Patent
Atlas literature
Patent
US 9,054,232Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional view of an epitaxial structure for integrating gallium nitride (GaN) light emitting diodes (LEDs) with aluminum gallium 5 nitride(A …
FIG. 2 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a sapphire substrate;
FIG. 3 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a silicon carbon (SiC) substrate; 10
FIG. 4 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a GaN substrate; Fig. 5 shows a cross-sectional …
FIG. 7 N 0 0 (57) Abstract: A method for fabricating an epitaxial structure includes providing a substrate (102, 202, 302, 402) and a heterojunc-tion stack on …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Amendments to the Claims: Please amend the claims as follows: Claim 1 A method for fabricating an epitaxial structure, comprising: providing a substrate and a heterojunction stack over a first side of the substrate, the heterojunction stack comprising an undoped gallium nitride (GaN) layer over the first side of the substrate and a doped aluminum gallium nitride (AlGaN) layer on the undoped GaN layer; and forming a GaN light emitting diode stack over a second side of the substrate, the GaN light emitting diode stack comprising an n- type GaN layer over the second side of the substrate, a GaN/indium gallium nitride (InGaN) multiple quantum well (MQW) structure over the n-type GaN layer, a p-type AlGaN layer over the n-epe GaN/InGaN MQW structure, and a p-type GaN layer over the p-type AlGaN layer, and processing the heterojunction stack to form one or more devices coupled to the light emitting diode stack, the one or more devices are chosen from the group consisting of an AlGaN/GaN heterojunction field effect transistor (HFET) and an AlGaN/GaN Schottky diode.
The method of claim 1, wherein: the substrate is a silicon substrate; providing the substrate and the heterojunction stack over the first side of the substrate comprises: 3 forming a first strain engineered stack over the first side of the substrate, the first strain engineered stack accommodating strain between silicon and GaN; and forming the heterojunction stack over the first strain engineered stack; and the method further comprises forming a second strain engineered stack over the second side of the substrate, the GaN light emitting diode stack being formed over the second strain engineered stack, wherein: the first strain engineered stack comprises: a first G aN layer over the first side of the substrate; and a first aluminum nitride (AlN) strain-releasing layer on the first GaN layer; and the second strain engineered stack comprises: a second GaN layer over the second side of the substrate; and a second AlN strain-releasing layer on the second GaN layer.
The method of claim 1, wherein the substrate comprises a sapphire substrate, the method further comprising: forming a first GaN or AlN nucleation layer over the first side of the substrate; and forming a non-conducting GaN layer over the GaN or AlN nucleation layer, wherein the heterojunction stack is formed over the non-conducting GaN layer; and forming a second GaN or AlN nucleation layer over the second side of the substrate, wherein the GaN light emitting diode stack is formed over the second GaN or AlN buffer layer.
The method of claim 1, wherein the substrate comprises a silicon carbon (SiC) substrate, the method further comprising: forming a first AlN or AlGaN nucleation layer over the first side of the substrate; forming a non-conducting GaN layer over the first AlN or AlGaN buffer layer, the heterojunction stack being formed over the non- conducting GaN layer; and 5 forming a second A l N or A l GaN nucleation layer over the second side of the substrate, the GaN light emitting diode stack being formed over the second A l N or A l GaN nucleation layer.
The method of claim 1, wherein the substrate comprises a GaN substrate, the method further comprising [[:]] forming a non-conducting GaN layer over the first side of the substrate, the heterojunction stack being formed over the non-conducting GaN layer.
The structure of claim 1 [[9]], wherein the heterojunction stack comprises: a source for the AlGaN/GaN HFET that contacts the undoped GaN layer; 9 a drain for the AlGaN/GaN HFET that contacts the undoped GaN layer; a gate for the A l GaN/GaN HFET that contacts the doped A l GaN layer; an anode for the A l GaN/GaN Schottky diode that contacts the doped AlGaN layer; and a cathode for the A l GaN/GaN Schottky diode that contacts the undoped GaN layer.
Claim 4 The method of claim [[3]] 2, further comprising: forming a first undoped AlN buffer layer over the first side of the substrate; and forming a first undoped AlGaN layer over the first undoped AlN buffer layer, wherein the first strain engineered stack is formed over the first undoped AlGaN layer; 4 forming a second undoped A l N buffer layer over the second side of the substrate; and forming a second undoped AlGaN layer over the second undoped Al N buffer layer, wherein the second strain engineered stack is formed over the second undoped AlGaN layer.
The method of claim 4, further comprising [[:]] between the first strain engineered stack and the heterojunction stack, forming a nonconducting GaN layer.
Claim 10 The method of claim [[9]] 1, wherein said processing the heterojunction stack comprises: forming a source for the A l GaN/GaN HFET that contacts the undoped GaN layer; forming a drain for the A l GaN/GaN HFET that contacts the undoped GaN layer; forming a gate for the A l GaN/GaN HFET that contacts the doped Al GaN layer; forming an anode for the A l GaN/GaN Schottky diode that contacts the doped A l GaN layer; and forming a cathode for the A l GaN/GaN Schottky diode that contacts the undoped GaN layer.
An epitaxial structure, comprising: a substrate; a heterojunction stack over a first side of the substrate, the heterojunction stack comprising an undoped GaN layer over the first side of the substrate and a doped A l GaN layer on the undoped GaN layer; and 6 a GaN light emitting diode stack over a second side of the substrate, the GaN light emitting diode stack comprising an n-type GaN layer over the second side of the substrate, a GaN/InGaN MQW structure over the n-type GaN layer, a p-type AlGaN layer over the ntyp-e GaN/InGaN MQW structure, and a p-type GaN layer over the p-type AlGaN layer, wherein the heterojunction stack comprises one or more devices coupled to the light emitting diode stack, the one or more devices including one or more of an AlGaN/GaN heterojunction field effect transistor (HFET) and an AlGaN/GaN Schottky diode, wherein at least one of the devices is connected to the GaN light emitting diode stack.
The structure of claim 11, wherein the substrate is a silicon substrate, the structure further comprising: a first strain engineered stack over the first side of the substrate, the first strain engineered stack accommodating the strain between silicon and GaN, the heterojunction stack being over the first strain engineered stack; and a second strain engineered stack over the second side of the substrate, the GaN light emitting diode stack being over the second strain engineered stack wherein: the first strain engineered stack comprises: a first GaN layer over the first side of the substrate; and a first aluminum nitride (AlN) strain-releasing layer on the first GaN layer; and the second strain engineered stack comprises: 7 a second GaN layer over the second side of the substrate; and a second A l N strain-releasing layer on the second GaN layer.
The structure of claim 11, wherein the substrate comprises a sapphire substrate, the structure further comprising: a first GaN or A l N nucleation layer over the first side of the substrate; an 8 a non-conducting GaN layer over the first GaN or A lN nucleation layer, the heterojunction stack being over the non- conducting GaN layer; and a second GaN or A l N nucleation layer over the second side of the substrate, the GaN light emitting diode stack being over the second GaN or AlN nucleation layer.
The structure of claim 11, wherein the substrate comprises a SiC substrate, the [[15]] structure further comprising: a first AlN or AlGaN nucleation layer over the first side of the substrate; a non-conducting GaN layer over the first AlN or AlGaN nucleation layer, the heterojunction stack being over the non- conducting GaN layer; and a second AlN or AlGaN nucleation layer over the second side of the substrate, the GaN light emitting diode stack being over the second AlN or AlGaN nucleation layer.
The structure of claim 11, wherein the substrate comprises a GaN substrate, the structure further comprising[[:]] a non-conducting GaN layer over the first side of the substrate, the heterojunction stack being over the non- conducting GaN layer.
canceled
The structure of claim [[13]] 11, further comprising: a first undoped A l N buffer layer over the first side of the substrate; an a first undoped A l GaN layer over the first undoped A l N buffer layer, the first strain engineered stack being over the first undoped A l GaN layer; a second undoped A l N buffer layer over the second side of the substrate; and a second undoped A l GaN layer over the second undoped A lN buffer layer, the GaN light emitting diode stack being over the second undoped A l GaN layer; and a non-conducting GaN layer over the first strain engineered stack, the heterojunction stack being over the fi±ot non-conducting GaN layer.
canceled
canceled
Layer stacks claimed or described, ordered top of device to substrate.
GaN light emitting diode stack
AlGaN/GaN heterojunction field effect transistor (HFET)
Materials described outside the worked examples.
gallium nitride
GaN
aluminum gallium nitride
AlGaN
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,054,232Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional view of an epitaxial structure for integrating gallium nitride (GaN) light emitting diodes (LEDs) with aluminum gallium 5 nitride(A …
FIG. 2 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a sapphire substrate;
FIG. 3 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a silicon carbon (SiC) substrate; 10
FIG. 4 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a GaN substrate; Fig. 5 shows a cross-sectional …
FIG. 7 N 0 0 (57) Abstract: A method for fabricating an epitaxial structure includes providing a substrate (102, 202, 302, 402) and a heterojunc-tion stack on …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Amendments to the Claims: Please amend the claims as follows: Claim 1 A method for fabricating an epitaxial structure, comprising: providing a substrate and a heterojunction stack over a first side of the substrate, the heterojunction stack comprising an undoped gallium nitride (GaN) layer over the first side of the substrate and a doped aluminum gallium nitride (AlGaN) layer on the undoped GaN layer; and forming a GaN light emitting diode stack over a second side of the substrate, the GaN light emitting diode stack comprising an n- type GaN layer over the second side of the substrate, a GaN/indium gallium nitride (InGaN) multiple quantum well (MQW) structure over the n-type GaN layer, a p-type AlGaN layer over the n-epe GaN/InGaN MQW structure, and a p-type GaN layer over the p-type AlGaN layer, and processing the heterojunction stack to form one or more devices coupled to the light emitting diode stack, the one or more devices are chosen from the group consisting of an AlGaN/GaN heterojunction field effect transistor (HFET) and an AlGaN/GaN Schottky diode.
The method of claim 1, wherein: the substrate is a silicon substrate; providing the substrate and the heterojunction stack over the first side of the substrate comprises: 3 forming a first strain engineered stack over the first side of the substrate, the first strain engineered stack accommodating strain between silicon and GaN; and forming the heterojunction stack over the first strain engineered stack; and the method further comprises forming a second strain engineered stack over the second side of the substrate, the GaN light emitting diode stack being formed over the second strain engineered stack, wherein: the first strain engineered stack comprises: a first G aN layer over the first side of the substrate; and a first aluminum nitride (AlN) strain-releasing layer on the first GaN layer; and the second strain engineered stack comprises: a second GaN layer over the second side of the substrate; and a second AlN strain-releasing layer on the second GaN layer.
The method of claim 1, wherein the substrate comprises a sapphire substrate, the method further comprising: forming a first GaN or AlN nucleation layer over the first side of the substrate; and forming a non-conducting GaN layer over the GaN or AlN nucleation layer, wherein the heterojunction stack is formed over the non-conducting GaN layer; and forming a second GaN or AlN nucleation layer over the second side of the substrate, wherein the GaN light emitting diode stack is formed over the second GaN or AlN buffer layer.
The method of claim 1, wherein the substrate comprises a silicon carbon (SiC) substrate, the method further comprising: forming a first AlN or AlGaN nucleation layer over the first side of the substrate; forming a non-conducting GaN layer over the first AlN or AlGaN buffer layer, the heterojunction stack being formed over the non- conducting GaN layer; and 5 forming a second A l N or A l GaN nucleation layer over the second side of the substrate, the GaN light emitting diode stack being formed over the second A l N or A l GaN nucleation layer.
The method of claim 1, wherein the substrate comprises a GaN substrate, the method further comprising [[:]] forming a non-conducting GaN layer over the first side of the substrate, the heterojunction stack being formed over the non-conducting GaN layer.
The structure of claim 1 [[9]], wherein the heterojunction stack comprises: a source for the AlGaN/GaN HFET that contacts the undoped GaN layer; 9 a drain for the AlGaN/GaN HFET that contacts the undoped GaN layer; a gate for the A l GaN/GaN HFET that contacts the doped A l GaN layer; an anode for the A l GaN/GaN Schottky diode that contacts the doped AlGaN layer; and a cathode for the A l GaN/GaN Schottky diode that contacts the undoped GaN layer.
Claim 4 The method of claim [[3]] 2, further comprising: forming a first undoped AlN buffer layer over the first side of the substrate; and forming a first undoped AlGaN layer over the first undoped AlN buffer layer, wherein the first strain engineered stack is formed over the first undoped AlGaN layer; 4 forming a second undoped A l N buffer layer over the second side of the substrate; and forming a second undoped AlGaN layer over the second undoped Al N buffer layer, wherein the second strain engineered stack is formed over the second undoped AlGaN layer.
The method of claim 4, further comprising [[:]] between the first strain engineered stack and the heterojunction stack, forming a nonconducting GaN layer.
Claim 10 The method of claim [[9]] 1, wherein said processing the heterojunction stack comprises: forming a source for the A l GaN/GaN HFET that contacts the undoped GaN layer; forming a drain for the A l GaN/GaN HFET that contacts the undoped GaN layer; forming a gate for the A l GaN/GaN HFET that contacts the doped Al GaN layer; forming an anode for the A l GaN/GaN Schottky diode that contacts the doped A l GaN layer; and forming a cathode for the A l GaN/GaN Schottky diode that contacts the undoped GaN layer.
An epitaxial structure, comprising: a substrate; a heterojunction stack over a first side of the substrate, the heterojunction stack comprising an undoped GaN layer over the first side of the substrate and a doped A l GaN layer on the undoped GaN layer; and 6 a GaN light emitting diode stack over a second side of the substrate, the GaN light emitting diode stack comprising an n-type GaN layer over the second side of the substrate, a GaN/InGaN MQW structure over the n-type GaN layer, a p-type AlGaN layer over the ntyp-e GaN/InGaN MQW structure, and a p-type GaN layer over the p-type AlGaN layer, wherein the heterojunction stack comprises one or more devices coupled to the light emitting diode stack, the one or more devices including one or more of an AlGaN/GaN heterojunction field effect transistor (HFET) and an AlGaN/GaN Schottky diode, wherein at least one of the devices is connected to the GaN light emitting diode stack.
The structure of claim 11, wherein the substrate is a silicon substrate, the structure further comprising: a first strain engineered stack over the first side of the substrate, the first strain engineered stack accommodating the strain between silicon and GaN, the heterojunction stack being over the first strain engineered stack; and a second strain engineered stack over the second side of the substrate, the GaN light emitting diode stack being over the second strain engineered stack wherein: the first strain engineered stack comprises: a first GaN layer over the first side of the substrate; and a first aluminum nitride (AlN) strain-releasing layer on the first GaN layer; and the second strain engineered stack comprises: 7 a second GaN layer over the second side of the substrate; and a second A l N strain-releasing layer on the second GaN layer.
The structure of claim 11, wherein the substrate comprises a sapphire substrate, the structure further comprising: a first GaN or A l N nucleation layer over the first side of the substrate; an 8 a non-conducting GaN layer over the first GaN or A lN nucleation layer, the heterojunction stack being over the non- conducting GaN layer; and a second GaN or A l N nucleation layer over the second side of the substrate, the GaN light emitting diode stack being over the second GaN or AlN nucleation layer.
The structure of claim 11, wherein the substrate comprises a SiC substrate, the [[15]] structure further comprising: a first AlN or AlGaN nucleation layer over the first side of the substrate; a non-conducting GaN layer over the first AlN or AlGaN nucleation layer, the heterojunction stack being over the non- conducting GaN layer; and a second AlN or AlGaN nucleation layer over the second side of the substrate, the GaN light emitting diode stack being over the second AlN or AlGaN nucleation layer.
The structure of claim 11, wherein the substrate comprises a GaN substrate, the structure further comprising[[:]] a non-conducting GaN layer over the first side of the substrate, the heterojunction stack being over the non- conducting GaN layer.
canceled
The structure of claim [[13]] 11, further comprising: a first undoped A l N buffer layer over the first side of the substrate; an a first undoped A l GaN layer over the first undoped A l N buffer layer, the first strain engineered stack being over the first undoped A l GaN layer; a second undoped A l N buffer layer over the second side of the substrate; and a second undoped A l GaN layer over the second undoped A lN buffer layer, the GaN light emitting diode stack being over the second undoped A l GaN layer; and a non-conducting GaN layer over the first strain engineered stack, the heterojunction stack being over the fi±ot non-conducting GaN layer.
canceled
canceled
Layer stacks claimed or described, ordered top of device to substrate.
GaN light emitting diode stack
AlGaN/GaN heterojunction field effect transistor (HFET)
Materials described outside the worked examples.
gallium nitride
GaN
aluminum gallium nitride
AlGaN
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,054,232Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional view of an epitaxial structure for integrating gallium nitride (GaN) light emitting diodes (LEDs) with aluminum gallium 5 nitride(A …
FIG. 2 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a sapphire substrate;
FIG. 3 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a silicon carbon (SiC) substrate; 10
FIG. 4 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a GaN substrate; Fig. 5 shows a cross-sectional …
FIG. 7 N 0 0 (57) Abstract: A method for fabricating an epitaxial structure includes providing a substrate (102, 202, 302, 402) and a heterojunc-tion stack on …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Amendments to the Claims: Please amend the claims as follows: Claim 1 A method for fabricating an epitaxial structure, comprising: providing a substrate and a heterojunction stack over a first side of the substrate, the heterojunction stack comprising an undoped gallium nitride (GaN) layer over the first side of the substrate and a doped aluminum gallium nitride (AlGaN) layer on the undoped GaN layer; and forming a GaN light emitting diode stack over a second side of the substrate, the GaN light emitting diode stack comprising an n- type GaN layer over the second side of the substrate, a GaN/indium gallium nitride (InGaN) multiple quantum well (MQW) structure over the n-type GaN layer, a p-type AlGaN layer over the n-epe GaN/InGaN MQW structure, and a p-type GaN layer over the p-type AlGaN layer, and processing the heterojunction stack to form one or more devices coupled to the light emitting diode stack, the one or more devices are chosen from the group consisting of an AlGaN/GaN heterojunction field effect transistor (HFET) and an AlGaN/GaN Schottky diode.
The method of claim 1, wherein: the substrate is a silicon substrate; providing the substrate and the heterojunction stack over the first side of the substrate comprises: 3 forming a first strain engineered stack over the first side of the substrate, the first strain engineered stack accommodating strain between silicon and GaN; and forming the heterojunction stack over the first strain engineered stack; and the method further comprises forming a second strain engineered stack over the second side of the substrate, the GaN light emitting diode stack being formed over the second strain engineered stack, wherein: the first strain engineered stack comprises: a first G aN layer over the first side of the substrate; and a first aluminum nitride (AlN) strain-releasing layer on the first GaN layer; and the second strain engineered stack comprises: a second GaN layer over the second side of the substrate; and a second AlN strain-releasing layer on the second GaN layer.
The method of claim 1, wherein the substrate comprises a sapphire substrate, the method further comprising: forming a first GaN or AlN nucleation layer over the first side of the substrate; and forming a non-conducting GaN layer over the GaN or AlN nucleation layer, wherein the heterojunction stack is formed over the non-conducting GaN layer; and forming a second GaN or AlN nucleation layer over the second side of the substrate, wherein the GaN light emitting diode stack is formed over the second GaN or AlN buffer layer.
The method of claim 1, wherein the substrate comprises a silicon carbon (SiC) substrate, the method further comprising: forming a first AlN or AlGaN nucleation layer over the first side of the substrate; forming a non-conducting GaN layer over the first AlN or AlGaN buffer layer, the heterojunction stack being formed over the non- conducting GaN layer; and 5 forming a second A l N or A l GaN nucleation layer over the second side of the substrate, the GaN light emitting diode stack being formed over the second A l N or A l GaN nucleation layer.
The method of claim 1, wherein the substrate comprises a GaN substrate, the method further comprising [[:]] forming a non-conducting GaN layer over the first side of the substrate, the heterojunction stack being formed over the non-conducting GaN layer.
The structure of claim 1 [[9]], wherein the heterojunction stack comprises: a source for the AlGaN/GaN HFET that contacts the undoped GaN layer; 9 a drain for the AlGaN/GaN HFET that contacts the undoped GaN layer; a gate for the A l GaN/GaN HFET that contacts the doped A l GaN layer; an anode for the A l GaN/GaN Schottky diode that contacts the doped AlGaN layer; and a cathode for the A l GaN/GaN Schottky diode that contacts the undoped GaN layer.
Claim 4 The method of claim [[3]] 2, further comprising: forming a first undoped AlN buffer layer over the first side of the substrate; and forming a first undoped AlGaN layer over the first undoped AlN buffer layer, wherein the first strain engineered stack is formed over the first undoped AlGaN layer; 4 forming a second undoped A l N buffer layer over the second side of the substrate; and forming a second undoped AlGaN layer over the second undoped Al N buffer layer, wherein the second strain engineered stack is formed over the second undoped AlGaN layer.
The method of claim 4, further comprising [[:]] between the first strain engineered stack and the heterojunction stack, forming a nonconducting GaN layer.
Claim 10 The method of claim [[9]] 1, wherein said processing the heterojunction stack comprises: forming a source for the A l GaN/GaN HFET that contacts the undoped GaN layer; forming a drain for the A l GaN/GaN HFET that contacts the undoped GaN layer; forming a gate for the A l GaN/GaN HFET that contacts the doped Al GaN layer; forming an anode for the A l GaN/GaN Schottky diode that contacts the doped A l GaN layer; and forming a cathode for the A l GaN/GaN Schottky diode that contacts the undoped GaN layer.
An epitaxial structure, comprising: a substrate; a heterojunction stack over a first side of the substrate, the heterojunction stack comprising an undoped GaN layer over the first side of the substrate and a doped A l GaN layer on the undoped GaN layer; and 6 a GaN light emitting diode stack over a second side of the substrate, the GaN light emitting diode stack comprising an n-type GaN layer over the second side of the substrate, a GaN/InGaN MQW structure over the n-type GaN layer, a p-type AlGaN layer over the ntyp-e GaN/InGaN MQW structure, and a p-type GaN layer over the p-type AlGaN layer, wherein the heterojunction stack comprises one or more devices coupled to the light emitting diode stack, the one or more devices including one or more of an AlGaN/GaN heterojunction field effect transistor (HFET) and an AlGaN/GaN Schottky diode, wherein at least one of the devices is connected to the GaN light emitting diode stack.
The structure of claim 11, wherein the substrate is a silicon substrate, the structure further comprising: a first strain engineered stack over the first side of the substrate, the first strain engineered stack accommodating the strain between silicon and GaN, the heterojunction stack being over the first strain engineered stack; and a second strain engineered stack over the second side of the substrate, the GaN light emitting diode stack being over the second strain engineered stack wherein: the first strain engineered stack comprises: a first GaN layer over the first side of the substrate; and a first aluminum nitride (AlN) strain-releasing layer on the first GaN layer; and the second strain engineered stack comprises: 7 a second GaN layer over the second side of the substrate; and a second A l N strain-releasing layer on the second GaN layer.
The structure of claim 11, wherein the substrate comprises a sapphire substrate, the structure further comprising: a first GaN or A l N nucleation layer over the first side of the substrate; an 8 a non-conducting GaN layer over the first GaN or A lN nucleation layer, the heterojunction stack being over the non- conducting GaN layer; and a second GaN or A l N nucleation layer over the second side of the substrate, the GaN light emitting diode stack being over the second GaN or AlN nucleation layer.
The structure of claim 11, wherein the substrate comprises a SiC substrate, the [[15]] structure further comprising: a first AlN or AlGaN nucleation layer over the first side of the substrate; a non-conducting GaN layer over the first AlN or AlGaN nucleation layer, the heterojunction stack being over the non- conducting GaN layer; and a second AlN or AlGaN nucleation layer over the second side of the substrate, the GaN light emitting diode stack being over the second AlN or AlGaN nucleation layer.
The structure of claim 11, wherein the substrate comprises a GaN substrate, the structure further comprising[[:]] a non-conducting GaN layer over the first side of the substrate, the heterojunction stack being over the non- conducting GaN layer.
canceled
The structure of claim [[13]] 11, further comprising: a first undoped A l N buffer layer over the first side of the substrate; an a first undoped A l GaN layer over the first undoped A l N buffer layer, the first strain engineered stack being over the first undoped A l GaN layer; a second undoped A l N buffer layer over the second side of the substrate; and a second undoped A l GaN layer over the second undoped A lN buffer layer, the GaN light emitting diode stack being over the second undoped A l GaN layer; and a non-conducting GaN layer over the first strain engineered stack, the heterojunction stack being over the fi±ot non-conducting GaN layer.
canceled
canceled
Layer stacks claimed or described, ordered top of device to substrate.
GaN light emitting diode stack
AlGaN/GaN heterojunction field effect transistor (HFET)
Materials described outside the worked examples.
gallium nitride
GaN
aluminum gallium nitride
AlGaN
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,054,232Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a cross-sectional view of an epitaxial structure for integrating gallium nitride (GaN) light emitting diodes (LEDs) with aluminum gallium 5 nitride(A …
FIG. 2 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a sapphire substrate;
FIG. 3 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a silicon carbon (SiC) substrate; 10
FIG. 4 is a cross-sectional view of an epitaxial structure for integrating GaN LEDs with A l GaN/GaN devices on a GaN substrate; Fig. 5 shows a cross-sectional …
FIG. 7 N 0 0 (57) Abstract: A method for fabricating an epitaxial structure includes providing a substrate (102, 202, 302, 402) and a heterojunc-tion stack on …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
Amendments to the Claims: Please amend the claims as follows: Claim 1 A method for fabricating an epitaxial structure, comprising: providing a substrate and a heterojunction stack over a first side of the substrate, the heterojunction stack comprising an undoped gallium nitride (GaN) layer over the first side of the substrate and a doped aluminum gallium nitride (AlGaN) layer on the undoped GaN layer; and forming a GaN light emitting diode stack over a second side of the substrate, the GaN light emitting diode stack comprising an n- type GaN layer over the second side of the substrate, a GaN/indium gallium nitride (InGaN) multiple quantum well (MQW) structure over the n-type GaN layer, a p-type AlGaN layer over the n-epe GaN/InGaN MQW structure, and a p-type GaN layer over the p-type AlGaN layer, and processing the heterojunction stack to form one or more devices coupled to the light emitting diode stack, the one or more devices are chosen from the group consisting of an AlGaN/GaN heterojunction field effect transistor (HFET) and an AlGaN/GaN Schottky diode.
The method of claim 1, wherein: the substrate is a silicon substrate; providing the substrate and the heterojunction stack over the first side of the substrate comprises: 3 forming a first strain engineered stack over the first side of the substrate, the first strain engineered stack accommodating strain between silicon and GaN; and forming the heterojunction stack over the first strain engineered stack; and the method further comprises forming a second strain engineered stack over the second side of the substrate, the GaN light emitting diode stack being formed over the second strain engineered stack, wherein: the first strain engineered stack comprises: a first G aN layer over the first side of the substrate; and a first aluminum nitride (AlN) strain-releasing layer on the first GaN layer; and the second strain engineered stack comprises: a second GaN layer over the second side of the substrate; and a second AlN strain-releasing layer on the second GaN layer.
The method of claim 1, wherein the substrate comprises a sapphire substrate, the method further comprising: forming a first GaN or AlN nucleation layer over the first side of the substrate; and forming a non-conducting GaN layer over the GaN or AlN nucleation layer, wherein the heterojunction stack is formed over the non-conducting GaN layer; and forming a second GaN or AlN nucleation layer over the second side of the substrate, wherein the GaN light emitting diode stack is formed over the second GaN or AlN buffer layer.
The method of claim 1, wherein the substrate comprises a silicon carbon (SiC) substrate, the method further comprising: forming a first AlN or AlGaN nucleation layer over the first side of the substrate; forming a non-conducting GaN layer over the first AlN or AlGaN buffer layer, the heterojunction stack being formed over the non- conducting GaN layer; and 5 forming a second A l N or A l GaN nucleation layer over the second side of the substrate, the GaN light emitting diode stack being formed over the second A l N or A l GaN nucleation layer.
The method of claim 1, wherein the substrate comprises a GaN substrate, the method further comprising [[:]] forming a non-conducting GaN layer over the first side of the substrate, the heterojunction stack being formed over the non-conducting GaN layer.
The structure of claim 1 [[9]], wherein the heterojunction stack comprises: a source for the AlGaN/GaN HFET that contacts the undoped GaN layer; 9 a drain for the AlGaN/GaN HFET that contacts the undoped GaN layer; a gate for the A l GaN/GaN HFET that contacts the doped A l GaN layer; an anode for the A l GaN/GaN Schottky diode that contacts the doped AlGaN layer; and a cathode for the A l GaN/GaN Schottky diode that contacts the undoped GaN layer.
Claim 4 The method of claim [[3]] 2, further comprising: forming a first undoped AlN buffer layer over the first side of the substrate; and forming a first undoped AlGaN layer over the first undoped AlN buffer layer, wherein the first strain engineered stack is formed over the first undoped AlGaN layer; 4 forming a second undoped A l N buffer layer over the second side of the substrate; and forming a second undoped AlGaN layer over the second undoped Al N buffer layer, wherein the second strain engineered stack is formed over the second undoped AlGaN layer.
The method of claim 4, further comprising [[:]] between the first strain engineered stack and the heterojunction stack, forming a nonconducting GaN layer.
Claim 10 The method of claim [[9]] 1, wherein said processing the heterojunction stack comprises: forming a source for the A l GaN/GaN HFET that contacts the undoped GaN layer; forming a drain for the A l GaN/GaN HFET that contacts the undoped GaN layer; forming a gate for the A l GaN/GaN HFET that contacts the doped Al GaN layer; forming an anode for the A l GaN/GaN Schottky diode that contacts the doped A l GaN layer; and forming a cathode for the A l GaN/GaN Schottky diode that contacts the undoped GaN layer.
An epitaxial structure, comprising: a substrate; a heterojunction stack over a first side of the substrate, the heterojunction stack comprising an undoped GaN layer over the first side of the substrate and a doped A l GaN layer on the undoped GaN layer; and 6 a GaN light emitting diode stack over a second side of the substrate, the GaN light emitting diode stack comprising an n-type GaN layer over the second side of the substrate, a GaN/InGaN MQW structure over the n-type GaN layer, a p-type AlGaN layer over the ntyp-e GaN/InGaN MQW structure, and a p-type GaN layer over the p-type AlGaN layer, wherein the heterojunction stack comprises one or more devices coupled to the light emitting diode stack, the one or more devices including one or more of an AlGaN/GaN heterojunction field effect transistor (HFET) and an AlGaN/GaN Schottky diode, wherein at least one of the devices is connected to the GaN light emitting diode stack.
The structure of claim 11, wherein the substrate is a silicon substrate, the structure further comprising: a first strain engineered stack over the first side of the substrate, the first strain engineered stack accommodating the strain between silicon and GaN, the heterojunction stack being over the first strain engineered stack; and a second strain engineered stack over the second side of the substrate, the GaN light emitting diode stack being over the second strain engineered stack wherein: the first strain engineered stack comprises: a first GaN layer over the first side of the substrate; and a first aluminum nitride (AlN) strain-releasing layer on the first GaN layer; and the second strain engineered stack comprises: 7 a second GaN layer over the second side of the substrate; and a second A l N strain-releasing layer on the second GaN layer.
The structure of claim 11, wherein the substrate comprises a sapphire substrate, the structure further comprising: a first GaN or A l N nucleation layer over the first side of the substrate; an 8 a non-conducting GaN layer over the first GaN or A lN nucleation layer, the heterojunction stack being over the non- conducting GaN layer; and a second GaN or A l N nucleation layer over the second side of the substrate, the GaN light emitting diode stack being over the second GaN or AlN nucleation layer.
The structure of claim 11, wherein the substrate comprises a SiC substrate, the [[15]] structure further comprising: a first AlN or AlGaN nucleation layer over the first side of the substrate; a non-conducting GaN layer over the first AlN or AlGaN nucleation layer, the heterojunction stack being over the non- conducting GaN layer; and a second AlN or AlGaN nucleation layer over the second side of the substrate, the GaN light emitting diode stack being over the second AlN or AlGaN nucleation layer.
The structure of claim 11, wherein the substrate comprises a GaN substrate, the structure further comprising[[:]] a non-conducting GaN layer over the first side of the substrate, the heterojunction stack being over the non- conducting GaN layer.
canceled
The structure of claim [[13]] 11, further comprising: a first undoped A l N buffer layer over the first side of the substrate; an a first undoped A l GaN layer over the first undoped A l N buffer layer, the first strain engineered stack being over the first undoped A l GaN layer; a second undoped A l N buffer layer over the second side of the substrate; and a second undoped A l GaN layer over the second undoped A lN buffer layer, the GaN light emitting diode stack being over the second undoped A l GaN layer; and a non-conducting GaN layer over the first strain engineered stack, the heterojunction stack being over the fi±ot non-conducting GaN layer.
canceled
canceled
Layer stacks claimed or described, ordered top of device to substrate.
GaN light emitting diode stack
AlGaN/GaN heterojunction field effect transistor (HFET)
Materials described outside the worked examples.
gallium nitride
GaN
aluminum gallium nitride
AlGaN
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