Patent
US 9,570,294Preparation Method of Graphene Nanoribbon on h-BN
HAOMIN WANG
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,570,294Patent drawings and their descriptions. Click a drawing to enlarge it.
Figures 1 to 3 show structural diagrams presented by each step of a preparation method 17 of a graphene nanoribbon on h- BN. 18
Figure 4 and figure 5 show atomic force microscope images of h-BN grooves with an 19 etched depth of a single or a plurality of atomic layers. 20
Figure 6 and figure 7 respectively show an atomic force microscope image of an h-BN 21 groove with an etched boundary of Zigzag and an atomic force microscope image of 22 graphene nanoribbon grown in the groove. 23
Figure 8 and figure 9 respectively show an atomic force microscope image of an h-BN 24 groove with an etched boundary of Armchair and an atomic force microscope image of 25 graphene nanoribbon grown in the groove. 27 Illustrations of reference signs 10 h-BN 11 h-BN groove 12 graphene nanoribbon 6 …
Figure 9. It is to be noted that the drawings provided in the 10 present embodiment only explain the basic conception of the present invention in an 11 illustrative manner, so the drawings only display the components relevant to the present 12 invention rather than being drawn according to the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A preparation method of a graphene nanoribbon on h-BN, comprising steps of: 1) forming a h-BN groove template with a nano ribbon-shaped groove structure on the h-BN by adopting a metal catalysis etching method;
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a temperature range of the anneal etching is 90 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.25.1729.2597.1833.2651.svg 0.18 0.347 Chemistry Black and white ~ 130 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.25.2019.2597.2123.2651.svg 0.18 0.347 Chemistry Black and white, and an etching rate of the h-BN is controlled by controlling the temperature of the anneal etching. 6 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a time range of the anneal etching is l0 min ~ 300min, and a depth, width and length of the nano ribbon-shaped groove structure is controlled by a time control of the anneal etching.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the nano ribbon-shaped groove structure features a depth of a thickness of 1~ 9 atomic layers, a width less than or equal to 1?m l00nm, and a length larger than or equal to 100nm.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the chemical vapor deposition method in step 2) comprises one of a low pressure chemical vapor deposition method LPCVD, a plasma enhanced chemical vapor deposition PECVD, an ordinary pressure chemical vapor deposition CVD and a pulsed laser deposition PLD.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a carbon source for growing the graphene nanoribbon in step 2) comprises a solid-state carbon source, a gaseous carbon source and a liquid-state carbon source, wherein, the solid-state carbon source comprises one of a graphite, a glucose and a polymethacrylate or a combination thereof, the liquid-state carbon source comprises a liquid benzene, the gaseous carbon source comprises one of a methane, an ethene and an acetylene or a combination thereof. 7 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the carbon source for growing the graphene nanoribbon in step 2) is the acetylene and methane, wherein a gas flow ratio of the acetylene and the methane is 1:1 ~1:30.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: an air pressure range for growing the graphene nanoribbon is 1Pa ~lO Pa, a temperature range therefore is 80 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.5.16.1579.1747.1973.1801.svg 0.18 1.313 Chemistry Black and white, and a growth time range therefore is 1 min ~l Hour.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the obtained graphene nanoribbon in step 2) features a width less than or equal to lgm-m, a depth of a thickness of 1~9 atomic layers, and a length larger than or equal to 100 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.5.22.1965.2360.2053.2396.svg 0.12 0.293 Chemistry Black and white 8 GUH-257 (14/803371)
2) growing a graphene nanoribbon in the h-BN groove template by adopting a chemical vapor deposition method; wherein the metal catalysis etching method in step 1) comprises steps of: 1-1) forming a metal particle thin film with a catalysis etching effect on the h-BN; 1-2) performing anneal etching on the h-BN with the metal particle thin film, to obtain the h-BN groove template with the nano ribbon-shaped groove structure.
The preparation method of a graphene nanoribbon on h-BN according to claim 2, characterized in that: the h-BN is an h-BN thin film with a cleavage plane of atomic-level flatness obtained by the mechanical cleavage method.
canceled
The preparation method of a graphene nanoribbon on h-BN according to claim SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.2.26.1452.2811.1513.2854.svg 0.143 0.203 Chemistry Black and white, characterized in that: in step 1-1), a metal salt solution, which has a catalysis 5 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 5, characterized in that: density and distribution of the etched nano ribbon-shaped groove structure are controlled by controlling a concentration of metal catalysis particle solution, where the concentration of metal catalysis particle is 5.29*10-3mol/L ~ 5.29*10 -1 mol/L, density of the etched nanoribbon is controlled by changing the concentration of metal catalysis particle solution.
The preparation method of a graphene nanoribbon on h-BN according to claim SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.13.1452.1503.1513.1547.svg 0.147 0.203 Chemistry Black and white, characterized in that: the anneal etching in step 1-2) is to perform a anneal etching on the h-BN in a CVD tube furnace, with a carrier gas of Ar, and a working gas of H₂ or 0 2 according to different etching orientation; wherein, it is available to obtain a nano ribbon- shaped groove structure with an Armchair boundary structure when the H₂ and Ar features a flow rate of 1:1 ~1:10, and it is available to obtain a nano ribbon-shaped groove structure with a Z igzag edge structure when the 02 and Ar features a flow rate of 1:1~0:10.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanoribbon on h-BN
Materials described outside the worked examples.
graphene nanoribbon
h-BN
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
Figure 4 and figure 5 show atomic force microscope images of h-BN grooves with an 19 etched depth of a single or a plurality of atomic layers. 20
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,570,294Patent drawings and their descriptions. Click a drawing to enlarge it.
Figures 1 to 3 show structural diagrams presented by each step of a preparation method 17 of a graphene nanoribbon on h- BN. 18
Figure 4 and figure 5 show atomic force microscope images of h-BN grooves with an 19 etched depth of a single or a plurality of atomic layers. 20
Figure 6 and figure 7 respectively show an atomic force microscope image of an h-BN 21 groove with an etched boundary of Zigzag and an atomic force microscope image of 22 graphene nanoribbon grown in the groove. 23
Figure 8 and figure 9 respectively show an atomic force microscope image of an h-BN 24 groove with an etched boundary of Armchair and an atomic force microscope image of 25 graphene nanoribbon grown in the groove. 27 Illustrations of reference signs 10 h-BN 11 h-BN groove 12 graphene nanoribbon 6 …
Figure 9. It is to be noted that the drawings provided in the 10 present embodiment only explain the basic conception of the present invention in an 11 illustrative manner, so the drawings only display the components relevant to the present 12 invention rather than being drawn according to the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A preparation method of a graphene nanoribbon on h-BN, comprising steps of: 1) forming a h-BN groove template with a nano ribbon-shaped groove structure on the h-BN by adopting a metal catalysis etching method;
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a temperature range of the anneal etching is 90 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.25.1729.2597.1833.2651.svg 0.18 0.347 Chemistry Black and white ~ 130 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.25.2019.2597.2123.2651.svg 0.18 0.347 Chemistry Black and white, and an etching rate of the h-BN is controlled by controlling the temperature of the anneal etching. 6 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a time range of the anneal etching is l0 min ~ 300min, and a depth, width and length of the nano ribbon-shaped groove structure is controlled by a time control of the anneal etching.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the nano ribbon-shaped groove structure features a depth of a thickness of 1~ 9 atomic layers, a width less than or equal to 1?m l00nm, and a length larger than or equal to 100nm.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the chemical vapor deposition method in step 2) comprises one of a low pressure chemical vapor deposition method LPCVD, a plasma enhanced chemical vapor deposition PECVD, an ordinary pressure chemical vapor deposition CVD and a pulsed laser deposition PLD.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a carbon source for growing the graphene nanoribbon in step 2) comprises a solid-state carbon source, a gaseous carbon source and a liquid-state carbon source, wherein, the solid-state carbon source comprises one of a graphite, a glucose and a polymethacrylate or a combination thereof, the liquid-state carbon source comprises a liquid benzene, the gaseous carbon source comprises one of a methane, an ethene and an acetylene or a combination thereof. 7 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the carbon source for growing the graphene nanoribbon in step 2) is the acetylene and methane, wherein a gas flow ratio of the acetylene and the methane is 1:1 ~1:30.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: an air pressure range for growing the graphene nanoribbon is 1Pa ~lO Pa, a temperature range therefore is 80 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.5.16.1579.1747.1973.1801.svg 0.18 1.313 Chemistry Black and white, and a growth time range therefore is 1 min ~l Hour.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the obtained graphene nanoribbon in step 2) features a width less than or equal to lgm-m, a depth of a thickness of 1~9 atomic layers, and a length larger than or equal to 100 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.5.22.1965.2360.2053.2396.svg 0.12 0.293 Chemistry Black and white 8 GUH-257 (14/803371)
2) growing a graphene nanoribbon in the h-BN groove template by adopting a chemical vapor deposition method; wherein the metal catalysis etching method in step 1) comprises steps of: 1-1) forming a metal particle thin film with a catalysis etching effect on the h-BN; 1-2) performing anneal etching on the h-BN with the metal particle thin film, to obtain the h-BN groove template with the nano ribbon-shaped groove structure.
The preparation method of a graphene nanoribbon on h-BN according to claim 2, characterized in that: the h-BN is an h-BN thin film with a cleavage plane of atomic-level flatness obtained by the mechanical cleavage method.
canceled
The preparation method of a graphene nanoribbon on h-BN according to claim SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.2.26.1452.2811.1513.2854.svg 0.143 0.203 Chemistry Black and white, characterized in that: in step 1-1), a metal salt solution, which has a catalysis 5 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 5, characterized in that: density and distribution of the etched nano ribbon-shaped groove structure are controlled by controlling a concentration of metal catalysis particle solution, where the concentration of metal catalysis particle is 5.29*10-3mol/L ~ 5.29*10 -1 mol/L, density of the etched nanoribbon is controlled by changing the concentration of metal catalysis particle solution.
The preparation method of a graphene nanoribbon on h-BN according to claim SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.13.1452.1503.1513.1547.svg 0.147 0.203 Chemistry Black and white, characterized in that: the anneal etching in step 1-2) is to perform a anneal etching on the h-BN in a CVD tube furnace, with a carrier gas of Ar, and a working gas of H₂ or 0 2 according to different etching orientation; wherein, it is available to obtain a nano ribbon- shaped groove structure with an Armchair boundary structure when the H₂ and Ar features a flow rate of 1:1 ~1:10, and it is available to obtain a nano ribbon-shaped groove structure with a Z igzag edge structure when the 02 and Ar features a flow rate of 1:1~0:10.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanoribbon on h-BN
Materials described outside the worked examples.
graphene nanoribbon
h-BN
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
Figure 4 and figure 5 show atomic force microscope images of h-BN grooves with an 19 etched depth of a single or a plurality of atomic layers. 20
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,570,294Patent drawings and their descriptions. Click a drawing to enlarge it.
Figures 1 to 3 show structural diagrams presented by each step of a preparation method 17 of a graphene nanoribbon on h- BN. 18
Figure 4 and figure 5 show atomic force microscope images of h-BN grooves with an 19 etched depth of a single or a plurality of atomic layers. 20
Figure 6 and figure 7 respectively show an atomic force microscope image of an h-BN 21 groove with an etched boundary of Zigzag and an atomic force microscope image of 22 graphene nanoribbon grown in the groove. 23
Figure 8 and figure 9 respectively show an atomic force microscope image of an h-BN 24 groove with an etched boundary of Armchair and an atomic force microscope image of 25 graphene nanoribbon grown in the groove. 27 Illustrations of reference signs 10 h-BN 11 h-BN groove 12 graphene nanoribbon 6 …
Figure 9. It is to be noted that the drawings provided in the 10 present embodiment only explain the basic conception of the present invention in an 11 illustrative manner, so the drawings only display the components relevant to the present 12 invention rather than being drawn according to the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A preparation method of a graphene nanoribbon on h-BN, comprising steps of: 1) forming a h-BN groove template with a nano ribbon-shaped groove structure on the h-BN by adopting a metal catalysis etching method;
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a temperature range of the anneal etching is 90 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.25.1729.2597.1833.2651.svg 0.18 0.347 Chemistry Black and white ~ 130 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.25.2019.2597.2123.2651.svg 0.18 0.347 Chemistry Black and white, and an etching rate of the h-BN is controlled by controlling the temperature of the anneal etching. 6 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a time range of the anneal etching is l0 min ~ 300min, and a depth, width and length of the nano ribbon-shaped groove structure is controlled by a time control of the anneal etching.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the nano ribbon-shaped groove structure features a depth of a thickness of 1~ 9 atomic layers, a width less than or equal to 1?m l00nm, and a length larger than or equal to 100nm.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the chemical vapor deposition method in step 2) comprises one of a low pressure chemical vapor deposition method LPCVD, a plasma enhanced chemical vapor deposition PECVD, an ordinary pressure chemical vapor deposition CVD and a pulsed laser deposition PLD.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a carbon source for growing the graphene nanoribbon in step 2) comprises a solid-state carbon source, a gaseous carbon source and a liquid-state carbon source, wherein, the solid-state carbon source comprises one of a graphite, a glucose and a polymethacrylate or a combination thereof, the liquid-state carbon source comprises a liquid benzene, the gaseous carbon source comprises one of a methane, an ethene and an acetylene or a combination thereof. 7 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the carbon source for growing the graphene nanoribbon in step 2) is the acetylene and methane, wherein a gas flow ratio of the acetylene and the methane is 1:1 ~1:30.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: an air pressure range for growing the graphene nanoribbon is 1Pa ~lO Pa, a temperature range therefore is 80 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.5.16.1579.1747.1973.1801.svg 0.18 1.313 Chemistry Black and white, and a growth time range therefore is 1 min ~l Hour.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the obtained graphene nanoribbon in step 2) features a width less than or equal to lgm-m, a depth of a thickness of 1~9 atomic layers, and a length larger than or equal to 100 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.5.22.1965.2360.2053.2396.svg 0.12 0.293 Chemistry Black and white 8 GUH-257 (14/803371)
2) growing a graphene nanoribbon in the h-BN groove template by adopting a chemical vapor deposition method; wherein the metal catalysis etching method in step 1) comprises steps of: 1-1) forming a metal particle thin film with a catalysis etching effect on the h-BN; 1-2) performing anneal etching on the h-BN with the metal particle thin film, to obtain the h-BN groove template with the nano ribbon-shaped groove structure.
The preparation method of a graphene nanoribbon on h-BN according to claim 2, characterized in that: the h-BN is an h-BN thin film with a cleavage plane of atomic-level flatness obtained by the mechanical cleavage method.
canceled
The preparation method of a graphene nanoribbon on h-BN according to claim SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.2.26.1452.2811.1513.2854.svg 0.143 0.203 Chemistry Black and white, characterized in that: in step 1-1), a metal salt solution, which has a catalysis 5 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 5, characterized in that: density and distribution of the etched nano ribbon-shaped groove structure are controlled by controlling a concentration of metal catalysis particle solution, where the concentration of metal catalysis particle is 5.29*10-3mol/L ~ 5.29*10 -1 mol/L, density of the etched nanoribbon is controlled by changing the concentration of metal catalysis particle solution.
The preparation method of a graphene nanoribbon on h-BN according to claim SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.13.1452.1503.1513.1547.svg 0.147 0.203 Chemistry Black and white, characterized in that: the anneal etching in step 1-2) is to perform a anneal etching on the h-BN in a CVD tube furnace, with a carrier gas of Ar, and a working gas of H₂ or 0 2 according to different etching orientation; wherein, it is available to obtain a nano ribbon- shaped groove structure with an Armchair boundary structure when the H₂ and Ar features a flow rate of 1:1 ~1:10, and it is available to obtain a nano ribbon-shaped groove structure with a Z igzag edge structure when the 02 and Ar features a flow rate of 1:1~0:10.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanoribbon on h-BN
Materials described outside the worked examples.
graphene nanoribbon
h-BN
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
Figure 4 and figure 5 show atomic force microscope images of h-BN grooves with an 19 etched depth of a single or a plurality of atomic layers. 20
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,570,294Patent drawings and their descriptions. Click a drawing to enlarge it.
Figures 1 to 3 show structural diagrams presented by each step of a preparation method 17 of a graphene nanoribbon on h- BN. 18
Figure 4 and figure 5 show atomic force microscope images of h-BN grooves with an 19 etched depth of a single or a plurality of atomic layers. 20
Figure 6 and figure 7 respectively show an atomic force microscope image of an h-BN 21 groove with an etched boundary of Zigzag and an atomic force microscope image of 22 graphene nanoribbon grown in the groove. 23
Figure 8 and figure 9 respectively show an atomic force microscope image of an h-BN 24 groove with an etched boundary of Armchair and an atomic force microscope image of 25 graphene nanoribbon grown in the groove. 27 Illustrations of reference signs 10 h-BN 11 h-BN groove 12 graphene nanoribbon 6 …
Figure 9. It is to be noted that the drawings provided in the 10 present embodiment only explain the basic conception of the present invention in an 11 illustrative manner, so the drawings only display the components relevant to the present 12 invention rather than being drawn according to the …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A preparation method of a graphene nanoribbon on h-BN, comprising steps of: 1) forming a h-BN groove template with a nano ribbon-shaped groove structure on the h-BN by adopting a metal catalysis etching method;
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a temperature range of the anneal etching is 90 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.25.1729.2597.1833.2651.svg 0.18 0.347 Chemistry Black and white ~ 130 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.25.2019.2597.2123.2651.svg 0.18 0.347 Chemistry Black and white, and an etching rate of the h-BN is controlled by controlling the temperature of the anneal etching. 6 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a time range of the anneal etching is l0 min ~ 300min, and a depth, width and length of the nano ribbon-shaped groove structure is controlled by a time control of the anneal etching.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the nano ribbon-shaped groove structure features a depth of a thickness of 1~ 9 atomic layers, a width less than or equal to 1?m l00nm, and a length larger than or equal to 100nm.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the chemical vapor deposition method in step 2) comprises one of a low pressure chemical vapor deposition method LPCVD, a plasma enhanced chemical vapor deposition PECVD, an ordinary pressure chemical vapor deposition CVD and a pulsed laser deposition PLD.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: a carbon source for growing the graphene nanoribbon in step 2) comprises a solid-state carbon source, a gaseous carbon source and a liquid-state carbon source, wherein, the solid-state carbon source comprises one of a graphite, a glucose and a polymethacrylate or a combination thereof, the liquid-state carbon source comprises a liquid benzene, the gaseous carbon source comprises one of a methane, an ethene and an acetylene or a combination thereof. 7 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the carbon source for growing the graphene nanoribbon in step 2) is the acetylene and methane, wherein a gas flow ratio of the acetylene and the methane is 1:1 ~1:30.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: an air pressure range for growing the graphene nanoribbon is 1Pa ~lO Pa, a temperature range therefore is 80 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.5.16.1579.1747.1973.1801.svg 0.18 1.313 Chemistry Black and white, and a growth time range therefore is 1 min ~l Hour.
The preparation method of a graphene nanoribbon on h-BN according to claim 1, characterized in that: the obtained graphene nanoribbon in step 2) features a width less than or equal to lgm-m, a depth of a thickness of 1~9 atomic layers, and a length larger than or equal to 100 SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.5.22.1965.2360.2053.2396.svg 0.12 0.293 Chemistry Black and white 8 GUH-257 (14/803371)
2) growing a graphene nanoribbon in the h-BN groove template by adopting a chemical vapor deposition method; wherein the metal catalysis etching method in step 1) comprises steps of: 1-1) forming a metal particle thin film with a catalysis etching effect on the h-BN; 1-2) performing anneal etching on the h-BN with the metal particle thin film, to obtain the h-BN groove template with the nano ribbon-shaped groove structure.
The preparation method of a graphene nanoribbon on h-BN according to claim 2, characterized in that: the h-BN is an h-BN thin film with a cleavage plane of atomic-level flatness obtained by the mechanical cleavage method.
canceled
The preparation method of a graphene nanoribbon on h-BN according to claim SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.2.26.1452.2811.1513.2854.svg 0.143 0.203 Chemistry Black and white, characterized in that: in step 1-1), a metal salt solution, which has a catalysis 5 GUH-257 (14/803371)
The preparation method of a graphene nanoribbon on h-BN according to claim 5, characterized in that: density and distribution of the etched nano ribbon-shaped groove structure are controlled by controlling a concentration of metal catalysis particle solution, where the concentration of metal catalysis particle is 5.29*10-3mol/L ~ 5.29*10 -1 mol/L, density of the etched nanoribbon is controlled by changing the concentration of metal catalysis particle solution.
The preparation method of a graphene nanoribbon on h-BN according to claim SVG 14803371.09-06-2016.IST₅EX₂₃PXXIFW2.CLM.3.13.1452.1503.1513.1547.svg 0.147 0.203 Chemistry Black and white, characterized in that: the anneal etching in step 1-2) is to perform a anneal etching on the h-BN in a CVD tube furnace, with a carrier gas of Ar, and a working gas of H₂ or 0 2 according to different etching orientation; wherein, it is available to obtain a nano ribbon- shaped groove structure with an Armchair boundary structure when the H₂ and Ar features a flow rate of 1:1 ~1:10, and it is available to obtain a nano ribbon-shaped groove structure with a Z igzag edge structure when the 02 and Ar features a flow rate of 1:1~0:10.
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanoribbon on h-BN
Materials described outside the worked examples.
graphene nanoribbon
h-BN
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
Figure 4 and figure 5 show atomic force microscope images of h-BN grooves with an 19 etched depth of a single or a plurality of atomic layers. 20
Related documents with shared materials, methods, properties, or citations.
metal catalysis particle
graphite
glucose
polymethacrylate
liquid benzene
C₆H₆
methane
CH₄
acetylene
C₂H₂
ethene
C₂H₄
silane
SiH₄
Figure 6 and figure 7 respectively show an atomic force microscope image of an h-BN 21 groove with an etched boundary of Zigzag and an atomic force microscope image of 22 graphene nanoribbon grown in the groove. 23
Figure 8 and figure 9 respectively show an atomic force microscope image of an h-BN 24 groove with an etched boundary of Armchair and an atomic force microscope image of 25 graphene nanoribbon grown in the groove. 27 Illustrations of reference signs 10 h-BN 11 h-BN groove 12 graphene nanoribbon 6 …
metal catalysis particle
graphite
glucose
polymethacrylate
liquid benzene
C₆H₆
methane
CH₄
acetylene
C₂H₂
ethene
C₂H₄
silane
SiH₄
Figure 6 and figure 7 respectively show an atomic force microscope image of an h-BN 21 groove with an etched boundary of Zigzag and an atomic force microscope image of 22 graphene nanoribbon grown in the groove. 23
Figure 8 and figure 9 respectively show an atomic force microscope image of an h-BN 24 groove with an etched boundary of Armchair and an atomic force microscope image of 25 graphene nanoribbon grown in the groove. 27 Illustrations of reference signs 10 h-BN 11 h-BN groove 12 graphene nanoribbon 6 …
metal catalysis particle
graphite
glucose
polymethacrylate
liquid benzene
C₆H₆
methane
CH₄
acetylene
C₂H₂
ethene
C₂H₄
silane
SiH₄
Figure 6 and figure 7 respectively show an atomic force microscope image of an h-BN 21 groove with an etched boundary of Zigzag and an atomic force microscope image of 22 graphene nanoribbon grown in the groove. 23
Figure 8 and figure 9 respectively show an atomic force microscope image of an h-BN 24 groove with an etched boundary of Armchair and an atomic force microscope image of 25 graphene nanoribbon grown in the groove. 27 Illustrations of reference signs 10 h-BN 11 h-BN groove 12 graphene nanoribbon 6 …
metal catalysis particle
graphite
glucose
polymethacrylate
liquid benzene
C₆H₆
methane
CH₄
acetylene
C₂H₂
ethene
C₂H₄
silane
SiH₄
Figure 6 and figure 7 respectively show an atomic force microscope image of an h-BN 21 groove with an etched boundary of Zigzag and an atomic force microscope image of 22 graphene nanoribbon grown in the groove. 23
Figure 8 and figure 9 respectively show an atomic force microscope image of an h-BN 24 groove with an etched boundary of Armchair and an atomic force microscope image of 25 graphene nanoribbon grown in the groove. 27 Illustrations of reference signs 10 h-BN 11 h-BN groove 12 graphene nanoribbon 6 …