Patent
US 10,613,027CHEMICAL SENSORS BASED ON PLASMON RESONANCE IN GRAPHENE
Phaedon Avouris
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,613,027Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional diagram illustrating a starting structure for forming a graphene- based surface plasmon resonance (SPR) sensor using graphene …
FIG. 2 is a cross-sectional diagram illustrating an etch mask having been patterned on the graphene layer according to an embodiment of the present invention; …
FIG. 3 is a cross-sectional diagram illustrating the etch mask having been used to pattern the graphene layer into the graphene nanoribbons according to an …
FIG. 4 is a cross-sectional diagram illustrating the etch mask having been removed following patterning of the nanoribbons according to an embodiment of the …
FIG. 5 is a cross-sectional diagram illustrating an optional coating having been deposited onto the substrate covering and protecting the graphene nanoribbons …
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 7, illustrates in an alternative bulk graphene-based embodiment the etch mask having been used to pattern trenches in the insulating dielectric layer that …
FIG. 8, illustrates the etch mask having been removed revealing that the patterned insulating dielectric layer has a corrugated surface consisting of ridges …
FIG. 9, illustrates graphene having been deposited onto the substrate according to an embodiment of the present invention; [0021]
FIG. 10, illustrates an optional coating having been deposited onto the sensor to cover and protect the graphene according to an embodiment of the present …
FIG. 11 is a cross-sectional diagram which, following from
FIG. 12 illustrates how in this case an etch is used to remove portions of the insulating dielectric layer 602b not covered by etch mask 702 down to the …
FIG. 13, illustrates the second material having been polished down to the surface of the insulating dielectric layer according to an embodiment of the present …
FIG. 14, illustrates graphene having been deposited onto the substrate according to an embodiment of the present invention; [0026]
FIG. 15, illustrates an optional coating having been deposited onto the sensor to cover and protect the graphene according to an embodiment of the present …
FIG. 16 is a cross-sectional diagram which, following from
FIG. 17, illustrates an alternative (reflection measurement-based) use of the present SPR sensor to analyze the sample according to an embodiment of the present …
FIG. 18, the charge density of the graphene can be modulated using the field effect, e.g., by applying a gate voltage 1808 to the conductive layer 1 04a (which …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
FIG. 20 is a diagram which, following from
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of analyzing a sample using a graphene-based surface plasmon resonance (SPR) sensor, comprising the steps of: depositing the sample on the graphene-based SPR sensor, wherein the graphene- based SPR sensor comprises an electrically conductive layer, a dielectric layer disposed on the electrically conductive layer, and graphene disposed on a side of the dielectric layer opposite the electrically conductive layer, wherein the sample is deposited onto the graphene, and wherein the graphene is doped with a dopant selected from the group consisting of: polyethylene imine (PE I) and diazonium salts; generating light using a light source that is positioned proximal to a first side of the graphene-based SPR sensor over the sample; passing the light through the sample and a grated portion of the graphene-based SPR sensor having multiple evenly-spaced periodic regions of differing light permittivity that couple the light with plasmons in the graphene, the passing further comprising inducing a plasmon resonance in the graphene, and wherein, by way of an interaction between the plasmon resonance in the graphene and vibrational dipole moments in the sample. an intensity of the light is changed as it passes through the graphene-based SPR sensor, wherein the grated portion comprises either a) periodic regions of the graphene while the dielectric layer is continuous beneath the graphene or b) periodic regions of the dielectric layer while the graphene is continuous over the dielectric layer, and wherein the electrically conductive layer is continuous beneath the graphene and the dielectric layer; and detecting the intensity of the light that has passed through the sample and the graphene-based SPR sensor, wherein the intensity of the light detected represents molecular properties of the sample, wherein the intensity of the light is detected using a detector that is proximal to either i) the first side of the graphene-based SPR sensor or ii) a second side of the graphene-based S P R sensor opposite to the first side of the graphene- based SPR sensor. Currently amended
The method of claim 1, wherein the electrically conductive layer comprises a back gate electrode of the graphene-based SPR sensor, the method further comprising the step of: applying a voltage to the back gate electrode to alter a carrier density of the graphene. Previously presented
The method of claim 1, wherein the sample is a biological sample. Original
The method of claim 1, wherein the sample is a chemical sample. Original
The method of claim 1, wherein the light source and the detector are located on opposite sides of the graphene-based SPR sensor such that the light produced by the light source passes through the graphene-based SPR sensor and the sample to the detector. Previously presented
The method of claim 1, wherein the light source and the detector are located on a same side of the graphene-based SPR sensor such that the light produced by the light source is reflected off of a surface of the graphene-based SPR sensor at an angle and is captured by the detector. Previously presented
The method of claim 1, wherein the graphene comprises multiple, evenly spaced graphene strips disposed side-by-side one another on a surface of the dielectric layer over the electrically conductive layer, wherein both the dielectric layer and the electrically conductive layer are continuous, the graphene strips comprising the grated portion of the graphene-based SPR sensor having the multiple evenly-spaced periodic regions of differing light permittivity, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another along the surface of the dielectric layer by a same distance x, wherein x is from about 5 nanometers to about micrometers, and ranges therebetween. Previously presented
The method of claim 1, wherein the graphene-based SPR sensor comprises the dielectric layer having trenches patterned at regular intervals therein, the graphene disposed as a continuous layer over the dielectric layer so as to fully cover each of the trenches, and the electrically conductive la y er present as a continuous layer beneath the graphene and the dielectric layer, wherein the trenches patterned in the dielectric la y er form a corrugated surface of the dielectric layer having a series of grooves and ridges with the grooves being formed by the trenches and the ridges being formed by the dielectric layer remaining between the trenches, and wherein the corrugated surface of the dielectric layer provides multiple evenly-spaced periodic regions of differing light permittivity beneath the continuous layer of the graphene comprising i) first regions having a first permittivity to light and ii) second regions having a second permittivity to light. Currently amended
The method of claim 1, wherein the electrically conductive layer comprises intrinsic silicon. Previously presented
The method of claim 1, wherein the graphene-based on the graphene, wherein the coating comprises a
The method of claim 1, wherein the electrically from the group consisting o f: tantalum, titanium, Previously presented SPR sensor further comprises: a coating transparent dielectric material. Original conductive layer comprises a metal selected platinum, tungsten, and combinations thereof.
. Canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene-based SPR sensor (general)
graphene nanoribbon-based SPR sensor (graphene strips)
Materials described outside the worked examples.
graphene
polyethylene imine (PEI)
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 is a cross-sectional diagram illustrating a starting structure for forming a graphene- based surface plasmon resonance (SPR) sensor using graphene …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 50–5000 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,613,027Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional diagram illustrating a starting structure for forming a graphene- based surface plasmon resonance (SPR) sensor using graphene …
FIG. 2 is a cross-sectional diagram illustrating an etch mask having been patterned on the graphene layer according to an embodiment of the present invention; …
FIG. 3 is a cross-sectional diagram illustrating the etch mask having been used to pattern the graphene layer into the graphene nanoribbons according to an …
FIG. 4 is a cross-sectional diagram illustrating the etch mask having been removed following patterning of the nanoribbons according to an embodiment of the …
FIG. 5 is a cross-sectional diagram illustrating an optional coating having been deposited onto the substrate covering and protecting the graphene nanoribbons …
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 7, illustrates in an alternative bulk graphene-based embodiment the etch mask having been used to pattern trenches in the insulating dielectric layer that …
FIG. 8, illustrates the etch mask having been removed revealing that the patterned insulating dielectric layer has a corrugated surface consisting of ridges …
FIG. 9, illustrates graphene having been deposited onto the substrate according to an embodiment of the present invention; [0021]
FIG. 10, illustrates an optional coating having been deposited onto the sensor to cover and protect the graphene according to an embodiment of the present …
FIG. 11 is a cross-sectional diagram which, following from
FIG. 12 illustrates how in this case an etch is used to remove portions of the insulating dielectric layer 602b not covered by etch mask 702 down to the …
FIG. 13, illustrates the second material having been polished down to the surface of the insulating dielectric layer according to an embodiment of the present …
FIG. 14, illustrates graphene having been deposited onto the substrate according to an embodiment of the present invention; [0026]
FIG. 15, illustrates an optional coating having been deposited onto the sensor to cover and protect the graphene according to an embodiment of the present …
FIG. 16 is a cross-sectional diagram which, following from
FIG. 17, illustrates an alternative (reflection measurement-based) use of the present SPR sensor to analyze the sample according to an embodiment of the present …
FIG. 18, the charge density of the graphene can be modulated using the field effect, e.g., by applying a gate voltage 1808 to the conductive layer 1 04a (which …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
FIG. 20 is a diagram which, following from
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of analyzing a sample using a graphene-based surface plasmon resonance (SPR) sensor, comprising the steps of: depositing the sample on the graphene-based SPR sensor, wherein the graphene- based SPR sensor comprises an electrically conductive layer, a dielectric layer disposed on the electrically conductive layer, and graphene disposed on a side of the dielectric layer opposite the electrically conductive layer, wherein the sample is deposited onto the graphene, and wherein the graphene is doped with a dopant selected from the group consisting of: polyethylene imine (PE I) and diazonium salts; generating light using a light source that is positioned proximal to a first side of the graphene-based SPR sensor over the sample; passing the light through the sample and a grated portion of the graphene-based SPR sensor having multiple evenly-spaced periodic regions of differing light permittivity that couple the light with plasmons in the graphene, the passing further comprising inducing a plasmon resonance in the graphene, and wherein, by way of an interaction between the plasmon resonance in the graphene and vibrational dipole moments in the sample. an intensity of the light is changed as it passes through the graphene-based SPR sensor, wherein the grated portion comprises either a) periodic regions of the graphene while the dielectric layer is continuous beneath the graphene or b) periodic regions of the dielectric layer while the graphene is continuous over the dielectric layer, and wherein the electrically conductive layer is continuous beneath the graphene and the dielectric layer; and detecting the intensity of the light that has passed through the sample and the graphene-based SPR sensor, wherein the intensity of the light detected represents molecular properties of the sample, wherein the intensity of the light is detected using a detector that is proximal to either i) the first side of the graphene-based SPR sensor or ii) a second side of the graphene-based S P R sensor opposite to the first side of the graphene- based SPR sensor. Currently amended
The method of claim 1, wherein the electrically conductive layer comprises a back gate electrode of the graphene-based SPR sensor, the method further comprising the step of: applying a voltage to the back gate electrode to alter a carrier density of the graphene. Previously presented
The method of claim 1, wherein the sample is a biological sample. Original
The method of claim 1, wherein the sample is a chemical sample. Original
The method of claim 1, wherein the light source and the detector are located on opposite sides of the graphene-based SPR sensor such that the light produced by the light source passes through the graphene-based SPR sensor and the sample to the detector. Previously presented
The method of claim 1, wherein the light source and the detector are located on a same side of the graphene-based SPR sensor such that the light produced by the light source is reflected off of a surface of the graphene-based SPR sensor at an angle and is captured by the detector. Previously presented
The method of claim 1, wherein the graphene comprises multiple, evenly spaced graphene strips disposed side-by-side one another on a surface of the dielectric layer over the electrically conductive layer, wherein both the dielectric layer and the electrically conductive layer are continuous, the graphene strips comprising the grated portion of the graphene-based SPR sensor having the multiple evenly-spaced periodic regions of differing light permittivity, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another along the surface of the dielectric layer by a same distance x, wherein x is from about 5 nanometers to about micrometers, and ranges therebetween. Previously presented
The method of claim 1, wherein the graphene-based SPR sensor comprises the dielectric layer having trenches patterned at regular intervals therein, the graphene disposed as a continuous layer over the dielectric layer so as to fully cover each of the trenches, and the electrically conductive la y er present as a continuous layer beneath the graphene and the dielectric layer, wherein the trenches patterned in the dielectric la y er form a corrugated surface of the dielectric layer having a series of grooves and ridges with the grooves being formed by the trenches and the ridges being formed by the dielectric layer remaining between the trenches, and wherein the corrugated surface of the dielectric layer provides multiple evenly-spaced periodic regions of differing light permittivity beneath the continuous layer of the graphene comprising i) first regions having a first permittivity to light and ii) second regions having a second permittivity to light. Currently amended
The method of claim 1, wherein the electrically conductive layer comprises intrinsic silicon. Previously presented
The method of claim 1, wherein the graphene-based on the graphene, wherein the coating comprises a
The method of claim 1, wherein the electrically from the group consisting o f: tantalum, titanium, Previously presented SPR sensor further comprises: a coating transparent dielectric material. Original conductive layer comprises a metal selected platinum, tungsten, and combinations thereof.
. Canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene-based SPR sensor (general)
graphene nanoribbon-based SPR sensor (graphene strips)
Materials described outside the worked examples.
graphene
polyethylene imine (PEI)
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 is a cross-sectional diagram illustrating a starting structure for forming a graphene- based surface plasmon resonance (SPR) sensor using graphene …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 50–5000 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,613,027Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional diagram illustrating a starting structure for forming a graphene- based surface plasmon resonance (SPR) sensor using graphene …
FIG. 2 is a cross-sectional diagram illustrating an etch mask having been patterned on the graphene layer according to an embodiment of the present invention; …
FIG. 3 is a cross-sectional diagram illustrating the etch mask having been used to pattern the graphene layer into the graphene nanoribbons according to an …
FIG. 4 is a cross-sectional diagram illustrating the etch mask having been removed following patterning of the nanoribbons according to an embodiment of the …
FIG. 5 is a cross-sectional diagram illustrating an optional coating having been deposited onto the substrate covering and protecting the graphene nanoribbons …
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 7, illustrates in an alternative bulk graphene-based embodiment the etch mask having been used to pattern trenches in the insulating dielectric layer that …
FIG. 8, illustrates the etch mask having been removed revealing that the patterned insulating dielectric layer has a corrugated surface consisting of ridges …
FIG. 9, illustrates graphene having been deposited onto the substrate according to an embodiment of the present invention; [0021]
FIG. 10, illustrates an optional coating having been deposited onto the sensor to cover and protect the graphene according to an embodiment of the present …
FIG. 11 is a cross-sectional diagram which, following from
FIG. 12 illustrates how in this case an etch is used to remove portions of the insulating dielectric layer 602b not covered by etch mask 702 down to the …
FIG. 13, illustrates the second material having been polished down to the surface of the insulating dielectric layer according to an embodiment of the present …
FIG. 14, illustrates graphene having been deposited onto the substrate according to an embodiment of the present invention; [0026]
FIG. 15, illustrates an optional coating having been deposited onto the sensor to cover and protect the graphene according to an embodiment of the present …
FIG. 16 is a cross-sectional diagram which, following from
FIG. 17, illustrates an alternative (reflection measurement-based) use of the present SPR sensor to analyze the sample according to an embodiment of the present …
FIG. 18, the charge density of the graphene can be modulated using the field effect, e.g., by applying a gate voltage 1808 to the conductive layer 1 04a (which …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
FIG. 20 is a diagram which, following from
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of analyzing a sample using a graphene-based surface plasmon resonance (SPR) sensor, comprising the steps of: depositing the sample on the graphene-based SPR sensor, wherein the graphene- based SPR sensor comprises an electrically conductive layer, a dielectric layer disposed on the electrically conductive layer, and graphene disposed on a side of the dielectric layer opposite the electrically conductive layer, wherein the sample is deposited onto the graphene, and wherein the graphene is doped with a dopant selected from the group consisting of: polyethylene imine (PE I) and diazonium salts; generating light using a light source that is positioned proximal to a first side of the graphene-based SPR sensor over the sample; passing the light through the sample and a grated portion of the graphene-based SPR sensor having multiple evenly-spaced periodic regions of differing light permittivity that couple the light with plasmons in the graphene, the passing further comprising inducing a plasmon resonance in the graphene, and wherein, by way of an interaction between the plasmon resonance in the graphene and vibrational dipole moments in the sample. an intensity of the light is changed as it passes through the graphene-based SPR sensor, wherein the grated portion comprises either a) periodic regions of the graphene while the dielectric layer is continuous beneath the graphene or b) periodic regions of the dielectric layer while the graphene is continuous over the dielectric layer, and wherein the electrically conductive layer is continuous beneath the graphene and the dielectric layer; and detecting the intensity of the light that has passed through the sample and the graphene-based SPR sensor, wherein the intensity of the light detected represents molecular properties of the sample, wherein the intensity of the light is detected using a detector that is proximal to either i) the first side of the graphene-based SPR sensor or ii) a second side of the graphene-based S P R sensor opposite to the first side of the graphene- based SPR sensor. Currently amended
The method of claim 1, wherein the electrically conductive layer comprises a back gate electrode of the graphene-based SPR sensor, the method further comprising the step of: applying a voltage to the back gate electrode to alter a carrier density of the graphene. Previously presented
The method of claim 1, wherein the sample is a biological sample. Original
The method of claim 1, wherein the sample is a chemical sample. Original
The method of claim 1, wherein the light source and the detector are located on opposite sides of the graphene-based SPR sensor such that the light produced by the light source passes through the graphene-based SPR sensor and the sample to the detector. Previously presented
The method of claim 1, wherein the light source and the detector are located on a same side of the graphene-based SPR sensor such that the light produced by the light source is reflected off of a surface of the graphene-based SPR sensor at an angle and is captured by the detector. Previously presented
The method of claim 1, wherein the graphene comprises multiple, evenly spaced graphene strips disposed side-by-side one another on a surface of the dielectric layer over the electrically conductive layer, wherein both the dielectric layer and the electrically conductive layer are continuous, the graphene strips comprising the grated portion of the graphene-based SPR sensor having the multiple evenly-spaced periodic regions of differing light permittivity, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another along the surface of the dielectric layer by a same distance x, wherein x is from about 5 nanometers to about micrometers, and ranges therebetween. Previously presented
The method of claim 1, wherein the graphene-based SPR sensor comprises the dielectric layer having trenches patterned at regular intervals therein, the graphene disposed as a continuous layer over the dielectric layer so as to fully cover each of the trenches, and the electrically conductive la y er present as a continuous layer beneath the graphene and the dielectric layer, wherein the trenches patterned in the dielectric la y er form a corrugated surface of the dielectric layer having a series of grooves and ridges with the grooves being formed by the trenches and the ridges being formed by the dielectric layer remaining between the trenches, and wherein the corrugated surface of the dielectric layer provides multiple evenly-spaced periodic regions of differing light permittivity beneath the continuous layer of the graphene comprising i) first regions having a first permittivity to light and ii) second regions having a second permittivity to light. Currently amended
The method of claim 1, wherein the electrically conductive layer comprises intrinsic silicon. Previously presented
The method of claim 1, wherein the graphene-based on the graphene, wherein the coating comprises a
The method of claim 1, wherein the electrically from the group consisting o f: tantalum, titanium, Previously presented SPR sensor further comprises: a coating transparent dielectric material. Original conductive layer comprises a metal selected platinum, tungsten, and combinations thereof.
. Canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene-based SPR sensor (general)
graphene nanoribbon-based SPR sensor (graphene strips)
Materials described outside the worked examples.
graphene
polyethylene imine (PEI)
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 is a cross-sectional diagram illustrating a starting structure for forming a graphene- based surface plasmon resonance (SPR) sensor using graphene …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 50–5000 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,613,027Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional diagram illustrating a starting structure for forming a graphene- based surface plasmon resonance (SPR) sensor using graphene …
FIG. 2 is a cross-sectional diagram illustrating an etch mask having been patterned on the graphene layer according to an embodiment of the present invention; …
FIG. 3 is a cross-sectional diagram illustrating the etch mask having been used to pattern the graphene layer into the graphene nanoribbons according to an …
FIG. 4 is a cross-sectional diagram illustrating the etch mask having been removed following patterning of the nanoribbons according to an embodiment of the …
FIG. 5 is a cross-sectional diagram illustrating an optional coating having been deposited onto the substrate covering and protecting the graphene nanoribbons …
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 7, illustrates in an alternative bulk graphene-based embodiment the etch mask having been used to pattern trenches in the insulating dielectric layer that …
FIG. 8, illustrates the etch mask having been removed revealing that the patterned insulating dielectric layer has a corrugated surface consisting of ridges …
FIG. 9, illustrates graphene having been deposited onto the substrate according to an embodiment of the present invention; [0021]
FIG. 10, illustrates an optional coating having been deposited onto the sensor to cover and protect the graphene according to an embodiment of the present …
FIG. 11 is a cross-sectional diagram which, following from
FIG. 12 illustrates how in this case an etch is used to remove portions of the insulating dielectric layer 602b not covered by etch mask 702 down to the …
FIG. 13, illustrates the second material having been polished down to the surface of the insulating dielectric layer according to an embodiment of the present …
FIG. 14, illustrates graphene having been deposited onto the substrate according to an embodiment of the present invention; [0026]
FIG. 15, illustrates an optional coating having been deposited onto the sensor to cover and protect the graphene according to an embodiment of the present …
FIG. 16 is a cross-sectional diagram which, following from
FIG. 17, illustrates an alternative (reflection measurement-based) use of the present SPR sensor to analyze the sample according to an embodiment of the present …
FIG. 18, the charge density of the graphene can be modulated using the field effect, e.g., by applying a gate voltage 1808 to the conductive layer 1 04a (which …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
FIG. 20 is a diagram which, following from
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of analyzing a sample using a graphene-based surface plasmon resonance (SPR) sensor, comprising the steps of: depositing the sample on the graphene-based SPR sensor, wherein the graphene- based SPR sensor comprises an electrically conductive layer, a dielectric layer disposed on the electrically conductive layer, and graphene disposed on a side of the dielectric layer opposite the electrically conductive layer, wherein the sample is deposited onto the graphene, and wherein the graphene is doped with a dopant selected from the group consisting of: polyethylene imine (PE I) and diazonium salts; generating light using a light source that is positioned proximal to a first side of the graphene-based SPR sensor over the sample; passing the light through the sample and a grated portion of the graphene-based SPR sensor having multiple evenly-spaced periodic regions of differing light permittivity that couple the light with plasmons in the graphene, the passing further comprising inducing a plasmon resonance in the graphene, and wherein, by way of an interaction between the plasmon resonance in the graphene and vibrational dipole moments in the sample. an intensity of the light is changed as it passes through the graphene-based SPR sensor, wherein the grated portion comprises either a) periodic regions of the graphene while the dielectric layer is continuous beneath the graphene or b) periodic regions of the dielectric layer while the graphene is continuous over the dielectric layer, and wherein the electrically conductive layer is continuous beneath the graphene and the dielectric layer; and detecting the intensity of the light that has passed through the sample and the graphene-based SPR sensor, wherein the intensity of the light detected represents molecular properties of the sample, wherein the intensity of the light is detected using a detector that is proximal to either i) the first side of the graphene-based SPR sensor or ii) a second side of the graphene-based S P R sensor opposite to the first side of the graphene- based SPR sensor. Currently amended
The method of claim 1, wherein the electrically conductive layer comprises a back gate electrode of the graphene-based SPR sensor, the method further comprising the step of: applying a voltage to the back gate electrode to alter a carrier density of the graphene. Previously presented
The method of claim 1, wherein the sample is a biological sample. Original
The method of claim 1, wherein the sample is a chemical sample. Original
The method of claim 1, wherein the light source and the detector are located on opposite sides of the graphene-based SPR sensor such that the light produced by the light source passes through the graphene-based SPR sensor and the sample to the detector. Previously presented
The method of claim 1, wherein the light source and the detector are located on a same side of the graphene-based SPR sensor such that the light produced by the light source is reflected off of a surface of the graphene-based SPR sensor at an angle and is captured by the detector. Previously presented
The method of claim 1, wherein the graphene comprises multiple, evenly spaced graphene strips disposed side-by-side one another on a surface of the dielectric layer over the electrically conductive layer, wherein both the dielectric layer and the electrically conductive layer are continuous, the graphene strips comprising the grated portion of the graphene-based SPR sensor having the multiple evenly-spaced periodic regions of differing light permittivity, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another along the surface of the dielectric layer by a same distance x, wherein x is from about 5 nanometers to about micrometers, and ranges therebetween. Previously presented
The method of claim 1, wherein the graphene-based SPR sensor comprises the dielectric layer having trenches patterned at regular intervals therein, the graphene disposed as a continuous layer over the dielectric layer so as to fully cover each of the trenches, and the electrically conductive la y er present as a continuous layer beneath the graphene and the dielectric layer, wherein the trenches patterned in the dielectric la y er form a corrugated surface of the dielectric layer having a series of grooves and ridges with the grooves being formed by the trenches and the ridges being formed by the dielectric layer remaining between the trenches, and wherein the corrugated surface of the dielectric layer provides multiple evenly-spaced periodic regions of differing light permittivity beneath the continuous layer of the graphene comprising i) first regions having a first permittivity to light and ii) second regions having a second permittivity to light. Currently amended
The method of claim 1, wherein the electrically conductive layer comprises intrinsic silicon. Previously presented
The method of claim 1, wherein the graphene-based on the graphene, wherein the coating comprises a
The method of claim 1, wherein the electrically from the group consisting o f: tantalum, titanium, Previously presented SPR sensor further comprises: a coating transparent dielectric material. Original conductive layer comprises a metal selected platinum, tungsten, and combinations thereof.
. Canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene-based SPR sensor (general)
graphene nanoribbon-based SPR sensor (graphene strips)
Materials described outside the worked examples.
graphene
polyethylene imine (PEI)
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 is a cross-sectional diagram illustrating a starting structure for forming a graphene- based surface plasmon resonance (SPR) sensor using graphene …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 50–5000 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
bulk graphene SPR sensor with corrugated dielectric
diazonium salts
dielectric layer
silicon dioxide
SiO₂
high-K dielectric
intrinsic silicon
Si
metal (tantalum, titanium, platinum, tungsten)
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 18, the charge density of the graphene can be modulated using the field effect, e.g., by applying a gate voltage 1808 to the conductive layer 1 04a (which …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
| 5–50000 nm |
| — |
Thickness | 5–20 nm | — |
bulk graphene SPR sensor with corrugated dielectric
diazonium salts
dielectric layer
silicon dioxide
SiO₂
high-K dielectric
intrinsic silicon
Si
metal (tantalum, titanium, platinum, tungsten)
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 18, the charge density of the graphene can be modulated using the field effect, e.g., by applying a gate voltage 1808 to the conductive layer 1 04a (which …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
| 5–50000 nm |
| — |
Thickness | 5–20 nm | — |
bulk graphene SPR sensor with corrugated dielectric
diazonium salts
dielectric layer
silicon dioxide
SiO₂
high-K dielectric
intrinsic silicon
Si
metal (tantalum, titanium, platinum, tungsten)
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 18, the charge density of the graphene can be modulated using the field effect, e.g., by applying a gate voltage 1808 to the conductive layer 1 04a (which …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
| 5–50000 nm |
| — |
Thickness | 5–20 nm | — |
bulk graphene SPR sensor with corrugated dielectric
diazonium salts
dielectric layer
silicon dioxide
SiO₂
high-K dielectric
intrinsic silicon
Si
metal (tantalum, titanium, platinum, tungsten)
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 6 is a cross-sectional diagram illustrating a starting structure for an alternative process for forming a graphene-based SPR sensor using bulk graphene, …
FIG. 18, the charge density of the graphene can be modulated using the field effect, e.g., by applying a gate voltage 1808 to the conductive layer 1 04a (which …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
FIG. 19, the absorption spectrum shifts proportionally with the width of the nanoribbons (labeled "Ribbon width"). [0084] As described above, transmission …
| 5–50000 nm |
| — |
Thickness | 5–20 nm | — |