Patent
US 9,067,783GRAPHENE-BASED PHOTODETECTOR INCLUDING COMPLEX TRANSPARENT ELECTRODE, METHOD OF MANUFACTURING THE SAME, AND DEVICE INCLUDING THE SAME
Jae-young CHOI
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,067,783Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a plan view of an embodiment of a photodetector according to the invention; [0031]
FIG. 2 is an enlarged view of a portion of an alternative embodiment, corresponding to the portion A l of
FIG. 3 is a cross-sectional view taken along line 3-3' of
FIG. 4 is a graph illustrating transmittance (percent: %) versus wavelength (nanometer: nm), showing results of an exemplary experiment on light transmittance …
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 6, showing a photocurrent by radiating a laser beam on first and second areas A and B of the photodetector of
FIG. 7 is a graph illustrating photocurrent (nanoampere: nA) versus voltage (V) applied between first and third electrodes of
FIG. 8 is a graph illustrating ratio of a photocurrent of the first or second area A or B to the total current (percent: %) versus voltage (V) applied between …
FIGS. 9 and 10 are cross-sectional views illustrating an embodiment of a method of manufacturing a photodetector according to the invention.
FIG. 10, a second electrode E₂ is provided on the graphene layer 34. The second electrode E₂ is provided to be apart from the first electrode E 1. The second …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A photodetector comprising: a substrate; a graphene layer disposed on the substrate; a first electrode disposed on the graphene layer; and a second electrode disposed on the graphene layer, wherein the first and second electrodes are spaced apart from each other, and wherein each of the first and second electrodes comprises a complex transparent SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741655.14.336.1415.2130.1586.svg 0.57 5.98 Graph Black and white
The photodetector of claim 1, wherein the complex transparent electrode of the first electrode has a different composition from the complex transparent electrode of the second electrode. original
The photodetector of claim 1, wherein the substrate has one of a single layer structure and a multi-layer structure.
The photodetector of claim 1, wherein the substrate is flexible. Page 2 of 10 SI-393 80-US RE₂ 01 104023 1US₀ YPL₁₀₃ 8US App l. No. 13/613,279 Response dated: Reply to Non-final Office Action dated:
The photodetector of claim 1, wherein the complex transparent electrode comprises a metal electrode having a thickness less than about 20 nanometers. SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.6.336.610.2091.695.svg 0.283 5.85 Graph Black and white complex transparent electrode of the first electrode comprises at least one of a transparent conductive oxide electrode, a carbon nanotube electrode and a graphene electrode.
The photodetector of claim 1, wherein an entire bottom surface of each of the first and second electrodes contacts the SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.11.336.1127.678.1214.svg 0.29 1.14 Graph Black and white original
An optical device comprising a photo device, wherein the photo device comprises the photodetector of claim 1.
The photodetector of claim 1, wherein an entire bottom surface of each of the first and second electrodes contact the graphene layer.
canceled
canceled
canceled
A method of manufacturing a photodetector, the method comprising: providing a graphene layer on a substrate; providing a first electrode on the graphene layer; and providing a second electrode apart from the first electrode, on the graphene layer, wherein each of the first and second electrodes comprises a complex transparent SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.23.336.2335.2130.2506.svg 0.57 5.98 Graph Black and white
The method of claim 12, wherein the providing the complex transparent electrode of the first electrode comprises: providing a first metal electrode which allows transmission of light therethrough to the graphene layer; Page 3 of 10 SI-393 80-US RE₂ 01 104023 1US₀ YPL₁₀₃ 8US App l. No. 13/613,279 Response dated: Reply to Non-final Office Action dated: providing a transparent electrode on the first metal electrode; and patterning the transparent electrode and the first metal electrode.
The method of claim 12, wherein the providing the complex transparent electrode of the second electrode comprises: providing a second metal electrode which allows transmission of light therethrough to the graphene layer; providing a transparent electrode on the second metal electrode; and patterning the transparent electrode and the second metal electrode.
The method of claim 12, wherein the substrate has one of a single layer structure and a multilayer structure.
The method of claim 12, wherein the substrate is flexible.
The method of claim 12, wherein an entire bottom surface of each of the first and second electrodes contact the graphene layer.
Layer stacks claimed or described, ordered top of device to substrate.
graphene-based photodetector
Materials described outside the worked examples.
graphene
complex transparent electrode
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a graph illustrating transmittance (percent: %) versus wavelength (nanometer: nm), showing results of an exemplary experiment on light transmittance …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | ≤ 20 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,067,783Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a plan view of an embodiment of a photodetector according to the invention; [0031]
FIG. 2 is an enlarged view of a portion of an alternative embodiment, corresponding to the portion A l of
FIG. 3 is a cross-sectional view taken along line 3-3' of
FIG. 4 is a graph illustrating transmittance (percent: %) versus wavelength (nanometer: nm), showing results of an exemplary experiment on light transmittance …
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 6, showing a photocurrent by radiating a laser beam on first and second areas A and B of the photodetector of
FIG. 7 is a graph illustrating photocurrent (nanoampere: nA) versus voltage (V) applied between first and third electrodes of
FIG. 8 is a graph illustrating ratio of a photocurrent of the first or second area A or B to the total current (percent: %) versus voltage (V) applied between …
FIGS. 9 and 10 are cross-sectional views illustrating an embodiment of a method of manufacturing a photodetector according to the invention.
FIG. 10, a second electrode E₂ is provided on the graphene layer 34. The second electrode E₂ is provided to be apart from the first electrode E 1. The second …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A photodetector comprising: a substrate; a graphene layer disposed on the substrate; a first electrode disposed on the graphene layer; and a second electrode disposed on the graphene layer, wherein the first and second electrodes are spaced apart from each other, and wherein each of the first and second electrodes comprises a complex transparent SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741655.14.336.1415.2130.1586.svg 0.57 5.98 Graph Black and white
The photodetector of claim 1, wherein the complex transparent electrode of the first electrode has a different composition from the complex transparent electrode of the second electrode. original
The photodetector of claim 1, wherein the substrate has one of a single layer structure and a multi-layer structure.
The photodetector of claim 1, wherein the substrate is flexible. Page 2 of 10 SI-393 80-US RE₂ 01 104023 1US₀ YPL₁₀₃ 8US App l. No. 13/613,279 Response dated: Reply to Non-final Office Action dated:
The photodetector of claim 1, wherein the complex transparent electrode comprises a metal electrode having a thickness less than about 20 nanometers. SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.6.336.610.2091.695.svg 0.283 5.85 Graph Black and white complex transparent electrode of the first electrode comprises at least one of a transparent conductive oxide electrode, a carbon nanotube electrode and a graphene electrode.
The photodetector of claim 1, wherein an entire bottom surface of each of the first and second electrodes contacts the SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.11.336.1127.678.1214.svg 0.29 1.14 Graph Black and white original
An optical device comprising a photo device, wherein the photo device comprises the photodetector of claim 1.
The photodetector of claim 1, wherein an entire bottom surface of each of the first and second electrodes contact the graphene layer.
canceled
canceled
canceled
A method of manufacturing a photodetector, the method comprising: providing a graphene layer on a substrate; providing a first electrode on the graphene layer; and providing a second electrode apart from the first electrode, on the graphene layer, wherein each of the first and second electrodes comprises a complex transparent SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.23.336.2335.2130.2506.svg 0.57 5.98 Graph Black and white
The method of claim 12, wherein the providing the complex transparent electrode of the first electrode comprises: providing a first metal electrode which allows transmission of light therethrough to the graphene layer; Page 3 of 10 SI-393 80-US RE₂ 01 104023 1US₀ YPL₁₀₃ 8US App l. No. 13/613,279 Response dated: Reply to Non-final Office Action dated: providing a transparent electrode on the first metal electrode; and patterning the transparent electrode and the first metal electrode.
The method of claim 12, wherein the providing the complex transparent electrode of the second electrode comprises: providing a second metal electrode which allows transmission of light therethrough to the graphene layer; providing a transparent electrode on the second metal electrode; and patterning the transparent electrode and the second metal electrode.
The method of claim 12, wherein the substrate has one of a single layer structure and a multilayer structure.
The method of claim 12, wherein the substrate is flexible.
The method of claim 12, wherein an entire bottom surface of each of the first and second electrodes contact the graphene layer.
Layer stacks claimed or described, ordered top of device to substrate.
graphene-based photodetector
Materials described outside the worked examples.
graphene
complex transparent electrode
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a graph illustrating transmittance (percent: %) versus wavelength (nanometer: nm), showing results of an exemplary experiment on light transmittance …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | ≤ 20 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,067,783Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a plan view of an embodiment of a photodetector according to the invention; [0031]
FIG. 2 is an enlarged view of a portion of an alternative embodiment, corresponding to the portion A l of
FIG. 3 is a cross-sectional view taken along line 3-3' of
FIG. 4 is a graph illustrating transmittance (percent: %) versus wavelength (nanometer: nm), showing results of an exemplary experiment on light transmittance …
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 6, showing a photocurrent by radiating a laser beam on first and second areas A and B of the photodetector of
FIG. 7 is a graph illustrating photocurrent (nanoampere: nA) versus voltage (V) applied between first and third electrodes of
FIG. 8 is a graph illustrating ratio of a photocurrent of the first or second area A or B to the total current (percent: %) versus voltage (V) applied between …
FIGS. 9 and 10 are cross-sectional views illustrating an embodiment of a method of manufacturing a photodetector according to the invention.
FIG. 10, a second electrode E₂ is provided on the graphene layer 34. The second electrode E₂ is provided to be apart from the first electrode E 1. The second …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A photodetector comprising: a substrate; a graphene layer disposed on the substrate; a first electrode disposed on the graphene layer; and a second electrode disposed on the graphene layer, wherein the first and second electrodes are spaced apart from each other, and wherein each of the first and second electrodes comprises a complex transparent SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741655.14.336.1415.2130.1586.svg 0.57 5.98 Graph Black and white
The photodetector of claim 1, wherein the complex transparent electrode of the first electrode has a different composition from the complex transparent electrode of the second electrode. original
The photodetector of claim 1, wherein the substrate has one of a single layer structure and a multi-layer structure.
The photodetector of claim 1, wherein the substrate is flexible. Page 2 of 10 SI-393 80-US RE₂ 01 104023 1US₀ YPL₁₀₃ 8US App l. No. 13/613,279 Response dated: Reply to Non-final Office Action dated:
The photodetector of claim 1, wherein the complex transparent electrode comprises a metal electrode having a thickness less than about 20 nanometers. SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.6.336.610.2091.695.svg 0.283 5.85 Graph Black and white complex transparent electrode of the first electrode comprises at least one of a transparent conductive oxide electrode, a carbon nanotube electrode and a graphene electrode.
The photodetector of claim 1, wherein an entire bottom surface of each of the first and second electrodes contacts the SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.11.336.1127.678.1214.svg 0.29 1.14 Graph Black and white original
An optical device comprising a photo device, wherein the photo device comprises the photodetector of claim 1.
The photodetector of claim 1, wherein an entire bottom surface of each of the first and second electrodes contact the graphene layer.
canceled
canceled
canceled
A method of manufacturing a photodetector, the method comprising: providing a graphene layer on a substrate; providing a first electrode on the graphene layer; and providing a second electrode apart from the first electrode, on the graphene layer, wherein each of the first and second electrodes comprises a complex transparent SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.23.336.2335.2130.2506.svg 0.57 5.98 Graph Black and white
The method of claim 12, wherein the providing the complex transparent electrode of the first electrode comprises: providing a first metal electrode which allows transmission of light therethrough to the graphene layer; Page 3 of 10 SI-393 80-US RE₂ 01 104023 1US₀ YPL₁₀₃ 8US App l. No. 13/613,279 Response dated: Reply to Non-final Office Action dated: providing a transparent electrode on the first metal electrode; and patterning the transparent electrode and the first metal electrode.
The method of claim 12, wherein the providing the complex transparent electrode of the second electrode comprises: providing a second metal electrode which allows transmission of light therethrough to the graphene layer; providing a transparent electrode on the second metal electrode; and patterning the transparent electrode and the second metal electrode.
The method of claim 12, wherein the substrate has one of a single layer structure and a multilayer structure.
The method of claim 12, wherein the substrate is flexible.
The method of claim 12, wherein an entire bottom surface of each of the first and second electrodes contact the graphene layer.
Layer stacks claimed or described, ordered top of device to substrate.
graphene-based photodetector
Materials described outside the worked examples.
graphene
complex transparent electrode
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a graph illustrating transmittance (percent: %) versus wavelength (nanometer: nm), showing results of an exemplary experiment on light transmittance …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | ≤ 20 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,067,783Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a plan view of an embodiment of a photodetector according to the invention; [0031]
FIG. 2 is an enlarged view of a portion of an alternative embodiment, corresponding to the portion A l of
FIG. 3 is a cross-sectional view taken along line 3-3' of
FIG. 4 is a graph illustrating transmittance (percent: %) versus wavelength (nanometer: nm), showing results of an exemplary experiment on light transmittance …
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 6, showing a photocurrent by radiating a laser beam on first and second areas A and B of the photodetector of
FIG. 7 is a graph illustrating photocurrent (nanoampere: nA) versus voltage (V) applied between first and third electrodes of
FIG. 8 is a graph illustrating ratio of a photocurrent of the first or second area A or B to the total current (percent: %) versus voltage (V) applied between …
FIGS. 9 and 10 are cross-sectional views illustrating an embodiment of a method of manufacturing a photodetector according to the invention.
FIG. 10, a second electrode E₂ is provided on the graphene layer 34. The second electrode E₂ is provided to be apart from the first electrode E 1. The second …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A photodetector comprising: a substrate; a graphene layer disposed on the substrate; a first electrode disposed on the graphene layer; and a second electrode disposed on the graphene layer, wherein the first and second electrodes are spaced apart from each other, and wherein each of the first and second electrodes comprises a complex transparent SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741655.14.336.1415.2130.1586.svg 0.57 5.98 Graph Black and white
The photodetector of claim 1, wherein the complex transparent electrode of the first electrode has a different composition from the complex transparent electrode of the second electrode. original
The photodetector of claim 1, wherein the substrate has one of a single layer structure and a multi-layer structure.
The photodetector of claim 1, wherein the substrate is flexible. Page 2 of 10 SI-393 80-US RE₂ 01 104023 1US₀ YPL₁₀₃ 8US App l. No. 13/613,279 Response dated: Reply to Non-final Office Action dated:
The photodetector of claim 1, wherein the complex transparent electrode comprises a metal electrode having a thickness less than about 20 nanometers. SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.6.336.610.2091.695.svg 0.283 5.85 Graph Black and white complex transparent electrode of the first electrode comprises at least one of a transparent conductive oxide electrode, a carbon nanotube electrode and a graphene electrode.
The photodetector of claim 1, wherein an entire bottom surface of each of the first and second electrodes contacts the SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.11.336.1127.678.1214.svg 0.29 1.14 Graph Black and white original
An optical device comprising a photo device, wherein the photo device comprises the photodetector of claim 1.
The photodetector of claim 1, wherein an entire bottom surface of each of the first and second electrodes contact the graphene layer.
canceled
canceled
canceled
A method of manufacturing a photodetector, the method comprising: providing a graphene layer on a substrate; providing a first electrode on the graphene layer; and providing a second electrode apart from the first electrode, on the graphene layer, wherein each of the first and second electrodes comprises a complex transparent SVG 13613279.10-03-2014.I₀TW₈₅YSPXXIFW3.CLM30741656.23.336.2335.2130.2506.svg 0.57 5.98 Graph Black and white
The method of claim 12, wherein the providing the complex transparent electrode of the first electrode comprises: providing a first metal electrode which allows transmission of light therethrough to the graphene layer; Page 3 of 10 SI-393 80-US RE₂ 01 104023 1US₀ YPL₁₀₃ 8US App l. No. 13/613,279 Response dated: Reply to Non-final Office Action dated: providing a transparent electrode on the first metal electrode; and patterning the transparent electrode and the first metal electrode.
The method of claim 12, wherein the providing the complex transparent electrode of the second electrode comprises: providing a second metal electrode which allows transmission of light therethrough to the graphene layer; providing a transparent electrode on the second metal electrode; and patterning the transparent electrode and the second metal electrode.
The method of claim 12, wherein the substrate has one of a single layer structure and a multilayer structure.
The method of claim 12, wherein the substrate is flexible.
The method of claim 12, wherein an entire bottom surface of each of the first and second electrodes contact the graphene layer.
Layer stacks claimed or described, ordered top of device to substrate.
graphene-based photodetector
Materials described outside the worked examples.
graphene
complex transparent electrode
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 4 is a graph illustrating transmittance (percent: %) versus wavelength (nanometer: nm), showing results of an exemplary experiment on light transmittance …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | ≤ 20 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
metal electrode (thin, <20 nm)
transparent electrode
metal electrode material: Pd, Ti, Al, Au, Ag, Pt, Cr, Ni, Co, or Cu
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 7 is a graph illustrating photocurrent (nanoampere: nA) versus voltage (V) applied between first and third electrodes of
FIG. 8 is a graph illustrating ratio of a photocurrent of the first or second area A or B to the total current (percent: %) versus voltage (V) applied between …
| — |
metal electrode (thin, <20 nm)
transparent electrode
metal electrode material: Pd, Ti, Al, Au, Ag, Pt, Cr, Ni, Co, or Cu
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 7 is a graph illustrating photocurrent (nanoampere: nA) versus voltage (V) applied between first and third electrodes of
FIG. 8 is a graph illustrating ratio of a photocurrent of the first or second area A or B to the total current (percent: %) versus voltage (V) applied between …
| — |
metal electrode (thin, <20 nm)
transparent electrode
metal electrode material: Pd, Ti, Al, Au, Ag, Pt, Cr, Ni, Co, or Cu
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 7 is a graph illustrating photocurrent (nanoampere: nA) versus voltage (V) applied between first and third electrodes of
FIG. 8 is a graph illustrating ratio of a photocurrent of the first or second area A or B to the total current (percent: %) versus voltage (V) applied between …
| — |
metal electrode (thin, <20 nm)
transparent electrode
metal electrode material: Pd, Ti, Al, Au, Ag, Pt, Cr, Ni, Co, or Cu
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 5A is a graph illustrating photocurrent (ampere: A) versus gate voltage (volt: V) according to an exemplary experiment on a photocurrent of a …
FIG. 7 is a graph illustrating photocurrent (nanoampere: nA) versus voltage (V) applied between first and third electrodes of
FIG. 8 is a graph illustrating ratio of a photocurrent of the first or second area A or B to the total current (percent: %) versus voltage (V) applied between …
| — |