Patent
US 8,138,494n-type GaN series superlattice structure
n-type GaN layer
GaN
aluminum indium gallium nitride layer
AlInGaN
InGaN layer
InGaN
GaN series buffer layer
first n-type GaN series superlattice structure layer
first n-type GaN series layer
second n-type GaN series superlattice structure layer
second n-type GaN series superlattice structure (interface blocking)
third n-type GaN series layer
n-type GaN series superlattice structure
n-type GaN layer
GaN
aluminum indium gallium nitride layer
AlInGaN
InGaN layer
InGaN
GaN series buffer layer
first n-type GaN series superlattice structure layer
first n-type GaN series layer
second n-type GaN series superlattice structure layer
second n-type GaN series superlattice structure (interface blocking)
third n-type GaN series layer
n-type GaN series superlattice structure
n-type GaN layer
GaN
aluminum indium gallium nitride layer
AlInGaN
InGaN layer
InGaN
GaN series buffer layer
first n-type GaN series superlattice structure layer
first n-type GaN series layer
second n-type GaN series superlattice structure layer
second n-type GaN series superlattice structure (interface blocking)
third n-type GaN series layer
n-type GaN series superlattice structure
n-type GaN layer
GaN
aluminum indium gallium nitride layer
AlInGaN
InGaN layer
InGaN
GaN series buffer layer
first n-type GaN series superlattice structure layer
first n-type GaN series layer
second n-type GaN series superlattice structure layer
second n-type GaN series superlattice structure (interface blocking)
third n-type GaN series layer