Patent
US 10,354,866Equipment and Method to Automatically Transfer a Graphene Monolayer to a substrate
Amaia ZURUTUZA ELORZA
US
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Patent
Atlas literature
Patent
US 10,354,866Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 shows a scheme of a graphene production method by chemical vapour deposition (CVD), graphene monolayer transfer according to the method and equipment of the invention and further removal of the polymethyl methacrylate (PMMA) polymer layer. 35
Figure 2 shows a scheme of the equipment elements used in the graphene monolayer transfer method and equipment of the invention. 8
Figure 3 shows a scheme of the equipment to automatically transfer a graphene monolayer of the invention.
Figure 4 shows a scheme of the equipment to automatically transfer a graphene monolayer of the invention, showing elements of the interior of the equipment. 5
Figure 5 shows an optical microscopy image of graphene produced in example 1
Figure 6 shows the Raman spectrum of graphene produced in example 1
Figure 7 shows an optical microscopy image of graphene produced in example 2
Figure 8 shows the Raman spectrum of graphene produced in example 2
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A device comprising: a vessel adapted to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, the vessel comprising a volume having a top section, a bottom section, and a middle section between the top section and the bottom section, the volume having a plurality of round cross-sections in a plurality of planes, the plurality of cross-sections including a first cross- section located in the bottom section and having a first radius, a second cross-section located in the middle section and having a second radius larger than the first radius, and a third cross- section located in the top section and having a third radius larger than the second radius, at least one first computer-controlled valve adapted to allow entry of first liquids into the vessel, the at least one first computer-controlled valve being disposed in the top section, at least one sensor adapted to control a level and pH of a second liquid disposed in the vessel, at least one second computer-controlled valve adapted to drain third liquids from the vessel, the at least one second computer-controlled valve being disposed in the bottom section, a stirring element adapted to homogenize a mixture comprising one or more liquids, the stirring element disposed in the bottom section, a plurality of supports adapted to support the substrate, the plurality of supports being located in a plane located in the middle section of the volume, a ramp adapted to feed the substrate into the vessel, the ramp having a first portion disposed outside the vessel and a second portion disposed inside the vessel, the ramp intersecting a side of the vessel in the middle section of the vessel, the ramp forming a selected angle with one or more of the plurality of planes, the ramp extending into the vessel and intersecting with the plane associated with the plurality of supports, and a computer-controlled unit configured to control liquid handling, etching of the metal layer, and positioning of the graphene monolayer on the substrate. Currently amended
The device according to claim 1, further comprising: a shower adapted to dispense the third liquids. Previously presented
Method to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, comprising the steps of: (a) etching the metal layer by pouring a metal etching solution into an equipment according to claim 1, by opening a computer-controlled valve and placing said graphene monolayer on top of said metal etching solution, (b) eluting the liquid present in said equipment by opening a computer-controlled valve and pouring a neutralising solution by opening a computer-controlled valve, (c) eluting the liquid present in said equipment by opening the computer-controlled valve and pouring an acidic solution by opening a computer-controlled valve and (d) inserting said substrate into said equipment through the ramp, eluting the liquid present in said equipment by opening the computer-controlled valve and depositing the graphene monolayer on said substrate. Withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
automated graphene transfer vessel
Materials described outside the worked examples.
graphene monolayer
metal layer
Measurements and analyses referenced in the patent, with their drawing references.
Figure 6 shows the Raman spectrum of graphene produced in example 1
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Duration | 6–12 hours | — |
Duration |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,354,866Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 shows a scheme of a graphene production method by chemical vapour deposition (CVD), graphene monolayer transfer according to the method and equipment of the invention and further removal of the polymethyl methacrylate (PMMA) polymer layer. 35
Figure 2 shows a scheme of the equipment elements used in the graphene monolayer transfer method and equipment of the invention. 8
Figure 3 shows a scheme of the equipment to automatically transfer a graphene monolayer of the invention.
Figure 4 shows a scheme of the equipment to automatically transfer a graphene monolayer of the invention, showing elements of the interior of the equipment. 5
Figure 5 shows an optical microscopy image of graphene produced in example 1
Figure 6 shows the Raman spectrum of graphene produced in example 1
Figure 7 shows an optical microscopy image of graphene produced in example 2
Figure 8 shows the Raman spectrum of graphene produced in example 2
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A device comprising: a vessel adapted to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, the vessel comprising a volume having a top section, a bottom section, and a middle section between the top section and the bottom section, the volume having a plurality of round cross-sections in a plurality of planes, the plurality of cross-sections including a first cross- section located in the bottom section and having a first radius, a second cross-section located in the middle section and having a second radius larger than the first radius, and a third cross- section located in the top section and having a third radius larger than the second radius, at least one first computer-controlled valve adapted to allow entry of first liquids into the vessel, the at least one first computer-controlled valve being disposed in the top section, at least one sensor adapted to control a level and pH of a second liquid disposed in the vessel, at least one second computer-controlled valve adapted to drain third liquids from the vessel, the at least one second computer-controlled valve being disposed in the bottom section, a stirring element adapted to homogenize a mixture comprising one or more liquids, the stirring element disposed in the bottom section, a plurality of supports adapted to support the substrate, the plurality of supports being located in a plane located in the middle section of the volume, a ramp adapted to feed the substrate into the vessel, the ramp having a first portion disposed outside the vessel and a second portion disposed inside the vessel, the ramp intersecting a side of the vessel in the middle section of the vessel, the ramp forming a selected angle with one or more of the plurality of planes, the ramp extending into the vessel and intersecting with the plane associated with the plurality of supports, and a computer-controlled unit configured to control liquid handling, etching of the metal layer, and positioning of the graphene monolayer on the substrate. Currently amended
The device according to claim 1, further comprising: a shower adapted to dispense the third liquids. Previously presented
Method to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, comprising the steps of: (a) etching the metal layer by pouring a metal etching solution into an equipment according to claim 1, by opening a computer-controlled valve and placing said graphene monolayer on top of said metal etching solution, (b) eluting the liquid present in said equipment by opening a computer-controlled valve and pouring a neutralising solution by opening a computer-controlled valve, (c) eluting the liquid present in said equipment by opening the computer-controlled valve and pouring an acidic solution by opening a computer-controlled valve and (d) inserting said substrate into said equipment through the ramp, eluting the liquid present in said equipment by opening the computer-controlled valve and depositing the graphene monolayer on said substrate. Withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
automated graphene transfer vessel
Materials described outside the worked examples.
graphene monolayer
metal layer
Measurements and analyses referenced in the patent, with their drawing references.
Figure 6 shows the Raman spectrum of graphene produced in example 1
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Duration | 6–12 hours | — |
Duration |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,354,866Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 shows a scheme of a graphene production method by chemical vapour deposition (CVD), graphene monolayer transfer according to the method and equipment of the invention and further removal of the polymethyl methacrylate (PMMA) polymer layer. 35
Figure 2 shows a scheme of the equipment elements used in the graphene monolayer transfer method and equipment of the invention. 8
Figure 3 shows a scheme of the equipment to automatically transfer a graphene monolayer of the invention.
Figure 4 shows a scheme of the equipment to automatically transfer a graphene monolayer of the invention, showing elements of the interior of the equipment. 5
Figure 5 shows an optical microscopy image of graphene produced in example 1
Figure 6 shows the Raman spectrum of graphene produced in example 1
Figure 7 shows an optical microscopy image of graphene produced in example 2
Figure 8 shows the Raman spectrum of graphene produced in example 2
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A device comprising: a vessel adapted to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, the vessel comprising a volume having a top section, a bottom section, and a middle section between the top section and the bottom section, the volume having a plurality of round cross-sections in a plurality of planes, the plurality of cross-sections including a first cross- section located in the bottom section and having a first radius, a second cross-section located in the middle section and having a second radius larger than the first radius, and a third cross- section located in the top section and having a third radius larger than the second radius, at least one first computer-controlled valve adapted to allow entry of first liquids into the vessel, the at least one first computer-controlled valve being disposed in the top section, at least one sensor adapted to control a level and pH of a second liquid disposed in the vessel, at least one second computer-controlled valve adapted to drain third liquids from the vessel, the at least one second computer-controlled valve being disposed in the bottom section, a stirring element adapted to homogenize a mixture comprising one or more liquids, the stirring element disposed in the bottom section, a plurality of supports adapted to support the substrate, the plurality of supports being located in a plane located in the middle section of the volume, a ramp adapted to feed the substrate into the vessel, the ramp having a first portion disposed outside the vessel and a second portion disposed inside the vessel, the ramp intersecting a side of the vessel in the middle section of the vessel, the ramp forming a selected angle with one or more of the plurality of planes, the ramp extending into the vessel and intersecting with the plane associated with the plurality of supports, and a computer-controlled unit configured to control liquid handling, etching of the metal layer, and positioning of the graphene monolayer on the substrate. Currently amended
The device according to claim 1, further comprising: a shower adapted to dispense the third liquids. Previously presented
Method to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, comprising the steps of: (a) etching the metal layer by pouring a metal etching solution into an equipment according to claim 1, by opening a computer-controlled valve and placing said graphene monolayer on top of said metal etching solution, (b) eluting the liquid present in said equipment by opening a computer-controlled valve and pouring a neutralising solution by opening a computer-controlled valve, (c) eluting the liquid present in said equipment by opening the computer-controlled valve and pouring an acidic solution by opening a computer-controlled valve and (d) inserting said substrate into said equipment through the ramp, eluting the liquid present in said equipment by opening the computer-controlled valve and depositing the graphene monolayer on said substrate. Withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
automated graphene transfer vessel
Materials described outside the worked examples.
graphene monolayer
metal layer
Measurements and analyses referenced in the patent, with their drawing references.
Figure 6 shows the Raman spectrum of graphene produced in example 1
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Duration | 6–12 hours | — |
Duration |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,354,866Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1 shows a scheme of a graphene production method by chemical vapour deposition (CVD), graphene monolayer transfer according to the method and equipment of the invention and further removal of the polymethyl methacrylate (PMMA) polymer layer. 35
Figure 2 shows a scheme of the equipment elements used in the graphene monolayer transfer method and equipment of the invention. 8
Figure 3 shows a scheme of the equipment to automatically transfer a graphene monolayer of the invention.
Figure 4 shows a scheme of the equipment to automatically transfer a graphene monolayer of the invention, showing elements of the interior of the equipment. 5
Figure 5 shows an optical microscopy image of graphene produced in example 1
Figure 6 shows the Raman spectrum of graphene produced in example 1
Figure 7 shows an optical microscopy image of graphene produced in example 2
Figure 8 shows the Raman spectrum of graphene produced in example 2
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A device comprising: a vessel adapted to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, the vessel comprising a volume having a top section, a bottom section, and a middle section between the top section and the bottom section, the volume having a plurality of round cross-sections in a plurality of planes, the plurality of cross-sections including a first cross- section located in the bottom section and having a first radius, a second cross-section located in the middle section and having a second radius larger than the first radius, and a third cross- section located in the top section and having a third radius larger than the second radius, at least one first computer-controlled valve adapted to allow entry of first liquids into the vessel, the at least one first computer-controlled valve being disposed in the top section, at least one sensor adapted to control a level and pH of a second liquid disposed in the vessel, at least one second computer-controlled valve adapted to drain third liquids from the vessel, the at least one second computer-controlled valve being disposed in the bottom section, a stirring element adapted to homogenize a mixture comprising one or more liquids, the stirring element disposed in the bottom section, a plurality of supports adapted to support the substrate, the plurality of supports being located in a plane located in the middle section of the volume, a ramp adapted to feed the substrate into the vessel, the ramp having a first portion disposed outside the vessel and a second portion disposed inside the vessel, the ramp intersecting a side of the vessel in the middle section of the vessel, the ramp forming a selected angle with one or more of the plurality of planes, the ramp extending into the vessel and intersecting with the plane associated with the plurality of supports, and a computer-controlled unit configured to control liquid handling, etching of the metal layer, and positioning of the graphene monolayer on the substrate. Currently amended
The device according to claim 1, further comprising: a shower adapted to dispense the third liquids. Previously presented
Method to automatically transfer a graphene monolayer deposited on a metal layer and protected with a polymer layer to a substrate, comprising the steps of: (a) etching the metal layer by pouring a metal etching solution into an equipment according to claim 1, by opening a computer-controlled valve and placing said graphene monolayer on top of said metal etching solution, (b) eluting the liquid present in said equipment by opening a computer-controlled valve and pouring a neutralising solution by opening a computer-controlled valve, (c) eluting the liquid present in said equipment by opening the computer-controlled valve and pouring an acidic solution by opening a computer-controlled valve and (d) inserting said substrate into said equipment through the ramp, eluting the liquid present in said equipment by opening the computer-controlled valve and depositing the graphene monolayer on said substrate. Withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
automated graphene transfer vessel
Materials described outside the worked examples.
graphene monolayer
metal layer
Measurements and analyses referenced in the patent, with their drawing references.
Figure 6 shows the Raman spectrum of graphene produced in example 1
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Duration | 6–12 hours | — |
Duration |
Related documents with shared materials, methods, properties, or citations.
polymer layer
substrate (semiconductor materials, polymers, metals, patterned wafers, ceramics)
quartz
glass
silicon
Si
silicon with a thermal oxide layer
polyethylene naphthalate (PEN)
polyethylene terephthalate (PET)
metal layer (copper, nickel, gold, silver, aluminium, platinum, palladium, ruthenium, iridium)
alloy layer
polymethyl methacrylate (PMMA)
polydimethyl siloxane (PDMS)
polycarbonate (PC)
ferric chloride
FeCl₃
nitric acid
HNO₃
ammonium persulfate
(NH₄)2S₂O₈
hydrogen peroxide
H₂O₂
Figure 8 shows the Raman spectrum of graphene produced in example 2
| — |
Duration | 5–30 minutes | — |
Duration | 2–30 minutes | — |
Duration | 5–10 minutes | — |
Duration | ≤ 1 minute | — |
polymer layer
substrate (semiconductor materials, polymers, metals, patterned wafers, ceramics)
quartz
glass
silicon
Si
silicon with a thermal oxide layer
polyethylene naphthalate (PEN)
polyethylene terephthalate (PET)
metal layer (copper, nickel, gold, silver, aluminium, platinum, palladium, ruthenium, iridium)
alloy layer
polymethyl methacrylate (PMMA)
polydimethyl siloxane (PDMS)
polycarbonate (PC)
ferric chloride
FeCl₃
nitric acid
HNO₃
ammonium persulfate
(NH₄)2S₂O₈
hydrogen peroxide
H₂O₂
Figure 8 shows the Raman spectrum of graphene produced in example 2
| — |
Duration | 5–30 minutes | — |
Duration | 2–30 minutes | — |
Duration | 5–10 minutes | — |
Duration | ≤ 1 minute | — |
polymer layer
substrate (semiconductor materials, polymers, metals, patterned wafers, ceramics)
quartz
glass
silicon
Si
silicon with a thermal oxide layer
polyethylene naphthalate (PEN)
polyethylene terephthalate (PET)
metal layer (copper, nickel, gold, silver, aluminium, platinum, palladium, ruthenium, iridium)
alloy layer
polymethyl methacrylate (PMMA)
polydimethyl siloxane (PDMS)
polycarbonate (PC)
ferric chloride
FeCl₃
nitric acid
HNO₃
ammonium persulfate
(NH₄)2S₂O₈
hydrogen peroxide
H₂O₂
Figure 8 shows the Raman spectrum of graphene produced in example 2
| — |
Duration | 5–30 minutes | — |
Duration | 2–30 minutes | — |
Duration | 5–10 minutes | — |
Duration | ≤ 1 minute | — |
polymer layer
substrate (semiconductor materials, polymers, metals, patterned wafers, ceramics)
quartz
glass
silicon
Si
silicon with a thermal oxide layer
polyethylene naphthalate (PEN)
polyethylene terephthalate (PET)
metal layer (copper, nickel, gold, silver, aluminium, platinum, palladium, ruthenium, iridium)
alloy layer
polymethyl methacrylate (PMMA)
polydimethyl siloxane (PDMS)
polycarbonate (PC)
ferric chloride
FeCl₃
nitric acid
HNO₃
ammonium persulfate
(NH₄)2S₂O₈
hydrogen peroxide
H₂O₂
Figure 8 shows the Raman spectrum of graphene produced in example 2
| — |
Duration | 5–30 minutes | — |
Duration | 2–30 minutes | — |
Duration | 5–10 minutes | — |
Duration | ≤ 1 minute | — |