Patent
US 9,136,112Method of Post Treating Graphene and Method of Manufacturing Graphene Using the Same
Dong-Kwan Won
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,136,112Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 and is a 15 lateral cross-sectional view corresponding to IV of
FIG. 2 is a schematic drawing showing the method of manufacturing graphene of
FIG. 3 is a schematic lateral cross-sectional view of a metal thin film transported according to an operation of S₁₀₀ of
FIG. 4 is a schematic lateral cross-sectional view of a metal thin film on which graphene is formed according to operations of S 110 and S₁₂₀ of
FIG. 5 is a schematic lateral cross-sectional view showing a state of graphene on which a carrier is coated according to an operation of S₁₃₀ of
FIG. 6 is a schematic lateral cross-sectional view showing a state of stacking 20 graphene and a carrier when a metal thin film is removed according to an …
FIG. 7 is a schematic lateral cross-sectional view showing a state of graphene 25 on which a protective film material is formed according to an operation of …
FIG. 8 is a schematic lateral cross-sectional view showing a state of graphene 30 when a carrier is removed according to an operation of S₁₇₀ of
FIG. 9 is a flow chart of a method of manufacturing graphene according to another embodiment of the present invention; 4
FIG. 10 is a schematic diagram showing the method of manufacturing graphene shown in
FIGS. 11 A and 11 B are schematic perspective views of a metal thin-film according to an operation S₉₀₀ of
FIG. 12 is a graph showing a surface resistance according to the number of times of pressure being applied to graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
(Cu rr ently Amended): A method of post treating graphene, the method comprising: providing graphene on a metal thin film; providing a carrier on the graphene, the providing the carrier comprising: supplying the ca rr ier onto an outer surface of a coating roller; and coating the supplied ca rr ier onto the metal thin film by the coating roller without having the coating roller contact the graphene; hardening the carrier; and removing the metal thin film from the graphene, wherein the coating roller is disposed to be se pa rated by a predetermined distance from the g raphene and configured to avoid app lying pressure to the graphene. currently amended
: The method of claim 1, wherein the metal thin film comprises a panel-like shape, and the post treating graphene is performed while a transporting unit is configured to transport the metal thin film. 2 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545645.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white 4-6..
: The method of claim 1, wherein the providing the carrier comprises printing or coating the carrier on the graphene.
: The method of claim 1, wherein the carrier is one selected from the group consisting of an acrylic material, a silicon-based material, and an epoxy-based material. 9-10..
: A graphene post-treated according to the method of claim 1.
: The method of claim 1, wherein the carrier comprises a liquid phase carrier.
: The method of claim 1, wherein the carrier is coated on the graphene in response to the coating roller rotating. 6 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545649.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white
. canceled
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(Cu rr ently Amended): A method of post treating graphene, the method comp ri sing: providing graphene on a metal thin film; providing a carrier on the graphene; hardening the ca rr ier; and removing the metal thin film from the graphene, wherein the hardening the carrier comprises hardening the ca rr ier using a hardening device comprising; a hardening roller separated b y a p redetermined distance from the carrier and conf igu red t o e t bt eat or light t o the carrieinte hardening rolle r config ured to harden the carrier by rotatin g on a fixed location; and 3 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545646.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white a transporting roller and separatd by a predetermined ditance from the carrier co nfig urf ed to ern it heat or light to the carrier. 12-14..
: The method of claim 11, wherein the hardening the carrier comprises hardening the carrier using a- the_ hardening 4e@e- roller configured to avoid applying pressure to the graphene while rotating. currently amended
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(Cu rr ently Amended): A method of manufacturing graphene comprising: transporting a metal thin film to a graphene forming apparatus; providing graphene on the metal thin film; providing a carrier on a first surface of the graphene, the providing the ca rr ier comprising: supplying the carrier onto an outer surface of a coating roller; and coating the supplied carrier onto the metal thin film by the coating roller without having the coating roller contact the graphene; hardening the ca rr ier; removing the metal thin film from the graphene; and providing a protective film on a second surface of the graphene, wherein the coating roller is disposed to be separated by a p redetermined distance from heg rapt re and configu ed cavoid g.rata n s e ne.
: The method of claim 15, wherein the post treating of graphene is performed using a reel-to-reel method. 17-20..
: The method of claim 15, further comprising removing the carr ier from the graphene provided with the protective film. 22-23..
: A graphene manufactured according to the method of claim 15.
: The method of claim 15, wherein the carrier comprises a liquid phase carrier.
: The method of claim 15, wherein the carrier is coated on the graphene in response to the coating roller rotating.
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: An apparatus for manufacturing low resistance graphene 5 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545648.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white comprising: a transportation unit which transports a metal thin film throughout the apparatus; a graphene forming apparatus which receives the metal thin film from the transportation unit and disposes graphene on the metal thin film; a carrier coating unit which disposes a ca rr ier on a first surface of the graphene; a hardening device which hardens the carrier; a metal film removing unit which removes the metal thin film from the graphene; and a protective film unit which disposes a protective film on a second surface of the graphene. withdrawn
: The apparatus of claim 30, wherein the carrier coating unit comprises a coating roller which is disposed in a first predetermined distance from the thin metal film and does not apply pressure to the graphene. withdrawn
: The apparatus of claim 30, wherein the hardening device is separated by a second predetermined distance from the ca rr ier which and emits heat or light to the carrier. withdrawn
. canceled
. canceled
. canceled
: The method of e4a-im49laim 1 1, wherein the ca rr ier is provided between the hardening roller and the transporting roller in a ca rr ier thickness direction. 7
Layer stacks claimed or described, ordered top of device to substrate.
apparatus for manufacturing low resistance graphene
Materials described outside the worked examples.
metal thin film
graphene
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 and is a 15 lateral cross-sectional view corresponding to IV of
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,136,112Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 and is a 15 lateral cross-sectional view corresponding to IV of
FIG. 2 is a schematic drawing showing the method of manufacturing graphene of
FIG. 3 is a schematic lateral cross-sectional view of a metal thin film transported according to an operation of S₁₀₀ of
FIG. 4 is a schematic lateral cross-sectional view of a metal thin film on which graphene is formed according to operations of S 110 and S₁₂₀ of
FIG. 5 is a schematic lateral cross-sectional view showing a state of graphene on which a carrier is coated according to an operation of S₁₃₀ of
FIG. 6 is a schematic lateral cross-sectional view showing a state of stacking 20 graphene and a carrier when a metal thin film is removed according to an …
FIG. 7 is a schematic lateral cross-sectional view showing a state of graphene 25 on which a protective film material is formed according to an operation of …
FIG. 8 is a schematic lateral cross-sectional view showing a state of graphene 30 when a carrier is removed according to an operation of S₁₇₀ of
FIG. 9 is a flow chart of a method of manufacturing graphene according to another embodiment of the present invention; 4
FIG. 10 is a schematic diagram showing the method of manufacturing graphene shown in
FIGS. 11 A and 11 B are schematic perspective views of a metal thin-film according to an operation S₉₀₀ of
FIG. 12 is a graph showing a surface resistance according to the number of times of pressure being applied to graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
(Cu rr ently Amended): A method of post treating graphene, the method comprising: providing graphene on a metal thin film; providing a carrier on the graphene, the providing the carrier comprising: supplying the ca rr ier onto an outer surface of a coating roller; and coating the supplied ca rr ier onto the metal thin film by the coating roller without having the coating roller contact the graphene; hardening the carrier; and removing the metal thin film from the graphene, wherein the coating roller is disposed to be se pa rated by a predetermined distance from the g raphene and configured to avoid app lying pressure to the graphene. currently amended
: The method of claim 1, wherein the metal thin film comprises a panel-like shape, and the post treating graphene is performed while a transporting unit is configured to transport the metal thin film. 2 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545645.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white 4-6..
: The method of claim 1, wherein the providing the carrier comprises printing or coating the carrier on the graphene.
: The method of claim 1, wherein the carrier is one selected from the group consisting of an acrylic material, a silicon-based material, and an epoxy-based material. 9-10..
: A graphene post-treated according to the method of claim 1.
: The method of claim 1, wherein the carrier comprises a liquid phase carrier.
: The method of claim 1, wherein the carrier is coated on the graphene in response to the coating roller rotating. 6 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545649.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white
. canceled
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(Cu rr ently Amended): A method of post treating graphene, the method comp ri sing: providing graphene on a metal thin film; providing a carrier on the graphene; hardening the ca rr ier; and removing the metal thin film from the graphene, wherein the hardening the carrier comprises hardening the ca rr ier using a hardening device comprising; a hardening roller separated b y a p redetermined distance from the carrier and conf igu red t o e t bt eat or light t o the carrieinte hardening rolle r config ured to harden the carrier by rotatin g on a fixed location; and 3 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545646.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white a transporting roller and separatd by a predetermined ditance from the carrier co nfig urf ed to ern it heat or light to the carrier. 12-14..
: The method of claim 11, wherein the hardening the carrier comprises hardening the carrier using a- the_ hardening 4e@e- roller configured to avoid applying pressure to the graphene while rotating. currently amended
canceled
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(Cu rr ently Amended): A method of manufacturing graphene comprising: transporting a metal thin film to a graphene forming apparatus; providing graphene on the metal thin film; providing a carrier on a first surface of the graphene, the providing the ca rr ier comprising: supplying the carrier onto an outer surface of a coating roller; and coating the supplied carrier onto the metal thin film by the coating roller without having the coating roller contact the graphene; hardening the ca rr ier; removing the metal thin film from the graphene; and providing a protective film on a second surface of the graphene, wherein the coating roller is disposed to be separated by a p redetermined distance from heg rapt re and configu ed cavoid g.rata n s e ne.
: The method of claim 15, wherein the post treating of graphene is performed using a reel-to-reel method. 17-20..
: The method of claim 15, further comprising removing the carr ier from the graphene provided with the protective film. 22-23..
: A graphene manufactured according to the method of claim 15.
: The method of claim 15, wherein the carrier comprises a liquid phase carrier.
: The method of claim 15, wherein the carrier is coated on the graphene in response to the coating roller rotating.
canceled
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. canceled
: An apparatus for manufacturing low resistance graphene 5 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545648.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white comprising: a transportation unit which transports a metal thin film throughout the apparatus; a graphene forming apparatus which receives the metal thin film from the transportation unit and disposes graphene on the metal thin film; a carrier coating unit which disposes a ca rr ier on a first surface of the graphene; a hardening device which hardens the carrier; a metal film removing unit which removes the metal thin film from the graphene; and a protective film unit which disposes a protective film on a second surface of the graphene. withdrawn
: The apparatus of claim 30, wherein the carrier coating unit comprises a coating roller which is disposed in a first predetermined distance from the thin metal film and does not apply pressure to the graphene. withdrawn
: The apparatus of claim 30, wherein the hardening device is separated by a second predetermined distance from the ca rr ier which and emits heat or light to the carrier. withdrawn
. canceled
. canceled
. canceled
: The method of e4a-im49laim 1 1, wherein the ca rr ier is provided between the hardening roller and the transporting roller in a ca rr ier thickness direction. 7
Layer stacks claimed or described, ordered top of device to substrate.
apparatus for manufacturing low resistance graphene
Materials described outside the worked examples.
metal thin film
graphene
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 and is a 15 lateral cross-sectional view corresponding to IV of
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,136,112Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 and is a 15 lateral cross-sectional view corresponding to IV of
FIG. 2 is a schematic drawing showing the method of manufacturing graphene of
FIG. 3 is a schematic lateral cross-sectional view of a metal thin film transported according to an operation of S₁₀₀ of
FIG. 4 is a schematic lateral cross-sectional view of a metal thin film on which graphene is formed according to operations of S 110 and S₁₂₀ of
FIG. 5 is a schematic lateral cross-sectional view showing a state of graphene on which a carrier is coated according to an operation of S₁₃₀ of
FIG. 6 is a schematic lateral cross-sectional view showing a state of stacking 20 graphene and a carrier when a metal thin film is removed according to an …
FIG. 7 is a schematic lateral cross-sectional view showing a state of graphene 25 on which a protective film material is formed according to an operation of …
FIG. 8 is a schematic lateral cross-sectional view showing a state of graphene 30 when a carrier is removed according to an operation of S₁₇₀ of
FIG. 9 is a flow chart of a method of manufacturing graphene according to another embodiment of the present invention; 4
FIG. 10 is a schematic diagram showing the method of manufacturing graphene shown in
FIGS. 11 A and 11 B are schematic perspective views of a metal thin-film according to an operation S₉₀₀ of
FIG. 12 is a graph showing a surface resistance according to the number of times of pressure being applied to graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
(Cu rr ently Amended): A method of post treating graphene, the method comprising: providing graphene on a metal thin film; providing a carrier on the graphene, the providing the carrier comprising: supplying the ca rr ier onto an outer surface of a coating roller; and coating the supplied ca rr ier onto the metal thin film by the coating roller without having the coating roller contact the graphene; hardening the carrier; and removing the metal thin film from the graphene, wherein the coating roller is disposed to be se pa rated by a predetermined distance from the g raphene and configured to avoid app lying pressure to the graphene. currently amended
: The method of claim 1, wherein the metal thin film comprises a panel-like shape, and the post treating graphene is performed while a transporting unit is configured to transport the metal thin film. 2 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545645.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white 4-6..
: The method of claim 1, wherein the providing the carrier comprises printing or coating the carrier on the graphene.
: The method of claim 1, wherein the carrier is one selected from the group consisting of an acrylic material, a silicon-based material, and an epoxy-based material. 9-10..
: A graphene post-treated according to the method of claim 1.
: The method of claim 1, wherein the carrier comprises a liquid phase carrier.
: The method of claim 1, wherein the carrier is coated on the graphene in response to the coating roller rotating. 6 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545649.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white
. canceled
canceled
canceled
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canceled
(Cu rr ently Amended): A method of post treating graphene, the method comp ri sing: providing graphene on a metal thin film; providing a carrier on the graphene; hardening the ca rr ier; and removing the metal thin film from the graphene, wherein the hardening the carrier comprises hardening the ca rr ier using a hardening device comprising; a hardening roller separated b y a p redetermined distance from the carrier and conf igu red t o e t bt eat or light t o the carrieinte hardening rolle r config ured to harden the carrier by rotatin g on a fixed location; and 3 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545646.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white a transporting roller and separatd by a predetermined ditance from the carrier co nfig urf ed to ern it heat or light to the carrier. 12-14..
: The method of claim 11, wherein the hardening the carrier comprises hardening the carrier using a- the_ hardening 4e@e- roller configured to avoid applying pressure to the graphene while rotating. currently amended
canceled
canceled
canceled
(Cu rr ently Amended): A method of manufacturing graphene comprising: transporting a metal thin film to a graphene forming apparatus; providing graphene on the metal thin film; providing a carrier on a first surface of the graphene, the providing the ca rr ier comprising: supplying the carrier onto an outer surface of a coating roller; and coating the supplied carrier onto the metal thin film by the coating roller without having the coating roller contact the graphene; hardening the ca rr ier; removing the metal thin film from the graphene; and providing a protective film on a second surface of the graphene, wherein the coating roller is disposed to be separated by a p redetermined distance from heg rapt re and configu ed cavoid g.rata n s e ne.
: The method of claim 15, wherein the post treating of graphene is performed using a reel-to-reel method. 17-20..
: The method of claim 15, further comprising removing the carr ier from the graphene provided with the protective film. 22-23..
: A graphene manufactured according to the method of claim 15.
: The method of claim 15, wherein the carrier comprises a liquid phase carrier.
: The method of claim 15, wherein the carrier is coated on the graphene in response to the coating roller rotating.
canceled
canceled
canceled
canceled
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. canceled
: An apparatus for manufacturing low resistance graphene 5 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545648.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white comprising: a transportation unit which transports a metal thin film throughout the apparatus; a graphene forming apparatus which receives the metal thin film from the transportation unit and disposes graphene on the metal thin film; a carrier coating unit which disposes a ca rr ier on a first surface of the graphene; a hardening device which hardens the carrier; a metal film removing unit which removes the metal thin film from the graphene; and a protective film unit which disposes a protective film on a second surface of the graphene. withdrawn
: The apparatus of claim 30, wherein the carrier coating unit comprises a coating roller which is disposed in a first predetermined distance from the thin metal film and does not apply pressure to the graphene. withdrawn
: The apparatus of claim 30, wherein the hardening device is separated by a second predetermined distance from the ca rr ier which and emits heat or light to the carrier. withdrawn
. canceled
. canceled
. canceled
: The method of e4a-im49laim 1 1, wherein the ca rr ier is provided between the hardening roller and the transporting roller in a ca rr ier thickness direction. 7
Layer stacks claimed or described, ordered top of device to substrate.
apparatus for manufacturing low resistance graphene
Materials described outside the worked examples.
metal thin film
graphene
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 and is a 15 lateral cross-sectional view corresponding to IV of
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,136,112Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 and is a 15 lateral cross-sectional view corresponding to IV of
FIG. 2 is a schematic drawing showing the method of manufacturing graphene of
FIG. 3 is a schematic lateral cross-sectional view of a metal thin film transported according to an operation of S₁₀₀ of
FIG. 4 is a schematic lateral cross-sectional view of a metal thin film on which graphene is formed according to operations of S 110 and S₁₂₀ of
FIG. 5 is a schematic lateral cross-sectional view showing a state of graphene on which a carrier is coated according to an operation of S₁₃₀ of
FIG. 6 is a schematic lateral cross-sectional view showing a state of stacking 20 graphene and a carrier when a metal thin film is removed according to an …
FIG. 7 is a schematic lateral cross-sectional view showing a state of graphene 25 on which a protective film material is formed according to an operation of …
FIG. 8 is a schematic lateral cross-sectional view showing a state of graphene 30 when a carrier is removed according to an operation of S₁₇₀ of
FIG. 9 is a flow chart of a method of manufacturing graphene according to another embodiment of the present invention; 4
FIG. 10 is a schematic diagram showing the method of manufacturing graphene shown in
FIGS. 11 A and 11 B are schematic perspective views of a metal thin-film according to an operation S₉₀₀ of
FIG. 12 is a graph showing a surface resistance according to the number of times of pressure being applied to graphene.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
(Cu rr ently Amended): A method of post treating graphene, the method comprising: providing graphene on a metal thin film; providing a carrier on the graphene, the providing the carrier comprising: supplying the ca rr ier onto an outer surface of a coating roller; and coating the supplied ca rr ier onto the metal thin film by the coating roller without having the coating roller contact the graphene; hardening the carrier; and removing the metal thin film from the graphene, wherein the coating roller is disposed to be se pa rated by a predetermined distance from the g raphene and configured to avoid app lying pressure to the graphene. currently amended
: The method of claim 1, wherein the metal thin film comprises a panel-like shape, and the post treating graphene is performed while a transporting unit is configured to transport the metal thin film. 2 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545645.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white 4-6..
: The method of claim 1, wherein the providing the carrier comprises printing or coating the carrier on the graphene.
: The method of claim 1, wherein the carrier is one selected from the group consisting of an acrylic material, a silicon-based material, and an epoxy-based material. 9-10..
: A graphene post-treated according to the method of claim 1.
: The method of claim 1, wherein the carrier comprises a liquid phase carrier.
: The method of claim 1, wherein the carrier is coated on the graphene in response to the coating roller rotating. 6 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545649.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white
. canceled
canceled
canceled
canceled
canceled
canceled
(Cu rr ently Amended): A method of post treating graphene, the method comp ri sing: providing graphene on a metal thin film; providing a carrier on the graphene; hardening the ca rr ier; and removing the metal thin film from the graphene, wherein the hardening the carrier comprises hardening the ca rr ier using a hardening device comprising; a hardening roller separated b y a p redetermined distance from the carrier and conf igu red t o e t bt eat or light t o the carrieinte hardening rolle r config ured to harden the carrier by rotatin g on a fixed location; and 3 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545646.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white a transporting roller and separatd by a predetermined ditance from the carrier co nfig urf ed to ern it heat or light to the carrier. 12-14..
: The method of claim 11, wherein the hardening the carrier comprises hardening the carrier using a- the_ hardening 4e@e- roller configured to avoid applying pressure to the graphene while rotating. currently amended
canceled
canceled
canceled
(Cu rr ently Amended): A method of manufacturing graphene comprising: transporting a metal thin film to a graphene forming apparatus; providing graphene on the metal thin film; providing a carrier on a first surface of the graphene, the providing the ca rr ier comprising: supplying the carrier onto an outer surface of a coating roller; and coating the supplied carrier onto the metal thin film by the coating roller without having the coating roller contact the graphene; hardening the ca rr ier; removing the metal thin film from the graphene; and providing a protective film on a second surface of the graphene, wherein the coating roller is disposed to be separated by a p redetermined distance from heg rapt re and configu ed cavoid g.rata n s e ne.
: The method of claim 15, wherein the post treating of graphene is performed using a reel-to-reel method. 17-20..
: The method of claim 15, further comprising removing the carr ier from the graphene provided with the protective film. 22-23..
: A graphene manufactured according to the method of claim 15.
: The method of claim 15, wherein the carrier comprises a liquid phase carrier.
: The method of claim 15, wherein the carrier is coated on the graphene in response to the coating roller rotating.
canceled
canceled
canceled
canceled
canceled
canceled
. canceled
: An apparatus for manufacturing low resistance graphene 5 SVG 13816351.04-20-2015.I₈Q₈WTCLPXXIFW3.CLM14545648.1.301.161.2246.263.svg 0.34 6.483 Graph Black and white comprising: a transportation unit which transports a metal thin film throughout the apparatus; a graphene forming apparatus which receives the metal thin film from the transportation unit and disposes graphene on the metal thin film; a carrier coating unit which disposes a ca rr ier on a first surface of the graphene; a hardening device which hardens the carrier; a metal film removing unit which removes the metal thin film from the graphene; and a protective film unit which disposes a protective film on a second surface of the graphene. withdrawn
: The apparatus of claim 30, wherein the carrier coating unit comprises a coating roller which is disposed in a first predetermined distance from the thin metal film and does not apply pressure to the graphene. withdrawn
: The apparatus of claim 30, wherein the hardening device is separated by a second predetermined distance from the ca rr ier which and emits heat or light to the carrier. withdrawn
. canceled
. canceled
. canceled
: The method of e4a-im49laim 1 1, wherein the ca rr ier is provided between the hardening roller and the transporting roller in a ca rr ier thickness direction. 7
Layer stacks claimed or described, ordered top of device to substrate.
apparatus for manufacturing low resistance graphene
Materials described outside the worked examples.
metal thin film
graphene
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 1 and is a 15 lateral cross-sectional view corresponding to IV of
Related documents with shared materials, methods, properties, or citations.
carrier
protective film
PMMA
water soluble acrylic resin
polydimethylsiloxane (PDMS)
silicon adhesive
FIG. 12 is a graph showing a surface resistance according to the number of times of pressure being applied to graphene.
durability, and thus, can effectively protect the graphene 302 from surrounding environment. 10 The carrier 303 may be an epoxy-based material such as a water soluble epoxy or a modified epoxy resin. Also, the carrier 303 may be a water soluble polyurethane resi
carrier
protective film
PMMA
water soluble acrylic resin
polydimethylsiloxane (PDMS)
silicon adhesive
FIG. 12 is a graph showing a surface resistance according to the number of times of pressure being applied to graphene.
durability, and thus, can effectively protect the graphene 302 from surrounding environment. 10 The carrier 303 may be an epoxy-based material such as a water soluble epoxy or a modified epoxy resin. Also, the carrier 303 may be a water soluble polyurethane resi
carrier
protective film
PMMA
water soluble acrylic resin
polydimethylsiloxane (PDMS)
silicon adhesive
FIG. 12 is a graph showing a surface resistance according to the number of times of pressure being applied to graphene.
durability, and thus, can effectively protect the graphene 302 from surrounding environment. 10 The carrier 303 may be an epoxy-based material such as a water soluble epoxy or a modified epoxy resin. Also, the carrier 303 may be a water soluble polyurethane resi
carrier
protective film
PMMA
water soluble acrylic resin
polydimethylsiloxane (PDMS)
silicon adhesive
FIG. 12 is a graph showing a surface resistance according to the number of times of pressure being applied to graphene.
durability, and thus, can effectively protect the graphene 302 from surrounding environment. 10 The carrier 303 may be an epoxy-based material such as a water soluble epoxy or a modified epoxy resin. Also, the carrier 303 may be a water soluble polyurethane resi