Patent
US 11,621,365Ca₃Al₂O₆
GaAs
SrTiO₃
Si
InP
Ge
FIG. 4c depicts scanning transmission electron microscopy (STEM) energy dispersive x-ray spectroscopy (EDS) atomic percent maps that show a SA O layer having a …
FIG. 4c depicts scanning transmission electron microscopy (STEM) energy dispersive x-ray spectroscopy (EDS) atomic percent maps that show a SA O layer having a …
FIG. 5 a depicts XRD data of epitaxial SA O (100) on ST O (100) substrate after ex situ anneal. FIG. S b depicts a TEM image: SA O layer closest to ST O …
FIG. 5 a depicts XRD data of epitaxial SA O (100) on ST O (100) substrate after ex situ anneal. FIG. S b depicts a TEM image: SA O layer closest to ST O …
FIG. 6a depicts XRD data for ST O/SA O templates deposited on ST O (001) substrates.
FIG. 7 depicts TEM data for ST O/SA O templates deposited on ST O (001) substrates. [0016]
FIG. 8a depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates.
FIG. 8a depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates.
FIG. 10 depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates. [0019]
| 0.5653 nm |
GaAs |
Pressure | 1e-9 Torr | — |
Ca₃Al₂O₆
GaAs
SrTiO₃
Si
InP
Ge
FIG. 4c depicts scanning transmission electron microscopy (STEM) energy dispersive x-ray spectroscopy (EDS) atomic percent maps that show a SA O layer having a …
FIG. 4c depicts scanning transmission electron microscopy (STEM) energy dispersive x-ray spectroscopy (EDS) atomic percent maps that show a SA O layer having a …
FIG. 5 a depicts XRD data of epitaxial SA O (100) on ST O (100) substrate after ex situ anneal. FIG. S b depicts a TEM image: SA O layer closest to ST O …
FIG. 5 a depicts XRD data of epitaxial SA O (100) on ST O (100) substrate after ex situ anneal. FIG. S b depicts a TEM image: SA O layer closest to ST O …
FIG. 6a depicts XRD data for ST O/SA O templates deposited on ST O (001) substrates.
FIG. 7 depicts TEM data for ST O/SA O templates deposited on ST O (001) substrates. [0016]
FIG. 8a depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates.
FIG. 8a depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates.
FIG. 10 depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates. [0019]
| 0.5653 nm |
GaAs |
Pressure | 1e-9 Torr | — |
Ca₃Al₂O₆
GaAs
SrTiO₃
Si
InP
Ge
FIG. 4c depicts scanning transmission electron microscopy (STEM) energy dispersive x-ray spectroscopy (EDS) atomic percent maps that show a SA O layer having a …
FIG. 4c depicts scanning transmission electron microscopy (STEM) energy dispersive x-ray spectroscopy (EDS) atomic percent maps that show a SA O layer having a …
FIG. 5 a depicts XRD data of epitaxial SA O (100) on ST O (100) substrate after ex situ anneal. FIG. S b depicts a TEM image: SA O layer closest to ST O …
FIG. 5 a depicts XRD data of epitaxial SA O (100) on ST O (100) substrate after ex situ anneal. FIG. S b depicts a TEM image: SA O layer closest to ST O …
FIG. 6a depicts XRD data for ST O/SA O templates deposited on ST O (001) substrates.
FIG. 7 depicts TEM data for ST O/SA O templates deposited on ST O (001) substrates. [0016]
FIG. 8a depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates.
FIG. 8a depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates.
FIG. 10 depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates. [0019]
| 0.5653 nm |
GaAs |
Pressure | 1e-9 Torr | — |
Ca₃Al₂O₆
GaAs
SrTiO₃
Si
InP
Ge
FIG. 4c depicts scanning transmission electron microscopy (STEM) energy dispersive x-ray spectroscopy (EDS) atomic percent maps that show a SA O layer having a …
FIG. 4c depicts scanning transmission electron microscopy (STEM) energy dispersive x-ray spectroscopy (EDS) atomic percent maps that show a SA O layer having a …
FIG. 5 a depicts XRD data of epitaxial SA O (100) on ST O (100) substrate after ex situ anneal. FIG. S b depicts a TEM image: SA O layer closest to ST O …
FIG. 5 a depicts XRD data of epitaxial SA O (100) on ST O (100) substrate after ex situ anneal. FIG. S b depicts a TEM image: SA O layer closest to ST O …
FIG. 6a depicts XRD data for ST O/SA O templates deposited on ST O (001) substrates.
FIG. 7 depicts TEM data for ST O/SA O templates deposited on ST O (001) substrates. [0016]
FIG. 8a depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates.
FIG. 8a depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates.
FIG. 10 depicts XRD data for ST O/SA O templates deposited on Ge (001) substrates. [0019]
| 0.5653 nm |
GaAs |
Pressure | 1e-9 Torr | — |