Research paper
Experimental CharacterizationTheoretical| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | cavity depth | 285nm | — | |||
| Dimension | nanodrum diameter | 14um | — | |||
| Drive Amplitude | direct-drive amplitude | 70mV | — | |||
| Drive Amplitude | parametric-drive amplitude | 2V | — | |||
| Resonance Frequency | direct-drive operating point | 3.67MHz | — | |||
| Resonance Frequency | parametric operating frequency | 7.34MHz | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | cavity depth | 285nm | — | |||
| Dimension | nanodrum diameter | 14um | — | |||
| Drive Amplitude | direct-drive amplitude | 70mV | — | |||
| Drive Amplitude | parametric-drive amplitude | 2V | — | |||
| Resonance Frequency | direct-drive operating point | 3.67MHz | — | |||
| Resonance Frequency | parametric operating frequency | 7.34MHz | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | cavity depth | 285nm | — | |||
| Dimension | nanodrum diameter | 14um | — | |||
| Drive Amplitude | direct-drive amplitude | 70mV | — | |||
| Drive Amplitude | parametric-drive amplitude | 2V | — | |||
| Resonance Frequency | direct-drive operating point | 3.67MHz | — | |||
| Resonance Frequency | parametric operating frequency | 7.34MHz | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | cavity depth | 285nm | — | |||
| Dimension | nanodrum diameter | 14um | — | |||
| Drive Amplitude | direct-drive amplitude | 70mV | — | |||
| Drive Amplitude | parametric-drive amplitude | 2V | — | |||
| Resonance Frequency | direct-drive operating point | 3.67MHz | — | |||
| Resonance Frequency | parametric operating frequency | 7.34MHz | — |