Research paper
Experimental Characterization| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | reflectivity-fitted thickness, region 1 | 185nm | — | |||
| Substrate Thickness | reflectivity-fitted thickness, region 2 | 200nm | — | |||
| Substrate Thickness | AFM thickness, region 1 | 185nm | — | |||
| Substrate Thickness | AFM thickness, region 2 | 200nm | — | |||
| Substrate Thickness | Bland-Altman mean bias of reflectometry relative to AFM | -1.67nm | — | |||
| Raman Peak | SHG wavelength | 800nm | — | |||
| Raman Intensity Ratio | log-log SHG power-law slope | 1.98 | — | |||
| Raman Peak | THG wavelength | 533.3333333333334nm | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | reflectivity-fitted thickness, region 1 | 185nm | — | |||
| Substrate Thickness | reflectivity-fitted thickness, region 2 | 200nm | — | |||
| Substrate Thickness | AFM thickness, region 1 | 185nm | — | |||
| Substrate Thickness | AFM thickness, region 2 | 200nm | — | |||
| Substrate Thickness | Bland-Altman mean bias of reflectometry relative to AFM | -1.67nm | — | |||
| Raman Peak | SHG wavelength | 800nm | — | |||
| Raman Intensity Ratio | log-log SHG power-law slope | 1.98 | — | |||
| Raman Peak | THG wavelength | 533.3333333333334nm | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | reflectivity-fitted thickness, region 1 | 185nm | — | |||
| Substrate Thickness | reflectivity-fitted thickness, region 2 | 200nm | — | |||
| Substrate Thickness | AFM thickness, region 1 | 185nm | — | |||
| Substrate Thickness | AFM thickness, region 2 | 200nm | — | |||
| Substrate Thickness | Bland-Altman mean bias of reflectometry relative to AFM | -1.67nm | — | |||
| Raman Peak | SHG wavelength | 800nm | — | |||
| Raman Intensity Ratio | log-log SHG power-law slope | 1.98 | — | |||
| Raman Peak | THG wavelength | 533.3333333333334nm | — |
| Type | Label | Value | Material | Sample | Condition | Source |
|---|---|---|---|---|---|---|
| Substrate Thickness | reflectivity-fitted thickness, region 1 | 185nm | — | |||
| Substrate Thickness | reflectivity-fitted thickness, region 2 | 200nm | — | |||
| Substrate Thickness | AFM thickness, region 1 | 185nm | — | |||
| Substrate Thickness | AFM thickness, region 2 | 200nm | — | |||
| Substrate Thickness | Bland-Altman mean bias of reflectometry relative to AFM | -1.67nm | — | |||
| Raman Peak | SHG wavelength | 800nm | — | |||
| Raman Intensity Ratio | log-log SHG power-law slope | 1.98 | — | |||
| Raman Peak | THG wavelength | 533.3333333333334nm | — |