Patent
US 9,437,372Process for Producing Graphene Foam Supercapacitor Electrode
Aruna Zhamu
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,437,372Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 (A) A flow chart illustrating various prior art processes of producing exfoliated graphite products (flexible graphite foils and expanded graphite flakes), …
FIG.2 Schematic of a conventional supercapacitor cell.
FIG.3 A possible mechanism of chemical linking between graphene oxide sheets that effectively increases the graphene sheet lateral dimensions.
FIG.4 (C) electrical conductivity data for the GO suspension-derived foam produced by the presently invented process and the hydrothermally reduced GO graphene …
FIG.5(A) The rm al conductivity values (vs. specific gravity values up to 1.02 SVG 14998474.01-11-2016.IK₁FKOP₅RXEAPX0.SPEC.20.15.1859.1599.1993.1657.svg 0.193 …
FIG.6 Ther m al conductivity values of graphene foam samples derived from GO and GF (graphene fluoride) as a function of the specific gravity.
FIG.7 Thermal conductivity values of graphene foam samples derived from GO and pristine graphene as a function of the f in al (maximum) heat treatment …
FIG.8(A) Inter-graphene plane spacing in graphene foam walls as measured by X-ray diffraction;
FIG.9 The electrode specific capacitance values of two series of supercapacitors (conventional and presently invented) plotted as a function of the electrode …
FIG. 10 Ragone plots (gravimetric and volumetric power density vs. energy density) of symmetric supercapacitor (EDLC) cells containing isolated nitrogen-doped …
FIG. 11 Ragone plots of lithium ion capacitor (LIC) cells containing pristine graphene sheets as the electrode active material and lithium salt-PC/DEC organic …
FIG. 12 The cell-level gravimetric and volumetric energy densities plotted over the achievable electrode thickness range of the RGO-based EDLC supercapacitors …
FIG. 13 The cell-level gravimetric energy densities plotted over the achievable active material proportion (active material weight/total cell weight) in a …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A process for producing a supercapacitor electrode, said process comprising: (a) preparing a graphene dispersion having multiple sheets of a starting graphene material dispersed in a liquid medium, and wherein said dispersion contains an optional blowing agent 5 having a blowing agent-to-graphene material weight ratio from 0/1.0 to 1.0/1.0; (b) dispensing and depositing said graphene dispersion onto a surface of a supporting substrate to for m a wet layer of graphene material, wherein said dispensing and depositing procedure includes subjecting said graphene dispersion to an orientation-inducing stress; (c) partially or completely removing said liquid medium from the wet layer of graphene 10 material to form a dried layer of graphene material; (d) heat treating the dried layer of graphene material at a first heat treatment temperature from 80 * C to 3,200 0 C at a desired heating rate sufficient to induce volatile gas molecules from said non-carbon elements or to activate said blowing agent for producing a layer of solid graphene foam, wherein said solid graphene foam is composed of multiple pores and 15 pore walls, and said pore walls contain a pristine graphene material having essentially zero % of non-carbon elements, or a non-pristine graphene material having 0.001% to 5% by weight of non-carbon elements, and wherein said solid graphene foam has a physical density from 0.01 to 1.7 SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.1.18.598.1882.712.1939.svg 0.19 0.38 Chemistry Black and white, a specific surface area from 50 to 3,300 SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.1.18.1555.1882.1662.1940.svg 0.193 0.357 Chemistry Black and white a thermal conductivity of at-least 200 W/mK per unit of specific gravity, and/or an electrical conductivity no less than 20 2,000 S/cm per unit of specific gravity; and (e) impregnating said multiple pores with a liquid or gel electrolyte to form a layer of preimpregnated solid graphene foam, which is subjected to a step of compressing or roll- pressing that reduces a pore size, improves orientation of graphene planes, and squeezes excess electrolyte out of said pre-impregnated solid graphene foam for for m ing said 25 supercapacitor electrode.
The process of claim 1, wherein said starting graphene material is selected from a pristine graphene or a non-pristine graphene material, having a content of non-carbon elements greater than 2% by weight, selected from graphene oxide, reduced graphene oxide, graphene fluoride, graphene chloride, graphene bromide, graphene iodide, hydrogenated graphene, 65 nitrogenated graphene, chemically f u nctionalized graphene, doped graphene, or a combination thereof.
The process of claim 1, further including a step of heat-treating the solid graphene foam at a second heat treatment temperature higher than said first heat treatment temperature, prior to step (e), for a length of time sufficient for obtaining a graphene foam wherein said pore walls contain stacked graphene planes having an inter-plane spacing d 002 from 0.3354 nm to 0.36 nm and a content of non-carbon elements less than 2% by weight.
The process of claim 1, wherein said graphene material contains pristine graphene and said dispersion contains a blowing agent having a blowing agent-to-pristine graphene weight ratio from 0.01/1.0 to 1.0/1.0.
The process of claim 1, wherein said blowing agent is a physical blowing agent, a chemical blowing agent, a mixture thereof, a dissolution-and-leaching agent, or a mechanically introduced blowing agent.
The process of claim 1, wherein said graphene material is selected from the group of nonpristine graphene materials consisting of graphene oxide, reduced graphene oxide, graphene fluoride, graphene chloride, graphene bromide, graphene iodide, hydrogenated SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.2.16.1975.1799.2209.1846.svg 0.157 0.78 Chemistry Black and white nitrogenated graphene, chemically functionalized graphene, doped graphene, and combinations thereof, and wherein the first heat treatment temperature is less than 2,500 *C and said solid graphene foam contains a content of non-carbon elements from 0.0 1 % to 2.0% 20 by weight.
The process of claim 1, wherein said graphene material in said solid graphene foam contains structural defects induced during said step (d) of heat treating.
The process of claim 1, wherein said liquid medium consists of water and/or an alcohol.
The process of claim 1, which is a roll-to-roll process wherein said steps (b) and (c) include feeding said supporting substrate from a feeder roller to a deposition zone, continuously or inte rm ittently depositing said graphene dispersion onto a surface of said supporting substrate to form said wet layer of graphene material thereon, drying said wet layer of graphene material to form the dried layer of graphene material, and collecting said dried layer of graphene material deposited on said supporting substrate on a collector roller
The process of claim 1, wherein said non-carbon elements include an element selected from oxygen, fluorine, chlorine, bromine, iodine, nitrogen, hydrogen, or boron.
The process of claim 1, wherein said step (d) of heat treating the dried layer of graphene material at a first heat treatment temperature is conducted under a compressive stress.
The process of claim 1, wherein said graphene dispersion contains a graphene oxide dispersion prepared by immersing a graphitic material in a powder or fibrous form in an 25 oxidizing liquid in a reaction vessel at a reaction temperature for a length of time sufficient to obtain said graphene dispersion wherein said graphitic material is selected from natural graphite, artificial graphite, meso-phase carbon, meso-phase pitch, meso-carbon micro-bead, 67 soft carbon, hard carbon, coke, carbon fiber, carbon nano-fiber, carbon nano-tube, or a combination thereof and wherein said graphene oxide has an oxygen content no less than 5% by weight.
The process of claim 1, further comprising a step of cutting said supercapacitor electrode into 20 multiple sheets of smaller supercapacitor electrode and stacking said multiple sheets to for m a thicker electrode for a supercapacitor
A roll-to-roll process for producing a continuous-length sheet of a supercapacitor electrode, said process comprising: (a) preparing a graphene dispersion having a graphene material dispersed in a liquid medium, 25 wherein said dispersion optionally contains a blowing agent; (b) continuously or intermittently dispensing and depositing said graphene dispersion onto a surface of a supporting substrate to form a wet layer of graphene material, wherein said 68 supporting substrate is a continuous thin film supplied from a feeder roller and collected on a collector roller; (c) partially or completely removing said liquid medium from the wet layer of graphene material to form a dried layer of graphene; 5 (d) heat treating the dried layer of graphene material at a first heat treatment temperature from 100 * C to 1,500 * C at a desired heating rate sufficient to activate said blowing agent for producing said solid graphene foam having multiple pores; (e) impregnating said multiple pores with a liquid or gel electrolyte to form a continuous layer of preimpregnated solid graphene foam, which is subjected to a step of compressing or 10 roll-pressing that reduces a pore size, improves orientation of graphene planes, and squeezes excess electrolyte out of said pre-impregnated solid graphene foam for for m ing a continuous sheet of said supercapacitor electrode; and (f) collecting said continuous sheet of said supercapacitor electrode on said collector roller.
The roll-to-roll process of claim 22, further comprising a step of heat treating the solid graphene foam at a second heat treatment temperature higher than said first temperature prior to step (e).
The roll-to-roll process of claim 22, further comprising a step of cutting said sheet of said supercapacitor electrode into multiple sheets of sma l ler supercapacitor electrode and stacking said multiple sheets to fo rm a thicker electrode for a supercapacitor. 20 69
Layer stacks claimed or described, ordered top of device to substrate.
supercapacitor electrode
Materials described outside the worked examples.
pristine graphene
blowing agent
Measurements and analyses referenced in the patent, with their drawing references.
FIG.4 (C) electrical conductivity data for the GO suspension-derived foam produced by the presently invented process and the hydrothermally reduced GO graphene …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Physical Density | 0.01–1.7 g/cm3 | solid graphene foam |
Specific Surface Area | 50–3300 m2/g |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,437,372Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 (A) A flow chart illustrating various prior art processes of producing exfoliated graphite products (flexible graphite foils and expanded graphite flakes), …
FIG.2 Schematic of a conventional supercapacitor cell.
FIG.3 A possible mechanism of chemical linking between graphene oxide sheets that effectively increases the graphene sheet lateral dimensions.
FIG.4 (C) electrical conductivity data for the GO suspension-derived foam produced by the presently invented process and the hydrothermally reduced GO graphene …
FIG.5(A) The rm al conductivity values (vs. specific gravity values up to 1.02 SVG 14998474.01-11-2016.IK₁FKOP₅RXEAPX0.SPEC.20.15.1859.1599.1993.1657.svg 0.193 …
FIG.6 Ther m al conductivity values of graphene foam samples derived from GO and GF (graphene fluoride) as a function of the specific gravity.
FIG.7 Thermal conductivity values of graphene foam samples derived from GO and pristine graphene as a function of the f in al (maximum) heat treatment …
FIG.8(A) Inter-graphene plane spacing in graphene foam walls as measured by X-ray diffraction;
FIG.9 The electrode specific capacitance values of two series of supercapacitors (conventional and presently invented) plotted as a function of the electrode …
FIG. 10 Ragone plots (gravimetric and volumetric power density vs. energy density) of symmetric supercapacitor (EDLC) cells containing isolated nitrogen-doped …
FIG. 11 Ragone plots of lithium ion capacitor (LIC) cells containing pristine graphene sheets as the electrode active material and lithium salt-PC/DEC organic …
FIG. 12 The cell-level gravimetric and volumetric energy densities plotted over the achievable electrode thickness range of the RGO-based EDLC supercapacitors …
FIG. 13 The cell-level gravimetric energy densities plotted over the achievable active material proportion (active material weight/total cell weight) in a …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A process for producing a supercapacitor electrode, said process comprising: (a) preparing a graphene dispersion having multiple sheets of a starting graphene material dispersed in a liquid medium, and wherein said dispersion contains an optional blowing agent 5 having a blowing agent-to-graphene material weight ratio from 0/1.0 to 1.0/1.0; (b) dispensing and depositing said graphene dispersion onto a surface of a supporting substrate to for m a wet layer of graphene material, wherein said dispensing and depositing procedure includes subjecting said graphene dispersion to an orientation-inducing stress; (c) partially or completely removing said liquid medium from the wet layer of graphene 10 material to form a dried layer of graphene material; (d) heat treating the dried layer of graphene material at a first heat treatment temperature from 80 * C to 3,200 0 C at a desired heating rate sufficient to induce volatile gas molecules from said non-carbon elements or to activate said blowing agent for producing a layer of solid graphene foam, wherein said solid graphene foam is composed of multiple pores and 15 pore walls, and said pore walls contain a pristine graphene material having essentially zero % of non-carbon elements, or a non-pristine graphene material having 0.001% to 5% by weight of non-carbon elements, and wherein said solid graphene foam has a physical density from 0.01 to 1.7 SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.1.18.598.1882.712.1939.svg 0.19 0.38 Chemistry Black and white, a specific surface area from 50 to 3,300 SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.1.18.1555.1882.1662.1940.svg 0.193 0.357 Chemistry Black and white a thermal conductivity of at-least 200 W/mK per unit of specific gravity, and/or an electrical conductivity no less than 20 2,000 S/cm per unit of specific gravity; and (e) impregnating said multiple pores with a liquid or gel electrolyte to form a layer of preimpregnated solid graphene foam, which is subjected to a step of compressing or roll- pressing that reduces a pore size, improves orientation of graphene planes, and squeezes excess electrolyte out of said pre-impregnated solid graphene foam for for m ing said 25 supercapacitor electrode.
The process of claim 1, wherein said starting graphene material is selected from a pristine graphene or a non-pristine graphene material, having a content of non-carbon elements greater than 2% by weight, selected from graphene oxide, reduced graphene oxide, graphene fluoride, graphene chloride, graphene bromide, graphene iodide, hydrogenated graphene, 65 nitrogenated graphene, chemically f u nctionalized graphene, doped graphene, or a combination thereof.
The process of claim 1, further including a step of heat-treating the solid graphene foam at a second heat treatment temperature higher than said first heat treatment temperature, prior to step (e), for a length of time sufficient for obtaining a graphene foam wherein said pore walls contain stacked graphene planes having an inter-plane spacing d 002 from 0.3354 nm to 0.36 nm and a content of non-carbon elements less than 2% by weight.
The process of claim 1, wherein said graphene material contains pristine graphene and said dispersion contains a blowing agent having a blowing agent-to-pristine graphene weight ratio from 0.01/1.0 to 1.0/1.0.
The process of claim 1, wherein said blowing agent is a physical blowing agent, a chemical blowing agent, a mixture thereof, a dissolution-and-leaching agent, or a mechanically introduced blowing agent.
The process of claim 1, wherein said graphene material is selected from the group of nonpristine graphene materials consisting of graphene oxide, reduced graphene oxide, graphene fluoride, graphene chloride, graphene bromide, graphene iodide, hydrogenated SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.2.16.1975.1799.2209.1846.svg 0.157 0.78 Chemistry Black and white nitrogenated graphene, chemically functionalized graphene, doped graphene, and combinations thereof, and wherein the first heat treatment temperature is less than 2,500 *C and said solid graphene foam contains a content of non-carbon elements from 0.0 1 % to 2.0% 20 by weight.
The process of claim 1, wherein said graphene material in said solid graphene foam contains structural defects induced during said step (d) of heat treating.
The process of claim 1, wherein said liquid medium consists of water and/or an alcohol.
The process of claim 1, which is a roll-to-roll process wherein said steps (b) and (c) include feeding said supporting substrate from a feeder roller to a deposition zone, continuously or inte rm ittently depositing said graphene dispersion onto a surface of said supporting substrate to form said wet layer of graphene material thereon, drying said wet layer of graphene material to form the dried layer of graphene material, and collecting said dried layer of graphene material deposited on said supporting substrate on a collector roller
The process of claim 1, wherein said non-carbon elements include an element selected from oxygen, fluorine, chlorine, bromine, iodine, nitrogen, hydrogen, or boron.
The process of claim 1, wherein said step (d) of heat treating the dried layer of graphene material at a first heat treatment temperature is conducted under a compressive stress.
The process of claim 1, wherein said graphene dispersion contains a graphene oxide dispersion prepared by immersing a graphitic material in a powder or fibrous form in an 25 oxidizing liquid in a reaction vessel at a reaction temperature for a length of time sufficient to obtain said graphene dispersion wherein said graphitic material is selected from natural graphite, artificial graphite, meso-phase carbon, meso-phase pitch, meso-carbon micro-bead, 67 soft carbon, hard carbon, coke, carbon fiber, carbon nano-fiber, carbon nano-tube, or a combination thereof and wherein said graphene oxide has an oxygen content no less than 5% by weight.
The process of claim 1, further comprising a step of cutting said supercapacitor electrode into 20 multiple sheets of smaller supercapacitor electrode and stacking said multiple sheets to for m a thicker electrode for a supercapacitor
A roll-to-roll process for producing a continuous-length sheet of a supercapacitor electrode, said process comprising: (a) preparing a graphene dispersion having a graphene material dispersed in a liquid medium, 25 wherein said dispersion optionally contains a blowing agent; (b) continuously or intermittently dispensing and depositing said graphene dispersion onto a surface of a supporting substrate to form a wet layer of graphene material, wherein said 68 supporting substrate is a continuous thin film supplied from a feeder roller and collected on a collector roller; (c) partially or completely removing said liquid medium from the wet layer of graphene material to form a dried layer of graphene; 5 (d) heat treating the dried layer of graphene material at a first heat treatment temperature from 100 * C to 1,500 * C at a desired heating rate sufficient to activate said blowing agent for producing said solid graphene foam having multiple pores; (e) impregnating said multiple pores with a liquid or gel electrolyte to form a continuous layer of preimpregnated solid graphene foam, which is subjected to a step of compressing or 10 roll-pressing that reduces a pore size, improves orientation of graphene planes, and squeezes excess electrolyte out of said pre-impregnated solid graphene foam for for m ing a continuous sheet of said supercapacitor electrode; and (f) collecting said continuous sheet of said supercapacitor electrode on said collector roller.
The roll-to-roll process of claim 22, further comprising a step of heat treating the solid graphene foam at a second heat treatment temperature higher than said first temperature prior to step (e).
The roll-to-roll process of claim 22, further comprising a step of cutting said sheet of said supercapacitor electrode into multiple sheets of sma l ler supercapacitor electrode and stacking said multiple sheets to fo rm a thicker electrode for a supercapacitor. 20 69
Layer stacks claimed or described, ordered top of device to substrate.
supercapacitor electrode
Materials described outside the worked examples.
pristine graphene
blowing agent
Measurements and analyses referenced in the patent, with their drawing references.
FIG.4 (C) electrical conductivity data for the GO suspension-derived foam produced by the presently invented process and the hydrothermally reduced GO graphene …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Physical Density | 0.01–1.7 g/cm3 | solid graphene foam |
Specific Surface Area | 50–3300 m2/g |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,437,372Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 (A) A flow chart illustrating various prior art processes of producing exfoliated graphite products (flexible graphite foils and expanded graphite flakes), …
FIG.2 Schematic of a conventional supercapacitor cell.
FIG.3 A possible mechanism of chemical linking between graphene oxide sheets that effectively increases the graphene sheet lateral dimensions.
FIG.4 (C) electrical conductivity data for the GO suspension-derived foam produced by the presently invented process and the hydrothermally reduced GO graphene …
FIG.5(A) The rm al conductivity values (vs. specific gravity values up to 1.02 SVG 14998474.01-11-2016.IK₁FKOP₅RXEAPX0.SPEC.20.15.1859.1599.1993.1657.svg 0.193 …
FIG.6 Ther m al conductivity values of graphene foam samples derived from GO and GF (graphene fluoride) as a function of the specific gravity.
FIG.7 Thermal conductivity values of graphene foam samples derived from GO and pristine graphene as a function of the f in al (maximum) heat treatment …
FIG.8(A) Inter-graphene plane spacing in graphene foam walls as measured by X-ray diffraction;
FIG.9 The electrode specific capacitance values of two series of supercapacitors (conventional and presently invented) plotted as a function of the electrode …
FIG. 10 Ragone plots (gravimetric and volumetric power density vs. energy density) of symmetric supercapacitor (EDLC) cells containing isolated nitrogen-doped …
FIG. 11 Ragone plots of lithium ion capacitor (LIC) cells containing pristine graphene sheets as the electrode active material and lithium salt-PC/DEC organic …
FIG. 12 The cell-level gravimetric and volumetric energy densities plotted over the achievable electrode thickness range of the RGO-based EDLC supercapacitors …
FIG. 13 The cell-level gravimetric energy densities plotted over the achievable active material proportion (active material weight/total cell weight) in a …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A process for producing a supercapacitor electrode, said process comprising: (a) preparing a graphene dispersion having multiple sheets of a starting graphene material dispersed in a liquid medium, and wherein said dispersion contains an optional blowing agent 5 having a blowing agent-to-graphene material weight ratio from 0/1.0 to 1.0/1.0; (b) dispensing and depositing said graphene dispersion onto a surface of a supporting substrate to for m a wet layer of graphene material, wherein said dispensing and depositing procedure includes subjecting said graphene dispersion to an orientation-inducing stress; (c) partially or completely removing said liquid medium from the wet layer of graphene 10 material to form a dried layer of graphene material; (d) heat treating the dried layer of graphene material at a first heat treatment temperature from 80 * C to 3,200 0 C at a desired heating rate sufficient to induce volatile gas molecules from said non-carbon elements or to activate said blowing agent for producing a layer of solid graphene foam, wherein said solid graphene foam is composed of multiple pores and 15 pore walls, and said pore walls contain a pristine graphene material having essentially zero % of non-carbon elements, or a non-pristine graphene material having 0.001% to 5% by weight of non-carbon elements, and wherein said solid graphene foam has a physical density from 0.01 to 1.7 SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.1.18.598.1882.712.1939.svg 0.19 0.38 Chemistry Black and white, a specific surface area from 50 to 3,300 SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.1.18.1555.1882.1662.1940.svg 0.193 0.357 Chemistry Black and white a thermal conductivity of at-least 200 W/mK per unit of specific gravity, and/or an electrical conductivity no less than 20 2,000 S/cm per unit of specific gravity; and (e) impregnating said multiple pores with a liquid or gel electrolyte to form a layer of preimpregnated solid graphene foam, which is subjected to a step of compressing or roll- pressing that reduces a pore size, improves orientation of graphene planes, and squeezes excess electrolyte out of said pre-impregnated solid graphene foam for for m ing said 25 supercapacitor electrode.
The process of claim 1, wherein said starting graphene material is selected from a pristine graphene or a non-pristine graphene material, having a content of non-carbon elements greater than 2% by weight, selected from graphene oxide, reduced graphene oxide, graphene fluoride, graphene chloride, graphene bromide, graphene iodide, hydrogenated graphene, 65 nitrogenated graphene, chemically f u nctionalized graphene, doped graphene, or a combination thereof.
The process of claim 1, further including a step of heat-treating the solid graphene foam at a second heat treatment temperature higher than said first heat treatment temperature, prior to step (e), for a length of time sufficient for obtaining a graphene foam wherein said pore walls contain stacked graphene planes having an inter-plane spacing d 002 from 0.3354 nm to 0.36 nm and a content of non-carbon elements less than 2% by weight.
The process of claim 1, wherein said graphene material contains pristine graphene and said dispersion contains a blowing agent having a blowing agent-to-pristine graphene weight ratio from 0.01/1.0 to 1.0/1.0.
The process of claim 1, wherein said blowing agent is a physical blowing agent, a chemical blowing agent, a mixture thereof, a dissolution-and-leaching agent, or a mechanically introduced blowing agent.
The process of claim 1, wherein said graphene material is selected from the group of nonpristine graphene materials consisting of graphene oxide, reduced graphene oxide, graphene fluoride, graphene chloride, graphene bromide, graphene iodide, hydrogenated SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.2.16.1975.1799.2209.1846.svg 0.157 0.78 Chemistry Black and white nitrogenated graphene, chemically functionalized graphene, doped graphene, and combinations thereof, and wherein the first heat treatment temperature is less than 2,500 *C and said solid graphene foam contains a content of non-carbon elements from 0.0 1 % to 2.0% 20 by weight.
The process of claim 1, wherein said graphene material in said solid graphene foam contains structural defects induced during said step (d) of heat treating.
The process of claim 1, wherein said liquid medium consists of water and/or an alcohol.
The process of claim 1, which is a roll-to-roll process wherein said steps (b) and (c) include feeding said supporting substrate from a feeder roller to a deposition zone, continuously or inte rm ittently depositing said graphene dispersion onto a surface of said supporting substrate to form said wet layer of graphene material thereon, drying said wet layer of graphene material to form the dried layer of graphene material, and collecting said dried layer of graphene material deposited on said supporting substrate on a collector roller
The process of claim 1, wherein said non-carbon elements include an element selected from oxygen, fluorine, chlorine, bromine, iodine, nitrogen, hydrogen, or boron.
The process of claim 1, wherein said step (d) of heat treating the dried layer of graphene material at a first heat treatment temperature is conducted under a compressive stress.
The process of claim 1, wherein said graphene dispersion contains a graphene oxide dispersion prepared by immersing a graphitic material in a powder or fibrous form in an 25 oxidizing liquid in a reaction vessel at a reaction temperature for a length of time sufficient to obtain said graphene dispersion wherein said graphitic material is selected from natural graphite, artificial graphite, meso-phase carbon, meso-phase pitch, meso-carbon micro-bead, 67 soft carbon, hard carbon, coke, carbon fiber, carbon nano-fiber, carbon nano-tube, or a combination thereof and wherein said graphene oxide has an oxygen content no less than 5% by weight.
The process of claim 1, further comprising a step of cutting said supercapacitor electrode into 20 multiple sheets of smaller supercapacitor electrode and stacking said multiple sheets to for m a thicker electrode for a supercapacitor
A roll-to-roll process for producing a continuous-length sheet of a supercapacitor electrode, said process comprising: (a) preparing a graphene dispersion having a graphene material dispersed in a liquid medium, 25 wherein said dispersion optionally contains a blowing agent; (b) continuously or intermittently dispensing and depositing said graphene dispersion onto a surface of a supporting substrate to form a wet layer of graphene material, wherein said 68 supporting substrate is a continuous thin film supplied from a feeder roller and collected on a collector roller; (c) partially or completely removing said liquid medium from the wet layer of graphene material to form a dried layer of graphene; 5 (d) heat treating the dried layer of graphene material at a first heat treatment temperature from 100 * C to 1,500 * C at a desired heating rate sufficient to activate said blowing agent for producing said solid graphene foam having multiple pores; (e) impregnating said multiple pores with a liquid or gel electrolyte to form a continuous layer of preimpregnated solid graphene foam, which is subjected to a step of compressing or 10 roll-pressing that reduces a pore size, improves orientation of graphene planes, and squeezes excess electrolyte out of said pre-impregnated solid graphene foam for for m ing a continuous sheet of said supercapacitor electrode; and (f) collecting said continuous sheet of said supercapacitor electrode on said collector roller.
The roll-to-roll process of claim 22, further comprising a step of heat treating the solid graphene foam at a second heat treatment temperature higher than said first temperature prior to step (e).
The roll-to-roll process of claim 22, further comprising a step of cutting said sheet of said supercapacitor electrode into multiple sheets of sma l ler supercapacitor electrode and stacking said multiple sheets to fo rm a thicker electrode for a supercapacitor. 20 69
Layer stacks claimed or described, ordered top of device to substrate.
supercapacitor electrode
Materials described outside the worked examples.
pristine graphene
blowing agent
Measurements and analyses referenced in the patent, with their drawing references.
FIG.4 (C) electrical conductivity data for the GO suspension-derived foam produced by the presently invented process and the hydrothermally reduced GO graphene …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Physical Density | 0.01–1.7 g/cm3 | solid graphene foam |
Specific Surface Area | 50–3300 m2/g |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,437,372Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 (A) A flow chart illustrating various prior art processes of producing exfoliated graphite products (flexible graphite foils and expanded graphite flakes), …
FIG.2 Schematic of a conventional supercapacitor cell.
FIG.3 A possible mechanism of chemical linking between graphene oxide sheets that effectively increases the graphene sheet lateral dimensions.
FIG.4 (C) electrical conductivity data for the GO suspension-derived foam produced by the presently invented process and the hydrothermally reduced GO graphene …
FIG.5(A) The rm al conductivity values (vs. specific gravity values up to 1.02 SVG 14998474.01-11-2016.IK₁FKOP₅RXEAPX0.SPEC.20.15.1859.1599.1993.1657.svg 0.193 …
FIG.6 Ther m al conductivity values of graphene foam samples derived from GO and GF (graphene fluoride) as a function of the specific gravity.
FIG.7 Thermal conductivity values of graphene foam samples derived from GO and pristine graphene as a function of the f in al (maximum) heat treatment …
FIG.8(A) Inter-graphene plane spacing in graphene foam walls as measured by X-ray diffraction;
FIG.9 The electrode specific capacitance values of two series of supercapacitors (conventional and presently invented) plotted as a function of the electrode …
FIG. 10 Ragone plots (gravimetric and volumetric power density vs. energy density) of symmetric supercapacitor (EDLC) cells containing isolated nitrogen-doped …
FIG. 11 Ragone plots of lithium ion capacitor (LIC) cells containing pristine graphene sheets as the electrode active material and lithium salt-PC/DEC organic …
FIG. 12 The cell-level gravimetric and volumetric energy densities plotted over the achievable electrode thickness range of the RGO-based EDLC supercapacitors …
FIG. 13 The cell-level gravimetric energy densities plotted over the achievable active material proportion (active material weight/total cell weight) in a …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A process for producing a supercapacitor electrode, said process comprising: (a) preparing a graphene dispersion having multiple sheets of a starting graphene material dispersed in a liquid medium, and wherein said dispersion contains an optional blowing agent 5 having a blowing agent-to-graphene material weight ratio from 0/1.0 to 1.0/1.0; (b) dispensing and depositing said graphene dispersion onto a surface of a supporting substrate to for m a wet layer of graphene material, wherein said dispensing and depositing procedure includes subjecting said graphene dispersion to an orientation-inducing stress; (c) partially or completely removing said liquid medium from the wet layer of graphene 10 material to form a dried layer of graphene material; (d) heat treating the dried layer of graphene material at a first heat treatment temperature from 80 * C to 3,200 0 C at a desired heating rate sufficient to induce volatile gas molecules from said non-carbon elements or to activate said blowing agent for producing a layer of solid graphene foam, wherein said solid graphene foam is composed of multiple pores and 15 pore walls, and said pore walls contain a pristine graphene material having essentially zero % of non-carbon elements, or a non-pristine graphene material having 0.001% to 5% by weight of non-carbon elements, and wherein said solid graphene foam has a physical density from 0.01 to 1.7 SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.1.18.598.1882.712.1939.svg 0.19 0.38 Chemistry Black and white, a specific surface area from 50 to 3,300 SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.1.18.1555.1882.1662.1940.svg 0.193 0.357 Chemistry Black and white a thermal conductivity of at-least 200 W/mK per unit of specific gravity, and/or an electrical conductivity no less than 20 2,000 S/cm per unit of specific gravity; and (e) impregnating said multiple pores with a liquid or gel electrolyte to form a layer of preimpregnated solid graphene foam, which is subjected to a step of compressing or roll- pressing that reduces a pore size, improves orientation of graphene planes, and squeezes excess electrolyte out of said pre-impregnated solid graphene foam for for m ing said 25 supercapacitor electrode.
The process of claim 1, wherein said starting graphene material is selected from a pristine graphene or a non-pristine graphene material, having a content of non-carbon elements greater than 2% by weight, selected from graphene oxide, reduced graphene oxide, graphene fluoride, graphene chloride, graphene bromide, graphene iodide, hydrogenated graphene, 65 nitrogenated graphene, chemically f u nctionalized graphene, doped graphene, or a combination thereof.
The process of claim 1, further including a step of heat-treating the solid graphene foam at a second heat treatment temperature higher than said first heat treatment temperature, prior to step (e), for a length of time sufficient for obtaining a graphene foam wherein said pore walls contain stacked graphene planes having an inter-plane spacing d 002 from 0.3354 nm to 0.36 nm and a content of non-carbon elements less than 2% by weight.
The process of claim 1, wherein said graphene material contains pristine graphene and said dispersion contains a blowing agent having a blowing agent-to-pristine graphene weight ratio from 0.01/1.0 to 1.0/1.0.
The process of claim 1, wherein said blowing agent is a physical blowing agent, a chemical blowing agent, a mixture thereof, a dissolution-and-leaching agent, or a mechanically introduced blowing agent.
The process of claim 1, wherein said graphene material is selected from the group of nonpristine graphene materials consisting of graphene oxide, reduced graphene oxide, graphene fluoride, graphene chloride, graphene bromide, graphene iodide, hydrogenated SVG 14998474.01-11-2016.IK₁FKOP₂RXEAPX0.CLM.2.16.1975.1799.2209.1846.svg 0.157 0.78 Chemistry Black and white nitrogenated graphene, chemically functionalized graphene, doped graphene, and combinations thereof, and wherein the first heat treatment temperature is less than 2,500 *C and said solid graphene foam contains a content of non-carbon elements from 0.0 1 % to 2.0% 20 by weight.
The process of claim 1, wherein said graphene material in said solid graphene foam contains structural defects induced during said step (d) of heat treating.
The process of claim 1, wherein said liquid medium consists of water and/or an alcohol.
The process of claim 1, which is a roll-to-roll process wherein said steps (b) and (c) include feeding said supporting substrate from a feeder roller to a deposition zone, continuously or inte rm ittently depositing said graphene dispersion onto a surface of said supporting substrate to form said wet layer of graphene material thereon, drying said wet layer of graphene material to form the dried layer of graphene material, and collecting said dried layer of graphene material deposited on said supporting substrate on a collector roller
The process of claim 1, wherein said non-carbon elements include an element selected from oxygen, fluorine, chlorine, bromine, iodine, nitrogen, hydrogen, or boron.
The process of claim 1, wherein said step (d) of heat treating the dried layer of graphene material at a first heat treatment temperature is conducted under a compressive stress.
The process of claim 1, wherein said graphene dispersion contains a graphene oxide dispersion prepared by immersing a graphitic material in a powder or fibrous form in an 25 oxidizing liquid in a reaction vessel at a reaction temperature for a length of time sufficient to obtain said graphene dispersion wherein said graphitic material is selected from natural graphite, artificial graphite, meso-phase carbon, meso-phase pitch, meso-carbon micro-bead, 67 soft carbon, hard carbon, coke, carbon fiber, carbon nano-fiber, carbon nano-tube, or a combination thereof and wherein said graphene oxide has an oxygen content no less than 5% by weight.
The process of claim 1, further comprising a step of cutting said supercapacitor electrode into 20 multiple sheets of smaller supercapacitor electrode and stacking said multiple sheets to for m a thicker electrode for a supercapacitor
A roll-to-roll process for producing a continuous-length sheet of a supercapacitor electrode, said process comprising: (a) preparing a graphene dispersion having a graphene material dispersed in a liquid medium, 25 wherein said dispersion optionally contains a blowing agent; (b) continuously or intermittently dispensing and depositing said graphene dispersion onto a surface of a supporting substrate to form a wet layer of graphene material, wherein said 68 supporting substrate is a continuous thin film supplied from a feeder roller and collected on a collector roller; (c) partially or completely removing said liquid medium from the wet layer of graphene material to form a dried layer of graphene; 5 (d) heat treating the dried layer of graphene material at a first heat treatment temperature from 100 * C to 1,500 * C at a desired heating rate sufficient to activate said blowing agent for producing said solid graphene foam having multiple pores; (e) impregnating said multiple pores with a liquid or gel electrolyte to form a continuous layer of preimpregnated solid graphene foam, which is subjected to a step of compressing or 10 roll-pressing that reduces a pore size, improves orientation of graphene planes, and squeezes excess electrolyte out of said pre-impregnated solid graphene foam for for m ing a continuous sheet of said supercapacitor electrode; and (f) collecting said continuous sheet of said supercapacitor electrode on said collector roller.
The roll-to-roll process of claim 22, further comprising a step of heat treating the solid graphene foam at a second heat treatment temperature higher than said first temperature prior to step (e).
The roll-to-roll process of claim 22, further comprising a step of cutting said sheet of said supercapacitor electrode into multiple sheets of sma l ler supercapacitor electrode and stacking said multiple sheets to fo rm a thicker electrode for a supercapacitor. 20 69
Layer stacks claimed or described, ordered top of device to substrate.
supercapacitor electrode
Materials described outside the worked examples.
pristine graphene
blowing agent
Measurements and analyses referenced in the patent, with their drawing references.
FIG.4 (C) electrical conductivity data for the GO suspension-derived foam produced by the presently invented process and the hydrothermally reduced GO graphene …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Physical Density | 0.01–1.7 g/cm3 | solid graphene foam |
Specific Surface Area | 50–3300 m2/g |
Related documents with shared materials, methods, properties, or citations.
solid graphene foam
graphene oxide
reduced graphene oxide
graphene fluoride
graphene chloride
graphene bromide
graphene iodide
hydrogenated graphene
nitrogenated graphene
chemically functionalized graphene
doped graphene
graphitic material
FIG. 10 Ragone plots (gravimetric and volumetric power density vs. energy density) of symmetric supercapacitor (EDLC) cells containing isolated nitrogen-doped …
FIG. 12 The cell-level gravimetric and volumetric energy densities plotted over the achievable electrode thickness range of the RGO-based EDLC supercapacitors …
Thermal Conductivity Per Specific Gravity | ≥ 200 W/mK per unit specific gravity | solid graphene foam |
Electrical Conductivity Per Specific Gravity | ≥ 2000 S/cm per unit specific gravity | solid graphene foam |
inter-plane spacing d002 | 0.3354–0.36 nm | solid graphene foam |
claim 18 condition | ≥ 250 W/mK per unit specific gravity | solid graphene foam |
claim 18 condition | ≥ 2500 S/cm per unit specific gravity | solid graphene foam |
claim 19 condition | ≥ 300 W/mK per unit specific gravity | solid graphene foam |
claim 19 condition | ≥ 3000 S/cm per unit specific gravity | solid graphene foam |
claim 20 condition | ≥ 400 W/mK per unit specific gravity | solid graphene foam |
claim 20 condition | ≥ 4000 S/cm per unit specific gravity | solid graphene foam |
Thickness | 0.3354–0.4 nm | — |
Duration | 15–120 s | — |
Duration | 900–7200 s | — |
Thickness | 10–10000000 nm | — |
Duration | 0.5–96 hours | — |
Duration | 0.2–1 hour | — |
Duration | 0.5–5 hours | — |
Duration | 48–72 hours | — |
— | 250–500 W | — |
Duration | 2–6 hours | — |
Thickness | 0.6–1.2 nm | — |
Duration | 1–4 hours | — |
Duration | 1–2 hours | — |
Duration | 0.5–2 hours | — |
Duration | 5–16 hours | — |
Duration | 1–8 hours | — |
Duration | 48–96 hours | — |
Duration | 10–100 minutes | — |
Duration | 1–5 hours | — |
Duration | 1–10 hours | — |
Thickness | 2–50 nm | — |
Thickness | ≤ 0.344 nm | — |
Pressure | ≤ 1 torr | — |
Thickness | ≤ 0.4 nm | — |
— | ≥ 200 W | — |
— | ≥ 350 W | — |
Thickness | ≥ 20 nm | — |
Thickness | ≥ 1 nm | — |
Duration | ≥ 15 minutes | — |
Thickness | ≤ 0.35 nm | — |
Duration | ≥ 1 hour | — |
— | ≥ 250 W | — |
— | ≥ 300 W | — |
— | ≥ 400 W | — |
Thickness | 0.5–50 nm | — |
Thickness | 0.4–5 nm | — |
Thickness | ≤ 0.34 nm | — |
Thickness | ≤ 0.336 nm | — |
Thickness | ≤ 0.337 nm | — |
Thickness | ≤ 1 nm | — |
— | ≥ 150 W | — |
solid graphene foam
graphene oxide
reduced graphene oxide
graphene fluoride
graphene chloride
graphene bromide
graphene iodide
hydrogenated graphene
nitrogenated graphene
chemically functionalized graphene
doped graphene
graphitic material
FIG. 10 Ragone plots (gravimetric and volumetric power density vs. energy density) of symmetric supercapacitor (EDLC) cells containing isolated nitrogen-doped …
FIG. 12 The cell-level gravimetric and volumetric energy densities plotted over the achievable electrode thickness range of the RGO-based EDLC supercapacitors …
Thermal Conductivity Per Specific Gravity | ≥ 200 W/mK per unit specific gravity | solid graphene foam |
Electrical Conductivity Per Specific Gravity | ≥ 2000 S/cm per unit specific gravity | solid graphene foam |
inter-plane spacing d002 | 0.3354–0.36 nm | solid graphene foam |
claim 18 condition | ≥ 250 W/mK per unit specific gravity | solid graphene foam |
claim 18 condition | ≥ 2500 S/cm per unit specific gravity | solid graphene foam |
claim 19 condition | ≥ 300 W/mK per unit specific gravity | solid graphene foam |
claim 19 condition | ≥ 3000 S/cm per unit specific gravity | solid graphene foam |
claim 20 condition | ≥ 400 W/mK per unit specific gravity | solid graphene foam |
claim 20 condition | ≥ 4000 S/cm per unit specific gravity | solid graphene foam |
Thickness | 0.3354–0.4 nm | — |
Duration | 15–120 s | — |
Duration | 900–7200 s | — |
Thickness | 10–10000000 nm | — |
Duration | 0.5–96 hours | — |
Duration | 0.2–1 hour | — |
Duration | 0.5–5 hours | — |
Duration | 48–72 hours | — |
— | 250–500 W | — |
Duration | 2–6 hours | — |
Thickness | 0.6–1.2 nm | — |
Duration | 1–4 hours | — |
Duration | 1–2 hours | — |
Duration | 0.5–2 hours | — |
Duration | 5–16 hours | — |
Duration | 1–8 hours | — |
Duration | 48–96 hours | — |
Duration | 10–100 minutes | — |
Duration | 1–5 hours | — |
Duration | 1–10 hours | — |
Thickness | 2–50 nm | — |
Thickness | ≤ 0.344 nm | — |
Pressure | ≤ 1 torr | — |
Thickness | ≤ 0.4 nm | — |
— | ≥ 200 W | — |
— | ≥ 350 W | — |
Thickness | ≥ 20 nm | — |
Thickness | ≥ 1 nm | — |
Duration | ≥ 15 minutes | — |
Thickness | ≤ 0.35 nm | — |
Duration | ≥ 1 hour | — |
— | ≥ 250 W | — |
— | ≥ 300 W | — |
— | ≥ 400 W | — |
Thickness | 0.5–50 nm | — |
Thickness | 0.4–5 nm | — |
Thickness | ≤ 0.34 nm | — |
Thickness | ≤ 0.336 nm | — |
Thickness | ≤ 0.337 nm | — |
Thickness | ≤ 1 nm | — |
— | ≥ 150 W | — |
solid graphene foam
graphene oxide
reduced graphene oxide
graphene fluoride
graphene chloride
graphene bromide
graphene iodide
hydrogenated graphene
nitrogenated graphene
chemically functionalized graphene
doped graphene
graphitic material
FIG. 10 Ragone plots (gravimetric and volumetric power density vs. energy density) of symmetric supercapacitor (EDLC) cells containing isolated nitrogen-doped …
FIG. 12 The cell-level gravimetric and volumetric energy densities plotted over the achievable electrode thickness range of the RGO-based EDLC supercapacitors …
Thermal Conductivity Per Specific Gravity | ≥ 200 W/mK per unit specific gravity | solid graphene foam |
Electrical Conductivity Per Specific Gravity | ≥ 2000 S/cm per unit specific gravity | solid graphene foam |
inter-plane spacing d002 | 0.3354–0.36 nm | solid graphene foam |
claim 18 condition | ≥ 250 W/mK per unit specific gravity | solid graphene foam |
claim 18 condition | ≥ 2500 S/cm per unit specific gravity | solid graphene foam |
claim 19 condition | ≥ 300 W/mK per unit specific gravity | solid graphene foam |
claim 19 condition | ≥ 3000 S/cm per unit specific gravity | solid graphene foam |
claim 20 condition | ≥ 400 W/mK per unit specific gravity | solid graphene foam |
claim 20 condition | ≥ 4000 S/cm per unit specific gravity | solid graphene foam |
Thickness | 0.3354–0.4 nm | — |
Duration | 15–120 s | — |
Duration | 900–7200 s | — |
Thickness | 10–10000000 nm | — |
Duration | 0.5–96 hours | — |
Duration | 0.2–1 hour | — |
Duration | 0.5–5 hours | — |
Duration | 48–72 hours | — |
— | 250–500 W | — |
Duration | 2–6 hours | — |
Thickness | 0.6–1.2 nm | — |
Duration | 1–4 hours | — |
Duration | 1–2 hours | — |
Duration | 0.5–2 hours | — |
Duration | 5–16 hours | — |
Duration | 1–8 hours | — |
Duration | 48–96 hours | — |
Duration | 10–100 minutes | — |
Duration | 1–5 hours | — |
Duration | 1–10 hours | — |
Thickness | 2–50 nm | — |
Thickness | ≤ 0.344 nm | — |
Pressure | ≤ 1 torr | — |
Thickness | ≤ 0.4 nm | — |
— | ≥ 200 W | — |
— | ≥ 350 W | — |
Thickness | ≥ 20 nm | — |
Thickness | ≥ 1 nm | — |
Duration | ≥ 15 minutes | — |
Thickness | ≤ 0.35 nm | — |
Duration | ≥ 1 hour | — |
— | ≥ 250 W | — |
— | ≥ 300 W | — |
— | ≥ 400 W | — |
Thickness | 0.5–50 nm | — |
Thickness | 0.4–5 nm | — |
Thickness | ≤ 0.34 nm | — |
Thickness | ≤ 0.336 nm | — |
Thickness | ≤ 0.337 nm | — |
Thickness | ≤ 1 nm | — |
— | ≥ 150 W | — |
solid graphene foam
graphene oxide
reduced graphene oxide
graphene fluoride
graphene chloride
graphene bromide
graphene iodide
hydrogenated graphene
nitrogenated graphene
chemically functionalized graphene
doped graphene
graphitic material
FIG. 10 Ragone plots (gravimetric and volumetric power density vs. energy density) of symmetric supercapacitor (EDLC) cells containing isolated nitrogen-doped …
FIG. 12 The cell-level gravimetric and volumetric energy densities plotted over the achievable electrode thickness range of the RGO-based EDLC supercapacitors …
Thermal Conductivity Per Specific Gravity | ≥ 200 W/mK per unit specific gravity | solid graphene foam |
Electrical Conductivity Per Specific Gravity | ≥ 2000 S/cm per unit specific gravity | solid graphene foam |
inter-plane spacing d002 | 0.3354–0.36 nm | solid graphene foam |
claim 18 condition | ≥ 250 W/mK per unit specific gravity | solid graphene foam |
claim 18 condition | ≥ 2500 S/cm per unit specific gravity | solid graphene foam |
claim 19 condition | ≥ 300 W/mK per unit specific gravity | solid graphene foam |
claim 19 condition | ≥ 3000 S/cm per unit specific gravity | solid graphene foam |
claim 20 condition | ≥ 400 W/mK per unit specific gravity | solid graphene foam |
claim 20 condition | ≥ 4000 S/cm per unit specific gravity | solid graphene foam |
Thickness | 0.3354–0.4 nm | — |
Duration | 15–120 s | — |
Duration | 900–7200 s | — |
Thickness | 10–10000000 nm | — |
Duration | 0.5–96 hours | — |
Duration | 0.2–1 hour | — |
Duration | 0.5–5 hours | — |
Duration | 48–72 hours | — |
— | 250–500 W | — |
Duration | 2–6 hours | — |
Thickness | 0.6–1.2 nm | — |
Duration | 1–4 hours | — |
Duration | 1–2 hours | — |
Duration | 0.5–2 hours | — |
Duration | 5–16 hours | — |
Duration | 1–8 hours | — |
Duration | 48–96 hours | — |
Duration | 10–100 minutes | — |
Duration | 1–5 hours | — |
Duration | 1–10 hours | — |
Thickness | 2–50 nm | — |
Thickness | ≤ 0.344 nm | — |
Pressure | ≤ 1 torr | — |
Thickness | ≤ 0.4 nm | — |
— | ≥ 200 W | — |
— | ≥ 350 W | — |
Thickness | ≥ 20 nm | — |
Thickness | ≥ 1 nm | — |
Duration | ≥ 15 minutes | — |
Thickness | ≤ 0.35 nm | — |
Duration | ≥ 1 hour | — |
— | ≥ 250 W | — |
— | ≥ 300 W | — |
— | ≥ 400 W | — |
Thickness | 0.5–50 nm | — |
Thickness | 0.4–5 nm | — |
Thickness | ≤ 0.34 nm | — |
Thickness | ≤ 0.336 nm | — |
Thickness | ≤ 0.337 nm | — |
Thickness | ≤ 1 nm | — |
— | ≥ 150 W | — |