Patent
US 10,553,762n-type semiconductor layer
p-type semiconductor layer
active layer
Thickness | 1–15 nm | — |
Temperature | 500–750 °C | — |
Pressure | 300–600 Pa | — |
Pressure | ≤ 1 Pa | — |
n-type semiconductor layer
p-type semiconductor layer
active layer
Thickness | 1–15 nm | — |
Temperature | 500–750 °C | — |
Pressure | 300–600 Pa | — |
Pressure | ≤ 1 Pa | — |
n-type semiconductor layer
p-type semiconductor layer
active layer
Thickness | 1–15 nm | — |
Temperature | 500–750 °C | — |
Pressure | 300–600 Pa | — |
Pressure | ≤ 1 Pa | — |
n-type semiconductor layer
p-type semiconductor layer
active layer
Thickness | 1–15 nm | — |
Temperature | 500–750 °C | — |
Pressure | 300–600 Pa | — |
Pressure | ≤ 1 Pa | — |