graphene is patterned to form a shape.
The device as recited in claim 1, further comprising an optical waveguide integrated with graphene.
The device as recited in claim 1, wherein the electrodes are formed as fingers over a position of the graphene.
The device as recited in claim 1, further comprising an insulator layer formed on the substrate and an optical waveguide formed over the substrate within the insulator layer.
An electromagnetic device, comprising: a substrate; a waveguide formed on or in the substrate; a layer of graphene formed over the waveguide; and a metallization layer patterned on the graphene wherein the metallization layer forms electrodes directly on the graphene corresponding to an intersection region between the -3- graphene and the waveguide such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The device as recited in claim 11, wherein the metallization layer forms a coplanar waveguide over the graphene.
The device as recited in claim 11, wherein the metallization layer forms an antenna over the graphene.
The device as recited in claim 11, wherein the layer of graphene is patterned to form a shape.
The device as recited in claim 11, wherein the optical waveguide is integrated into the substrate.
The device as recited in claim 11, further comprising an insulator layer formed on the substrate and the optical waveguide being formed within the insulator layer.
The device as recited in claim 11, wherein the electrodes are formed as fingers over a position of the graphene.
A method for fabricating an electromagnetic device, comprising: providing a layer of graphene on a substrate; and patterning a metallization layer on the graphene to form electrodes directly on the -4- graphene such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The method as recited in claim 17, further comprising forming an optical waveguide in or on the substrate at a position where the graphene is excited.
The method as recited in claim 17, wherein forming a layer of graphene includes patterning the layer of graphene to form a shape.
The device as recited in claim 17, wherein patterning the metallization layer includes forming the electrodes as fingers over a position of the graphene. -5-
Layer stacks claimed or described, ordered top of device to substrate.
graphene THz electromagnetic device (substrate-only configuration)
graphene THz electromagnetic device with integrated waveguide
Materials described outside the worked examples.
graphene
metallization layer
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,805,148Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view of a substrate having a graphene layer formed thereon in accordance with the present principles; [0012]
FIG. 2 is a top view of the substrate with the graphene layer having a coplanar waveguide metallization structure formed thereon in accordance with the present …
FIG. 3 is a top view of the substrate with the graphene layer having an antenna metallization structure formed thereon in accordance with the present …
FIG. 4 is a top view of a substrate with a patterned graphene layer formed into a shape by selective removal of graphene in accordance with the present …
FIG. 5 is a top view of the substrate with the shaped graphene layer of
FIG. 6 is a top view of the substrate with the shaped graphene layer of
FIG. 7 is a top view of a terahertz emitter device with a waveguide integrated therein in accordance with one illustrative embodiment; [0018]
FIG. 8 is a cross-sectional view taken at section line 8-8 of
FIG. 9 is a top view of a terahertz emitter device array with a waveguide integrated therein in accordance with another illustrative embodiment; [0020]
FIG. 10 is a perspective view of the terahertz emitter device array of
FIG. 11 is a block/flow diagram showing an illustrative method for fabricating an electromagnetic device with terahertz capabilities in accordance with one …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An electromagnetic device, comprising: a substrate; a layer of graphene formed on the substrate; and a metallization layer patterned on the graphene, the metallization layer forming electrodes directly on the g raphene such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The device as recited in claim 1, wherein the metallization layer forms a coplanar waveguide over the graphene.
The device as recited in claim 1, wherein the metallization layer forms an antenna over the graphene.
The device as recited in claim 1, wherein the layer of graphene is patterned to form a shape.
The device as recited in claim 1, further comprising an optical waveguide integrated with graphene.
The device as recited in claim 1, wherein the electrodes are formed as fingers over a position of the graphene.
The device as recited in claim 1, further comprising an insulator layer formed on the substrate and an optical waveguide formed over the substrate within the insulator layer.
An electromagnetic device, comprising: a substrate; a waveguide formed on or in the substrate; a layer of graphene formed over the waveguide; and a metallization layer patterned on the graphene wherein the metallization layer forms electrodes directly on the graphene corresponding to an intersection region between the -3- graphene and the waveguide such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The device as recited in claim 11, wherein the metallization layer forms a coplanar waveguide over the graphene.
The device as recited in claim 11, wherein the metallization layer forms an antenna over the graphene.
The device as recited in claim 11, wherein the layer of graphene is patterned to form a shape.
The device as recited in claim 11, wherein the optical waveguide is integrated into the substrate.
The device as recited in claim 11, further comprising an insulator layer formed on the substrate and the optical waveguide being formed within the insulator layer.
The device as recited in claim 11, wherein the electrodes are formed as fingers over a position of the graphene.
A method for fabricating an electromagnetic device, comprising: providing a layer of graphene on a substrate; and patterning a metallization layer on the graphene to form electrodes directly on the -4- graphene such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The method as recited in claim 17, further comprising forming an optical waveguide in or on the substrate at a position where the graphene is excited.
The method as recited in claim 17, wherein forming a layer of graphene includes patterning the layer of graphene to form a shape.
The device as recited in claim 17, wherein patterning the metallization layer includes forming the electrodes as fingers over a position of the graphene. -5-
Layer stacks claimed or described, ordered top of device to substrate.
graphene THz electromagnetic device (substrate-only configuration)
graphene THz electromagnetic device with integrated waveguide
Materials described outside the worked examples.
graphene
metallization layer
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,805,148Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view of a substrate having a graphene layer formed thereon in accordance with the present principles; [0012]
FIG. 2 is a top view of the substrate with the graphene layer having a coplanar waveguide metallization structure formed thereon in accordance with the present …
FIG. 3 is a top view of the substrate with the graphene layer having an antenna metallization structure formed thereon in accordance with the present …
FIG. 4 is a top view of a substrate with a patterned graphene layer formed into a shape by selective removal of graphene in accordance with the present …
FIG. 5 is a top view of the substrate with the shaped graphene layer of
FIG. 6 is a top view of the substrate with the shaped graphene layer of
FIG. 7 is a top view of a terahertz emitter device with a waveguide integrated therein in accordance with one illustrative embodiment; [0018]
FIG. 8 is a cross-sectional view taken at section line 8-8 of
FIG. 9 is a top view of a terahertz emitter device array with a waveguide integrated therein in accordance with another illustrative embodiment; [0020]
FIG. 10 is a perspective view of the terahertz emitter device array of
FIG. 11 is a block/flow diagram showing an illustrative method for fabricating an electromagnetic device with terahertz capabilities in accordance with one …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An electromagnetic device, comprising: a substrate; a layer of graphene formed on the substrate; and a metallization layer patterned on the graphene, the metallization layer forming electrodes directly on the g raphene such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The device as recited in claim 1, wherein the metallization layer forms a coplanar waveguide over the graphene.
The device as recited in claim 1, wherein the metallization layer forms an antenna over the graphene.
The device as recited in claim 1, wherein the layer of graphene is patterned to form a shape.
The device as recited in claim 1, further comprising an optical waveguide integrated with graphene.
The device as recited in claim 1, wherein the electrodes are formed as fingers over a position of the graphene.
The device as recited in claim 1, further comprising an insulator layer formed on the substrate and an optical waveguide formed over the substrate within the insulator layer.
An electromagnetic device, comprising: a substrate; a waveguide formed on or in the substrate; a layer of graphene formed over the waveguide; and a metallization layer patterned on the graphene wherein the metallization layer forms electrodes directly on the graphene corresponding to an intersection region between the -3- graphene and the waveguide such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The device as recited in claim 11, wherein the metallization layer forms a coplanar waveguide over the graphene.
The device as recited in claim 11, wherein the metallization layer forms an antenna over the graphene.
The device as recited in claim 11, wherein the layer of graphene is patterned to form a shape.
The device as recited in claim 11, wherein the optical waveguide is integrated into the substrate.
The device as recited in claim 11, further comprising an insulator layer formed on the substrate and the optical waveguide being formed within the insulator layer.
The device as recited in claim 11, wherein the electrodes are formed as fingers over a position of the graphene.
A method for fabricating an electromagnetic device, comprising: providing a layer of graphene on a substrate; and patterning a metallization layer on the graphene to form electrodes directly on the -4- graphene such that when the graphene is excited across the electrodes terahertz frequency radiation is generated.
The method as recited in claim 17, further comprising forming an optical waveguide in or on the substrate at a position where the graphene is excited.
The method as recited in claim 17, wherein forming a layer of graphene includes patterning the layer of graphene to form a shape.
The device as recited in claim 17, wherein patterning the metallization layer includes forming the electrodes as fingers over a position of the graphene. -5-
Layer stacks claimed or described, ordered top of device to substrate.
graphene THz electromagnetic device (substrate-only configuration)
graphene THz electromagnetic device with integrated waveguide
Materials described outside the worked examples.
graphene
metallization layer
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
insulator layer
silicon oxide
SiO₂
silicon carbide
SiC
copper
Cu
aluminum
Al
tungsten
W
insulator layer
silicon oxide
SiO₂
silicon carbide
SiC
copper
Cu
aluminum
Al
tungsten
W
insulator layer
silicon oxide
SiO₂
silicon carbide
SiC
copper
Cu
aluminum
Al
tungsten
W
insulator layer
silicon oxide
SiO₂
silicon carbide
SiC
copper
Cu
aluminum
Al
tungsten
W