Patent
US 10,841,709NANOCOMPOSITE GRAPHENE POLYMER MEMBRANE ASSEMBLY, AND MANUFACTURING METHOD THEREOF
Gabriel ZELTZER
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,841,709Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C is a detailed view of area ' S' of the nanocomposite graphene polymer membrane shown in
FIG. 2 is a schematic diagram of an actuator or electrostatic speaker that includes a nanocomposite graphene polymer membrane and assembly such as that …
FIG. 3 is a diagram illustrating a cross-sectional view of an alternative nanocomposite graphene polymer membrane in accordance with the present disclosure. …
FIGS. 4A-4F are diagrams illustrating sequential steps of a method for manufacturing a nanocomposite graphene polymer membrane and assembly such as those shown …
FIGS. 5B and 5C are photographs of graphene layers such as those provided in nanocomposite graphene polymer membranes described in the disclosure. [0027]
FIG. 6 is a high-level functional block diagram of the method depicted in
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An assembly comprising: a frame having an opening; [[and]] a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening; and a rigid member disposed on the membrane hetero-structure at a location in the opening of the frame, wherein the rigid member is spaced apart from all edges of the opening in the frame. Currently amended
The assembly of claim 1, wherein the graphene layer comprises a graphene sheet extending fully across the opening of the frame. Original
The assembly of claim 1 [[5]], wherein the rigid member includes a rigid material including at least one of ceramic, glass, metal, metal oxide, silicon, silica, quartz, and sapphire. Currently amended
The assembly of claim 1 [[5]], wherein the rigid member includes a polymer layer having a stiffness higher than stiffnesses of each of the membrane hetero-structure, the polymer layer, and the graphene layer. Currently amended
The assembly of claim 1 [[5]], wherein the opening has a diameter of 12-60 mm, and the rigid member has a diameter smaller than the opening and within the range of 10-20 mm. Currently amended
The assembly of claim 1, further comprising: at least one electric contact terminal mounted to the frame and electrically connected to the graphene layer. Original
The assembly of claim 1, wherein the opening has a diameter of 10 to 100 mm, and the membrane hetero-structure extends across a diameter of the opening. Original
The assembly of claim 1, wherein the opening has a diameter of 12 to 60 mm, and the membrane hetero-structure extends across a diameter of the opening. Original
The assembly of claim 1, wherein the membrane hetero-structure has a thickness less than or equal to 600 nm. Original
Canceled
An assembly comprising: a frame having an opening; and a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening, wherein the membrane hetero-structure extends across the opening of the frame with a tension of 0.1-1000 N/m. Currently amended
Canceled
An assembly comprising: a frame having an opening; and a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening, wherein the membrane hetero-structure further includes a second polymer layer extending across the opening and disposed such that the graphene layer is between the polymer layer and the second polymer layer, and a plasmonic nanoparticle layer disposed between the graphene layer and the second polymer layer. Currently amended
The assembly of claim 11, wherein the membrane hetero-structure further includes a single or multi-layer graphene disposed on the second polymer layer. Currently amended
The assembly of claim 11 [[12]], wherein the membrane hetero-structure further includes one or more repetitions of the polymer/graphene/polymer/graphene structure. Currently amended
Canceled
A method of formin g a micro electro-mechanical system (MEMS), comprising: applying an adhesive to a frame having an opening; and tensioning a membrane hetero-structure on the applied adhesive across the opening of the frame, wherein the membrane hetero-structure includes a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening. Original
The method of claim 19, further comprising: following the tensioning, annealing the assembly of the membrane hetero-structure tensioned across the opening of the frame. Original
The method of claim 19, further comprising: forming the graphene layer on a metal foil using a chemical vapor deposition (CVD) process; and forming the polymer layer on the graphene layer using a spin coating, spray coating, or solvent casting process to form the membrane heterostructure having the metal foil on a first surface thereof, wherein the membrane hetero-structure is tensioned on the applied adhesive across the opening of the frame following the forming thereof. Original
The method of claim 19, further comprising: forming a rigid member on the membrane hetero-structure at a location in the opening of the frame, wherein the rigid member is spaced apart from all edges of the opening in the frame. Original
Layer stacks claimed or described, ordered top of device to substrate.
MEMS membrane assembly with rigid member
MEMS membrane assembly with tensioned hetero-structure
Materials described outside the worked examples.
polymer layer
graphene layer
rigid member
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Membrane Tension | 0.1–1000 N/m | polymer layergraphene layer |
Membrane Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,841,709Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C is a detailed view of area ' S' of the nanocomposite graphene polymer membrane shown in
FIG. 2 is a schematic diagram of an actuator or electrostatic speaker that includes a nanocomposite graphene polymer membrane and assembly such as that …
FIG. 3 is a diagram illustrating a cross-sectional view of an alternative nanocomposite graphene polymer membrane in accordance with the present disclosure. …
FIGS. 4A-4F are diagrams illustrating sequential steps of a method for manufacturing a nanocomposite graphene polymer membrane and assembly such as those shown …
FIGS. 5B and 5C are photographs of graphene layers such as those provided in nanocomposite graphene polymer membranes described in the disclosure. [0027]
FIG. 6 is a high-level functional block diagram of the method depicted in
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An assembly comprising: a frame having an opening; [[and]] a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening; and a rigid member disposed on the membrane hetero-structure at a location in the opening of the frame, wherein the rigid member is spaced apart from all edges of the opening in the frame. Currently amended
The assembly of claim 1, wherein the graphene layer comprises a graphene sheet extending fully across the opening of the frame. Original
The assembly of claim 1 [[5]], wherein the rigid member includes a rigid material including at least one of ceramic, glass, metal, metal oxide, silicon, silica, quartz, and sapphire. Currently amended
The assembly of claim 1 [[5]], wherein the rigid member includes a polymer layer having a stiffness higher than stiffnesses of each of the membrane hetero-structure, the polymer layer, and the graphene layer. Currently amended
The assembly of claim 1 [[5]], wherein the opening has a diameter of 12-60 mm, and the rigid member has a diameter smaller than the opening and within the range of 10-20 mm. Currently amended
The assembly of claim 1, further comprising: at least one electric contact terminal mounted to the frame and electrically connected to the graphene layer. Original
The assembly of claim 1, wherein the opening has a diameter of 10 to 100 mm, and the membrane hetero-structure extends across a diameter of the opening. Original
The assembly of claim 1, wherein the opening has a diameter of 12 to 60 mm, and the membrane hetero-structure extends across a diameter of the opening. Original
The assembly of claim 1, wherein the membrane hetero-structure has a thickness less than or equal to 600 nm. Original
Canceled
An assembly comprising: a frame having an opening; and a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening, wherein the membrane hetero-structure extends across the opening of the frame with a tension of 0.1-1000 N/m. Currently amended
Canceled
An assembly comprising: a frame having an opening; and a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening, wherein the membrane hetero-structure further includes a second polymer layer extending across the opening and disposed such that the graphene layer is between the polymer layer and the second polymer layer, and a plasmonic nanoparticle layer disposed between the graphene layer and the second polymer layer. Currently amended
The assembly of claim 11, wherein the membrane hetero-structure further includes a single or multi-layer graphene disposed on the second polymer layer. Currently amended
The assembly of claim 11 [[12]], wherein the membrane hetero-structure further includes one or more repetitions of the polymer/graphene/polymer/graphene structure. Currently amended
Canceled
A method of formin g a micro electro-mechanical system (MEMS), comprising: applying an adhesive to a frame having an opening; and tensioning a membrane hetero-structure on the applied adhesive across the opening of the frame, wherein the membrane hetero-structure includes a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening. Original
The method of claim 19, further comprising: following the tensioning, annealing the assembly of the membrane hetero-structure tensioned across the opening of the frame. Original
The method of claim 19, further comprising: forming the graphene layer on a metal foil using a chemical vapor deposition (CVD) process; and forming the polymer layer on the graphene layer using a spin coating, spray coating, or solvent casting process to form the membrane heterostructure having the metal foil on a first surface thereof, wherein the membrane hetero-structure is tensioned on the applied adhesive across the opening of the frame following the forming thereof. Original
The method of claim 19, further comprising: forming a rigid member on the membrane hetero-structure at a location in the opening of the frame, wherein the rigid member is spaced apart from all edges of the opening in the frame. Original
Layer stacks claimed or described, ordered top of device to substrate.
MEMS membrane assembly with rigid member
MEMS membrane assembly with tensioned hetero-structure
Materials described outside the worked examples.
polymer layer
graphene layer
rigid member
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Membrane Tension | 0.1–1000 N/m | polymer layergraphene layer |
Membrane Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,841,709Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C is a detailed view of area ' S' of the nanocomposite graphene polymer membrane shown in
FIG. 2 is a schematic diagram of an actuator or electrostatic speaker that includes a nanocomposite graphene polymer membrane and assembly such as that …
FIG. 3 is a diagram illustrating a cross-sectional view of an alternative nanocomposite graphene polymer membrane in accordance with the present disclosure. …
FIGS. 4A-4F are diagrams illustrating sequential steps of a method for manufacturing a nanocomposite graphene polymer membrane and assembly such as those shown …
FIGS. 5B and 5C are photographs of graphene layers such as those provided in nanocomposite graphene polymer membranes described in the disclosure. [0027]
FIG. 6 is a high-level functional block diagram of the method depicted in
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An assembly comprising: a frame having an opening; [[and]] a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening; and a rigid member disposed on the membrane hetero-structure at a location in the opening of the frame, wherein the rigid member is spaced apart from all edges of the opening in the frame. Currently amended
The assembly of claim 1, wherein the graphene layer comprises a graphene sheet extending fully across the opening of the frame. Original
The assembly of claim 1 [[5]], wherein the rigid member includes a rigid material including at least one of ceramic, glass, metal, metal oxide, silicon, silica, quartz, and sapphire. Currently amended
The assembly of claim 1 [[5]], wherein the rigid member includes a polymer layer having a stiffness higher than stiffnesses of each of the membrane hetero-structure, the polymer layer, and the graphene layer. Currently amended
The assembly of claim 1 [[5]], wherein the opening has a diameter of 12-60 mm, and the rigid member has a diameter smaller than the opening and within the range of 10-20 mm. Currently amended
The assembly of claim 1, further comprising: at least one electric contact terminal mounted to the frame and electrically connected to the graphene layer. Original
The assembly of claim 1, wherein the opening has a diameter of 10 to 100 mm, and the membrane hetero-structure extends across a diameter of the opening. Original
The assembly of claim 1, wherein the opening has a diameter of 12 to 60 mm, and the membrane hetero-structure extends across a diameter of the opening. Original
The assembly of claim 1, wherein the membrane hetero-structure has a thickness less than or equal to 600 nm. Original
Canceled
An assembly comprising: a frame having an opening; and a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening, wherein the membrane hetero-structure extends across the opening of the frame with a tension of 0.1-1000 N/m. Currently amended
Canceled
An assembly comprising: a frame having an opening; and a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening, wherein the membrane hetero-structure further includes a second polymer layer extending across the opening and disposed such that the graphene layer is between the polymer layer and the second polymer layer, and a plasmonic nanoparticle layer disposed between the graphene layer and the second polymer layer. Currently amended
The assembly of claim 11, wherein the membrane hetero-structure further includes a single or multi-layer graphene disposed on the second polymer layer. Currently amended
The assembly of claim 11 [[12]], wherein the membrane hetero-structure further includes one or more repetitions of the polymer/graphene/polymer/graphene structure. Currently amended
Canceled
A method of formin g a micro electro-mechanical system (MEMS), comprising: applying an adhesive to a frame having an opening; and tensioning a membrane hetero-structure on the applied adhesive across the opening of the frame, wherein the membrane hetero-structure includes a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening. Original
The method of claim 19, further comprising: following the tensioning, annealing the assembly of the membrane hetero-structure tensioned across the opening of the frame. Original
The method of claim 19, further comprising: forming the graphene layer on a metal foil using a chemical vapor deposition (CVD) process; and forming the polymer layer on the graphene layer using a spin coating, spray coating, or solvent casting process to form the membrane heterostructure having the metal foil on a first surface thereof, wherein the membrane hetero-structure is tensioned on the applied adhesive across the opening of the frame following the forming thereof. Original
The method of claim 19, further comprising: forming a rigid member on the membrane hetero-structure at a location in the opening of the frame, wherein the rigid member is spaced apart from all edges of the opening in the frame. Original
Layer stacks claimed or described, ordered top of device to substrate.
MEMS membrane assembly with rigid member
MEMS membrane assembly with tensioned hetero-structure
Materials described outside the worked examples.
polymer layer
graphene layer
rigid member
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Membrane Tension | 0.1–1000 N/m | polymer layergraphene layer |
Membrane Thickness |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,841,709Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 C is a detailed view of area ' S' of the nanocomposite graphene polymer membrane shown in
FIG. 2 is a schematic diagram of an actuator or electrostatic speaker that includes a nanocomposite graphene polymer membrane and assembly such as that …
FIG. 3 is a diagram illustrating a cross-sectional view of an alternative nanocomposite graphene polymer membrane in accordance with the present disclosure. …
FIGS. 4A-4F are diagrams illustrating sequential steps of a method for manufacturing a nanocomposite graphene polymer membrane and assembly such as those shown …
FIGS. 5B and 5C are photographs of graphene layers such as those provided in nanocomposite graphene polymer membranes described in the disclosure. [0027]
FIG. 6 is a high-level functional block diagram of the method depicted in
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An assembly comprising: a frame having an opening; [[and]] a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening; and a rigid member disposed on the membrane hetero-structure at a location in the opening of the frame, wherein the rigid member is spaced apart from all edges of the opening in the frame. Currently amended
The assembly of claim 1, wherein the graphene layer comprises a graphene sheet extending fully across the opening of the frame. Original
The assembly of claim 1 [[5]], wherein the rigid member includes a rigid material including at least one of ceramic, glass, metal, metal oxide, silicon, silica, quartz, and sapphire. Currently amended
The assembly of claim 1 [[5]], wherein the rigid member includes a polymer layer having a stiffness higher than stiffnesses of each of the membrane hetero-structure, the polymer layer, and the graphene layer. Currently amended
The assembly of claim 1 [[5]], wherein the opening has a diameter of 12-60 mm, and the rigid member has a diameter smaller than the opening and within the range of 10-20 mm. Currently amended
The assembly of claim 1, further comprising: at least one electric contact terminal mounted to the frame and electrically connected to the graphene layer. Original
The assembly of claim 1, wherein the opening has a diameter of 10 to 100 mm, and the membrane hetero-structure extends across a diameter of the opening. Original
The assembly of claim 1, wherein the opening has a diameter of 12 to 60 mm, and the membrane hetero-structure extends across a diameter of the opening. Original
The assembly of claim 1, wherein the membrane hetero-structure has a thickness less than or equal to 600 nm. Original
Canceled
An assembly comprising: a frame having an opening; and a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening, wherein the membrane hetero-structure extends across the opening of the frame with a tension of 0.1-1000 N/m. Currently amended
Canceled
An assembly comprising: a frame having an opening; and a membrane hetero-structure contacting the frame and extending across the opening and including a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening, wherein the membrane hetero-structure further includes a second polymer layer extending across the opening and disposed such that the graphene layer is between the polymer layer and the second polymer layer, and a plasmonic nanoparticle layer disposed between the graphene layer and the second polymer layer. Currently amended
The assembly of claim 11, wherein the membrane hetero-structure further includes a single or multi-layer graphene disposed on the second polymer layer. Currently amended
The assembly of claim 11 [[12]], wherein the membrane hetero-structure further includes one or more repetitions of the polymer/graphene/polymer/graphene structure. Currently amended
Canceled
A method of formin g a micro electro-mechanical system (MEMS), comprising: applying an adhesive to a frame having an opening; and tensioning a membrane hetero-structure on the applied adhesive across the opening of the frame, wherein the membrane hetero-structure includes a polymer layer extending across the opening and a graphene layer disposed on the polymer layer and extending across the opening. Original
The method of claim 19, further comprising: following the tensioning, annealing the assembly of the membrane hetero-structure tensioned across the opening of the frame. Original
The method of claim 19, further comprising: forming the graphene layer on a metal foil using a chemical vapor deposition (CVD) process; and forming the polymer layer on the graphene layer using a spin coating, spray coating, or solvent casting process to form the membrane heterostructure having the metal foil on a first surface thereof, wherein the membrane hetero-structure is tensioned on the applied adhesive across the opening of the frame following the forming thereof. Original
The method of claim 19, further comprising: forming a rigid member on the membrane hetero-structure at a location in the opening of the frame, wherein the rigid member is spaced apart from all edges of the opening in the frame. Original
Layer stacks claimed or described, ordered top of device to substrate.
MEMS membrane assembly with rigid member
MEMS membrane assembly with tensioned hetero-structure
Materials described outside the worked examples.
polymer layer
graphene layer
rigid member
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Membrane Tension | 0.1–1000 N/m | polymer layergraphene layer |
Membrane Thickness |
Related documents with shared materials, methods, properties, or citations.
MEMS membrane assembly with plasmonic nanoparticle layer
single-layer graphene sheet
multi-layer graphene sheet
second polymer layer
plasmonic nanoparticle layer
metal foil
polymer layergraphene layer |
Membrane Thickness | ≥ 40 nm | polymer layergraphene layer |
Sound Pressure Level | 65–75 dB | polymer layergraphene layer |
Thickness | 18–35 mm | — |
Thickness | 10–100 mm | — |
Thickness | 12–60 mm | — |
Thickness | 10–100 nm | — |
Thickness | 50–500 nm | — |
Thickness | 10–20 mm | — |
Duration | 15–30 minutes | — |
Duration | 30–60 minutes | — |
Thickness | 90–100 nm | — |
Thickness | 15–20 mm | — |
Thickness | 100–600 nm | — |
Pressure | ≤ 2 torr | — |
Pressure | ≤ 2.5 torr | — |
Temperature | ≥ 950 °C | — |
Thickness | ≥ 38 mm | — |
Thickness | ≥ 1e-20 mm | — |
MEMS membrane assembly with plasmonic nanoparticle layer
single-layer graphene sheet
multi-layer graphene sheet
second polymer layer
plasmonic nanoparticle layer
metal foil
polymer layergraphene layer |
Membrane Thickness | ≥ 40 nm | polymer layergraphene layer |
Sound Pressure Level | 65–75 dB | polymer layergraphene layer |
Thickness | 18–35 mm | — |
Thickness | 10–100 mm | — |
Thickness | 12–60 mm | — |
Thickness | 10–100 nm | — |
Thickness | 50–500 nm | — |
Thickness | 10–20 mm | — |
Duration | 15–30 minutes | — |
Duration | 30–60 minutes | — |
Thickness | 90–100 nm | — |
Thickness | 15–20 mm | — |
Thickness | 100–600 nm | — |
Pressure | ≤ 2 torr | — |
Pressure | ≤ 2.5 torr | — |
Temperature | ≥ 950 °C | — |
Thickness | ≥ 38 mm | — |
Thickness | ≥ 1e-20 mm | — |
MEMS membrane assembly with plasmonic nanoparticle layer
single-layer graphene sheet
multi-layer graphene sheet
second polymer layer
plasmonic nanoparticle layer
metal foil
polymer layergraphene layer |
Membrane Thickness | ≥ 40 nm | polymer layergraphene layer |
Sound Pressure Level | 65–75 dB | polymer layergraphene layer |
Thickness | 18–35 mm | — |
Thickness | 10–100 mm | — |
Thickness | 12–60 mm | — |
Thickness | 10–100 nm | — |
Thickness | 50–500 nm | — |
Thickness | 10–20 mm | — |
Duration | 15–30 minutes | — |
Duration | 30–60 minutes | — |
Thickness | 90–100 nm | — |
Thickness | 15–20 mm | — |
Thickness | 100–600 nm | — |
Pressure | ≤ 2 torr | — |
Pressure | ≤ 2.5 torr | — |
Temperature | ≥ 950 °C | — |
Thickness | ≥ 38 mm | — |
Thickness | ≥ 1e-20 mm | — |
MEMS membrane assembly with plasmonic nanoparticle layer
single-layer graphene sheet
multi-layer graphene sheet
second polymer layer
plasmonic nanoparticle layer
metal foil
polymer layergraphene layer |
Membrane Thickness | ≥ 40 nm | polymer layergraphene layer |
Sound Pressure Level | 65–75 dB | polymer layergraphene layer |
Thickness | 18–35 mm | — |
Thickness | 10–100 mm | — |
Thickness | 12–60 mm | — |
Thickness | 10–100 nm | — |
Thickness | 50–500 nm | — |
Thickness | 10–20 mm | — |
Duration | 15–30 minutes | — |
Duration | 30–60 minutes | — |
Thickness | 90–100 nm | — |
Thickness | 15–20 mm | — |
Thickness | 100–600 nm | — |
Pressure | ≤ 2 torr | — |
Pressure | ≤ 2.5 torr | — |
Temperature | ≥ 950 °C | — |
Thickness | ≥ 38 mm | — |
Thickness | ≥ 1e-20 mm | — |