Patent
US 8,987,129Ge
nitrogen
N
GaInAs
GaAsSb
GaAsBi
GaInAsP
AlGaAs
GaInAsSb
AlGaInAs
AlInAs
AlGaAsSb
AlGaInAsSb
AlGaInAsP
GaInP
dimethyl hydrazine (symmetric or nonsymmetric)
trimethylhydrazine
nitrogen trifluoride
NF₃
| 900–1700 nm |
| — |
Thickness | 650–900 nm | — |
Thickness | 300–650 nm | — |
Thickness | 900–1300 nm | — |
Ge
nitrogen
N
GaInAs
GaAsSb
GaAsBi
GaInAsP
AlGaAs
GaInAsSb
AlGaInAs
AlInAs
AlGaAsSb
AlGaInAsSb
AlGaInAsP
GaInP
dimethyl hydrazine (symmetric or nonsymmetric)
trimethylhydrazine
nitrogen trifluoride
NF₃
| 900–1700 nm |
| — |
Thickness | 650–900 nm | — |
Thickness | 300–650 nm | — |
Thickness | 900–1300 nm | — |
Ge
nitrogen
N
GaInAs
GaAsSb
GaAsBi
GaInAsP
AlGaAs
GaInAsSb
AlGaInAs
AlInAs
AlGaAsSb
AlGaInAsSb
AlGaInAsP
GaInP
dimethyl hydrazine (symmetric or nonsymmetric)
trimethylhydrazine
nitrogen trifluoride
NF₃
| 900–1700 nm |
| — |
Thickness | 650–900 nm | — |
Thickness | 300–650 nm | — |
Thickness | 900–1300 nm | — |
Ge
nitrogen
N
GaInAs
GaAsSb
GaAsBi
GaInAsP
AlGaAs
GaInAsSb
AlGaInAs
AlInAs
AlGaAsSb
AlGaInAsSb
AlGaInAsP
GaInP
dimethyl hydrazine (symmetric or nonsymmetric)
trimethylhydrazine
nitrogen trifluoride
NF₃
| 900–1700 nm |
| — |
Thickness | 650–900 nm | — |
Thickness | 300–650 nm | — |
Thickness | 900–1300 nm | — |