Patent
US 9,284,640platinum
Pt
molybdenum
Mo
nickel
Ni
quartz glass
SiO₂
silicon
Si
argon
Ar
| 10–300 seconds |
| — |
Thickness | 500–500000 nm | — |
Thickness | ≥ 0.8 mm | — |
platinum
Pt
molybdenum
Mo
nickel
Ni
quartz glass
SiO₂
silicon
Si
argon
Ar
| 10–300 seconds |
| — |
Thickness | 500–500000 nm | — |
Thickness | ≥ 0.8 mm | — |
platinum
Pt
molybdenum
Mo
nickel
Ni
quartz glass
SiO₂
silicon
Si
argon
Ar
| 10–300 seconds |
| — |
Thickness | 500–500000 nm | — |
Thickness | ≥ 0.8 mm | — |
platinum
Pt
molybdenum
Mo
nickel
Ni
quartz glass
SiO₂
silicon
Si
argon
Ar
| 10–300 seconds |
| — |
Thickness | 500–500000 nm | — |
Thickness | ≥ 0.8 mm | — |