Patent
US 9,075,009aluminum oxide
Al₂O₃
| — |
Thickness | 100–500 nm | — |
Thickness | 100–300 nm | — |
Thickness | 200–800 nm | — |
Thickness | 400–450 nm | — |
Thickness | ≤ 10 nm | — |
aluminum oxide
Al₂O₃
| — |
Thickness | 100–500 nm | — |
Thickness | 100–300 nm | — |
Thickness | 200–800 nm | — |
Thickness | 400–450 nm | — |
Thickness | ≤ 10 nm | — |
aluminum oxide
Al₂O₃
| — |
Thickness | 100–500 nm | — |
Thickness | 100–300 nm | — |
Thickness | 200–800 nm | — |
Thickness | 400–450 nm | — |
Thickness | ≤ 10 nm | — |
aluminum oxide
Al₂O₃
| — |
Thickness | 100–500 nm | — |
Thickness | 100–300 nm | — |
Thickness | 200–800 nm | — |
Thickness | 400–450 nm | — |
Thickness | ≤ 10 nm | — |