Title GRAPHENE W INDOWS, M ETHO D S FOR MAKING SAME, AND DEVIC E S CONTAINING S AME F 11A Figure 118

and Declarations under Rule 4.17

Patent

Atlas literature

Patent

US 8,778,197

Title GRAPHENE W INDOWS, M ETHO D S FOR MAKING SAME, AND DEVIC E S CONTAINING S AME F 11A Figure 118

William Neil Everett, Joseph F. Pinkerton, William Martin Lackowski

28 June 2012·US

Drawings

Patent drawings and their descriptions. Click a drawing to enlarge it.

FIG. 1

FIG. 1I, the photores ist 103 is dissolved and the polymer residue is rinsed, which leaves behind the suspended graphene window 108. 1 00821 Using high purity …

FIG. 2

FIG. 2 is a SEM i mage of a-575 pm span of free-standing, single-layer graphene supported on etched Cu foil made using the scheme depicted in FIGS. IA-11 1 …

FIG. 3

FIG. 3 is a SEM image of an a rray of-100 p m circular spans of free-standing, single- layer graphene supported on etched Cu foil made using the scheme …

FIG. 4

FIG. 4 is a SEM i mage of a span in clean, free-standing, s in gle- layer graphene prepared with ultra-pure (99 999%) Cu foil made us in g the scheme depicted …

FIG. 5

FIG. 5 i s a higher magniﬁcation view of the SEM image of

FIG. 6

FIG. 6F, a process is performed to align and photo l ithographically pattern photoresist 608 on the backside of the graphene-modiﬁed foil As shown in

FIG. 7

FIG. 7E, photo l ithographically is used to pattern resist 706 to allow exposed region 707 of the graphene to be etched away. As sho w n in

FIG. 8

FIGS. 8A-8C are SEM i mages of nanoscale impurities remaining after complet in g the fabrication of free-stand in g, single-layer graphene spans made us in g …

FIG. 9

FIG. 9D, photo li thography is used to pattern ph otor esist 904 As shown in

FIG. 10

FIG. 10 i s an SEM i mage of an isolated Cu island formed on a suspended graphene structure made us in g the scheme dep ic ted in

FIG. 12

FIG. 12B, by etching through the exposed metal foil regions 1203, in dividualized arrays of free-stand in g graphene 1204 and 1207 can be produced …

FIG. 13

FIG. 13E) the graphene and provide high current-carrying capacity to, or away from, the graphene structures Additionally, this type of approach i s useful for …

FIG. 14

FIG. 14 i llustrates a high current grap h ene switch that uses a graphene window assembly that is mated with an insulator-conductor assembly 1 0073 1 FI G 15 …

FIG. 15

FIG. 15 is an SEM of a high current graphene switch.

FIG. 91

process tool top view

FIG. 91 is a top view of an isolated Cu feature 908 adhered to the graphene window 909 in the center of CVD grown graphene 902A on the Cu foil support 1 0098 1 …

Claims

Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.

46 independent · 15 dependent

1
Independentmetal foilgraphenepolymergraphene window
A method comprising: a. selecting a metal foil having a ﬁrst face and a second face, wherein the metal foil is comprises at least 99.8 % by weight of metal; b. growing a ﬁrst layer of graphene on the ﬁrst face of the metal foil to form a graphene-modiﬁed foil, wherein the second face of the graphene-modiﬁed foil is selected from the group consisting of i. a second layer of graphene on the second face of the metal foil, wherein the second layer of graphene was grown during the step of growing the ﬁrst layer of graphene, and ii. the second face of the metal foil; c. patterning the second face of the graphene-modiﬁed foil with a polymer, wherein the second face of the graphene-modiﬁed foil has an exposed region; d. etching the second face of the graphene-modiﬁed foil in the exposed region until exposing the ﬁrst layer of graphene, wherein a graphene window is formed.
1. 2
  Dependent← claim 1metal foil
  The method of Claim 1, wherein the metal foil is thermally annealed before growing the ﬁrst layer of graphene.
2. 6
  Dependent← claim 1Cu
  The method of Claim 1, wherein the metal of the metal foil is Cu.
3. 7
  Dependent← claim 1graphene
  The method of Claim 1, wherein the graphene is grown by CVD. 8-14..
4. 15
  Dependent← claim 1metal foil
  The method of Claim 1 further comprising: a. before the step of growing the ﬁrst layer of graphene, applying a protective coating on the second face of the metal foil, wherein the protective coating SVG 14006045.05-05-2014.HUUB₈U₂RPXXIFW3.CLM₁7347594.1.1331.150.2267.332.svg 0.607 3.12 Graph Black and white prevents graphene from growing on the second face of the metal foil during the step of growing the ﬁrst layer of graphene; b. removing the protective coating from the second face of the metal foil such that the second face of the graphene-modiﬁed foil is the second face of the metal foil.
5. 16
  Dependent← claim 1graphene
  The method of Claim 1 further comprising: a. growing the second layer of graphene on the second face of the metal foil during the step of growing the ﬁrst layer of graphene; and b. removing the second layer of graphene on the second face before the step of patterning, such that the second face of the graphene-modiﬁed foil is the second face of the metal foil.
6. 17
  Dependent← claim 1metal foil
  The method of Claim 1, wherein the metal foil comprises at least 99.99% by weight of the metal. previously presented
7. 19
  Dependent← claim 1graphene
  The method of Claim 1 further comprising depositing a material on the graphene on the ﬁrst face of the graphene-modiﬁed foil before the step of patterning the second face of the graphene-modiﬁed foil with a polymer. 20-23..
8. 26
  Dependent← claim 1metal foil
  The method of Claim 1, wherein the metal foil has native or SVG 14006045.05-05-2014.HUUB₈U₂RPXXIFW3.CLM₁7347595.1.1331.150.2267.332.svg 0.607 3.12 Graph Black and white doped impurities. previously presented
3
Independentmetal foilgraphenepolymergraphene window
A method comprising: a. selecting a metal foil having a ﬁrst face and a second face; b. thermally annealing the metal foil; SVG 14006045.05-05-2014.HUUB₈U₂RPXXIFW3.CLM₁7347593.1.1331.150.2267.332.svg 0.607 3.12 Graph Black and white c. after the step of annealing the metal foil, growing a ﬁrst layer of graphene on the ﬁrst face of the metal foil to form a graphene-modiﬁed foil, wherein the second face of the graphene-modiﬁed foil is selected from the group consisting of i. a second layer of graphene on the second face of the metal foil, wherein the second layer of graphene was grown during the step of growing the ﬁrst layer of graphene, and ii. the second face of the metal foil; d. patterning the second face of the graphene-modiﬁed foil with a polymer, wherein the second face of the graphene-modiﬁed foil has an exposed region; e. etching the second face of the graphene-modiﬁed foil in the exposed region until exposing the ﬁrst layer of graphene, wherein a graphene window is formed.
1. 59
  Dependent← claim 3metal foil
  The method of Claim 3, wherein the metal of
2. 60
  Dependent← claim 3graphene
  The method of Claim 3, wherein the graphene
3. 61
  Dependent← claim 3grapheneCu
  The method of Claim 3 further comprising: a. second face of the metal foil during the step of removing the second layer of graphene on the second face of the graphene-modiﬁed foil is the metal foil is Cu. is grown by CVD. growing the second layer of graphene on the growing the ﬁrst layer of graphene; and b. second face before the step of patterning, such that the second face of the metal foil.
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Device structures

Layer stacks claimed or described, ordered top of device to substrate.

graphene window

graphenemembrane/window

metal foilsupport

Materials

Materials described outside the worked examples.

metal foil

Substrate For Graphene Growth

graphene

Graphene Window Material

Process steps

Additional fabrication and treatment steps described in the patent.

Cvd Growth

Step 1

Process details

notes:Graphene grown on first face of metal foil by CVD; optional second layer grown simultaneously on second face

substrate:metal foil (high purity, ≥99.8 wt% metal)

Materials:graphene

Characterization

Measurements and analyses referenced in the patent, with their drawing references.

sem

SEM

FIG. 2 is a SEM i mage of a-575 pm span of free-standing, single-layer graphene supported on etched Cu foil made using the scheme depicted in FIGS. IA-11 1 …

Figure references

FIG. 2

graphenegraphene

Why these are connected

Related documents with shared materials, methods, properties, or citations.

Title GRAPHENE W INDOWS, M ETHO D S FOR MAKING SAME, AND DEVIC E S CONTAINING S AME F 11A Figure 118 | Matter42 Literature