Patent
US 9,359,211METHODS OF FABRICATING GRAPHENE USING ALLOY CATALYST
Yun-sung Woo
US
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US 9,359,211Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 and 2 are cross-sectional diagrams illustrating methods of fabricating graphene using an alloy catalyst layer according to example embodiments; and 2 …
FIG. 2, a hydrocarbon gas may be supplied into a chamber of a CVD apparatus to form a graphene layer 120 on an alloy layer 110. The hydrocarbon gas may be, for …
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of fabricating graphene, the method comprising: formi ng an alloy catalyst layer on a substrate, the alloy catalyst layer made of a Ni-Cu alloy; and forming a graphene monolayer on the alloy catalyst layer by supplying hydrocarbon gas onto the substrate at a temperature of about 650 ' C to about 750 *C using chemical vapor deposition (CVD), the alloy catalyst layer ' including about 5 atomic % to about 30 atomic % of nickel (Ni).
The method of claim 1, wherein the alloy catalyst layer includes about 20 atomic % of Ni.
The method of claim 1, wherein the for mzi ing of the alloy SVG 12805084.12-29-2015.IIRXIBBQPXXIFW3.CLM.2.4.292.417.465.471.svg 0.18 0.577 Chemistry Black and white layer includes for m ing the alloy catalyst layer to a thickness of about 10 nm to about 1000 nm.
The method of claim 1, wherein the forming of the alloy catalyst layer includes forming the alloy catalyst layer using one of a sputtering method and an evaporation method.
The method of claim 1, wherein the forming of the alloy catalyst layer includes forming the Ni-Cu alloy catalyst layer by stacking a Ni f ilm and a Cu fi lm on the substrate, and annealing the stacked thin films.
2-4.. canceled
. canceled
. canceled
Materials described outside the worked examples.
Ni-Cu alloy catalyst layer
nickel
Ni
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 100–300 nm | — |
Thickness | 0.3–1 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,359,211Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 and 2 are cross-sectional diagrams illustrating methods of fabricating graphene using an alloy catalyst layer according to example embodiments; and 2 …
FIG. 2, a hydrocarbon gas may be supplied into a chamber of a CVD apparatus to form a graphene layer 120 on an alloy layer 110. The hydrocarbon gas may be, for …
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of fabricating graphene, the method comprising: formi ng an alloy catalyst layer on a substrate, the alloy catalyst layer made of a Ni-Cu alloy; and forming a graphene monolayer on the alloy catalyst layer by supplying hydrocarbon gas onto the substrate at a temperature of about 650 ' C to about 750 *C using chemical vapor deposition (CVD), the alloy catalyst layer ' including about 5 atomic % to about 30 atomic % of nickel (Ni).
The method of claim 1, wherein the alloy catalyst layer includes about 20 atomic % of Ni.
The method of claim 1, wherein the for mzi ing of the alloy SVG 12805084.12-29-2015.IIRXIBBQPXXIFW3.CLM.2.4.292.417.465.471.svg 0.18 0.577 Chemistry Black and white layer includes for m ing the alloy catalyst layer to a thickness of about 10 nm to about 1000 nm.
The method of claim 1, wherein the forming of the alloy catalyst layer includes forming the alloy catalyst layer using one of a sputtering method and an evaporation method.
The method of claim 1, wherein the forming of the alloy catalyst layer includes forming the Ni-Cu alloy catalyst layer by stacking a Ni f ilm and a Cu fi lm on the substrate, and annealing the stacked thin films.
2-4.. canceled
. canceled
. canceled
Materials described outside the worked examples.
Ni-Cu alloy catalyst layer
nickel
Ni
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 100–300 nm | — |
Thickness | 0.3–1 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,359,211Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 and 2 are cross-sectional diagrams illustrating methods of fabricating graphene using an alloy catalyst layer according to example embodiments; and 2 …
FIG. 2, a hydrocarbon gas may be supplied into a chamber of a CVD apparatus to form a graphene layer 120 on an alloy layer 110. The hydrocarbon gas may be, for …
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of fabricating graphene, the method comprising: formi ng an alloy catalyst layer on a substrate, the alloy catalyst layer made of a Ni-Cu alloy; and forming a graphene monolayer on the alloy catalyst layer by supplying hydrocarbon gas onto the substrate at a temperature of about 650 ' C to about 750 *C using chemical vapor deposition (CVD), the alloy catalyst layer ' including about 5 atomic % to about 30 atomic % of nickel (Ni).
The method of claim 1, wherein the alloy catalyst layer includes about 20 atomic % of Ni.
The method of claim 1, wherein the for mzi ing of the alloy SVG 12805084.12-29-2015.IIRXIBBQPXXIFW3.CLM.2.4.292.417.465.471.svg 0.18 0.577 Chemistry Black and white layer includes for m ing the alloy catalyst layer to a thickness of about 10 nm to about 1000 nm.
The method of claim 1, wherein the forming of the alloy catalyst layer includes forming the alloy catalyst layer using one of a sputtering method and an evaporation method.
The method of claim 1, wherein the forming of the alloy catalyst layer includes forming the Ni-Cu alloy catalyst layer by stacking a Ni f ilm and a Cu fi lm on the substrate, and annealing the stacked thin films.
2-4.. canceled
. canceled
. canceled
Materials described outside the worked examples.
Ni-Cu alloy catalyst layer
nickel
Ni
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 100–300 nm | — |
Thickness | 0.3–1 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,359,211Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 and 2 are cross-sectional diagrams illustrating methods of fabricating graphene using an alloy catalyst layer according to example embodiments; and 2 …
FIG. 2, a hydrocarbon gas may be supplied into a chamber of a CVD apparatus to form a graphene layer 120 on an alloy layer 110. The hydrocarbon gas may be, for …
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of fabricating graphene, the method comprising: formi ng an alloy catalyst layer on a substrate, the alloy catalyst layer made of a Ni-Cu alloy; and forming a graphene monolayer on the alloy catalyst layer by supplying hydrocarbon gas onto the substrate at a temperature of about 650 ' C to about 750 *C using chemical vapor deposition (CVD), the alloy catalyst layer ' including about 5 atomic % to about 30 atomic % of nickel (Ni).
The method of claim 1, wherein the alloy catalyst layer includes about 20 atomic % of Ni.
The method of claim 1, wherein the for mzi ing of the alloy SVG 12805084.12-29-2015.IIRXIBBQPXXIFW3.CLM.2.4.292.417.465.471.svg 0.18 0.577 Chemistry Black and white layer includes for m ing the alloy catalyst layer to a thickness of about 10 nm to about 1000 nm.
The method of claim 1, wherein the forming of the alloy catalyst layer includes forming the alloy catalyst layer using one of a sputtering method and an evaporation method.
The method of claim 1, wherein the forming of the alloy catalyst layer includes forming the Ni-Cu alloy catalyst layer by stacking a Ni f ilm and a Cu fi lm on the substrate, and annealing the stacked thin films.
2-4.. canceled
. canceled
. canceled
Materials described outside the worked examples.
Ni-Cu alloy catalyst layer
nickel
Ni
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 100–300 nm | — |
Thickness | 0.3–1 nm |
Related documents with shared materials, methods, properties, or citations.
copper
Cu
graphene monolayer
platinum
Pt
iron
Fe
gold
Au
hydrocarbon gas
silicon substrate with silicon oxide layer
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
| — |
Thickness | 10–1000 nm | — |
Temperature | 650–750 °C | — |
METHOD AND SYSTEM FOR PRODUCING GRAPHENE AND FUNCTIONALIZED GRAPHENE
copper
Cu
graphene monolayer
platinum
Pt
iron
Fe
gold
Au
hydrocarbon gas
silicon substrate with silicon oxide layer
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
| — |
Thickness | 10–1000 nm | — |
Temperature | 650–750 °C | — |
METHOD AND SYSTEM FOR PRODUCING GRAPHENE AND FUNCTIONALIZED GRAPHENE
copper
Cu
graphene monolayer
platinum
Pt
iron
Fe
gold
Au
hydrocarbon gas
silicon substrate with silicon oxide layer
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
| — |
Thickness | 10–1000 nm | — |
Temperature | 650–750 °C | — |
METHOD AND SYSTEM FOR PRODUCING GRAPHENE AND FUNCTIONALIZED GRAPHENE
copper
Cu
graphene monolayer
platinum
Pt
iron
Fe
gold
Au
hydrocarbon gas
silicon substrate with silicon oxide layer
FIG. 3 is a Raman spectrum graph of graphene fabricated using a method according to example embodiments. [0013] It should be noted that these Figures are …
| — |
Thickness | 10–1000 nm | — |
Temperature | 650–750 °C | — |