Patent
US 9,868,105SPINEL-TYPE LITHIUM TITANIUM OXIDE/GRAPHENE COMPOSITE AND METHOD OF PREPARING THE SAME
Kwang Bum KIM
US
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US 9,868,105Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG 1 is a flowchart showing a process of preparing a Li₄Ti sO₁₂/graphene composite having a spinel structure according to one exemplary embodiment of the present invention;
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 3 showsa Raman spectra determining whether lithium titanium oxide is present on the Li₄Ti s O₁₂/graphene composite having a spinel structure 5 prepared according to one exemplary embodiment of the present invention;
FIG 4 is a transmission electron microscope (TEM) photographic diagram of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 5 is X-ray photoelectron spectoscopy(XPS) data analyzing a level 10 of reduction of graphene (C/O ratio) in the Li₄Ti s O₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 6 is a graph showing the capacity of an active material per unit weight of an electrode which is obtained through evaluation of charging/discharging 15 capacity of the Li₄Ti sO₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present …
FIG 7 shows the lifespan property of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing a transition metal oxide/graphene composite comp ri sing: (a) mixing a transition metal (M 1) salt, water and a solution of graphite oxide dispersed in a polyol solvent; (b) preparing a transition metal (M 1) oxide/graphene composite by applying microwaves to the mixed solution; and (c) preparing a transition metal (M₁M₂) oxide/graphene composite by applying microwaves to a solution obtained by mixing the transition metal (M 1) oxide/graphene composite with a transition metal (M₂) salt, wherein M 1 and M₂ are the same as or different from each other, and represent lithium, ruthenium, nickel, vanadium, cobalt, manganese, iron, or titanium. Original
The method of claim 1, wherein, in step (a), a powder of the graphite oxide is dispersed in the polyol solvent using sonication. Original
The method of claim 1, wherein, in step (a), the water is mixed at a content of 5 to 90 parts by weight, based on 100 parts by weight of the mixed solution. Original
The method of claim 1, wherein, in step (b), the microwaves have an oscillation frequency of 2.45 to 60 GHz. Original
The method of claim 1, wherein, in step (b), the transition metal (M 1) salt of step (a) is titanium salt, and a Ti O 2/graphene composite is formed by applying microwaves to a mixed solution containing the titanium salt to form titanium oxide nanoparticles on a surface of the graphene. Original
The method of claim 1, further comprising: washing and drying the transition metal (M 1) oxide/graphene composite prepared in step (b). Original
The method of claim 1, wherein the reaction in step (c) is performed for 10 to 30 minutes under microwaves having an oscillation frequency of 2.45 to 60 GHz. Original
The method of claim 1, wherein, in step (c), the transition metal (M₂) salt is lithium salt, and a Li 4 Ti 5 O 1 2/graphene composite is formed by applying microwaves to a mixed solution containing the lithium salt to form lithium titanium oxide nanoparticles on a surface of the graphene. Original
The method of claim 1, further comprising: subjecting the transition metal (M₁M₂) oxide/graphene composite to heat treatment under an argon atmosphere containing hydrogen. Original
Layer stacks claimed or described, ordered top of device to substrate.
lithium secondary battery anode
Materials described outside the worked examples.
transition metal (M₁M₂) oxide/graphene composite
graphene
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
TiO2 nanoparticle size range (claimed) | 2–10 nm | TiO₂ |
Li4Ti5O12 nanoparticle size range (claimed) | 5–30 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,868,105Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG 1 is a flowchart showing a process of preparing a Li₄Ti sO₁₂/graphene composite having a spinel structure according to one exemplary embodiment of the present invention;
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 3 showsa Raman spectra determining whether lithium titanium oxide is present on the Li₄Ti s O₁₂/graphene composite having a spinel structure 5 prepared according to one exemplary embodiment of the present invention;
FIG 4 is a transmission electron microscope (TEM) photographic diagram of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 5 is X-ray photoelectron spectoscopy(XPS) data analyzing a level 10 of reduction of graphene (C/O ratio) in the Li₄Ti s O₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 6 is a graph showing the capacity of an active material per unit weight of an electrode which is obtained through evaluation of charging/discharging 15 capacity of the Li₄Ti sO₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present …
FIG 7 shows the lifespan property of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing a transition metal oxide/graphene composite comp ri sing: (a) mixing a transition metal (M 1) salt, water and a solution of graphite oxide dispersed in a polyol solvent; (b) preparing a transition metal (M 1) oxide/graphene composite by applying microwaves to the mixed solution; and (c) preparing a transition metal (M₁M₂) oxide/graphene composite by applying microwaves to a solution obtained by mixing the transition metal (M 1) oxide/graphene composite with a transition metal (M₂) salt, wherein M 1 and M₂ are the same as or different from each other, and represent lithium, ruthenium, nickel, vanadium, cobalt, manganese, iron, or titanium. Original
The method of claim 1, wherein, in step (a), a powder of the graphite oxide is dispersed in the polyol solvent using sonication. Original
The method of claim 1, wherein, in step (a), the water is mixed at a content of 5 to 90 parts by weight, based on 100 parts by weight of the mixed solution. Original
The method of claim 1, wherein, in step (b), the microwaves have an oscillation frequency of 2.45 to 60 GHz. Original
The method of claim 1, wherein, in step (b), the transition metal (M 1) salt of step (a) is titanium salt, and a Ti O 2/graphene composite is formed by applying microwaves to a mixed solution containing the titanium salt to form titanium oxide nanoparticles on a surface of the graphene. Original
The method of claim 1, further comprising: washing and drying the transition metal (M 1) oxide/graphene composite prepared in step (b). Original
The method of claim 1, wherein the reaction in step (c) is performed for 10 to 30 minutes under microwaves having an oscillation frequency of 2.45 to 60 GHz. Original
The method of claim 1, wherein, in step (c), the transition metal (M₂) salt is lithium salt, and a Li 4 Ti 5 O 1 2/graphene composite is formed by applying microwaves to a mixed solution containing the lithium salt to form lithium titanium oxide nanoparticles on a surface of the graphene. Original
The method of claim 1, further comprising: subjecting the transition metal (M₁M₂) oxide/graphene composite to heat treatment under an argon atmosphere containing hydrogen. Original
Layer stacks claimed or described, ordered top of device to substrate.
lithium secondary battery anode
Materials described outside the worked examples.
transition metal (M₁M₂) oxide/graphene composite
graphene
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
TiO2 nanoparticle size range (claimed) | 2–10 nm | TiO₂ |
Li4Ti5O12 nanoparticle size range (claimed) | 5–30 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,868,105Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG 1 is a flowchart showing a process of preparing a Li₄Ti sO₁₂/graphene composite having a spinel structure according to one exemplary embodiment of the present invention;
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 3 showsa Raman spectra determining whether lithium titanium oxide is present on the Li₄Ti s O₁₂/graphene composite having a spinel structure 5 prepared according to one exemplary embodiment of the present invention;
FIG 4 is a transmission electron microscope (TEM) photographic diagram of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 5 is X-ray photoelectron spectoscopy(XPS) data analyzing a level 10 of reduction of graphene (C/O ratio) in the Li₄Ti s O₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 6 is a graph showing the capacity of an active material per unit weight of an electrode which is obtained through evaluation of charging/discharging 15 capacity of the Li₄Ti sO₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present …
FIG 7 shows the lifespan property of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing a transition metal oxide/graphene composite comp ri sing: (a) mixing a transition metal (M 1) salt, water and a solution of graphite oxide dispersed in a polyol solvent; (b) preparing a transition metal (M 1) oxide/graphene composite by applying microwaves to the mixed solution; and (c) preparing a transition metal (M₁M₂) oxide/graphene composite by applying microwaves to a solution obtained by mixing the transition metal (M 1) oxide/graphene composite with a transition metal (M₂) salt, wherein M 1 and M₂ are the same as or different from each other, and represent lithium, ruthenium, nickel, vanadium, cobalt, manganese, iron, or titanium. Original
The method of claim 1, wherein, in step (a), a powder of the graphite oxide is dispersed in the polyol solvent using sonication. Original
The method of claim 1, wherein, in step (a), the water is mixed at a content of 5 to 90 parts by weight, based on 100 parts by weight of the mixed solution. Original
The method of claim 1, wherein, in step (b), the microwaves have an oscillation frequency of 2.45 to 60 GHz. Original
The method of claim 1, wherein, in step (b), the transition metal (M 1) salt of step (a) is titanium salt, and a Ti O 2/graphene composite is formed by applying microwaves to a mixed solution containing the titanium salt to form titanium oxide nanoparticles on a surface of the graphene. Original
The method of claim 1, further comprising: washing and drying the transition metal (M 1) oxide/graphene composite prepared in step (b). Original
The method of claim 1, wherein the reaction in step (c) is performed for 10 to 30 minutes under microwaves having an oscillation frequency of 2.45 to 60 GHz. Original
The method of claim 1, wherein, in step (c), the transition metal (M₂) salt is lithium salt, and a Li 4 Ti 5 O 1 2/graphene composite is formed by applying microwaves to a mixed solution containing the lithium salt to form lithium titanium oxide nanoparticles on a surface of the graphene. Original
The method of claim 1, further comprising: subjecting the transition metal (M₁M₂) oxide/graphene composite to heat treatment under an argon atmosphere containing hydrogen. Original
Layer stacks claimed or described, ordered top of device to substrate.
lithium secondary battery anode
Materials described outside the worked examples.
transition metal (M₁M₂) oxide/graphene composite
graphene
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
TiO2 nanoparticle size range (claimed) | 2–10 nm | TiO₂ |
Li4Ti5O12 nanoparticle size range (claimed) | 5–30 nm |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,868,105Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG 1 is a flowchart showing a process of preparing a Li₄Ti sO₁₂/graphene composite having a spinel structure according to one exemplary embodiment of the present invention;
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 3 showsa Raman spectra determining whether lithium titanium oxide is present on the Li₄Ti s O₁₂/graphene composite having a spinel structure 5 prepared according to one exemplary embodiment of the present invention;
FIG 4 is a transmission electron microscope (TEM) photographic diagram of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 5 is X-ray photoelectron spectoscopy(XPS) data analyzing a level 10 of reduction of graphene (C/O ratio) in the Li₄Ti s O₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 6 is a graph showing the capacity of an active material per unit weight of an electrode which is obtained through evaluation of charging/discharging 15 capacity of the Li₄Ti sO₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present …
FIG 7 shows the lifespan property of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of preparing a transition metal oxide/graphene composite comp ri sing: (a) mixing a transition metal (M 1) salt, water and a solution of graphite oxide dispersed in a polyol solvent; (b) preparing a transition metal (M 1) oxide/graphene composite by applying microwaves to the mixed solution; and (c) preparing a transition metal (M₁M₂) oxide/graphene composite by applying microwaves to a solution obtained by mixing the transition metal (M 1) oxide/graphene composite with a transition metal (M₂) salt, wherein M 1 and M₂ are the same as or different from each other, and represent lithium, ruthenium, nickel, vanadium, cobalt, manganese, iron, or titanium. Original
The method of claim 1, wherein, in step (a), a powder of the graphite oxide is dispersed in the polyol solvent using sonication. Original
The method of claim 1, wherein, in step (a), the water is mixed at a content of 5 to 90 parts by weight, based on 100 parts by weight of the mixed solution. Original
The method of claim 1, wherein, in step (b), the microwaves have an oscillation frequency of 2.45 to 60 GHz. Original
The method of claim 1, wherein, in step (b), the transition metal (M 1) salt of step (a) is titanium salt, and a Ti O 2/graphene composite is formed by applying microwaves to a mixed solution containing the titanium salt to form titanium oxide nanoparticles on a surface of the graphene. Original
The method of claim 1, further comprising: washing and drying the transition metal (M 1) oxide/graphene composite prepared in step (b). Original
The method of claim 1, wherein the reaction in step (c) is performed for 10 to 30 minutes under microwaves having an oscillation frequency of 2.45 to 60 GHz. Original
The method of claim 1, wherein, in step (c), the transition metal (M₂) salt is lithium salt, and a Li 4 Ti 5 O 1 2/graphene composite is formed by applying microwaves to a mixed solution containing the lithium salt to form lithium titanium oxide nanoparticles on a surface of the graphene. Original
The method of claim 1, further comprising: subjecting the transition metal (M₁M₂) oxide/graphene composite to heat treatment under an argon atmosphere containing hydrogen. Original
Layer stacks claimed or described, ordered top of device to substrate.
lithium secondary battery anode
Materials described outside the worked examples.
transition metal (M₁M₂) oxide/graphene composite
graphene
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
TiO2 nanoparticle size range (claimed) | 2–10 nm | TiO₂ |
Li4Ti5O12 nanoparticle size range (claimed) | 5–30 nm |
Related documents with shared materials, methods, properties, or citations.
graphite oxide
spinel-type lithium titanium oxide/graphene composite
Li₄Ti₅O₁₂/graphene
titanium oxide nanoparticles
TiO₂
lithium titanium oxide nanoparticles
Li₄Ti₅O₁₂
polyol solvent
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 3 showsa Raman spectra determining whether lithium titanium oxide is present on the Li₄Ti s O₁₂/graphene composite having a spinel structure 5 prepared according to one exemplary embodiment of the present invention;
FIG 4 is a transmission electron microscope (TEM) photographic diagram of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 5 is X-ray photoelectron spectoscopy(XPS) data analyzing a level 10 of reduction of graphene (C/O ratio) in the Li₄Ti s O₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 6 is a graph showing the capacity of an active material per unit weight of an electrode which is obtained through evaluation of charging/discharging 15 capacity of the Li₄Ti sO₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present …
Pressure | 0.001–0.5 pa | — |
Pressure | 0.01–0.1 pa | — |
Pressure | 5–90 pa | — |
Duration | 10–30 minutes | — |
Thickness | 10–20 nm | — |
Temperature | 500–900 °C | — |
Voltage | 1–2.5 V | — |
Pressure | ≤ 0.001 pa | — |
Pressure | ≤ 0.01 pa | — |
Pressure | ≤ 5 pa | — |
graphite oxide
spinel-type lithium titanium oxide/graphene composite
Li₄Ti₅O₁₂/graphene
titanium oxide nanoparticles
TiO₂
lithium titanium oxide nanoparticles
Li₄Ti₅O₁₂
polyol solvent
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 3 showsa Raman spectra determining whether lithium titanium oxide is present on the Li₄Ti s O₁₂/graphene composite having a spinel structure 5 prepared according to one exemplary embodiment of the present invention;
FIG 4 is a transmission electron microscope (TEM) photographic diagram of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 5 is X-ray photoelectron spectoscopy(XPS) data analyzing a level 10 of reduction of graphene (C/O ratio) in the Li₄Ti s O₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 6 is a graph showing the capacity of an active material per unit weight of an electrode which is obtained through evaluation of charging/discharging 15 capacity of the Li₄Ti sO₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present …
Pressure | 0.001–0.5 pa | — |
Pressure | 0.01–0.1 pa | — |
Pressure | 5–90 pa | — |
Duration | 10–30 minutes | — |
Thickness | 10–20 nm | — |
Temperature | 500–900 °C | — |
Voltage | 1–2.5 V | — |
Pressure | ≤ 0.001 pa | — |
Pressure | ≤ 0.01 pa | — |
Pressure | ≤ 5 pa | — |
graphite oxide
spinel-type lithium titanium oxide/graphene composite
Li₄Ti₅O₁₂/graphene
titanium oxide nanoparticles
TiO₂
lithium titanium oxide nanoparticles
Li₄Ti₅O₁₂
polyol solvent
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 3 showsa Raman spectra determining whether lithium titanium oxide is present on the Li₄Ti s O₁₂/graphene composite having a spinel structure 5 prepared according to one exemplary embodiment of the present invention;
FIG 4 is a transmission electron microscope (TEM) photographic diagram of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 5 is X-ray photoelectron spectoscopy(XPS) data analyzing a level 10 of reduction of graphene (C/O ratio) in the Li₄Ti s O₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 6 is a graph showing the capacity of an active material per unit weight of an electrode which is obtained through evaluation of charging/discharging 15 capacity of the Li₄Ti sO₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present …
Pressure | 0.001–0.5 pa | — |
Pressure | 0.01–0.1 pa | — |
Pressure | 5–90 pa | — |
Duration | 10–30 minutes | — |
Thickness | 10–20 nm | — |
Temperature | 500–900 °C | — |
Voltage | 1–2.5 V | — |
Pressure | ≤ 0.001 pa | — |
Pressure | ≤ 0.01 pa | — |
Pressure | ≤ 5 pa | — |
graphite oxide
spinel-type lithium titanium oxide/graphene composite
Li₄Ti₅O₁₂/graphene
titanium oxide nanoparticles
TiO₂
lithium titanium oxide nanoparticles
Li₄Ti₅O₁₂
polyol solvent
FIG 2 is a graph showing the X-ray diffraction (XRD) analysis results 25 determining whether lithium titanium oxide is present on the Li₄Ti sO 12/graphene 5 composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 3 showsa Raman spectra determining whether lithium titanium oxide is present on the Li₄Ti s O₁₂/graphene composite having a spinel structure 5 prepared according to one exemplary embodiment of the present invention;
FIG 4 is a transmission electron microscope (TEM) photographic diagram of the Li₄Ti sO 12/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 5 is X-ray photoelectron spectoscopy(XPS) data analyzing a level 10 of reduction of graphene (C/O ratio) in the Li₄Ti s O₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present invention;
FIG 6 is a graph showing the capacity of an active material per unit weight of an electrode which is obtained through evaluation of charging/discharging 15 capacity of the Li₄Ti sO₁₂/graphene composite having a spinel structure prepared according to one exemplary embodiment of the present …
Pressure | 0.001–0.5 pa | — |
Pressure | 0.01–0.1 pa | — |
Pressure | 5–90 pa | — |
Duration | 10–30 minutes | — |
Thickness | 10–20 nm | — |
Temperature | 500–900 °C | — |
Voltage | 1–2.5 V | — |
Pressure | ≤ 0.001 pa | — |
Pressure | ≤ 0.01 pa | — |
Pressure | ≤ 5 pa | — |