Patent
US 8,418,547Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER
Jeffrey William Kysar, James Hone, Changgu Lee, Xiaoding Wei
THE CITY OF NEW YORK·US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 8,418,547Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
FIG. 2B is an example of Maximum stress and deflection of graphene 10 membrane versus normalized radial distance at maximum loading (simulation based on …
FIG. 3 B is an example of a 15 histogram of film pretensions. Dashed lines in both plots represent Gaussian fits to data. The effective Young's modulus and …
FIGS. 4A and 4 B illustrate an example of fracture test results.
FIG. 5 B shows an example of graphene layer identification using Raman spectroscopy at 633 n m. The flakes marked I, II, and III include one, two, and three …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
FIG. 7A.
FIG. 8A shows an example of measured force vs. displacement for four sequential tests on a 1 p m diameter membrane. The lower curves show an 10 example of the …
FIG. 9 shows an example of load and deflection curves such as can be obtained from Eq. S4, and FEM simulation results with both linear and nonlinear elasticity …
FIG. 10 shows an example of non-linear elastic properties of graphene 20 (dashed line) that can be deduced from analysis of experiments. In this example, the …
FIG. 11 shows an example of maximum stress vs. load curves, such as can be obtained from Eq. S5, and FEM simulation results with both linear and 25 nonlinear …
FIG. 12 shows an example of a two-parameter cumulative Weibull probability distribution for analysis of breaking force distribution for 16.5 nm tip on Flake …
FIG. 13, for using such an apparatus, or both.
FIG. 14 shows an example of a method 1400, which can include acts for forming an apparatus such as shown in
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 3 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE IN THE CLAIMS 1. An apparatus comprising: a substrate, including a substantially circular well; a deformable sheet membrane, suspended over the well, the membrane configured to include a specified integer number of one or more monolayers; and a processor-readable storage medium ee ipr-isim g comprising: accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or p ressure; and instructions that, when performed by a processor, cause the processor to calibrate a transducer using the accompanying information about the deflection displacement response of the suspended membrane to the applied force or pressure.
The apparatus of claim 1, wherein the storage medium comprises accompanying information about at least one of a dimension of the well or a tension of the membrane.
The apparatus of claim 1, further comprising [[a]] the transducer configured to transduce a deflection of the membrane, for use with the accompanying information, to provide the measurement of the applied force or pressure.
The apparatus of claim 1, comprising a plurality of wells, included on the substrate, and corresponding suspended membranes.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 4 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 8. The apparatus of claim 1, wherein the membrane comprises graphene.
-4.
A method comprising: using a substrate including a substantially circular well; using a deformable sheet membrane that is suspended over the well, the membrane configured to include a specified integer number of monolayers; and calibrating a device using a deflection displacement response of the suspended membrane to an applied force or pressure.
The method of claim 10, comprising calibrating the device using (1) information about the suspended membrane or the substrate and (2) the deflection displacement response of the suspended membrane to an applied force or pressure.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 5 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 16. The method of claim 10, wherein using a deformable sheet membrane comprises using a material comprising graphene.
The method of claim 10, wherein the calibrating comprises: measuring a deflection of the membrane; and providing information about the deflection to a user or automated process.
The method of claim 10, wherein the calibrating the device comprises calibrating an atomic force microscope (AFM).
The method of claim 10, wherein the calibrating the device comprises calibrating a nanoindenter.
A method of claim 10, comprising: measuring at least one of a diameter of the well or a tension of the membrane; and providing a user or automated process with information about at least one of the diameter of the well or a tension of the membrane.
The method of claim [[1,]] 1Ac omprising using measured information about a diameter of the well in performing the calibrating.
The method of claim [[1,]] 1Ac omprising using measured information about a tension of the membrane in performing the calibrating.
The method of claim 13, comprising using measured information about the tension of the membrane in performing the calibrating, wherein the measured information is obtained using x-ray diffraction.
The method of claim 13, comprising using measured information about the tension of the membrane in performing the calibrating, wherein the measured information is obtained using Raman spectroscopy.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 6 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 23. A method comprising: providing an apparatus comprising: a substrate, including a substantially circular well; a deformable sheet graphene membrane, suspended over the well, the membrane configured to include a specified integer number of one or more graphene monolayers; and a storage medium comprising accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure, wherein the storage medium comprises accompanying information about a dimension of the well and a tension of the membrane; a transducer configured to transduce a deflection of the membrane, for use with the accompanying information, to provide the measurement of the applied force or pressure, wherein the transducer comprises at least one of an atomic force microscope (AFM) or a nanoindenter; and calibrating at least one of an atomic force microscope (AFM) device or a nanoindenter device, using (1) information about the suspended membrane or the substrate, including using measured information about a diameter of the well and measured information about a tension of the membrane obtained using at least one of x-ray diffraction or Raman spectroscopy, and (2) the deflection displacement response of the suspended membrane to an applied force or pressure, wherein the calibrating comprises measuring a deflection of the membrane; and providing information about the deflection to a user or automated process.
Embodiments described in the patent, grouped by the materials and process steps they use.
1 material
An apparatus comprising a substrate with a substantially circular well and a deformable graphene or other 2D sheet membrane suspended over the well, the membrane including a specified integer number of monolayers.
1 material
The apparatus of Example 1, optionally comprising accompanying information about at least one of a diameter of the well or a tension of the membrane.
No measurements recorded
The apparatus of Examples 1-2, optionally configured such that the accompanying information is provided in written form in a kit with the substrate and the membrane.
No measurements recorded
The apparatus of Examples 1-3, optionally configured such that the accompanying information is provided in stored electronic form.
No measurements recorded
The apparatus of Examples 1-4, optionally configured such that the accompanying information is provided in stored electronic form in a kit with the substrate and the membrane.
No measurements recorded
The apparatus of Examples 1-5, optionally comprising a transducer configured to transduce a deflection of the membrane.
No measurements recorded
The apparatus of Examples 1-6, optionally comprising a plurality of wells and corresponding suspended membranes.
1 material
A method comprising using a substrate with a substantially circular well, using a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, and calibrating a transducer using a force-response of the membrane.
No measurements recorded
The method of Example 8, optionally comprising using measured information about a diameter of the well in performing the calibrating.
No measurements recorded
The method of Examples 8-9, optionally comprising using measured information about a tension of the membrane in performing the calibrating.
No measurements recorded
The method of Examples 8-10, optionally comprising using measured information about the tension of the membrane obtained using x-ray diffraction in performing the calibrating.
No measurements recorded
The method of Examples 8-11, optionally comprising using measured information about the tension of the membrane obtained using Raman spectroscopy in performing the calibrating.
1 material
A method comprising using a substrate with a substantially circular well, using a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, measuring a deflection of the membrane, and providing information about the deflection to a user or automated process.
1 material
A method including providing a substrate with a substantially circular well, providing a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, measuring at least one of a diameter of the well or a tension of the membrane, and providing a user or automated process with that information.
Layer stacks claimed or described, ordered top of device to substrate.
suspended membrane force/pressure calibration apparatus
Materials described outside the worked examples.
graphene
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 20–100 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,418,547Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
FIG. 2B is an example of Maximum stress and deflection of graphene 10 membrane versus normalized radial distance at maximum loading (simulation based on …
FIG. 3 B is an example of a 15 histogram of film pretensions. Dashed lines in both plots represent Gaussian fits to data. The effective Young's modulus and …
FIGS. 4A and 4 B illustrate an example of fracture test results.
FIG. 5 B shows an example of graphene layer identification using Raman spectroscopy at 633 n m. The flakes marked I, II, and III include one, two, and three …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
FIG. 7A.
FIG. 8A shows an example of measured force vs. displacement for four sequential tests on a 1 p m diameter membrane. The lower curves show an 10 example of the …
FIG. 9 shows an example of load and deflection curves such as can be obtained from Eq. S4, and FEM simulation results with both linear and nonlinear elasticity …
FIG. 10 shows an example of non-linear elastic properties of graphene 20 (dashed line) that can be deduced from analysis of experiments. In this example, the …
FIG. 11 shows an example of maximum stress vs. load curves, such as can be obtained from Eq. S5, and FEM simulation results with both linear and 25 nonlinear …
FIG. 12 shows an example of a two-parameter cumulative Weibull probability distribution for analysis of breaking force distribution for 16.5 nm tip on Flake …
FIG. 13, for using such an apparatus, or both.
FIG. 14 shows an example of a method 1400, which can include acts for forming an apparatus such as shown in
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 3 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE IN THE CLAIMS 1. An apparatus comprising: a substrate, including a substantially circular well; a deformable sheet membrane, suspended over the well, the membrane configured to include a specified integer number of one or more monolayers; and a processor-readable storage medium ee ipr-isim g comprising: accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or p ressure; and instructions that, when performed by a processor, cause the processor to calibrate a transducer using the accompanying information about the deflection displacement response of the suspended membrane to the applied force or pressure.
The apparatus of claim 1, wherein the storage medium comprises accompanying information about at least one of a dimension of the well or a tension of the membrane.
The apparatus of claim 1, further comprising [[a]] the transducer configured to transduce a deflection of the membrane, for use with the accompanying information, to provide the measurement of the applied force or pressure.
The apparatus of claim 1, comprising a plurality of wells, included on the substrate, and corresponding suspended membranes.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 4 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 8. The apparatus of claim 1, wherein the membrane comprises graphene.
-4.
A method comprising: using a substrate including a substantially circular well; using a deformable sheet membrane that is suspended over the well, the membrane configured to include a specified integer number of monolayers; and calibrating a device using a deflection displacement response of the suspended membrane to an applied force or pressure.
The method of claim 10, comprising calibrating the device using (1) information about the suspended membrane or the substrate and (2) the deflection displacement response of the suspended membrane to an applied force or pressure.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 5 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 16. The method of claim 10, wherein using a deformable sheet membrane comprises using a material comprising graphene.
The method of claim 10, wherein the calibrating comprises: measuring a deflection of the membrane; and providing information about the deflection to a user or automated process.
The method of claim 10, wherein the calibrating the device comprises calibrating an atomic force microscope (AFM).
The method of claim 10, wherein the calibrating the device comprises calibrating a nanoindenter.
A method of claim 10, comprising: measuring at least one of a diameter of the well or a tension of the membrane; and providing a user or automated process with information about at least one of the diameter of the well or a tension of the membrane.
The method of claim [[1,]] 1Ac omprising using measured information about a diameter of the well in performing the calibrating.
The method of claim [[1,]] 1Ac omprising using measured information about a tension of the membrane in performing the calibrating.
The method of claim 13, comprising using measured information about the tension of the membrane in performing the calibrating, wherein the measured information is obtained using x-ray diffraction.
The method of claim 13, comprising using measured information about the tension of the membrane in performing the calibrating, wherein the measured information is obtained using Raman spectroscopy.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 6 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 23. A method comprising: providing an apparatus comprising: a substrate, including a substantially circular well; a deformable sheet graphene membrane, suspended over the well, the membrane configured to include a specified integer number of one or more graphene monolayers; and a storage medium comprising accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure, wherein the storage medium comprises accompanying information about a dimension of the well and a tension of the membrane; a transducer configured to transduce a deflection of the membrane, for use with the accompanying information, to provide the measurement of the applied force or pressure, wherein the transducer comprises at least one of an atomic force microscope (AFM) or a nanoindenter; and calibrating at least one of an atomic force microscope (AFM) device or a nanoindenter device, using (1) information about the suspended membrane or the substrate, including using measured information about a diameter of the well and measured information about a tension of the membrane obtained using at least one of x-ray diffraction or Raman spectroscopy, and (2) the deflection displacement response of the suspended membrane to an applied force or pressure, wherein the calibrating comprises measuring a deflection of the membrane; and providing information about the deflection to a user or automated process.
Embodiments described in the patent, grouped by the materials and process steps they use.
1 material
An apparatus comprising a substrate with a substantially circular well and a deformable graphene or other 2D sheet membrane suspended over the well, the membrane including a specified integer number of monolayers.
1 material
The apparatus of Example 1, optionally comprising accompanying information about at least one of a diameter of the well or a tension of the membrane.
No measurements recorded
The apparatus of Examples 1-2, optionally configured such that the accompanying information is provided in written form in a kit with the substrate and the membrane.
No measurements recorded
The apparatus of Examples 1-3, optionally configured such that the accompanying information is provided in stored electronic form.
No measurements recorded
The apparatus of Examples 1-4, optionally configured such that the accompanying information is provided in stored electronic form in a kit with the substrate and the membrane.
No measurements recorded
The apparatus of Examples 1-5, optionally comprising a transducer configured to transduce a deflection of the membrane.
No measurements recorded
The apparatus of Examples 1-6, optionally comprising a plurality of wells and corresponding suspended membranes.
1 material
A method comprising using a substrate with a substantially circular well, using a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, and calibrating a transducer using a force-response of the membrane.
No measurements recorded
The method of Example 8, optionally comprising using measured information about a diameter of the well in performing the calibrating.
No measurements recorded
The method of Examples 8-9, optionally comprising using measured information about a tension of the membrane in performing the calibrating.
No measurements recorded
The method of Examples 8-10, optionally comprising using measured information about the tension of the membrane obtained using x-ray diffraction in performing the calibrating.
No measurements recorded
The method of Examples 8-11, optionally comprising using measured information about the tension of the membrane obtained using Raman spectroscopy in performing the calibrating.
1 material
A method comprising using a substrate with a substantially circular well, using a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, measuring a deflection of the membrane, and providing information about the deflection to a user or automated process.
1 material
A method including providing a substrate with a substantially circular well, providing a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, measuring at least one of a diameter of the well or a tension of the membrane, and providing a user or automated process with that information.
Layer stacks claimed or described, ordered top of device to substrate.
suspended membrane force/pressure calibration apparatus
Materials described outside the worked examples.
graphene
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 20–100 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,418,547Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
FIG. 2B is an example of Maximum stress and deflection of graphene 10 membrane versus normalized radial distance at maximum loading (simulation based on …
FIG. 3 B is an example of a 15 histogram of film pretensions. Dashed lines in both plots represent Gaussian fits to data. The effective Young's modulus and …
FIGS. 4A and 4 B illustrate an example of fracture test results.
FIG. 5 B shows an example of graphene layer identification using Raman spectroscopy at 633 n m. The flakes marked I, II, and III include one, two, and three …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
FIG. 7A.
FIG. 8A shows an example of measured force vs. displacement for four sequential tests on a 1 p m diameter membrane. The lower curves show an 10 example of the …
FIG. 9 shows an example of load and deflection curves such as can be obtained from Eq. S4, and FEM simulation results with both linear and nonlinear elasticity …
FIG. 10 shows an example of non-linear elastic properties of graphene 20 (dashed line) that can be deduced from analysis of experiments. In this example, the …
FIG. 11 shows an example of maximum stress vs. load curves, such as can be obtained from Eq. S5, and FEM simulation results with both linear and 25 nonlinear …
FIG. 12 shows an example of a two-parameter cumulative Weibull probability distribution for analysis of breaking force distribution for 16.5 nm tip on Flake …
FIG. 13, for using such an apparatus, or both.
FIG. 14 shows an example of a method 1400, which can include acts for forming an apparatus such as shown in
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 3 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE IN THE CLAIMS 1. An apparatus comprising: a substrate, including a substantially circular well; a deformable sheet membrane, suspended over the well, the membrane configured to include a specified integer number of one or more monolayers; and a processor-readable storage medium ee ipr-isim g comprising: accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or p ressure; and instructions that, when performed by a processor, cause the processor to calibrate a transducer using the accompanying information about the deflection displacement response of the suspended membrane to the applied force or pressure.
The apparatus of claim 1, wherein the storage medium comprises accompanying information about at least one of a dimension of the well or a tension of the membrane.
The apparatus of claim 1, further comprising [[a]] the transducer configured to transduce a deflection of the membrane, for use with the accompanying information, to provide the measurement of the applied force or pressure.
The apparatus of claim 1, comprising a plurality of wells, included on the substrate, and corresponding suspended membranes.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 4 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 8. The apparatus of claim 1, wherein the membrane comprises graphene.
-4.
A method comprising: using a substrate including a substantially circular well; using a deformable sheet membrane that is suspended over the well, the membrane configured to include a specified integer number of monolayers; and calibrating a device using a deflection displacement response of the suspended membrane to an applied force or pressure.
The method of claim 10, comprising calibrating the device using (1) information about the suspended membrane or the substrate and (2) the deflection displacement response of the suspended membrane to an applied force or pressure.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 5 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 16. The method of claim 10, wherein using a deformable sheet membrane comprises using a material comprising graphene.
The method of claim 10, wherein the calibrating comprises: measuring a deflection of the membrane; and providing information about the deflection to a user or automated process.
The method of claim 10, wherein the calibrating the device comprises calibrating an atomic force microscope (AFM).
The method of claim 10, wherein the calibrating the device comprises calibrating a nanoindenter.
A method of claim 10, comprising: measuring at least one of a diameter of the well or a tension of the membrane; and providing a user or automated process with information about at least one of the diameter of the well or a tension of the membrane.
The method of claim [[1,]] 1Ac omprising using measured information about a diameter of the well in performing the calibrating.
The method of claim [[1,]] 1Ac omprising using measured information about a tension of the membrane in performing the calibrating.
The method of claim 13, comprising using measured information about the tension of the membrane in performing the calibrating, wherein the measured information is obtained using x-ray diffraction.
The method of claim 13, comprising using measured information about the tension of the membrane in performing the calibrating, wherein the measured information is obtained using Raman spectroscopy.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 6 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 23. A method comprising: providing an apparatus comprising: a substrate, including a substantially circular well; a deformable sheet graphene membrane, suspended over the well, the membrane configured to include a specified integer number of one or more graphene monolayers; and a storage medium comprising accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure, wherein the storage medium comprises accompanying information about a dimension of the well and a tension of the membrane; a transducer configured to transduce a deflection of the membrane, for use with the accompanying information, to provide the measurement of the applied force or pressure, wherein the transducer comprises at least one of an atomic force microscope (AFM) or a nanoindenter; and calibrating at least one of an atomic force microscope (AFM) device or a nanoindenter device, using (1) information about the suspended membrane or the substrate, including using measured information about a diameter of the well and measured information about a tension of the membrane obtained using at least one of x-ray diffraction or Raman spectroscopy, and (2) the deflection displacement response of the suspended membrane to an applied force or pressure, wherein the calibrating comprises measuring a deflection of the membrane; and providing information about the deflection to a user or automated process.
Embodiments described in the patent, grouped by the materials and process steps they use.
1 material
An apparatus comprising a substrate with a substantially circular well and a deformable graphene or other 2D sheet membrane suspended over the well, the membrane including a specified integer number of monolayers.
1 material
The apparatus of Example 1, optionally comprising accompanying information about at least one of a diameter of the well or a tension of the membrane.
No measurements recorded
The apparatus of Examples 1-2, optionally configured such that the accompanying information is provided in written form in a kit with the substrate and the membrane.
No measurements recorded
The apparatus of Examples 1-3, optionally configured such that the accompanying information is provided in stored electronic form.
No measurements recorded
The apparatus of Examples 1-4, optionally configured such that the accompanying information is provided in stored electronic form in a kit with the substrate and the membrane.
No measurements recorded
The apparatus of Examples 1-5, optionally comprising a transducer configured to transduce a deflection of the membrane.
No measurements recorded
The apparatus of Examples 1-6, optionally comprising a plurality of wells and corresponding suspended membranes.
1 material
A method comprising using a substrate with a substantially circular well, using a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, and calibrating a transducer using a force-response of the membrane.
No measurements recorded
The method of Example 8, optionally comprising using measured information about a diameter of the well in performing the calibrating.
No measurements recorded
The method of Examples 8-9, optionally comprising using measured information about a tension of the membrane in performing the calibrating.
No measurements recorded
The method of Examples 8-10, optionally comprising using measured information about the tension of the membrane obtained using x-ray diffraction in performing the calibrating.
No measurements recorded
The method of Examples 8-11, optionally comprising using measured information about the tension of the membrane obtained using Raman spectroscopy in performing the calibrating.
1 material
A method comprising using a substrate with a substantially circular well, using a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, measuring a deflection of the membrane, and providing information about the deflection to a user or automated process.
1 material
A method including providing a substrate with a substantially circular well, providing a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, measuring at least one of a diameter of the well or a tension of the membrane, and providing a user or automated process with that information.
Layer stacks claimed or described, ordered top of device to substrate.
suspended membrane force/pressure calibration apparatus
Materials described outside the worked examples.
graphene
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 20–100 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 8,418,547Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
FIG. 2B is an example of Maximum stress and deflection of graphene 10 membrane versus normalized radial distance at maximum loading (simulation based on …
FIG. 3 B is an example of a 15 histogram of film pretensions. Dashed lines in both plots represent Gaussian fits to data. The effective Young's modulus and …
FIGS. 4A and 4 B illustrate an example of fracture test results.
FIG. 5 B shows an example of graphene layer identification using Raman spectroscopy at 633 n m. The flakes marked I, II, and III include one, two, and three …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
FIG. 7A.
FIG. 8A shows an example of measured force vs. displacement for four sequential tests on a 1 p m diameter membrane. The lower curves show an 10 example of the …
FIG. 9 shows an example of load and deflection curves such as can be obtained from Eq. S4, and FEM simulation results with both linear and nonlinear elasticity …
FIG. 10 shows an example of non-linear elastic properties of graphene 20 (dashed line) that can be deduced from analysis of experiments. In this example, the …
FIG. 11 shows an example of maximum stress vs. load curves, such as can be obtained from Eq. S5, and FEM simulation results with both linear and 25 nonlinear …
FIG. 12 shows an example of a two-parameter cumulative Weibull probability distribution for analysis of breaking force distribution for 16.5 nm tip on Flake …
FIG. 13, for using such an apparatus, or both.
FIG. 14 shows an example of a method 1400, which can include acts for forming an apparatus such as shown in
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 3 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE IN THE CLAIMS 1. An apparatus comprising: a substrate, including a substantially circular well; a deformable sheet membrane, suspended over the well, the membrane configured to include a specified integer number of one or more monolayers; and a processor-readable storage medium ee ipr-isim g comprising: accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or p ressure; and instructions that, when performed by a processor, cause the processor to calibrate a transducer using the accompanying information about the deflection displacement response of the suspended membrane to the applied force or pressure.
The apparatus of claim 1, wherein the storage medium comprises accompanying information about at least one of a dimension of the well or a tension of the membrane.
The apparatus of claim 1, further comprising [[a]] the transducer configured to transduce a deflection of the membrane, for use with the accompanying information, to provide the measurement of the applied force or pressure.
The apparatus of claim 1, comprising a plurality of wells, included on the substrate, and corresponding suspended membranes.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 4 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 8. The apparatus of claim 1, wherein the membrane comprises graphene.
-4.
A method comprising: using a substrate including a substantially circular well; using a deformable sheet membrane that is suspended over the well, the membrane configured to include a specified integer number of monolayers; and calibrating a device using a deflection displacement response of the suspended membrane to an applied force or pressure.
The method of claim 10, comprising calibrating the device using (1) information about the suspended membrane or the substrate and (2) the deflection displacement response of the suspended membrane to an applied force or pressure.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 5 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 16. The method of claim 10, wherein using a deformable sheet membrane comprises using a material comprising graphene.
The method of claim 10, wherein the calibrating comprises: measuring a deflection of the membrane; and providing information about the deflection to a user or automated process.
The method of claim 10, wherein the calibrating the device comprises calibrating an atomic force microscope (AFM).
The method of claim 10, wherein the calibrating the device comprises calibrating a nanoindenter.
A method of claim 10, comprising: measuring at least one of a diameter of the well or a tension of the membrane; and providing a user or automated process with information about at least one of the diameter of the well or a tension of the membrane.
The method of claim [[1,]] 1Ac omprising using measured information about a diameter of the well in performing the calibrating.
The method of claim [[1,]] 1Ac omprising using measured information about a tension of the membrane in performing the calibrating.
The method of claim 13, comprising using measured information about the tension of the membrane in performing the calibrating, wherein the measured information is obtained using x-ray diffraction.
The method of claim 13, comprising using measured information about the tension of the membrane in performing the calibrating, wherein the measured information is obtained using Raman spectroscopy.
AMENDMENT AND RESPONSE UNDER 37 C.F.R § 1.111 Page 6 Serial Number: 13/057,701 Dkt: 2413.099US₁ Filing Date: Title: FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE 23. A method comprising: providing an apparatus comprising: a substrate, including a substantially circular well; a deformable sheet graphene membrane, suspended over the well, the membrane configured to include a specified integer number of one or more graphene monolayers; and a storage medium comprising accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure, wherein the storage medium comprises accompanying information about a dimension of the well and a tension of the membrane; a transducer configured to transduce a deflection of the membrane, for use with the accompanying information, to provide the measurement of the applied force or pressure, wherein the transducer comprises at least one of an atomic force microscope (AFM) or a nanoindenter; and calibrating at least one of an atomic force microscope (AFM) device or a nanoindenter device, using (1) information about the suspended membrane or the substrate, including using measured information about a diameter of the well and measured information about a tension of the membrane obtained using at least one of x-ray diffraction or Raman spectroscopy, and (2) the deflection displacement response of the suspended membrane to an applied force or pressure, wherein the calibrating comprises measuring a deflection of the membrane; and providing information about the deflection to a user or automated process.
Embodiments described in the patent, grouped by the materials and process steps they use.
1 material
An apparatus comprising a substrate with a substantially circular well and a deformable graphene or other 2D sheet membrane suspended over the well, the membrane including a specified integer number of monolayers.
1 material
The apparatus of Example 1, optionally comprising accompanying information about at least one of a diameter of the well or a tension of the membrane.
No measurements recorded
The apparatus of Examples 1-2, optionally configured such that the accompanying information is provided in written form in a kit with the substrate and the membrane.
No measurements recorded
The apparatus of Examples 1-3, optionally configured such that the accompanying information is provided in stored electronic form.
No measurements recorded
The apparatus of Examples 1-4, optionally configured such that the accompanying information is provided in stored electronic form in a kit with the substrate and the membrane.
No measurements recorded
The apparatus of Examples 1-5, optionally comprising a transducer configured to transduce a deflection of the membrane.
No measurements recorded
The apparatus of Examples 1-6, optionally comprising a plurality of wells and corresponding suspended membranes.
1 material
A method comprising using a substrate with a substantially circular well, using a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, and calibrating a transducer using a force-response of the membrane.
No measurements recorded
The method of Example 8, optionally comprising using measured information about a diameter of the well in performing the calibrating.
No measurements recorded
The method of Examples 8-9, optionally comprising using measured information about a tension of the membrane in performing the calibrating.
No measurements recorded
The method of Examples 8-10, optionally comprising using measured information about the tension of the membrane obtained using x-ray diffraction in performing the calibrating.
No measurements recorded
The method of Examples 8-11, optionally comprising using measured information about the tension of the membrane obtained using Raman spectroscopy in performing the calibrating.
1 material
A method comprising using a substrate with a substantially circular well, using a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, measuring a deflection of the membrane, and providing information about the deflection to a user or automated process.
1 material
A method including providing a substrate with a substantially circular well, providing a deformable graphene or other 2D sheet membrane suspended over the well including a specified integer number of monolayers, measuring at least one of a diameter of the well or a tension of the membrane, and providing a user or automated process with that information.
Layer stacks claimed or described, ordered top of device to substrate.
suspended membrane force/pressure calibration apparatus
Materials described outside the worked examples.
graphene
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 20–100 nm | — |
Thickness |
Related documents with shared materials, methods, properties, or citations.
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
FIG. 5 B shows an example of graphene layer identification using Raman spectroscopy at 633 n m. The flakes marked I, II, and III include one, two, and three …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
| — |
Voltage | 1.05 -0.15v | — |
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
FIG. 5 B shows an example of graphene layer identification using Raman spectroscopy at 633 n m. The flakes marked I, II, and III include one, two, and three …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
| — |
Voltage | 1.05 -0.15v | — |
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
FIG. 5 B shows an example of graphene layer identification using Raman spectroscopy at 633 n m. The flakes marked I, II, and III include one, two, and three …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
| — |
Voltage | 1.05 -0.15v | — |
FIG. 1A is an example of a scanning electron micrograph (SEM) of a large graphene flake spanning an array of circular holes 1 p m and 1.5 m in 15 diameter, Area …
FIG. 5 B shows an example of graphene layer identification using Raman spectroscopy at 633 n m. The flakes marked I, II, and III include one, two, and three …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
FIG. 6B shows an example of a transmission electron micrograph (TEM) of tip #1 after nanoindentation. In this example, the small flake at the end of the tip is …
| — |
Voltage | 1.05 -0.15v | — |