Patent
US 10,481,419PHYSICALLY CONTACTABLE GRAPHENE ELECTRO-OPTIC MODULATOR AND METHOD FOR MANUFACTURING THE SAME
Yong-Won SONG
US
Copyright © 2026 Matter42. All rights reserved.
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Atlas literature
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US 10,481,419Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 0 A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the …
FIG. 2 is a diagram schematically showing an operation principle of the electro-optic modulator according to an embodiment of the present disclosure.
FIG. 3 is a schematic view for illustrating a method for manufacturing an electro-optic modulator according to an embodiment of the present disclosure.
FIGS. 4A to 4 C are diagrams showing a preprocessing process applied to transfer a graphene film and its result according to an embodiment of the present …
FIGS. 5A and 5B are diagrams showing results according to the graphene film transferring conditions according to an embodiment of the present disclosure.
FIGS. 6A and 6B are photographs obtained through the TEM analysis on the transferred graphene film according to an embodiment of the present disclosure.
FIG. 7 is a photograph showing a cross section of an electro-optic modulator having two graphene films, obtained through the SEM analysis, according to an …
FIG. 8 is a diagram showing an optical system for analyzing characteristics of the electro-optic modulator according to an embodiment of the present disclosure.
FIGS. 9A to 9 C are diagrams showing an overall portion and a partial portion of a system, designed according to the system diagram of
FIGS. 10A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the present …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for manufacturing a graphene electr o -optic modulator that modulates a light according to an electric signal, the method comprising: forming two metal electrodes on an oxide film formed on a substrate, the two metal electrodes being spaced apart from each other; synthesizing a first graphene film at a metal foil; coating the first graphene film with a polymer membrane; removing the metal foil at which the first graphene film is synthesized; and transferring the first graphene film coated with the polymer membrane onto the oxide film, wherein the first graphene film is electrically connected to any one of the two metal electrodes.
The method according to claim 1, further comprising: synthesizing a second graphene film at a metal foil; coating the second graphene film with a polymer membrane; removing the metal foil at which the second graphene film is synthesized; and transferring the second graphene film coated with the polymer membrane onto the polymer membrane coated on the first graphene film, wherein the second graphene film is electrically connected to the metal electrode to which the first graphene film is not connected.
The method according to claim 1, wherein the synthesizing the first graphene film includes: growing graphene films on both surfaces of the metal foil; and removing the graphene film grown on one surface of the metal foil, wherein the first graphene film is the graphene film not removed.
The method according to claim 1, further comprising: coating a part of the oxide film and one of the metal electrode with a polymer membrane, before transferring the first graphene film.
The method according to claim 1, further comprising: heating the polymer membrane, after transferring the first graphene film.
The graphene electro-optic modulator according to claim 1 0, wherein the PMMA has a molecular weight of 996 K.
A graphene electro-optic modulator for modulating a light according to an electric signal, comprising: an oxide film formed on a substrate; two metal electrodes disposed on the oxide film to be spaced apart from each other; a first graphene film transferred onto the oxide film; and a first polymer membrane coated on the graphene film, wherein the first graphene film is electrically connected to any one of the two metal electrodes.
The graphene electr o -optic modulator according to claim 7, further comprising: a second graphene film transferred onto the first polymer membrane; and a second polymer membrane coated on the second graphene film, wherein the second graphene film is electrically connected to the metal electrode to which the first graphene film is not connected.
The graphene electro-optic modulator according to claim 7, further comprising: a second polymer membrane provided between the first graphene film and the oxide film.
The graphene electro-optic modulator according to claim 7, wherein the first polymer membrane is made of poly(meth)acrylates (PMMA).
A system, comprising: a graphene electro-optic modulator defined in claim 7; an oscillator configured to oscillate a light signal; a generator configured to generate the electric signal; an amplifier configured to amplify the electric signal; a bias tee configured to apply a bias voltage to the electro-optic modulator based on the electric signal; and an optical waveguide having a core and a cladding layer, wherein the cladding layer is at least partially polished, and the graphene electro-optic modulator is in contact with the polished portion of the cladding layer.
Layer stacks claimed or described, ordered top of device to substrate.
graphene electro-optic modulator (single graphene layer)
graphene electro-optic modulator (dual graphene layer)
Materials described outside the worked examples.
graphene film
C
polymer membrane
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 1 0 A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
light extinction ratio | 20 dB | — |
operating speed |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,481,419Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 0 A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the …
FIG. 2 is a diagram schematically showing an operation principle of the electro-optic modulator according to an embodiment of the present disclosure.
FIG. 3 is a schematic view for illustrating a method for manufacturing an electro-optic modulator according to an embodiment of the present disclosure.
FIGS. 4A to 4 C are diagrams showing a preprocessing process applied to transfer a graphene film and its result according to an embodiment of the present …
FIGS. 5A and 5B are diagrams showing results according to the graphene film transferring conditions according to an embodiment of the present disclosure.
FIGS. 6A and 6B are photographs obtained through the TEM analysis on the transferred graphene film according to an embodiment of the present disclosure.
FIG. 7 is a photograph showing a cross section of an electro-optic modulator having two graphene films, obtained through the SEM analysis, according to an …
FIG. 8 is a diagram showing an optical system for analyzing characteristics of the electro-optic modulator according to an embodiment of the present disclosure.
FIGS. 9A to 9 C are diagrams showing an overall portion and a partial portion of a system, designed according to the system diagram of
FIGS. 10A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the present …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for manufacturing a graphene electr o -optic modulator that modulates a light according to an electric signal, the method comprising: forming two metal electrodes on an oxide film formed on a substrate, the two metal electrodes being spaced apart from each other; synthesizing a first graphene film at a metal foil; coating the first graphene film with a polymer membrane; removing the metal foil at which the first graphene film is synthesized; and transferring the first graphene film coated with the polymer membrane onto the oxide film, wherein the first graphene film is electrically connected to any one of the two metal electrodes.
The method according to claim 1, further comprising: synthesizing a second graphene film at a metal foil; coating the second graphene film with a polymer membrane; removing the metal foil at which the second graphene film is synthesized; and transferring the second graphene film coated with the polymer membrane onto the polymer membrane coated on the first graphene film, wherein the second graphene film is electrically connected to the metal electrode to which the first graphene film is not connected.
The method according to claim 1, wherein the synthesizing the first graphene film includes: growing graphene films on both surfaces of the metal foil; and removing the graphene film grown on one surface of the metal foil, wherein the first graphene film is the graphene film not removed.
The method according to claim 1, further comprising: coating a part of the oxide film and one of the metal electrode with a polymer membrane, before transferring the first graphene film.
The method according to claim 1, further comprising: heating the polymer membrane, after transferring the first graphene film.
The graphene electro-optic modulator according to claim 1 0, wherein the PMMA has a molecular weight of 996 K.
A graphene electro-optic modulator for modulating a light according to an electric signal, comprising: an oxide film formed on a substrate; two metal electrodes disposed on the oxide film to be spaced apart from each other; a first graphene film transferred onto the oxide film; and a first polymer membrane coated on the graphene film, wherein the first graphene film is electrically connected to any one of the two metal electrodes.
The graphene electr o -optic modulator according to claim 7, further comprising: a second graphene film transferred onto the first polymer membrane; and a second polymer membrane coated on the second graphene film, wherein the second graphene film is electrically connected to the metal electrode to which the first graphene film is not connected.
The graphene electro-optic modulator according to claim 7, further comprising: a second polymer membrane provided between the first graphene film and the oxide film.
The graphene electro-optic modulator according to claim 7, wherein the first polymer membrane is made of poly(meth)acrylates (PMMA).
A system, comprising: a graphene electro-optic modulator defined in claim 7; an oscillator configured to oscillate a light signal; a generator configured to generate the electric signal; an amplifier configured to amplify the electric signal; a bias tee configured to apply a bias voltage to the electro-optic modulator based on the electric signal; and an optical waveguide having a core and a cladding layer, wherein the cladding layer is at least partially polished, and the graphene electro-optic modulator is in contact with the polished portion of the cladding layer.
Layer stacks claimed or described, ordered top of device to substrate.
graphene electro-optic modulator (single graphene layer)
graphene electro-optic modulator (dual graphene layer)
Materials described outside the worked examples.
graphene film
C
polymer membrane
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 1 0 A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
light extinction ratio | 20 dB | — |
operating speed |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,481,419Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 0 A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the …
FIG. 2 is a diagram schematically showing an operation principle of the electro-optic modulator according to an embodiment of the present disclosure.
FIG. 3 is a schematic view for illustrating a method for manufacturing an electro-optic modulator according to an embodiment of the present disclosure.
FIGS. 4A to 4 C are diagrams showing a preprocessing process applied to transfer a graphene film and its result according to an embodiment of the present …
FIGS. 5A and 5B are diagrams showing results according to the graphene film transferring conditions according to an embodiment of the present disclosure.
FIGS. 6A and 6B are photographs obtained through the TEM analysis on the transferred graphene film according to an embodiment of the present disclosure.
FIG. 7 is a photograph showing a cross section of an electro-optic modulator having two graphene films, obtained through the SEM analysis, according to an …
FIG. 8 is a diagram showing an optical system for analyzing characteristics of the electro-optic modulator according to an embodiment of the present disclosure.
FIGS. 9A to 9 C are diagrams showing an overall portion and a partial portion of a system, designed according to the system diagram of
FIGS. 10A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the present …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for manufacturing a graphene electr o -optic modulator that modulates a light according to an electric signal, the method comprising: forming two metal electrodes on an oxide film formed on a substrate, the two metal electrodes being spaced apart from each other; synthesizing a first graphene film at a metal foil; coating the first graphene film with a polymer membrane; removing the metal foil at which the first graphene film is synthesized; and transferring the first graphene film coated with the polymer membrane onto the oxide film, wherein the first graphene film is electrically connected to any one of the two metal electrodes.
The method according to claim 1, further comprising: synthesizing a second graphene film at a metal foil; coating the second graphene film with a polymer membrane; removing the metal foil at which the second graphene film is synthesized; and transferring the second graphene film coated with the polymer membrane onto the polymer membrane coated on the first graphene film, wherein the second graphene film is electrically connected to the metal electrode to which the first graphene film is not connected.
The method according to claim 1, wherein the synthesizing the first graphene film includes: growing graphene films on both surfaces of the metal foil; and removing the graphene film grown on one surface of the metal foil, wherein the first graphene film is the graphene film not removed.
The method according to claim 1, further comprising: coating a part of the oxide film and one of the metal electrode with a polymer membrane, before transferring the first graphene film.
The method according to claim 1, further comprising: heating the polymer membrane, after transferring the first graphene film.
The graphene electro-optic modulator according to claim 1 0, wherein the PMMA has a molecular weight of 996 K.
A graphene electro-optic modulator for modulating a light according to an electric signal, comprising: an oxide film formed on a substrate; two metal electrodes disposed on the oxide film to be spaced apart from each other; a first graphene film transferred onto the oxide film; and a first polymer membrane coated on the graphene film, wherein the first graphene film is electrically connected to any one of the two metal electrodes.
The graphene electr o -optic modulator according to claim 7, further comprising: a second graphene film transferred onto the first polymer membrane; and a second polymer membrane coated on the second graphene film, wherein the second graphene film is electrically connected to the metal electrode to which the first graphene film is not connected.
The graphene electro-optic modulator according to claim 7, further comprising: a second polymer membrane provided between the first graphene film and the oxide film.
The graphene electro-optic modulator according to claim 7, wherein the first polymer membrane is made of poly(meth)acrylates (PMMA).
A system, comprising: a graphene electro-optic modulator defined in claim 7; an oscillator configured to oscillate a light signal; a generator configured to generate the electric signal; an amplifier configured to amplify the electric signal; a bias tee configured to apply a bias voltage to the electro-optic modulator based on the electric signal; and an optical waveguide having a core and a cladding layer, wherein the cladding layer is at least partially polished, and the graphene electro-optic modulator is in contact with the polished portion of the cladding layer.
Layer stacks claimed or described, ordered top of device to substrate.
graphene electro-optic modulator (single graphene layer)
graphene electro-optic modulator (dual graphene layer)
Materials described outside the worked examples.
graphene film
C
polymer membrane
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 1 0 A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
light extinction ratio | 20 dB | — |
operating speed |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,481,419Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 0 A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the …
FIG. 2 is a diagram schematically showing an operation principle of the electro-optic modulator according to an embodiment of the present disclosure.
FIG. 3 is a schematic view for illustrating a method for manufacturing an electro-optic modulator according to an embodiment of the present disclosure.
FIGS. 4A to 4 C are diagrams showing a preprocessing process applied to transfer a graphene film and its result according to an embodiment of the present …
FIGS. 5A and 5B are diagrams showing results according to the graphene film transferring conditions according to an embodiment of the present disclosure.
FIGS. 6A and 6B are photographs obtained through the TEM analysis on the transferred graphene film according to an embodiment of the present disclosure.
FIG. 7 is a photograph showing a cross section of an electro-optic modulator having two graphene films, obtained through the SEM analysis, according to an …
FIG. 8 is a diagram showing an optical system for analyzing characteristics of the electro-optic modulator according to an embodiment of the present disclosure.
FIGS. 9A to 9 C are diagrams showing an overall portion and a partial portion of a system, designed according to the system diagram of
FIGS. 10A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the present …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for manufacturing a graphene electr o -optic modulator that modulates a light according to an electric signal, the method comprising: forming two metal electrodes on an oxide film formed on a substrate, the two metal electrodes being spaced apart from each other; synthesizing a first graphene film at a metal foil; coating the first graphene film with a polymer membrane; removing the metal foil at which the first graphene film is synthesized; and transferring the first graphene film coated with the polymer membrane onto the oxide film, wherein the first graphene film is electrically connected to any one of the two metal electrodes.
The method according to claim 1, further comprising: synthesizing a second graphene film at a metal foil; coating the second graphene film with a polymer membrane; removing the metal foil at which the second graphene film is synthesized; and transferring the second graphene film coated with the polymer membrane onto the polymer membrane coated on the first graphene film, wherein the second graphene film is electrically connected to the metal electrode to which the first graphene film is not connected.
The method according to claim 1, wherein the synthesizing the first graphene film includes: growing graphene films on both surfaces of the metal foil; and removing the graphene film grown on one surface of the metal foil, wherein the first graphene film is the graphene film not removed.
The method according to claim 1, further comprising: coating a part of the oxide film and one of the metal electrode with a polymer membrane, before transferring the first graphene film.
The method according to claim 1, further comprising: heating the polymer membrane, after transferring the first graphene film.
The graphene electro-optic modulator according to claim 1 0, wherein the PMMA has a molecular weight of 996 K.
A graphene electro-optic modulator for modulating a light according to an electric signal, comprising: an oxide film formed on a substrate; two metal electrodes disposed on the oxide film to be spaced apart from each other; a first graphene film transferred onto the oxide film; and a first polymer membrane coated on the graphene film, wherein the first graphene film is electrically connected to any one of the two metal electrodes.
The graphene electr o -optic modulator according to claim 7, further comprising: a second graphene film transferred onto the first polymer membrane; and a second polymer membrane coated on the second graphene film, wherein the second graphene film is electrically connected to the metal electrode to which the first graphene film is not connected.
The graphene electro-optic modulator according to claim 7, further comprising: a second polymer membrane provided between the first graphene film and the oxide film.
The graphene electro-optic modulator according to claim 7, wherein the first polymer membrane is made of poly(meth)acrylates (PMMA).
A system, comprising: a graphene electro-optic modulator defined in claim 7; an oscillator configured to oscillate a light signal; a generator configured to generate the electric signal; an amplifier configured to amplify the electric signal; a bias tee configured to apply a bias voltage to the electro-optic modulator based on the electric signal; and an optical waveguide having a core and a cladding layer, wherein the cladding layer is at least partially polished, and the graphene electro-optic modulator is in contact with the polished portion of the cladding layer.
Layer stacks claimed or described, ordered top of device to substrate.
graphene electro-optic modulator (single graphene layer)
graphene electro-optic modulator (dual graphene layer)
Materials described outside the worked examples.
graphene film
C
polymer membrane
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIGS. 1 0 A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
light extinction ratio | 20 dB | — |
operating speed |
Related documents with shared materials, methods, properties, or citations.
graphene electro-optic modulator system with D-shaped optical fiber
metal foil
oxide film
poly(meth)acrylates (PMMA)
FIGS. 4A to 4 C are diagrams showing a preprocessing process applied to transfer a graphene film and its result according to an embodiment of the present …
FIGS. 6A and 6B are photographs obtained through the TEM analysis on the transferred graphene film according to an embodiment of the present disclosure.
FIG. 7 is a photograph showing a cross section of an electro-optic modulator having two graphene films, obtained through the SEM analysis, according to an …
FIGS. 10A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the present …
| — |
first graphene film area | 60 mm2 | C |
PMMA molecular weight | 996 K | poly(meth)acrylates (PMMA) |
Voltage | 10–40 V | — |
graphene electro-optic modulator system with D-shaped optical fiber
metal foil
oxide film
poly(meth)acrylates (PMMA)
FIGS. 4A to 4 C are diagrams showing a preprocessing process applied to transfer a graphene film and its result according to an embodiment of the present …
FIGS. 6A and 6B are photographs obtained through the TEM analysis on the transferred graphene film according to an embodiment of the present disclosure.
FIG. 7 is a photograph showing a cross section of an electro-optic modulator having two graphene films, obtained through the SEM analysis, according to an …
FIGS. 10A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the present …
| — |
first graphene film area | 60 mm2 | C |
PMMA molecular weight | 996 K | poly(meth)acrylates (PMMA) |
Voltage | 10–40 V | — |
graphene electro-optic modulator system with D-shaped optical fiber
metal foil
oxide film
poly(meth)acrylates (PMMA)
FIGS. 4A to 4 C are diagrams showing a preprocessing process applied to transfer a graphene film and its result according to an embodiment of the present …
FIGS. 6A and 6B are photographs obtained through the TEM analysis on the transferred graphene film according to an embodiment of the present disclosure.
FIG. 7 is a photograph showing a cross section of an electro-optic modulator having two graphene films, obtained through the SEM analysis, according to an …
FIGS. 10A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the present …
| — |
first graphene film area | 60 mm2 | C |
PMMA molecular weight | 996 K | poly(meth)acrylates (PMMA) |
Voltage | 10–40 V | — |
graphene electro-optic modulator system with D-shaped optical fiber
metal foil
oxide film
poly(meth)acrylates (PMMA)
FIGS. 4A to 4 C are diagrams showing a preprocessing process applied to transfer a graphene film and its result according to an embodiment of the present …
FIGS. 6A and 6B are photographs obtained through the TEM analysis on the transferred graphene film according to an embodiment of the present disclosure.
FIG. 7 is a photograph showing a cross section of an electro-optic modulator having two graphene films, obtained through the SEM analysis, according to an …
FIGS. 10A to 10 F are diagrams showing results of measuring the operation performance of the electro-optic modulator according to an embodiment of the present …
| — |
first graphene film area | 60 mm2 | C |
PMMA molecular weight | 996 K | poly(meth)acrylates (PMMA) |
Voltage | 10–40 V | — |