Patent
US 9,388,048SYNTHESIS OF GRAPHENE BY CHEMICAL VAPOR DEPOSITION
Chongwu Zhou
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,388,048Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 42b that there are both Ni 20 (111) and Ni (200) formed during the annealing process. However, the thermal annealing process cannot help to form the …
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
FIG. 44b, which has similar frequency of G and G' band, however, which is different is that the G' band cannot be fitted to a single Lorentzian but can always be …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for synthesizing graphene, the method comprising: providing a substrate having a catalytic surface; and flowing a dilute carbon feedstock over the catalytic surface of the substrate at a pressure equal to atmospheric pressure or lower to deposit a single planar layer of graphene or a thin stack of planar graphene layers on the catalytic surface of the substrate, the planar layer of graphene or the thin stack of planar graphene layers being parallel to the catalytic surface of the substrate, wherein the dilute carbon feedstock has more than 2 % and less than 15 % by volume carbon feedstock and comprises at least one of hydrogen, helium, and argon, the thin stack of planar graphene layers comprises five or fewer layers of graphene, wherein the single planar layer of graphene or the thin stack of planar graphene layers, when disposed on a polyethylene terephthalate (PET) substrate, has a conductance that is unperturbed after complete bending cycles, wherein the graphene is synthesized without the use of any plasma discharge.
The method of claim 1, further comprising depositing a film comprising a catalytic material on the substrate to form the catalytic surface.
The method of claim 1, wherein the substrate comprises a silicon wafer or a silicon wafer having a layer of silicon oxide thereon.
The method of claim 1, wherein the substrate and the catalytic surface are formed of the same material.
The method of claim 1, wherein the carbon feedstock comprises at least one of methane, ethylene, acetylene, propane, butane, ethanol, methanol, isopropanol, butanol, acetone, and aldehydes.
The method of claim 1, wherein the catalytic surface comprises a metal.
The method of claim 1, wherein the catalytic surface comprises a metal oxide. withdrawn
The method of claim 1, further comprising: transferring the single layer of graphene or the thin stack of graphene layers from the substrate to a target substrate, wherein the thin stack of graphene layers includes up to twenty graphene layers.
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First Named Inventor Chongwu Zhou Attorney's Docket No.: 06666-0302001/U SC 09-049 SVG 12576234.09-22-2015.IEW₀NBAEPXXIFW3.CLM.3.svg 0.45 2.42 Black and white canceled
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Layer stacks claimed or described, ordered top of device to substrate.
graphene transparent conductive electrode on PET
graphene on Si/SiO₂ substrate
Materials described outside the worked examples.
graphene
C
dilute carbon feedstock
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Fet Sheet Resistance | 230 | C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,388,048Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 42b that there are both Ni 20 (111) and Ni (200) formed during the annealing process. However, the thermal annealing process cannot help to form the …
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
FIG. 44b, which has similar frequency of G and G' band, however, which is different is that the G' band cannot be fitted to a single Lorentzian but can always be …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for synthesizing graphene, the method comprising: providing a substrate having a catalytic surface; and flowing a dilute carbon feedstock over the catalytic surface of the substrate at a pressure equal to atmospheric pressure or lower to deposit a single planar layer of graphene or a thin stack of planar graphene layers on the catalytic surface of the substrate, the planar layer of graphene or the thin stack of planar graphene layers being parallel to the catalytic surface of the substrate, wherein the dilute carbon feedstock has more than 2 % and less than 15 % by volume carbon feedstock and comprises at least one of hydrogen, helium, and argon, the thin stack of planar graphene layers comprises five or fewer layers of graphene, wherein the single planar layer of graphene or the thin stack of planar graphene layers, when disposed on a polyethylene terephthalate (PET) substrate, has a conductance that is unperturbed after complete bending cycles, wherein the graphene is synthesized without the use of any plasma discharge.
The method of claim 1, further comprising depositing a film comprising a catalytic material on the substrate to form the catalytic surface.
The method of claim 1, wherein the substrate comprises a silicon wafer or a silicon wafer having a layer of silicon oxide thereon.
The method of claim 1, wherein the substrate and the catalytic surface are formed of the same material.
The method of claim 1, wherein the carbon feedstock comprises at least one of methane, ethylene, acetylene, propane, butane, ethanol, methanol, isopropanol, butanol, acetone, and aldehydes.
The method of claim 1, wherein the catalytic surface comprises a metal.
The method of claim 1, wherein the catalytic surface comprises a metal oxide. withdrawn
The method of claim 1, further comprising: transferring the single layer of graphene or the thin stack of graphene layers from the substrate to a target substrate, wherein the thin stack of graphene layers includes up to twenty graphene layers.
canceled
canceled
First Named Inventor Chongwu Zhou Attorney's Docket No.: 06666-0302001/U SC 09-049 SVG 12576234.09-22-2015.IEW₀NBAEPXXIFW3.CLM.3.svg 0.45 2.42 Black and white canceled
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Layer stacks claimed or described, ordered top of device to substrate.
graphene transparent conductive electrode on PET
graphene on Si/SiO₂ substrate
Materials described outside the worked examples.
graphene
C
dilute carbon feedstock
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Fet Sheet Resistance | 230 | C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,388,048Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 42b that there are both Ni 20 (111) and Ni (200) formed during the annealing process. However, the thermal annealing process cannot help to form the …
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
FIG. 44b, which has similar frequency of G and G' band, however, which is different is that the G' band cannot be fitted to a single Lorentzian but can always be …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for synthesizing graphene, the method comprising: providing a substrate having a catalytic surface; and flowing a dilute carbon feedstock over the catalytic surface of the substrate at a pressure equal to atmospheric pressure or lower to deposit a single planar layer of graphene or a thin stack of planar graphene layers on the catalytic surface of the substrate, the planar layer of graphene or the thin stack of planar graphene layers being parallel to the catalytic surface of the substrate, wherein the dilute carbon feedstock has more than 2 % and less than 15 % by volume carbon feedstock and comprises at least one of hydrogen, helium, and argon, the thin stack of planar graphene layers comprises five or fewer layers of graphene, wherein the single planar layer of graphene or the thin stack of planar graphene layers, when disposed on a polyethylene terephthalate (PET) substrate, has a conductance that is unperturbed after complete bending cycles, wherein the graphene is synthesized without the use of any plasma discharge.
The method of claim 1, further comprising depositing a film comprising a catalytic material on the substrate to form the catalytic surface.
The method of claim 1, wherein the substrate comprises a silicon wafer or a silicon wafer having a layer of silicon oxide thereon.
The method of claim 1, wherein the substrate and the catalytic surface are formed of the same material.
The method of claim 1, wherein the carbon feedstock comprises at least one of methane, ethylene, acetylene, propane, butane, ethanol, methanol, isopropanol, butanol, acetone, and aldehydes.
The method of claim 1, wherein the catalytic surface comprises a metal.
The method of claim 1, wherein the catalytic surface comprises a metal oxide. withdrawn
The method of claim 1, further comprising: transferring the single layer of graphene or the thin stack of graphene layers from the substrate to a target substrate, wherein the thin stack of graphene layers includes up to twenty graphene layers.
canceled
canceled
First Named Inventor Chongwu Zhou Attorney's Docket No.: 06666-0302001/U SC 09-049 SVG 12576234.09-22-2015.IEW₀NBAEPXXIFW3.CLM.3.svg 0.45 2.42 Black and white canceled
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Layer stacks claimed or described, ordered top of device to substrate.
graphene transparent conductive electrode on PET
graphene on Si/SiO₂ substrate
Materials described outside the worked examples.
graphene
C
dilute carbon feedstock
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Fet Sheet Resistance | 230 | C |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,388,048Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 42b that there are both Ni 20 (111) and Ni (200) formed during the annealing process. However, the thermal annealing process cannot help to form the …
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
FIG. 44b, which has similar frequency of G and G' band, however, which is different is that the G' band cannot be fitted to a single Lorentzian but can always be …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for synthesizing graphene, the method comprising: providing a substrate having a catalytic surface; and flowing a dilute carbon feedstock over the catalytic surface of the substrate at a pressure equal to atmospheric pressure or lower to deposit a single planar layer of graphene or a thin stack of planar graphene layers on the catalytic surface of the substrate, the planar layer of graphene or the thin stack of planar graphene layers being parallel to the catalytic surface of the substrate, wherein the dilute carbon feedstock has more than 2 % and less than 15 % by volume carbon feedstock and comprises at least one of hydrogen, helium, and argon, the thin stack of planar graphene layers comprises five or fewer layers of graphene, wherein the single planar layer of graphene or the thin stack of planar graphene layers, when disposed on a polyethylene terephthalate (PET) substrate, has a conductance that is unperturbed after complete bending cycles, wherein the graphene is synthesized without the use of any plasma discharge.
The method of claim 1, further comprising depositing a film comprising a catalytic material on the substrate to form the catalytic surface.
The method of claim 1, wherein the substrate comprises a silicon wafer or a silicon wafer having a layer of silicon oxide thereon.
The method of claim 1, wherein the substrate and the catalytic surface are formed of the same material.
The method of claim 1, wherein the carbon feedstock comprises at least one of methane, ethylene, acetylene, propane, butane, ethanol, methanol, isopropanol, butanol, acetone, and aldehydes.
The method of claim 1, wherein the catalytic surface comprises a metal.
The method of claim 1, wherein the catalytic surface comprises a metal oxide. withdrawn
The method of claim 1, further comprising: transferring the single layer of graphene or the thin stack of graphene layers from the substrate to a target substrate, wherein the thin stack of graphene layers includes up to twenty graphene layers.
canceled
canceled
First Named Inventor Chongwu Zhou Attorney's Docket No.: 06666-0302001/U SC 09-049 SVG 12576234.09-22-2015.IEW₀NBAEPXXIFW3.CLM.3.svg 0.45 2.42 Black and white canceled
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canceled
canceled
canceled
canceled
canceled
canceled
canceled
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Layer stacks claimed or described, ordered top of device to substrate.
graphene transparent conductive electrode on PET
graphene on Si/SiO₂ substrate
Materials described outside the worked examples.
graphene
C
dilute carbon feedstock
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Fet Sheet Resistance | 230 | C |
Related documents with shared materials, methods, properties, or citations.
catalytic material film
silicon wafer/Si/SiO₂
carbon feedstock (methane, ethylene, acetylene, propane, butane, ethanol, methanol, isopropanol, butanol, acetone, aldehydes)
catalytic metal (nickel, iron, cobalt, manganese, molybdenum, iridium, gold, copper, silver, palladium, platinum, lead)
single crystalline nickel (111)
Ni
metal oxide catalytic surface
aluminum oxide or silicon oxide
sapphire
Al₂O₃
quartz
SiO₂
poly(methyl methacrylate) (PMMA)
polyethylene terephthalate (PET)
glass
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
FIG. 44b, which has similar frequency of G and G' band, however, which is different is that the G' band cannot be fitted to a single Lorentzian but can always be …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
| 8300 |
C |
Uv Vis Transmittance At Wavelength | 97 | C |
Thickness | 1–3 nm | — |
Thickness | 400–1100 nm | — |
Thickness | 1–2 µm | — |
Thickness | 25–55 cm | — |
Thickness | ≤ 5 nm | — |
Flow Rate | ≤ 600 sccm | — |
catalytic material film
silicon wafer/Si/SiO₂
carbon feedstock (methane, ethylene, acetylene, propane, butane, ethanol, methanol, isopropanol, butanol, acetone, aldehydes)
catalytic metal (nickel, iron, cobalt, manganese, molybdenum, iridium, gold, copper, silver, palladium, platinum, lead)
single crystalline nickel (111)
Ni
metal oxide catalytic surface
aluminum oxide or silicon oxide
sapphire
Al₂O₃
quartz
SiO₂
poly(methyl methacrylate) (PMMA)
polyethylene terephthalate (PET)
glass
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
FIG. 44b, which has similar frequency of G and G' band, however, which is different is that the G' band cannot be fitted to a single Lorentzian but can always be …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
| 8300 |
C |
Uv Vis Transmittance At Wavelength | 97 | C |
Thickness | 1–3 nm | — |
Thickness | 400–1100 nm | — |
Thickness | 1–2 µm | — |
Thickness | 25–55 cm | — |
Thickness | ≤ 5 nm | — |
Flow Rate | ≤ 600 sccm | — |
catalytic material film
silicon wafer/Si/SiO₂
carbon feedstock (methane, ethylene, acetylene, propane, butane, ethanol, methanol, isopropanol, butanol, acetone, aldehydes)
catalytic metal (nickel, iron, cobalt, manganese, molybdenum, iridium, gold, copper, silver, palladium, platinum, lead)
single crystalline nickel (111)
Ni
metal oxide catalytic surface
aluminum oxide or silicon oxide
sapphire
Al₂O₃
quartz
SiO₂
poly(methyl methacrylate) (PMMA)
polyethylene terephthalate (PET)
glass
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
FIG. 44b, which has similar frequency of G and G' band, however, which is different is that the G' band cannot be fitted to a single Lorentzian but can always be …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
| 8300 |
C |
Uv Vis Transmittance At Wavelength | 97 | C |
Thickness | 1–3 nm | — |
Thickness | 400–1100 nm | — |
Thickness | 1–2 µm | — |
Thickness | 25–55 cm | — |
Thickness | ≤ 5 nm | — |
Flow Rate | ≤ 600 sccm | — |
catalytic material film
silicon wafer/Si/SiO₂
carbon feedstock (methane, ethylene, acetylene, propane, butane, ethanol, methanol, isopropanol, butanol, acetone, aldehydes)
catalytic metal (nickel, iron, cobalt, manganese, molybdenum, iridium, gold, copper, silver, palladium, platinum, lead)
single crystalline nickel (111)
Ni
metal oxide catalytic surface
aluminum oxide or silicon oxide
sapphire
Al₂O₃
quartz
SiO₂
poly(methyl methacrylate) (PMMA)
polyethylene terephthalate (PET)
glass
FIGS. 43a-43e, AFM images before growth show that the surface of Ni (111) substrate is smooth but with some mechanical scratches. The polycrystalline Ni …
FIG. 44b, which has similar frequency of G and G' band, however, which is different is that the G' band cannot be fitted to a single Lorentzian but can always be …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
FIGS. 45d and 45e are corresponding 15 Raman spectra of dark grey region and white region, respectively, which indicate that they are multi-layer graphene. …
| 8300 |
C |
Uv Vis Transmittance At Wavelength | 97 | C |
Thickness | 1–3 nm | — |
Thickness | 400–1100 nm | — |
Thickness | 1–2 µm | — |
Thickness | 25–55 cm | — |
Thickness | ≤ 5 nm | — |
Flow Rate | ≤ 600 sccm | — |