SYSTEM FOR MANUFACTURING GRAPHENE ON A SUBSTRATE | Matter42 Literature
Patent
Atlas literature
Patent
US 9,593,420
SYSTEM FOR MANUFACTURING GRAPHENE ON A SUBSTRATE
Denton Jarvis
US
Drawings
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1
Figure 1 is a block diagram of the components of a system for manufacturing graphene on a substrate in accordance with the principles of the present invention.
Figure 2
Figure 2 is detailed view of the substrate assembly from an end-on or cross-sectional perspective.
Figure 3
process tool top view
Figure 3 is a top view of a portion of the elements shown in
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
6 independent · 0 dependent
15
Independent
Claims 15 -20 are canceled without prejudice. Please note that all claims currently pending and canceled
16
Independent
canceled
17
Independent
canceled
18
Independent
canceled
19
Independent
canceled
20
Independent
under consideration in the referenced application are shown below. This listing of claims will replace all prior versions and listings of claims in the application. AMENDMENTS TO THE CLAIMS canceled
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
graphene manufacturing apparatus
graphenedeposited lattice film
polyethylene terephthalate (PET)/Mylarsubstrate
Materials
Materials described outside the worked examples.
graphene
Deposited Lattice Structure
graphite
Precursor Source Material
Process steps
Additional fabrication and treatment steps described in the patent.
1
Laser Vaporization And Condensation Deposition
Step 1
Temperature
3593°C
Ambient
atmospheric pressure, carbon dioxide carrier gas
Process details
Why these are connected
Related documents with shared materials, methods, properties, or citations.
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1
Figure 1 is a block diagram of the components of a system for manufacturing graphene on a substrate in accordance with the principles of the present invention.
Figure 2
Figure 2 is detailed view of the substrate assembly from an end-on or cross-sectional perspective.
Figure 3
process tool top view
Figure 3 is a top view of a portion of the elements shown in
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
6 independent · 0 dependent
15
Independent
Claims 15 -20 are canceled without prejudice. Please note that all claims currently pending and canceled
16
Independent
canceled
17
Independent
canceled
18
Independent
canceled
19
Independent
canceled
20
Independent
under consideration in the referenced application are shown below. This listing of claims will replace all prior versions and listings of claims in the application. AMENDMENTS TO THE CLAIMS canceled
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
graphene manufacturing apparatus
graphenedeposited lattice film
polyethylene terephthalate (PET)/Mylarsubstrate
Materials
Materials described outside the worked examples.
graphene
Deposited Lattice Structure
graphite
Precursor Source Material
Process steps
Additional fabrication and treatment steps described in the patent.
1
Laser Vaporization And Condensation Deposition
Step 1
Temperature
3593°C
Ambient
atmospheric pressure, carbon dioxide carrier gas
Process details
Why these are connected
Related documents with shared materials, methods, properties, or citations.
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1
Figure 1 is a block diagram of the components of a system for manufacturing graphene on a substrate in accordance with the principles of the present invention.
Figure 2
Figure 2 is detailed view of the substrate assembly from an end-on or cross-sectional perspective.
Figure 3
process tool top view
Figure 3 is a top view of a portion of the elements shown in
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
6 independent · 0 dependent
15
Independent
Claims 15 -20 are canceled without prejudice. Please note that all claims currently pending and canceled
16
Independent
canceled
17
Independent
canceled
18
Independent
canceled
19
Independent
canceled
20
Independent
under consideration in the referenced application are shown below. This listing of claims will replace all prior versions and listings of claims in the application. AMENDMENTS TO THE CLAIMS canceled
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
graphene manufacturing apparatus
graphenedeposited lattice film
polyethylene terephthalate (PET)/Mylarsubstrate
Materials
Materials described outside the worked examples.
graphene
Deposited Lattice Structure
graphite
Precursor Source Material
Process steps
Additional fabrication and treatment steps described in the patent.
1
Laser Vaporization And Condensation Deposition
Step 1
Temperature
3593°C
Ambient
atmospheric pressure, carbon dioxide carrier gas
Process details
Why these are connected
Related documents with shared materials, methods, properties, or citations.
Patent drawings and their descriptions. Click a drawing to enlarge it.
Figure 1
Figure 1 is a block diagram of the components of a system for manufacturing graphene on a substrate in accordance with the principles of the present invention.
Figure 2
Figure 2 is detailed view of the substrate assembly from an end-on or cross-sectional perspective.
Figure 3
process tool top view
Figure 3 is a top view of a portion of the elements shown in
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
6 independent · 0 dependent
15
Independent
Claims 15 -20 are canceled without prejudice. Please note that all claims currently pending and canceled
16
Independent
canceled
17
Independent
canceled
18
Independent
canceled
19
Independent
canceled
20
Independent
under consideration in the referenced application are shown below. This listing of claims will replace all prior versions and listings of claims in the application. AMENDMENTS TO THE CLAIMS canceled
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
graphene manufacturing apparatus
graphenedeposited lattice film
polyethylene terephthalate (PET)/Mylarsubstrate
Materials
Materials described outside the worked examples.
graphene
Deposited Lattice Structure
graphite
Precursor Source Material
Process steps
Additional fabrication and treatment steps described in the patent.
1
Laser Vaporization And Condensation Deposition
Step 1
Temperature
3593°C
Ambient
atmospheric pressure, carbon dioxide carrier gas
Process details
Why these are connected
Related documents with shared materials, methods, properties, or citations.
notes:Graphite aerosolized by rotating brush, mixed with CO2, vaporized and ionized by lasers (~6500 F), ionized carbon particles condensed onto cooled substrate to form graphene lattice structure
pressure:atmospheric
electromagnet:used to focus ionized particle stream and act as magnetic valve
lasers count example:6
first hole diameter inches:0.04
second hole diameter inches:0.06
substrate cooling temperature celsius:-20 to -50
ionization temperature approx fahrenheit:6500
containment chamber dimensions example ft:5 x 2 x 3
notes:Graphite aerosolized by rotating brush, mixed with CO2, vaporized and ionized by lasers (~6500 F), ionized carbon particles condensed onto cooled substrate to form graphene lattice structure
pressure:atmospheric
electromagnet:used to focus ionized particle stream and act as magnetic valve
lasers count example:6
first hole diameter inches:0.04
second hole diameter inches:0.06
substrate cooling temperature celsius:-20 to -50
ionization temperature approx fahrenheit:6500
containment chamber dimensions example ft:5 x 2 x 3
notes:Graphite aerosolized by rotating brush, mixed with CO2, vaporized and ionized by lasers (~6500 F), ionized carbon particles condensed onto cooled substrate to form graphene lattice structure
pressure:atmospheric
electromagnet:used to focus ionized particle stream and act as magnetic valve
lasers count example:6
first hole diameter inches:0.04
second hole diameter inches:0.06
substrate cooling temperature celsius:-20 to -50
ionization temperature approx fahrenheit:6500
containment chamber dimensions example ft:5 x 2 x 3
notes:Graphite aerosolized by rotating brush, mixed with CO2, vaporized and ionized by lasers (~6500 F), ionized carbon particles condensed onto cooled substrate to form graphene lattice structure
pressure:atmospheric
electromagnet:used to focus ionized particle stream and act as magnetic valve
lasers count example:6
first hole diameter inches:0.04
second hole diameter inches:0.06
substrate cooling temperature celsius:-20 to -50
ionization temperature approx fahrenheit:6500
containment chamber dimensions example ft:5 x 2 x 3