Patent
US 10,196,272APPARATUS AND METHOD OF MANUFACTURING GRAPHENE FILM
Wan Soo KIM, Jung Hee Han, Byung Hee Hong
US
Copyright © 2026 Matter42. All rights reserved.
Patent details
Patent
US 10,196,272Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C, after the process of etching and removing the metal catalyst base 1 from the lower surface of the graphene film 2, there may be a void defect area 2a …
FIG. 2A. The wrinkles of the lamination structure may be removed by a flattening process to be explained with reference to FIG s. 2B and 2C. [0055] Then, as …
FIG. 3 illustrates a wrinkle flattening device and a lamination apparatus according to one embodiment of the present invention; [0037] FIG s. 4A and 4 B …
FIG. 4A and 4B illustrate the wrinkle flattening device and the lamination apparatus according to another embodiment of the present invention, respectively. …
FIG. 5 illustrates a wrinkle flattening device and a lamination apparatus according to another embodiment of the present invention; [0039]
FIG. 6 illustrates a wrinkle flattening device and a lamination apparatus according to another embodiment of the present invention; and [0040]
FIG. 7 illustrates an apparatus of manufacturing the graphene film according to one embodiment of the present invention, which relates to a roll-to-roll method.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus for manufacturing a graphene film comprising: a wrinkle flattening device configured to flatten wrinkles in a lamination structure including a base substrate and a graphene film on the base substrate; a lamination roller facing the wrinkle flattening device and configured to simultaneously laminate a first substrate on the graphene film when the lamination structure is on the wrinkle flattening device and the wrinkle flattening device is flattening the wrinkles; and a support roller facing the lamination roller, the support roller being configured to support a lower surface of the wrinkle flattening device, wherein the wrinkle flattening device comprises: a porous member including a plurality of holes therein configured to apply a vacuum to substantially an entire lower surface of the base substrate, a support member configured to support the porous member, contacting a peripheral area of a lower surface of the porous member, a first hollow space between the support member and an entire remaining area of the lower surface of the porous member except for the peripheral area, the first hollow space being in communication with the plurality of holes in the porous member, and a vacuum suction hole in a lateral surface of the support member and in communication with the first hollow space; and wherein the porous member contacts the base substrate of the lamination structure, the wrinkle flattening device applies the vacuum to the base substrate through the porous member when the porous member is in contact with the base substrate, and the wrinkle flattening device is movable between the lamination roller and the support roller. Currently amended
The apparatus according to claim 1, wherein the wrinkle flattening device comprises a rotatable roller. Previously presented
The apparatus according to claim 1, further comprising: a first supply roller upstream from the wrinkle flattening device and the first lamination apparatus, configured to supply the lamination structure; a second supply roller upstream from the wrinkle flattening device and the first lamination apparatus, configured to supply the first substrate; an etching apparatus downstream from the wrinkle flattening device and the first lamination apparatus, configured to etch the base substrate; a third supply roller downstream from the etching apparatus, configured to supply a second substrate; a second lamination apparatus configured to laminate the second substrate supplied by the third supply roller on the graphene film; and a peeling roller at the rear of the etching apparatus, configured to peel the first substrate from the graphene film. Previously presented
The apparatus according to claim 1, wherein the porous member comprises a porous material. Previously presented
The apparatus according to claim 1, wherein a size of each of the plurality of holes in the porous member and an interval between the holes in the plurality of holes in the porous member are within a range appropriate for a wrinkle flattening process applied to the lamination structure. Previously presented
The apparatus according to claim 1, further comprising a vacuum pump connected to the vacuum suction hole. Previously presented
The apparatus according to claim 1, wherein the base substrate comprises a catalyst for forming the graphene film comprising at least one metal or alloy selected from Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V, Zr, brass, bronze, white brass, stainless steel, and a Ge-based material, and the first substrate comprises a material that is not damaged by an etchant used in a process of etching the base substrate. Previously presented
The apparatus according to claim 1, wherein the lamination roller moves while rotating. Previously presented
The apparatus according to claim 1, wherein the support roller is under the wrinkle flattening device. New
2-6. Canceled
Canceled
10-14. Canceled
Canceled
22-24. Canceled
Canceled
The apparatus according to claim [[22]] 1, wherein the lamination roller and the wrinkle flattening device simultaneously laminate the first substrate on the graphene film and flatten the wrinkles of the lamination structure as the wrinkle flattening device and the lamination structure move to a space between the lamination roller and the support roller. Currently amended
Layer stacks claimed or described, ordered top of device to substrate.
graphene film manufacturing apparatus
Materials described outside the worked examples.
graphene film
base substrate (metal catalyst)
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 C, after the process of etching and removing the metal catalyst base 1 from the lower surface of the graphene film 2, there may be a void defect area 2a …
Related documents with shared materials, methods, properties, or citations.
Patent details
Patent
US 10,196,272Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C, after the process of etching and removing the metal catalyst base 1 from the lower surface of the graphene film 2, there may be a void defect area 2a …
FIG. 2A. The wrinkles of the lamination structure may be removed by a flattening process to be explained with reference to FIG s. 2B and 2C. [0055] Then, as …
FIG. 3 illustrates a wrinkle flattening device and a lamination apparatus according to one embodiment of the present invention; [0037] FIG s. 4A and 4 B …
FIG. 4A and 4B illustrate the wrinkle flattening device and the lamination apparatus according to another embodiment of the present invention, respectively. …
FIG. 5 illustrates a wrinkle flattening device and a lamination apparatus according to another embodiment of the present invention; [0039]
FIG. 6 illustrates a wrinkle flattening device and a lamination apparatus according to another embodiment of the present invention; and [0040]
FIG. 7 illustrates an apparatus of manufacturing the graphene film according to one embodiment of the present invention, which relates to a roll-to-roll method.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus for manufacturing a graphene film comprising: a wrinkle flattening device configured to flatten wrinkles in a lamination structure including a base substrate and a graphene film on the base substrate; a lamination roller facing the wrinkle flattening device and configured to simultaneously laminate a first substrate on the graphene film when the lamination structure is on the wrinkle flattening device and the wrinkle flattening device is flattening the wrinkles; and a support roller facing the lamination roller, the support roller being configured to support a lower surface of the wrinkle flattening device, wherein the wrinkle flattening device comprises: a porous member including a plurality of holes therein configured to apply a vacuum to substantially an entire lower surface of the base substrate, a support member configured to support the porous member, contacting a peripheral area of a lower surface of the porous member, a first hollow space between the support member and an entire remaining area of the lower surface of the porous member except for the peripheral area, the first hollow space being in communication with the plurality of holes in the porous member, and a vacuum suction hole in a lateral surface of the support member and in communication with the first hollow space; and wherein the porous member contacts the base substrate of the lamination structure, the wrinkle flattening device applies the vacuum to the base substrate through the porous member when the porous member is in contact with the base substrate, and the wrinkle flattening device is movable between the lamination roller and the support roller. Currently amended
The apparatus according to claim 1, wherein the wrinkle flattening device comprises a rotatable roller. Previously presented
The apparatus according to claim 1, further comprising: a first supply roller upstream from the wrinkle flattening device and the first lamination apparatus, configured to supply the lamination structure; a second supply roller upstream from the wrinkle flattening device and the first lamination apparatus, configured to supply the first substrate; an etching apparatus downstream from the wrinkle flattening device and the first lamination apparatus, configured to etch the base substrate; a third supply roller downstream from the etching apparatus, configured to supply a second substrate; a second lamination apparatus configured to laminate the second substrate supplied by the third supply roller on the graphene film; and a peeling roller at the rear of the etching apparatus, configured to peel the first substrate from the graphene film. Previously presented
The apparatus according to claim 1, wherein the porous member comprises a porous material. Previously presented
The apparatus according to claim 1, wherein a size of each of the plurality of holes in the porous member and an interval between the holes in the plurality of holes in the porous member are within a range appropriate for a wrinkle flattening process applied to the lamination structure. Previously presented
The apparatus according to claim 1, further comprising a vacuum pump connected to the vacuum suction hole. Previously presented
The apparatus according to claim 1, wherein the base substrate comprises a catalyst for forming the graphene film comprising at least one metal or alloy selected from Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V, Zr, brass, bronze, white brass, stainless steel, and a Ge-based material, and the first substrate comprises a material that is not damaged by an etchant used in a process of etching the base substrate. Previously presented
The apparatus according to claim 1, wherein the lamination roller moves while rotating. Previously presented
The apparatus according to claim 1, wherein the support roller is under the wrinkle flattening device. New
2-6. Canceled
Canceled
10-14. Canceled
Canceled
22-24. Canceled
Canceled
The apparatus according to claim [[22]] 1, wherein the lamination roller and the wrinkle flattening device simultaneously laminate the first substrate on the graphene film and flatten the wrinkles of the lamination structure as the wrinkle flattening device and the lamination structure move to a space between the lamination roller and the support roller. Currently amended
Layer stacks claimed or described, ordered top of device to substrate.
graphene film manufacturing apparatus
Materials described outside the worked examples.
graphene film
base substrate (metal catalyst)
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 C, after the process of etching and removing the metal catalyst base 1 from the lower surface of the graphene film 2, there may be a void defect area 2a …
Related documents with shared materials, methods, properties, or citations.
Patent details
Patent
US 10,196,272Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C, after the process of etching and removing the metal catalyst base 1 from the lower surface of the graphene film 2, there may be a void defect area 2a …
FIG. 2A. The wrinkles of the lamination structure may be removed by a flattening process to be explained with reference to FIG s. 2B and 2C. [0055] Then, as …
FIG. 3 illustrates a wrinkle flattening device and a lamination apparatus according to one embodiment of the present invention; [0037] FIG s. 4A and 4 B …
FIG. 4A and 4B illustrate the wrinkle flattening device and the lamination apparatus according to another embodiment of the present invention, respectively. …
FIG. 5 illustrates a wrinkle flattening device and a lamination apparatus according to another embodiment of the present invention; [0039]
FIG. 6 illustrates a wrinkle flattening device and a lamination apparatus according to another embodiment of the present invention; and [0040]
FIG. 7 illustrates an apparatus of manufacturing the graphene film according to one embodiment of the present invention, which relates to a roll-to-roll method.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus for manufacturing a graphene film comprising: a wrinkle flattening device configured to flatten wrinkles in a lamination structure including a base substrate and a graphene film on the base substrate; a lamination roller facing the wrinkle flattening device and configured to simultaneously laminate a first substrate on the graphene film when the lamination structure is on the wrinkle flattening device and the wrinkle flattening device is flattening the wrinkles; and a support roller facing the lamination roller, the support roller being configured to support a lower surface of the wrinkle flattening device, wherein the wrinkle flattening device comprises: a porous member including a plurality of holes therein configured to apply a vacuum to substantially an entire lower surface of the base substrate, a support member configured to support the porous member, contacting a peripheral area of a lower surface of the porous member, a first hollow space between the support member and an entire remaining area of the lower surface of the porous member except for the peripheral area, the first hollow space being in communication with the plurality of holes in the porous member, and a vacuum suction hole in a lateral surface of the support member and in communication with the first hollow space; and wherein the porous member contacts the base substrate of the lamination structure, the wrinkle flattening device applies the vacuum to the base substrate through the porous member when the porous member is in contact with the base substrate, and the wrinkle flattening device is movable between the lamination roller and the support roller. Currently amended
The apparatus according to claim 1, wherein the wrinkle flattening device comprises a rotatable roller. Previously presented
The apparatus according to claim 1, further comprising: a first supply roller upstream from the wrinkle flattening device and the first lamination apparatus, configured to supply the lamination structure; a second supply roller upstream from the wrinkle flattening device and the first lamination apparatus, configured to supply the first substrate; an etching apparatus downstream from the wrinkle flattening device and the first lamination apparatus, configured to etch the base substrate; a third supply roller downstream from the etching apparatus, configured to supply a second substrate; a second lamination apparatus configured to laminate the second substrate supplied by the third supply roller on the graphene film; and a peeling roller at the rear of the etching apparatus, configured to peel the first substrate from the graphene film. Previously presented
The apparatus according to claim 1, wherein the porous member comprises a porous material. Previously presented
The apparatus according to claim 1, wherein a size of each of the plurality of holes in the porous member and an interval between the holes in the plurality of holes in the porous member are within a range appropriate for a wrinkle flattening process applied to the lamination structure. Previously presented
The apparatus according to claim 1, further comprising a vacuum pump connected to the vacuum suction hole. Previously presented
The apparatus according to claim 1, wherein the base substrate comprises a catalyst for forming the graphene film comprising at least one metal or alloy selected from Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V, Zr, brass, bronze, white brass, stainless steel, and a Ge-based material, and the first substrate comprises a material that is not damaged by an etchant used in a process of etching the base substrate. Previously presented
The apparatus according to claim 1, wherein the lamination roller moves while rotating. Previously presented
The apparatus according to claim 1, wherein the support roller is under the wrinkle flattening device. New
2-6. Canceled
Canceled
10-14. Canceled
Canceled
22-24. Canceled
Canceled
The apparatus according to claim [[22]] 1, wherein the lamination roller and the wrinkle flattening device simultaneously laminate the first substrate on the graphene film and flatten the wrinkles of the lamination structure as the wrinkle flattening device and the lamination structure move to a space between the lamination roller and the support roller. Currently amended
Layer stacks claimed or described, ordered top of device to substrate.
graphene film manufacturing apparatus
Materials described outside the worked examples.
graphene film
base substrate (metal catalyst)
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 C, after the process of etching and removing the metal catalyst base 1 from the lower surface of the graphene film 2, there may be a void defect area 2a …
Related documents with shared materials, methods, properties, or citations.
Patent details
Patent
US 10,196,272Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C, after the process of etching and removing the metal catalyst base 1 from the lower surface of the graphene film 2, there may be a void defect area 2a …
FIG. 2A. The wrinkles of the lamination structure may be removed by a flattening process to be explained with reference to FIG s. 2B and 2C. [0055] Then, as …
FIG. 3 illustrates a wrinkle flattening device and a lamination apparatus according to one embodiment of the present invention; [0037] FIG s. 4A and 4 B …
FIG. 4A and 4B illustrate the wrinkle flattening device and the lamination apparatus according to another embodiment of the present invention, respectively. …
FIG. 5 illustrates a wrinkle flattening device and a lamination apparatus according to another embodiment of the present invention; [0039]
FIG. 6 illustrates a wrinkle flattening device and a lamination apparatus according to another embodiment of the present invention; and [0040]
FIG. 7 illustrates an apparatus of manufacturing the graphene film according to one embodiment of the present invention, which relates to a roll-to-roll method.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus for manufacturing a graphene film comprising: a wrinkle flattening device configured to flatten wrinkles in a lamination structure including a base substrate and a graphene film on the base substrate; a lamination roller facing the wrinkle flattening device and configured to simultaneously laminate a first substrate on the graphene film when the lamination structure is on the wrinkle flattening device and the wrinkle flattening device is flattening the wrinkles; and a support roller facing the lamination roller, the support roller being configured to support a lower surface of the wrinkle flattening device, wherein the wrinkle flattening device comprises: a porous member including a plurality of holes therein configured to apply a vacuum to substantially an entire lower surface of the base substrate, a support member configured to support the porous member, contacting a peripheral area of a lower surface of the porous member, a first hollow space between the support member and an entire remaining area of the lower surface of the porous member except for the peripheral area, the first hollow space being in communication with the plurality of holes in the porous member, and a vacuum suction hole in a lateral surface of the support member and in communication with the first hollow space; and wherein the porous member contacts the base substrate of the lamination structure, the wrinkle flattening device applies the vacuum to the base substrate through the porous member when the porous member is in contact with the base substrate, and the wrinkle flattening device is movable between the lamination roller and the support roller. Currently amended
The apparatus according to claim 1, wherein the wrinkle flattening device comprises a rotatable roller. Previously presented
The apparatus according to claim 1, further comprising: a first supply roller upstream from the wrinkle flattening device and the first lamination apparatus, configured to supply the lamination structure; a second supply roller upstream from the wrinkle flattening device and the first lamination apparatus, configured to supply the first substrate; an etching apparatus downstream from the wrinkle flattening device and the first lamination apparatus, configured to etch the base substrate; a third supply roller downstream from the etching apparatus, configured to supply a second substrate; a second lamination apparatus configured to laminate the second substrate supplied by the third supply roller on the graphene film; and a peeling roller at the rear of the etching apparatus, configured to peel the first substrate from the graphene film. Previously presented
The apparatus according to claim 1, wherein the porous member comprises a porous material. Previously presented
The apparatus according to claim 1, wherein a size of each of the plurality of holes in the porous member and an interval between the holes in the plurality of holes in the porous member are within a range appropriate for a wrinkle flattening process applied to the lamination structure. Previously presented
The apparatus according to claim 1, further comprising a vacuum pump connected to the vacuum suction hole. Previously presented
The apparatus according to claim 1, wherein the base substrate comprises a catalyst for forming the graphene film comprising at least one metal or alloy selected from Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V, Zr, brass, bronze, white brass, stainless steel, and a Ge-based material, and the first substrate comprises a material that is not damaged by an etchant used in a process of etching the base substrate. Previously presented
The apparatus according to claim 1, wherein the lamination roller moves while rotating. Previously presented
The apparatus according to claim 1, wherein the support roller is under the wrinkle flattening device. New
2-6. Canceled
Canceled
10-14. Canceled
Canceled
22-24. Canceled
Canceled
The apparatus according to claim [[22]] 1, wherein the lamination roller and the wrinkle flattening device simultaneously laminate the first substrate on the graphene film and flatten the wrinkles of the lamination structure as the wrinkle flattening device and the lamination structure move to a space between the lamination roller and the support roller. Currently amended
Layer stacks claimed or described, ordered top of device to substrate.
graphene film manufacturing apparatus
Materials described outside the worked examples.
graphene film
base substrate (metal catalyst)
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 C, after the process of etching and removing the metal catalyst base 1 from the lower surface of the graphene film 2, there may be a void defect area 2a …
Related documents with shared materials, methods, properties, or citations.
porous material
ceramic
metal or alloy catalyst selected from Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V, Zr, brass, bronze, white brass, stainless steel, and Ge-based material
porous material
ceramic
metal or alloy catalyst selected from Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V, Zr, brass, bronze, white brass, stainless steel, and Ge-based material
porous material
ceramic
metal or alloy catalyst selected from Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V, Zr, brass, bronze, white brass, stainless steel, and Ge-based material
porous material
ceramic
metal or alloy catalyst selected from Ni, Co, Fe, Pt, Au, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, U, V, Zr, brass, bronze, white brass, stainless steel, and Ge-based material