Patent
Atlas literature
Patent
US 12,244,014 B2Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1(A) Schematic illustrating the notion that expansion of Si particles, upon lithium intercalation during charging of 45 a prior art lithium-ion battery, …
FIG. 2(B) Schematic of the heat-induced conversion of polymer into carbon, which bonds graphene sheets together to form a 3D graphene-carbon hybrid foam. The …
FIG. 3(B) An SEM image of an internal structure of another 3D graphene-carbon hybrid foam
FIG. 4 The charge-discharge cycling behaviors of 2 lithium cells fea- turing graphene-carbon foam-supported Sb—Ge coating- based anodes (Sb 85%/Ge 15%): one …
FIG. 5 The charge-discharge cycling behaviors (specific capacity) of 3 lithium-ion cells each having SnO₂ particles or coating as the an anode active material: …
FIG. 6 The charge-discharge cycling behaviors of 2 lithium-ion cells: one cell containing graphene-embraced Si particles produced by the indirect transfer …
FIG. 7 The cycle life data of lithium-ion cells containing graphene-carbon foam-protected Si coatings, plotted as a function of the pore-to-coating ratio in …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of producing a porous anode material struc-ture for a lithium-ion battery, said method comprising (A) providing an integral 3D graphene-carbon hybrid foam comprising multiple pores, having a pore volume Vp, and pore walls; and (B) impregnating or infiltrating said pores with a fluid for forming a coating of an anode active material, having a coating volume Vc, coated on or bonded to surfaces of said pore walls; wherein said pore walls contain single-layer or few-layer graphene sheets chemi-cally bonded by a carbon material having a carbon material-to-graphene weight ratio from 1/200 to 1/2, and wherein the volume ratio Vp/Vc is from 0.1/1.0 to 10/1.0, wherein said porous anode material structure is in a porous particulate form having a diameter from 5 µm to 50 µm, wherein said anode active material coating is selected from the group consisting of: (a) lithium-containing composites; (b) lithium titanate, lithium manganate, lithium aluminate, lithium-con-taining titanium oxide, lithium transition metal oxide; (c) prelithiated versions thereof; (d) particles of Li, Li alloy, or surface-stabilized Li having at least 60% by weight of lithium element therein; and (e) combinations thereof.
The method of claim 1, wherein said integral 3D graphene-carbon hybrid foam is produced by conducting a process including: (a) mixing multiple particles of a graphitic material and multiple particles of a solid polymer carrier material to form a mixture in an impacting chamber of an energy impacting apparatus; (b) operating said energy impacting apparatus with a frequency and an intensity for a length of time sufficient for peeling off graphene sheets from said graphitic material and transferring said graphene sheets to sur-faces of said solid polymer carrier material particles to produce graphene-coated polymer particles inside said impacting chamber; (c) recovering said graphene-coated polymer particles from said impacting chamber and consolidating said graphene-coated or graphene-embedded polymer par-ticles into a desired shape of graphene-polymer com-posite structure; and (d) pyrolyzing said shape of graphene-polymer composite structure to thermally convert said polymer into pores and carbon or graphite that bonds said graphene sheets to form said integral 3D graphene-carbon hybrid foam.
The method of claim 1, further comprising a step of introducing a conducting polymer or carbon into said pores wherein said conducting polymer or carbon is deposited onto a surface of said coating of anode active material, providing protection thereto.
The method of claim 1, wherein said coating of anode active material is further coated with a layer of carbon or conducting polymer. ∗ ∗ ∗ ∗ ∗
Layer stacks claimed or described, ordered top of device to substrate.
porous anode material structure for lithium-ion battery
Materials described outside the worked examples.
3D graphene-carbon hybrid foam
anode active material coating
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 3(B) An SEM image of an internal structure of another 3D graphene-carbon hybrid foam
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Temperature | 1500–2500 °C | — |
Temperature |
Patents and literature cited by this patent (applicant and examiner references).
Cited patents · 14
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 12,244,014 B2Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1(A) Schematic illustrating the notion that expansion of Si particles, upon lithium intercalation during charging of 45 a prior art lithium-ion battery, …
FIG. 2(B) Schematic of the heat-induced conversion of polymer into carbon, which bonds graphene sheets together to form a 3D graphene-carbon hybrid foam. The …
FIG. 3(B) An SEM image of an internal structure of another 3D graphene-carbon hybrid foam
FIG. 4 The charge-discharge cycling behaviors of 2 lithium cells fea- turing graphene-carbon foam-supported Sb—Ge coating- based anodes (Sb 85%/Ge 15%): one …
FIG. 5 The charge-discharge cycling behaviors (specific capacity) of 3 lithium-ion cells each having SnO₂ particles or coating as the an anode active material: …
FIG. 6 The charge-discharge cycling behaviors of 2 lithium-ion cells: one cell containing graphene-embraced Si particles produced by the indirect transfer …
FIG. 7 The cycle life data of lithium-ion cells containing graphene-carbon foam-protected Si coatings, plotted as a function of the pore-to-coating ratio in …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of producing a porous anode material struc-ture for a lithium-ion battery, said method comprising (A) providing an integral 3D graphene-carbon hybrid foam comprising multiple pores, having a pore volume Vp, and pore walls; and (B) impregnating or infiltrating said pores with a fluid for forming a coating of an anode active material, having a coating volume Vc, coated on or bonded to surfaces of said pore walls; wherein said pore walls contain single-layer or few-layer graphene sheets chemi-cally bonded by a carbon material having a carbon material-to-graphene weight ratio from 1/200 to 1/2, and wherein the volume ratio Vp/Vc is from 0.1/1.0 to 10/1.0, wherein said porous anode material structure is in a porous particulate form having a diameter from 5 µm to 50 µm, wherein said anode active material coating is selected from the group consisting of: (a) lithium-containing composites; (b) lithium titanate, lithium manganate, lithium aluminate, lithium-con-taining titanium oxide, lithium transition metal oxide; (c) prelithiated versions thereof; (d) particles of Li, Li alloy, or surface-stabilized Li having at least 60% by weight of lithium element therein; and (e) combinations thereof.
The method of claim 1, wherein said integral 3D graphene-carbon hybrid foam is produced by conducting a process including: (a) mixing multiple particles of a graphitic material and multiple particles of a solid polymer carrier material to form a mixture in an impacting chamber of an energy impacting apparatus; (b) operating said energy impacting apparatus with a frequency and an intensity for a length of time sufficient for peeling off graphene sheets from said graphitic material and transferring said graphene sheets to sur-faces of said solid polymer carrier material particles to produce graphene-coated polymer particles inside said impacting chamber; (c) recovering said graphene-coated polymer particles from said impacting chamber and consolidating said graphene-coated or graphene-embedded polymer par-ticles into a desired shape of graphene-polymer com-posite structure; and (d) pyrolyzing said shape of graphene-polymer composite structure to thermally convert said polymer into pores and carbon or graphite that bonds said graphene sheets to form said integral 3D graphene-carbon hybrid foam.
The method of claim 1, further comprising a step of introducing a conducting polymer or carbon into said pores wherein said conducting polymer or carbon is deposited onto a surface of said coating of anode active material, providing protection thereto.
The method of claim 1, wherein said coating of anode active material is further coated with a layer of carbon or conducting polymer. ∗ ∗ ∗ ∗ ∗
Layer stacks claimed or described, ordered top of device to substrate.
porous anode material structure for lithium-ion battery
Materials described outside the worked examples.
3D graphene-carbon hybrid foam
anode active material coating
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 3(B) An SEM image of an internal structure of another 3D graphene-carbon hybrid foam
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Temperature | 1500–2500 °C | — |
Temperature |
Patents and literature cited by this patent (applicant and examiner references).
Cited patents · 14
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 12,244,014 B2Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1(A) Schematic illustrating the notion that expansion of Si particles, upon lithium intercalation during charging of 45 a prior art lithium-ion battery, …
FIG. 2(B) Schematic of the heat-induced conversion of polymer into carbon, which bonds graphene sheets together to form a 3D graphene-carbon hybrid foam. The …
FIG. 3(B) An SEM image of an internal structure of another 3D graphene-carbon hybrid foam
FIG. 4 The charge-discharge cycling behaviors of 2 lithium cells fea- turing graphene-carbon foam-supported Sb—Ge coating- based anodes (Sb 85%/Ge 15%): one …
FIG. 5 The charge-discharge cycling behaviors (specific capacity) of 3 lithium-ion cells each having SnO₂ particles or coating as the an anode active material: …
FIG. 6 The charge-discharge cycling behaviors of 2 lithium-ion cells: one cell containing graphene-embraced Si particles produced by the indirect transfer …
FIG. 7 The cycle life data of lithium-ion cells containing graphene-carbon foam-protected Si coatings, plotted as a function of the pore-to-coating ratio in …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of producing a porous anode material struc-ture for a lithium-ion battery, said method comprising (A) providing an integral 3D graphene-carbon hybrid foam comprising multiple pores, having a pore volume Vp, and pore walls; and (B) impregnating or infiltrating said pores with a fluid for forming a coating of an anode active material, having a coating volume Vc, coated on or bonded to surfaces of said pore walls; wherein said pore walls contain single-layer or few-layer graphene sheets chemi-cally bonded by a carbon material having a carbon material-to-graphene weight ratio from 1/200 to 1/2, and wherein the volume ratio Vp/Vc is from 0.1/1.0 to 10/1.0, wherein said porous anode material structure is in a porous particulate form having a diameter from 5 µm to 50 µm, wherein said anode active material coating is selected from the group consisting of: (a) lithium-containing composites; (b) lithium titanate, lithium manganate, lithium aluminate, lithium-con-taining titanium oxide, lithium transition metal oxide; (c) prelithiated versions thereof; (d) particles of Li, Li alloy, or surface-stabilized Li having at least 60% by weight of lithium element therein; and (e) combinations thereof.
The method of claim 1, wherein said integral 3D graphene-carbon hybrid foam is produced by conducting a process including: (a) mixing multiple particles of a graphitic material and multiple particles of a solid polymer carrier material to form a mixture in an impacting chamber of an energy impacting apparatus; (b) operating said energy impacting apparatus with a frequency and an intensity for a length of time sufficient for peeling off graphene sheets from said graphitic material and transferring said graphene sheets to sur-faces of said solid polymer carrier material particles to produce graphene-coated polymer particles inside said impacting chamber; (c) recovering said graphene-coated polymer particles from said impacting chamber and consolidating said graphene-coated or graphene-embedded polymer par-ticles into a desired shape of graphene-polymer com-posite structure; and (d) pyrolyzing said shape of graphene-polymer composite structure to thermally convert said polymer into pores and carbon or graphite that bonds said graphene sheets to form said integral 3D graphene-carbon hybrid foam.
The method of claim 1, further comprising a step of introducing a conducting polymer or carbon into said pores wherein said conducting polymer or carbon is deposited onto a surface of said coating of anode active material, providing protection thereto.
The method of claim 1, wherein said coating of anode active material is further coated with a layer of carbon or conducting polymer. ∗ ∗ ∗ ∗ ∗
Layer stacks claimed or described, ordered top of device to substrate.
porous anode material structure for lithium-ion battery
Materials described outside the worked examples.
3D graphene-carbon hybrid foam
anode active material coating
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 3(B) An SEM image of an internal structure of another 3D graphene-carbon hybrid foam
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Temperature | 1500–2500 °C | — |
Temperature |
Patents and literature cited by this patent (applicant and examiner references).
Cited patents · 14
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 12,244,014 B2Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1(A) Schematic illustrating the notion that expansion of Si particles, upon lithium intercalation during charging of 45 a prior art lithium-ion battery, …
FIG. 2(B) Schematic of the heat-induced conversion of polymer into carbon, which bonds graphene sheets together to form a 3D graphene-carbon hybrid foam. The …
FIG. 3(B) An SEM image of an internal structure of another 3D graphene-carbon hybrid foam
FIG. 4 The charge-discharge cycling behaviors of 2 lithium cells fea- turing graphene-carbon foam-supported Sb—Ge coating- based anodes (Sb 85%/Ge 15%): one …
FIG. 5 The charge-discharge cycling behaviors (specific capacity) of 3 lithium-ion cells each having SnO₂ particles or coating as the an anode active material: …
FIG. 6 The charge-discharge cycling behaviors of 2 lithium-ion cells: one cell containing graphene-embraced Si particles produced by the indirect transfer …
FIG. 7 The cycle life data of lithium-ion cells containing graphene-carbon foam-protected Si coatings, plotted as a function of the pore-to-coating ratio in …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method of producing a porous anode material struc-ture for a lithium-ion battery, said method comprising (A) providing an integral 3D graphene-carbon hybrid foam comprising multiple pores, having a pore volume Vp, and pore walls; and (B) impregnating or infiltrating said pores with a fluid for forming a coating of an anode active material, having a coating volume Vc, coated on or bonded to surfaces of said pore walls; wherein said pore walls contain single-layer or few-layer graphene sheets chemi-cally bonded by a carbon material having a carbon material-to-graphene weight ratio from 1/200 to 1/2, and wherein the volume ratio Vp/Vc is from 0.1/1.0 to 10/1.0, wherein said porous anode material structure is in a porous particulate form having a diameter from 5 µm to 50 µm, wherein said anode active material coating is selected from the group consisting of: (a) lithium-containing composites; (b) lithium titanate, lithium manganate, lithium aluminate, lithium-con-taining titanium oxide, lithium transition metal oxide; (c) prelithiated versions thereof; (d) particles of Li, Li alloy, or surface-stabilized Li having at least 60% by weight of lithium element therein; and (e) combinations thereof.
The method of claim 1, wherein said integral 3D graphene-carbon hybrid foam is produced by conducting a process including: (a) mixing multiple particles of a graphitic material and multiple particles of a solid polymer carrier material to form a mixture in an impacting chamber of an energy impacting apparatus; (b) operating said energy impacting apparatus with a frequency and an intensity for a length of time sufficient for peeling off graphene sheets from said graphitic material and transferring said graphene sheets to sur-faces of said solid polymer carrier material particles to produce graphene-coated polymer particles inside said impacting chamber; (c) recovering said graphene-coated polymer particles from said impacting chamber and consolidating said graphene-coated or graphene-embedded polymer par-ticles into a desired shape of graphene-polymer com-posite structure; and (d) pyrolyzing said shape of graphene-polymer composite structure to thermally convert said polymer into pores and carbon or graphite that bonds said graphene sheets to form said integral 3D graphene-carbon hybrid foam.
The method of claim 1, further comprising a step of introducing a conducting polymer or carbon into said pores wherein said conducting polymer or carbon is deposited onto a surface of said coating of anode active material, providing protection thereto.
The method of claim 1, wherein said coating of anode active material is further coated with a layer of carbon or conducting polymer. ∗ ∗ ∗ ∗ ∗
Layer stacks claimed or described, ordered top of device to substrate.
porous anode material structure for lithium-ion battery
Materials described outside the worked examples.
3D graphene-carbon hybrid foam
anode active material coating
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 3(B) An SEM image of an internal structure of another 3D graphene-carbon hybrid foam
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Temperature | 1500–2500 °C | — |
Temperature |
Patents and literature cited by this patent (applicant and examiner references).
Cited patents · 14
Related documents with shared materials, methods, properties, or citations.
lithium titanate/lithium manganate/lithium aluminate/lithium transition metal oxide/Li/Li alloy/surface-stabilized Li
graphitic material
solid polymer carrier material
additional carbon source material (petroleum pitch, coal tar pitch, aromatic organic material, monomer, or organic polymer)
conducting polymer or carbon overcoat
| — |
Temperature | 600–650 °C | — |
Pressure | 25–150 Pa | — |
Thickness | 10–20 nm | — |
Temperature | 750–875 °C | — |
Thickness | 1–20000 nm | — |
Thickness | 10000–1000000 nm | — |
Thickness | 10000–100000000 nm | — |
Thickness | 5–50 µm | — |
Thickness | 2–100 nm | — |
Thickness | 0.3354–0.36 nm | — |
Thickness | 0.3354–0.4 nm | — |
Temperature | 430–1050 °C | — |
Temperature | 100–650 °C | — |
Duration | 0.5–5 minutes | — |
Thickness | 50–300 µm | — |
Thickness | 100–200 µm | — |
Temperature | 300–2500 °C | — |
Duration | 1–30 minutes | — |
Duration | 10–120 minutes | — |
Duration | 2–48 hours | — |
Thickness | ≤ 5 µm | — |
Thickness | ≤ 1 µm | — |
Thickness | ≤ 500 nm | — |
Thickness | ≤ 1 nm | — |
Thickness | ≤ 0.344 nm | — |
Temperature | ≤ 2500 °C | — |
Thickness | ≥ 20 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 µm | — |
Thickness | ≥ 10 µm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
— | ≥ 200 W | — |
Thickness | 10–10000000 nm | — |
Thickness | 100–1000000 nm | — |
Temperature | 200–2500 °C | — |
Temperature | 2500–3200 °C | — |
Thickness | 100–100000 nm | — |
Thickness | 200–200000 nm | — |
Thickness | 1–20 µm | — |
Thickness | 1–500 µm | — |
Thickness | ≤ 0.35 nm | — |
Thickness | ≤ 0.34 nm | — |
Thickness | ≤ 0.336 nm | — |
Thickness | ≥ 10 cm | — |
— | ≥ 250 W | — |
— | ≥ 300 W | — |
— | ≥ 350 W | — |
— | ≥ 400 W | — |
Cited non-patent literature · 2
lithium titanate/lithium manganate/lithium aluminate/lithium transition metal oxide/Li/Li alloy/surface-stabilized Li
graphitic material
solid polymer carrier material
additional carbon source material (petroleum pitch, coal tar pitch, aromatic organic material, monomer, or organic polymer)
conducting polymer or carbon overcoat
| — |
Temperature | 600–650 °C | — |
Pressure | 25–150 Pa | — |
Thickness | 10–20 nm | — |
Temperature | 750–875 °C | — |
Thickness | 1–20000 nm | — |
Thickness | 10000–1000000 nm | — |
Thickness | 10000–100000000 nm | — |
Thickness | 5–50 µm | — |
Thickness | 2–100 nm | — |
Thickness | 0.3354–0.36 nm | — |
Thickness | 0.3354–0.4 nm | — |
Temperature | 430–1050 °C | — |
Temperature | 100–650 °C | — |
Duration | 0.5–5 minutes | — |
Thickness | 50–300 µm | — |
Thickness | 100–200 µm | — |
Temperature | 300–2500 °C | — |
Duration | 1–30 minutes | — |
Duration | 10–120 minutes | — |
Duration | 2–48 hours | — |
Thickness | ≤ 5 µm | — |
Thickness | ≤ 1 µm | — |
Thickness | ≤ 500 nm | — |
Thickness | ≤ 1 nm | — |
Thickness | ≤ 0.344 nm | — |
Temperature | ≤ 2500 °C | — |
Thickness | ≥ 20 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 µm | — |
Thickness | ≥ 10 µm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
— | ≥ 200 W | — |
Thickness | 10–10000000 nm | — |
Thickness | 100–1000000 nm | — |
Temperature | 200–2500 °C | — |
Temperature | 2500–3200 °C | — |
Thickness | 100–100000 nm | — |
Thickness | 200–200000 nm | — |
Thickness | 1–20 µm | — |
Thickness | 1–500 µm | — |
Thickness | ≤ 0.35 nm | — |
Thickness | ≤ 0.34 nm | — |
Thickness | ≤ 0.336 nm | — |
Thickness | ≥ 10 cm | — |
— | ≥ 250 W | — |
— | ≥ 300 W | — |
— | ≥ 350 W | — |
— | ≥ 400 W | — |
Cited non-patent literature · 2
lithium titanate/lithium manganate/lithium aluminate/lithium transition metal oxide/Li/Li alloy/surface-stabilized Li
graphitic material
solid polymer carrier material
additional carbon source material (petroleum pitch, coal tar pitch, aromatic organic material, monomer, or organic polymer)
conducting polymer or carbon overcoat
| — |
Temperature | 600–650 °C | — |
Pressure | 25–150 Pa | — |
Thickness | 10–20 nm | — |
Temperature | 750–875 °C | — |
Thickness | 1–20000 nm | — |
Thickness | 10000–1000000 nm | — |
Thickness | 10000–100000000 nm | — |
Thickness | 5–50 µm | — |
Thickness | 2–100 nm | — |
Thickness | 0.3354–0.36 nm | — |
Thickness | 0.3354–0.4 nm | — |
Temperature | 430–1050 °C | — |
Temperature | 100–650 °C | — |
Duration | 0.5–5 minutes | — |
Thickness | 50–300 µm | — |
Thickness | 100–200 µm | — |
Temperature | 300–2500 °C | — |
Duration | 1–30 minutes | — |
Duration | 10–120 minutes | — |
Duration | 2–48 hours | — |
Thickness | ≤ 5 µm | — |
Thickness | ≤ 1 µm | — |
Thickness | ≤ 500 nm | — |
Thickness | ≤ 1 nm | — |
Thickness | ≤ 0.344 nm | — |
Temperature | ≤ 2500 °C | — |
Thickness | ≥ 20 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 µm | — |
Thickness | ≥ 10 µm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
— | ≥ 200 W | — |
Thickness | 10–10000000 nm | — |
Thickness | 100–1000000 nm | — |
Temperature | 200–2500 °C | — |
Temperature | 2500–3200 °C | — |
Thickness | 100–100000 nm | — |
Thickness | 200–200000 nm | — |
Thickness | 1–20 µm | — |
Thickness | 1–500 µm | — |
Thickness | ≤ 0.35 nm | — |
Thickness | ≤ 0.34 nm | — |
Thickness | ≤ 0.336 nm | — |
Thickness | ≥ 10 cm | — |
— | ≥ 250 W | — |
— | ≥ 300 W | — |
— | ≥ 350 W | — |
— | ≥ 400 W | — |
Cited non-patent literature · 2
lithium titanate/lithium manganate/lithium aluminate/lithium transition metal oxide/Li/Li alloy/surface-stabilized Li
graphitic material
solid polymer carrier material
additional carbon source material (petroleum pitch, coal tar pitch, aromatic organic material, monomer, or organic polymer)
conducting polymer or carbon overcoat
| — |
Temperature | 600–650 °C | — |
Pressure | 25–150 Pa | — |
Thickness | 10–20 nm | — |
Temperature | 750–875 °C | — |
Thickness | 1–20000 nm | — |
Thickness | 10000–1000000 nm | — |
Thickness | 10000–100000000 nm | — |
Thickness | 5–50 µm | — |
Thickness | 2–100 nm | — |
Thickness | 0.3354–0.36 nm | — |
Thickness | 0.3354–0.4 nm | — |
Temperature | 430–1050 °C | — |
Temperature | 100–650 °C | — |
Duration | 0.5–5 minutes | — |
Thickness | 50–300 µm | — |
Thickness | 100–200 µm | — |
Temperature | 300–2500 °C | — |
Duration | 1–30 minutes | — |
Duration | 10–120 minutes | — |
Duration | 2–48 hours | — |
Thickness | ≤ 5 µm | — |
Thickness | ≤ 1 µm | — |
Thickness | ≤ 500 nm | — |
Thickness | ≤ 1 nm | — |
Thickness | ≤ 0.344 nm | — |
Temperature | ≤ 2500 °C | — |
Thickness | ≥ 20 nm | — |
Thickness | ≥ 1 nm | — |
Thickness | ≥ 1 µm | — |
Thickness | ≥ 10 µm | — |
Thickness | ≥ 5 nm | — |
Thickness | ≥ 10 nm | — |
— | ≥ 200 W | — |
Thickness | 10–10000000 nm | — |
Thickness | 100–1000000 nm | — |
Temperature | 200–2500 °C | — |
Temperature | 2500–3200 °C | — |
Thickness | 100–100000 nm | — |
Thickness | 200–200000 nm | — |
Thickness | 1–20 µm | — |
Thickness | 1–500 µm | — |
Thickness | ≤ 0.35 nm | — |
Thickness | ≤ 0.34 nm | — |
Thickness | ≤ 0.336 nm | — |
Thickness | ≥ 10 cm | — |
— | ≥ 250 W | — |
— | ≥ 300 W | — |
— | ≥ 350 W | — |
— | ≥ 400 W | — |
Cited non-patent literature · 2
