Patent
US 9,242,865metal substrate
copper
Cu
plasma-forming gas (hydrogen and noble gas mixture)
noble gas (argon, krypton, xenon, or combination)
hydrocarbon
graphite electrode
glassy carbon electrode
carbon fiber electrode
organic polymer electrode embedded with electrically conductive particles
reactive carbon species
| 650–700 torr |
| — |
Pressure | 600–650 torr | — |
Pressure | 500–600 torr | — |
Thickness | 1000000–100000000 nm | — |
POROUS GRAPHENE MEMBER, METHOD FOR MANUFACTURING SAME, AND APPARATUS FOR MANUFACTURING SAME USING THE METHOD
metal substrate
copper
Cu
plasma-forming gas (hydrogen and noble gas mixture)
noble gas (argon, krypton, xenon, or combination)
hydrocarbon
graphite electrode
glassy carbon electrode
carbon fiber electrode
organic polymer electrode embedded with electrically conductive particles
reactive carbon species
| 650–700 torr |
| — |
Pressure | 600–650 torr | — |
Pressure | 500–600 torr | — |
Thickness | 1000000–100000000 nm | — |
POROUS GRAPHENE MEMBER, METHOD FOR MANUFACTURING SAME, AND APPARATUS FOR MANUFACTURING SAME USING THE METHOD
metal substrate
copper
Cu
plasma-forming gas (hydrogen and noble gas mixture)
noble gas (argon, krypton, xenon, or combination)
hydrocarbon
graphite electrode
glassy carbon electrode
carbon fiber electrode
organic polymer electrode embedded with electrically conductive particles
reactive carbon species
| 650–700 torr |
| — |
Pressure | 600–650 torr | — |
Pressure | 500–600 torr | — |
Thickness | 1000000–100000000 nm | — |
POROUS GRAPHENE MEMBER, METHOD FOR MANUFACTURING SAME, AND APPARATUS FOR MANUFACTURING SAME USING THE METHOD
metal substrate
copper
Cu
plasma-forming gas (hydrogen and noble gas mixture)
noble gas (argon, krypton, xenon, or combination)
hydrocarbon
graphite electrode
glassy carbon electrode
carbon fiber electrode
organic polymer electrode embedded with electrically conductive particles
reactive carbon species
| 650–700 torr |
| — |
Pressure | 600–650 torr | — |
Pressure | 500–600 torr | — |
Thickness | 1000000–100000000 nm | — |
POROUS GRAPHENE MEMBER, METHOD FOR MANUFACTURING SAME, AND APPARATUS FOR MANUFACTURING SAME USING THE METHOD