Patent
US 10,738,377METHOD FOR MANUFACTURING GRAPHENE AND APPARATUS FOR MANUFACTURING GRAPHENE
Takashi MATSUMOTO
US
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Patent
Atlas literature
Patent
US 10,738,377Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1, an apparatus fo r manufacturing graphene 10 includes an accommodating chamber 11 con figu red to accommo d ate a substrate S on which elements of an …
FIG. 2 is an internal space potential diagram of an accommodating chamber shown in
FIGS. 3A and 3B are process diagrams showing a method for manufacturing graphene according to a first embodiment of the present disclosure. [0015] FI GS. 4A to …
FIGS. 4A to 4C, in order to facilitate understanding, the six- membered ring structures 28 horizontally adsorbed to the surface of the substrate S are depicted …
FIG. 5C). As a result, two layers of graphene 29 can be easily manufactured. Since the surface of the graphene 29 has two-dimensional periodicity, new …
FIG. 6, the apparatus for manufacturing graphene 30 includes a cylindrical beam generation chamber 31. The beam generation chamber 31 is arranged so that a …
FIG. 7 is a sectional view schematically showing a configuration of an apparatus for manufacturing graphene accor ding to a second embodiment of the present …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for manufacturing graphene, comprising: an adsorption step of causing six-membered ring structures of carbon atoms to be adsorbed to a surface of a substrate; and an irradiation step of irradiating the surface of the substrate to which the six- membered ring structures are adsorbed with a molecular beam containing carbon atoms, such that one layer of graphene is formed by: ionizing molecules containing carbon atoms to form cations of the molecules; accelerating the cations in an electrostatic field to form an ion beam; causing the ion beam to pass through a space in which a charge conversion gas exists, such that electric charges of the cations are moved to molecules of the charge conversion gas and the electrically neutralized molecules containing carbon atoms form the molecular beam; opening the six-membered ring structures adsorbed to the surface of the substrate by a kinetic energy imparted by the molecular beam; and crosslinking the opened six-membered ring structures by the carbon atoms contained in the molecular beam. Currently amended
The method of Claim 1, wherein the surface of the substrate has two-dimensional periodicity. Previously presented
The method of Claim 1, wherein energy of the molecular beam is 50 eV to 100 eV. Currently amended
The method of Claim 1, wherein the adsorption step and the i rr adiation step are repeated. Original
Canceled
The method of Claim [[4]] 1, wherein the molecules of the charge conversion gas and the molecules containing carbon atoms are the same type of molecules. Currently amended
The method of Claim [[4]] 1, wherein in the irradiating step, the molecules containing carbon atoms are ionized and accelerated in an electrostatic field. Currently amended
(Cu rr ently amended) The method of Claim [4]]1, wherein each of the molecules containing carbon atoms contains a carbon atom double bond or a carbon atom triple bond. Currently amended
The method of Claim 7, wherein the molecules containing carbon atoms are ethylene or acetylene. Previously presented
11-17. Canceled
Canceled
Materials described outside the worked examples.
graphene
six-membered ring structures of carbon atoms
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
— | 50–100 eV | — |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,738,377Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1, an apparatus fo r manufacturing graphene 10 includes an accommodating chamber 11 con figu red to accommo d ate a substrate S on which elements of an …
FIG. 2 is an internal space potential diagram of an accommodating chamber shown in
FIGS. 3A and 3B are process diagrams showing a method for manufacturing graphene according to a first embodiment of the present disclosure. [0015] FI GS. 4A to …
FIGS. 4A to 4C, in order to facilitate understanding, the six- membered ring structures 28 horizontally adsorbed to the surface of the substrate S are depicted …
FIG. 5C). As a result, two layers of graphene 29 can be easily manufactured. Since the surface of the graphene 29 has two-dimensional periodicity, new …
FIG. 6, the apparatus for manufacturing graphene 30 includes a cylindrical beam generation chamber 31. The beam generation chamber 31 is arranged so that a …
FIG. 7 is a sectional view schematically showing a configuration of an apparatus for manufacturing graphene accor ding to a second embodiment of the present …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for manufacturing graphene, comprising: an adsorption step of causing six-membered ring structures of carbon atoms to be adsorbed to a surface of a substrate; and an irradiation step of irradiating the surface of the substrate to which the six- membered ring structures are adsorbed with a molecular beam containing carbon atoms, such that one layer of graphene is formed by: ionizing molecules containing carbon atoms to form cations of the molecules; accelerating the cations in an electrostatic field to form an ion beam; causing the ion beam to pass through a space in which a charge conversion gas exists, such that electric charges of the cations are moved to molecules of the charge conversion gas and the electrically neutralized molecules containing carbon atoms form the molecular beam; opening the six-membered ring structures adsorbed to the surface of the substrate by a kinetic energy imparted by the molecular beam; and crosslinking the opened six-membered ring structures by the carbon atoms contained in the molecular beam. Currently amended
The method of Claim 1, wherein the surface of the substrate has two-dimensional periodicity. Previously presented
The method of Claim 1, wherein energy of the molecular beam is 50 eV to 100 eV. Currently amended
The method of Claim 1, wherein the adsorption step and the i rr adiation step are repeated. Original
Canceled
The method of Claim [[4]] 1, wherein the molecules of the charge conversion gas and the molecules containing carbon atoms are the same type of molecules. Currently amended
The method of Claim [[4]] 1, wherein in the irradiating step, the molecules containing carbon atoms are ionized and accelerated in an electrostatic field. Currently amended
(Cu rr ently amended) The method of Claim [4]]1, wherein each of the molecules containing carbon atoms contains a carbon atom double bond or a carbon atom triple bond. Currently amended
The method of Claim 7, wherein the molecules containing carbon atoms are ethylene or acetylene. Previously presented
11-17. Canceled
Canceled
Materials described outside the worked examples.
graphene
six-membered ring structures of carbon atoms
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
— | 50–100 eV | — |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,738,377Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1, an apparatus fo r manufacturing graphene 10 includes an accommodating chamber 11 con figu red to accommo d ate a substrate S on which elements of an …
FIG. 2 is an internal space potential diagram of an accommodating chamber shown in
FIGS. 3A and 3B are process diagrams showing a method for manufacturing graphene according to a first embodiment of the present disclosure. [0015] FI GS. 4A to …
FIGS. 4A to 4C, in order to facilitate understanding, the six- membered ring structures 28 horizontally adsorbed to the surface of the substrate S are depicted …
FIG. 5C). As a result, two layers of graphene 29 can be easily manufactured. Since the surface of the graphene 29 has two-dimensional periodicity, new …
FIG. 6, the apparatus for manufacturing graphene 30 includes a cylindrical beam generation chamber 31. The beam generation chamber 31 is arranged so that a …
FIG. 7 is a sectional view schematically showing a configuration of an apparatus for manufacturing graphene accor ding to a second embodiment of the present …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for manufacturing graphene, comprising: an adsorption step of causing six-membered ring structures of carbon atoms to be adsorbed to a surface of a substrate; and an irradiation step of irradiating the surface of the substrate to which the six- membered ring structures are adsorbed with a molecular beam containing carbon atoms, such that one layer of graphene is formed by: ionizing molecules containing carbon atoms to form cations of the molecules; accelerating the cations in an electrostatic field to form an ion beam; causing the ion beam to pass through a space in which a charge conversion gas exists, such that electric charges of the cations are moved to molecules of the charge conversion gas and the electrically neutralized molecules containing carbon atoms form the molecular beam; opening the six-membered ring structures adsorbed to the surface of the substrate by a kinetic energy imparted by the molecular beam; and crosslinking the opened six-membered ring structures by the carbon atoms contained in the molecular beam. Currently amended
The method of Claim 1, wherein the surface of the substrate has two-dimensional periodicity. Previously presented
The method of Claim 1, wherein energy of the molecular beam is 50 eV to 100 eV. Currently amended
The method of Claim 1, wherein the adsorption step and the i rr adiation step are repeated. Original
Canceled
The method of Claim [[4]] 1, wherein the molecules of the charge conversion gas and the molecules containing carbon atoms are the same type of molecules. Currently amended
The method of Claim [[4]] 1, wherein in the irradiating step, the molecules containing carbon atoms are ionized and accelerated in an electrostatic field. Currently amended
(Cu rr ently amended) The method of Claim [4]]1, wherein each of the molecules containing carbon atoms contains a carbon atom double bond or a carbon atom triple bond. Currently amended
The method of Claim 7, wherein the molecules containing carbon atoms are ethylene or acetylene. Previously presented
11-17. Canceled
Canceled
Materials described outside the worked examples.
graphene
six-membered ring structures of carbon atoms
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
— | 50–100 eV | — |
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 10,738,377Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1, an apparatus fo r manufacturing graphene 10 includes an accommodating chamber 11 con figu red to accommo d ate a substrate S on which elements of an …
FIG. 2 is an internal space potential diagram of an accommodating chamber shown in
FIGS. 3A and 3B are process diagrams showing a method for manufacturing graphene according to a first embodiment of the present disclosure. [0015] FI GS. 4A to …
FIGS. 4A to 4C, in order to facilitate understanding, the six- membered ring structures 28 horizontally adsorbed to the surface of the substrate S are depicted …
FIG. 5C). As a result, two layers of graphene 29 can be easily manufactured. Since the surface of the graphene 29 has two-dimensional periodicity, new …
FIG. 6, the apparatus for manufacturing graphene 30 includes a cylindrical beam generation chamber 31. The beam generation chamber 31 is arranged so that a …
FIG. 7 is a sectional view schematically showing a configuration of an apparatus for manufacturing graphene accor ding to a second embodiment of the present …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for manufacturing graphene, comprising: an adsorption step of causing six-membered ring structures of carbon atoms to be adsorbed to a surface of a substrate; and an irradiation step of irradiating the surface of the substrate to which the six- membered ring structures are adsorbed with a molecular beam containing carbon atoms, such that one layer of graphene is formed by: ionizing molecules containing carbon atoms to form cations of the molecules; accelerating the cations in an electrostatic field to form an ion beam; causing the ion beam to pass through a space in which a charge conversion gas exists, such that electric charges of the cations are moved to molecules of the charge conversion gas and the electrically neutralized molecules containing carbon atoms form the molecular beam; opening the six-membered ring structures adsorbed to the surface of the substrate by a kinetic energy imparted by the molecular beam; and crosslinking the opened six-membered ring structures by the carbon atoms contained in the molecular beam. Currently amended
The method of Claim 1, wherein the surface of the substrate has two-dimensional periodicity. Previously presented
The method of Claim 1, wherein energy of the molecular beam is 50 eV to 100 eV. Currently amended
The method of Claim 1, wherein the adsorption step and the i rr adiation step are repeated. Original
Canceled
The method of Claim [[4]] 1, wherein the molecules of the charge conversion gas and the molecules containing carbon atoms are the same type of molecules. Currently amended
The method of Claim [[4]] 1, wherein in the irradiating step, the molecules containing carbon atoms are ionized and accelerated in an electrostatic field. Currently amended
(Cu rr ently amended) The method of Claim [4]]1, wherein each of the molecules containing carbon atoms contains a carbon atom double bond or a carbon atom triple bond. Currently amended
The method of Claim 7, wherein the molecules containing carbon atoms are ethylene or acetylene. Previously presented
11-17. Canceled
Canceled
Materials described outside the worked examples.
graphene
six-membered ring structures of carbon atoms
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
— | 50–100 eV | — |
Related documents with shared materials, methods, properties, or citations.
ethylene
C₂H₄
acetylene
C₂H₂
sapphire
Al₂O₃
artificial quartz
SiO₂
SiC
GaN
AlN
ZnO
BN
MoS₂
WS₂
MoSe₂
WSe₂
Ni
Co
Cu
W
Mo
ethylene
C₂H₄
acetylene
C₂H₂
sapphire
Al₂O₃
artificial quartz
SiO₂
SiC
GaN
AlN
ZnO
BN
MoS₂
WS₂
MoSe₂
WSe₂
Ni
Co
Cu
W
Mo
ethylene
C₂H₄
acetylene
C₂H₂
sapphire
Al₂O₃
artificial quartz
SiO₂
SiC
GaN
AlN
ZnO
BN
MoS₂
WS₂
MoSe₂
WSe₂
Ni
Co
Cu
W
Mo
ethylene
C₂H₄
acetylene
C₂H₂
sapphire
Al₂O₃
artificial quartz
SiO₂
SiC
GaN
AlN
ZnO
BN
MoS₂
WS₂
MoSe₂
WSe₂
Ni
Co
Cu
W
Mo