Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1
FIG. 1 is an isometric view of an example module that includes an example planar interconnect structure. 55
FIG. 2
FIG. 2 is a schematic of an example GaN switching module.
FIG. 3
FIG. 3 is a schematic of an example segmented GaN FET transistor.
FIG. 4
FIGS. 4A and 4B illustrates a prior art wire bond inter- 60 connect.
FIG. 5
FIG. 5 is an isometric cut-away view that illustrates an example planar interconnect structure in more detail.
FIG. 6
process tool top view
FIG. 6B is a cross-sectional view of an example planar interconnect structure. 65
FIG. 7
FIGS. 7A-7C are cross-sectional views illustrating fabri- cation of an example planar interconnect structure. B₂
FIG. 8
FIG. 8 is a plot illustrating a comparison of inductance between a bond wire interconnect and an example planar interconnect structure.
FIG. 9
FIG. 9 is an isometric view of another example module that includes an example planar interconnect structure.
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
4 independent · 10 dependent
1
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A circuit module comprising: a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a semicon-ductor device formed therein, the semiconductor device having a set of bond pads formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; and a first printed ink planar interconnect line coupled to a subset of the set of bond pads and to the conductive pad.
2
Dependent← claim 1Cucircuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the printed ink includes copper particles.
3
Dependent← claim 1silver or gold particle printed inkcircuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the printed ink includes silver or gold particles.
4
Dependent← claim 1circuit module with printed ink planar interconnect
The circuit module of claim 1, wherein a heat dispers-ing layer of the multilayer substrate forms the second surface of the multilayer substrate.
5
Dependent← claim 1GaNGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the semicon-ductor device is a GaN FET.
6
Dependent← claim 1circuit module with printed ink planar interconnect
The circuit module of claim 1, further comprising: a second IC die mounted to the first surface of the multilayer substrate; at least one passive component coupled to the first surface of the multilayer substrate; and encapsulation material covering the first surface of the multilayer substrate, the IC die, the second IC die, and the passive component.
8
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A circuit module comprising: a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; a second conductive pad formed within a second one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a semicon-ductor device formed therein, the semiconductor device having a set of bond pads formed on the first surface of the IC die, wherein the set of bond pads is a first set of bond pads and the semiconductor device has a second set of bond pads formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; a first printed ink planar interconnect line coupled to the set of bond pads and to the conductive pad; and a second printed ink planar interconnect line coupled to the second set of bond pads and to the second conduc-tive pad.
9
Independentprinted conductive inkGaNGaN FET circuit module with printed ink planar interconnect
A circuit module comprising: 25 a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; a second conductive pad formed within a second one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a GaN FET semiconductor device formed therein, the GaN FET having a set of source bond pads, a set of drain bond pads, and a gate bond pad all formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; a first printed ink planar interconnect line coupled to the set of source bond pads and to the first conductive pad; and B₂ a second printed ink planar interconnect line coupled to the set of drain bond pads and to the second conductive pad.
10
Dependent← claim 9GaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9 further comprising: a second IC die mounted to the first surface of the multilayer substrate, the second IC having an output bond pad; and a third printed ink planar interconnect line coupled between the output bond pad on the second IC and the gate bond pad on the GaN FET.
11
Dependent← claim 9CuGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein the printed ink includes copper particles.
12
Dependent← claim 9silver or gold particle printed inkGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein the printed ink includes silver or gold particles.
13
Dependent← claim 9GaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein a heat dis-persing layer of the multilayer substrate forms the second surface of the multilayer substrate.
14
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A method for fabricating a module, the method comprising: fabricating a multilayer substrate having an exposed sur-face; patterning a first conductive layer of the multilayer substrate to form a conductive pad; patterning a second conductive layer of the multilayer substrate to form a second conductive pad; bonding an integrated circuit (IC) die to the exposed surface of the multilayer substrate such that a set of bond pads on the IC die face away from the exposed surface of the multilayer substrate; printing a patterned layer of dielectric over the IC die and the conductive pad such that the set of bond pads and the conductive pad are exposed; printing a patterned layer of conductive ink to form a first printed ink planar interconnect line to couple a portion of the set of bond pads to the conductive pad; and wherein printing the patterned layer of conductive ink also forms a second printed ink planar interconnect line to couple a second portion of the set of bond pads to the second conductive pad. ∗ ∗ ∗ ∗ ∗
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
circuit module with printed ink planar interconnect
mold encapsulation materialencapsulation
printed conductive inkprinted ink planar interconnect line
printed dielectric layerprinted dielectric layer
IC die (bonded dead-bug, bond pads up)IC die (bonded dead-bug, bond pads up)
ceramicceramic layer
multilayer substrate conductive patterned layers
Materials
Materials described outside the worked examples.
printed conductive ink
Planar Interconnect Line Material
copper particle printed ink
Cu
Planar Interconnect Line Material
silver or gold particle printed ink
Planar Interconnect Line Material
Process steps
Additional fabrication and treatment steps described in the patent.
1
Die Bonding And Printed Interconnect Fabrication
Step 1
Process details
steps:fabricate multilayer substrate with exposed surface, pattern first conductive layer to form conductive pad, pattern second conductive layer to form second conductive pad, bond IC die to exposed surface of multilayer substrate (dead-bug, bond pads facing away from substrate), print patterned layer of dielectric over IC die and conductive pad with bond pads and conductive pad exposed, print patterned layer of conductive ink to form first and second printed ink planar interconnect lines
Materials:printed conductive ink
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
fet electrical
Fet Electrical
FIG. 3 is a schematic of an example segmented GaN FET transistor.
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1
FIG. 1 is an isometric view of an example module that includes an example planar interconnect structure. 55
FIG. 2
FIG. 2 is a schematic of an example GaN switching module.
FIG. 3
FIG. 3 is a schematic of an example segmented GaN FET transistor.
FIG. 4
FIGS. 4A and 4B illustrates a prior art wire bond inter- 60 connect.
FIG. 5
FIG. 5 is an isometric cut-away view that illustrates an example planar interconnect structure in more detail.
FIG. 6
process tool top view
FIG. 6B is a cross-sectional view of an example planar interconnect structure. 65
FIG. 7
FIGS. 7A-7C are cross-sectional views illustrating fabri- cation of an example planar interconnect structure. B₂
FIG. 8
FIG. 8 is a plot illustrating a comparison of inductance between a bond wire interconnect and an example planar interconnect structure.
FIG. 9
FIG. 9 is an isometric view of another example module that includes an example planar interconnect structure.
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
4 independent · 10 dependent
1
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A circuit module comprising: a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a semicon-ductor device formed therein, the semiconductor device having a set of bond pads formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; and a first printed ink planar interconnect line coupled to a subset of the set of bond pads and to the conductive pad.
2
Dependent← claim 1Cucircuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the printed ink includes copper particles.
3
Dependent← claim 1silver or gold particle printed inkcircuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the printed ink includes silver or gold particles.
4
Dependent← claim 1circuit module with printed ink planar interconnect
The circuit module of claim 1, wherein a heat dispers-ing layer of the multilayer substrate forms the second surface of the multilayer substrate.
5
Dependent← claim 1GaNGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the semicon-ductor device is a GaN FET.
6
Dependent← claim 1circuit module with printed ink planar interconnect
The circuit module of claim 1, further comprising: a second IC die mounted to the first surface of the multilayer substrate; at least one passive component coupled to the first surface of the multilayer substrate; and encapsulation material covering the first surface of the multilayer substrate, the IC die, the second IC die, and the passive component.
8
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A circuit module comprising: a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; a second conductive pad formed within a second one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a semicon-ductor device formed therein, the semiconductor device having a set of bond pads formed on the first surface of the IC die, wherein the set of bond pads is a first set of bond pads and the semiconductor device has a second set of bond pads formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; a first printed ink planar interconnect line coupled to the set of bond pads and to the conductive pad; and a second printed ink planar interconnect line coupled to the second set of bond pads and to the second conduc-tive pad.
9
Independentprinted conductive inkGaNGaN FET circuit module with printed ink planar interconnect
A circuit module comprising: 25 a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; a second conductive pad formed within a second one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a GaN FET semiconductor device formed therein, the GaN FET having a set of source bond pads, a set of drain bond pads, and a gate bond pad all formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; a first printed ink planar interconnect line coupled to the set of source bond pads and to the first conductive pad; and B₂ a second printed ink planar interconnect line coupled to the set of drain bond pads and to the second conductive pad.
10
Dependent← claim 9GaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9 further comprising: a second IC die mounted to the first surface of the multilayer substrate, the second IC having an output bond pad; and a third printed ink planar interconnect line coupled between the output bond pad on the second IC and the gate bond pad on the GaN FET.
11
Dependent← claim 9CuGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein the printed ink includes copper particles.
12
Dependent← claim 9silver or gold particle printed inkGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein the printed ink includes silver or gold particles.
13
Dependent← claim 9GaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein a heat dis-persing layer of the multilayer substrate forms the second surface of the multilayer substrate.
14
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A method for fabricating a module, the method comprising: fabricating a multilayer substrate having an exposed sur-face; patterning a first conductive layer of the multilayer substrate to form a conductive pad; patterning a second conductive layer of the multilayer substrate to form a second conductive pad; bonding an integrated circuit (IC) die to the exposed surface of the multilayer substrate such that a set of bond pads on the IC die face away from the exposed surface of the multilayer substrate; printing a patterned layer of dielectric over the IC die and the conductive pad such that the set of bond pads and the conductive pad are exposed; printing a patterned layer of conductive ink to form a first printed ink planar interconnect line to couple a portion of the set of bond pads to the conductive pad; and wherein printing the patterned layer of conductive ink also forms a second printed ink planar interconnect line to couple a second portion of the set of bond pads to the second conductive pad. ∗ ∗ ∗ ∗ ∗
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
circuit module with printed ink planar interconnect
mold encapsulation materialencapsulation
printed conductive inkprinted ink planar interconnect line
printed dielectric layerprinted dielectric layer
IC die (bonded dead-bug, bond pads up)IC die (bonded dead-bug, bond pads up)
ceramicceramic layer
multilayer substrate conductive patterned layers
Materials
Materials described outside the worked examples.
printed conductive ink
Planar Interconnect Line Material
copper particle printed ink
Cu
Planar Interconnect Line Material
silver or gold particle printed ink
Planar Interconnect Line Material
Process steps
Additional fabrication and treatment steps described in the patent.
1
Die Bonding And Printed Interconnect Fabrication
Step 1
Process details
steps:fabricate multilayer substrate with exposed surface, pattern first conductive layer to form conductive pad, pattern second conductive layer to form second conductive pad, bond IC die to exposed surface of multilayer substrate (dead-bug, bond pads facing away from substrate), print patterned layer of dielectric over IC die and conductive pad with bond pads and conductive pad exposed, print patterned layer of conductive ink to form first and second printed ink planar interconnect lines
Materials:printed conductive ink
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
fet electrical
Fet Electrical
FIG. 3 is a schematic of an example segmented GaN FET transistor.
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1
FIG. 1 is an isometric view of an example module that includes an example planar interconnect structure. 55
FIG. 2
FIG. 2 is a schematic of an example GaN switching module.
FIG. 3
FIG. 3 is a schematic of an example segmented GaN FET transistor.
FIG. 4
FIGS. 4A and 4B illustrates a prior art wire bond inter- 60 connect.
FIG. 5
FIG. 5 is an isometric cut-away view that illustrates an example planar interconnect structure in more detail.
FIG. 6
process tool top view
FIG. 6B is a cross-sectional view of an example planar interconnect structure. 65
FIG. 7
FIGS. 7A-7C are cross-sectional views illustrating fabri- cation of an example planar interconnect structure. B₂
FIG. 8
FIG. 8 is a plot illustrating a comparison of inductance between a bond wire interconnect and an example planar interconnect structure.
FIG. 9
FIG. 9 is an isometric view of another example module that includes an example planar interconnect structure.
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
4 independent · 10 dependent
1
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A circuit module comprising: a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a semicon-ductor device formed therein, the semiconductor device having a set of bond pads formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; and a first printed ink planar interconnect line coupled to a subset of the set of bond pads and to the conductive pad.
2
Dependent← claim 1Cucircuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the printed ink includes copper particles.
3
Dependent← claim 1silver or gold particle printed inkcircuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the printed ink includes silver or gold particles.
4
Dependent← claim 1circuit module with printed ink planar interconnect
The circuit module of claim 1, wherein a heat dispers-ing layer of the multilayer substrate forms the second surface of the multilayer substrate.
5
Dependent← claim 1GaNGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the semicon-ductor device is a GaN FET.
6
Dependent← claim 1circuit module with printed ink planar interconnect
The circuit module of claim 1, further comprising: a second IC die mounted to the first surface of the multilayer substrate; at least one passive component coupled to the first surface of the multilayer substrate; and encapsulation material covering the first surface of the multilayer substrate, the IC die, the second IC die, and the passive component.
8
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A circuit module comprising: a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; a second conductive pad formed within a second one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a semicon-ductor device formed therein, the semiconductor device having a set of bond pads formed on the first surface of the IC die, wherein the set of bond pads is a first set of bond pads and the semiconductor device has a second set of bond pads formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; a first printed ink planar interconnect line coupled to the set of bond pads and to the conductive pad; and a second printed ink planar interconnect line coupled to the second set of bond pads and to the second conduc-tive pad.
9
Independentprinted conductive inkGaNGaN FET circuit module with printed ink planar interconnect
A circuit module comprising: 25 a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; a second conductive pad formed within a second one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a GaN FET semiconductor device formed therein, the GaN FET having a set of source bond pads, a set of drain bond pads, and a gate bond pad all formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; a first printed ink planar interconnect line coupled to the set of source bond pads and to the first conductive pad; and B₂ a second printed ink planar interconnect line coupled to the set of drain bond pads and to the second conductive pad.
10
Dependent← claim 9GaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9 further comprising: a second IC die mounted to the first surface of the multilayer substrate, the second IC having an output bond pad; and a third printed ink planar interconnect line coupled between the output bond pad on the second IC and the gate bond pad on the GaN FET.
11
Dependent← claim 9CuGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein the printed ink includes copper particles.
12
Dependent← claim 9silver or gold particle printed inkGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein the printed ink includes silver or gold particles.
13
Dependent← claim 9GaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein a heat dis-persing layer of the multilayer substrate forms the second surface of the multilayer substrate.
14
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A method for fabricating a module, the method comprising: fabricating a multilayer substrate having an exposed sur-face; patterning a first conductive layer of the multilayer substrate to form a conductive pad; patterning a second conductive layer of the multilayer substrate to form a second conductive pad; bonding an integrated circuit (IC) die to the exposed surface of the multilayer substrate such that a set of bond pads on the IC die face away from the exposed surface of the multilayer substrate; printing a patterned layer of dielectric over the IC die and the conductive pad such that the set of bond pads and the conductive pad are exposed; printing a patterned layer of conductive ink to form a first printed ink planar interconnect line to couple a portion of the set of bond pads to the conductive pad; and wherein printing the patterned layer of conductive ink also forms a second printed ink planar interconnect line to couple a second portion of the set of bond pads to the second conductive pad. ∗ ∗ ∗ ∗ ∗
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
circuit module with printed ink planar interconnect
mold encapsulation materialencapsulation
printed conductive inkprinted ink planar interconnect line
printed dielectric layerprinted dielectric layer
IC die (bonded dead-bug, bond pads up)IC die (bonded dead-bug, bond pads up)
ceramicceramic layer
multilayer substrate conductive patterned layers
Materials
Materials described outside the worked examples.
printed conductive ink
Planar Interconnect Line Material
copper particle printed ink
Cu
Planar Interconnect Line Material
silver or gold particle printed ink
Planar Interconnect Line Material
Process steps
Additional fabrication and treatment steps described in the patent.
1
Die Bonding And Printed Interconnect Fabrication
Step 1
Process details
steps:fabricate multilayer substrate with exposed surface, pattern first conductive layer to form conductive pad, pattern second conductive layer to form second conductive pad, bond IC die to exposed surface of multilayer substrate (dead-bug, bond pads facing away from substrate), print patterned layer of dielectric over IC die and conductive pad with bond pads and conductive pad exposed, print patterned layer of conductive ink to form first and second printed ink planar interconnect lines
Materials:printed conductive ink
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
fet electrical
Fet Electrical
FIG. 3 is a schematic of an example segmented GaN FET transistor.
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1
FIG. 1 is an isometric view of an example module that includes an example planar interconnect structure. 55
FIG. 2
FIG. 2 is a schematic of an example GaN switching module.
FIG. 3
FIG. 3 is a schematic of an example segmented GaN FET transistor.
FIG. 4
FIGS. 4A and 4B illustrates a prior art wire bond inter- 60 connect.
FIG. 5
FIG. 5 is an isometric cut-away view that illustrates an example planar interconnect structure in more detail.
FIG. 6
process tool top view
FIG. 6B is a cross-sectional view of an example planar interconnect structure. 65
FIG. 7
FIGS. 7A-7C are cross-sectional views illustrating fabri- cation of an example planar interconnect structure. B₂
FIG. 8
FIG. 8 is a plot illustrating a comparison of inductance between a bond wire interconnect and an example planar interconnect structure.
FIG. 9
FIG. 9 is an isometric view of another example module that includes an example planar interconnect structure.
Claims
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
4 independent · 10 dependent
1
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A circuit module comprising: a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a semicon-ductor device formed therein, the semiconductor device having a set of bond pads formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; and a first printed ink planar interconnect line coupled to a subset of the set of bond pads and to the conductive pad.
2
Dependent← claim 1Cucircuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the printed ink includes copper particles.
3
Dependent← claim 1silver or gold particle printed inkcircuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the printed ink includes silver or gold particles.
4
Dependent← claim 1circuit module with printed ink planar interconnect
The circuit module of claim 1, wherein a heat dispers-ing layer of the multilayer substrate forms the second surface of the multilayer substrate.
5
Dependent← claim 1GaNGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 1, wherein the semicon-ductor device is a GaN FET.
6
Dependent← claim 1circuit module with printed ink planar interconnect
The circuit module of claim 1, further comprising: a second IC die mounted to the first surface of the multilayer substrate; at least one passive component coupled to the first surface of the multilayer substrate; and encapsulation material covering the first surface of the multilayer substrate, the IC die, the second IC die, and the passive component.
8
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A circuit module comprising: a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; a second conductive pad formed within a second one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a semicon-ductor device formed therein, the semiconductor device having a set of bond pads formed on the first surface of the IC die, wherein the set of bond pads is a first set of bond pads and the semiconductor device has a second set of bond pads formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; a first printed ink planar interconnect line coupled to the set of bond pads and to the conductive pad; and a second printed ink planar interconnect line coupled to the second set of bond pads and to the second conduc-tive pad.
9
Independentprinted conductive inkGaNGaN FET circuit module with printed ink planar interconnect
A circuit module comprising: 25 a multilayer substrate having a first surface and an oppo-site second surface; a first conductive pad formed within a first one of the layers of the multilayer substrate; a second conductive pad formed within a second one of the layers of the multilayer substrate; an integrated circuit (IC) die having a first surface and an opposite second surface, the IC die having a GaN FET semiconductor device formed therein, the GaN FET having a set of source bond pads, a set of drain bond pads, and a gate bond pad all formed on the first surface of the IC die, the second surface of the IC die being bonded to the first surface of the multilayer substrate; a first printed ink planar interconnect line coupled to the set of source bond pads and to the first conductive pad; and B₂ a second printed ink planar interconnect line coupled to the set of drain bond pads and to the second conductive pad.
10
Dependent← claim 9GaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9 further comprising: a second IC die mounted to the first surface of the multilayer substrate, the second IC having an output bond pad; and a third printed ink planar interconnect line coupled between the output bond pad on the second IC and the gate bond pad on the GaN FET.
11
Dependent← claim 9CuGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein the printed ink includes copper particles.
12
Dependent← claim 9silver or gold particle printed inkGaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein the printed ink includes silver or gold particles.
13
Dependent← claim 9GaN FET circuit module with printed ink planar interconnect
The circuit module of claim 9, wherein a heat dis-persing layer of the multilayer substrate forms the second surface of the multilayer substrate.
14
Independentprinted conductive inkcircuit module with printed ink planar interconnect
A method for fabricating a module, the method comprising: fabricating a multilayer substrate having an exposed sur-face; patterning a first conductive layer of the multilayer substrate to form a conductive pad; patterning a second conductive layer of the multilayer substrate to form a second conductive pad; bonding an integrated circuit (IC) die to the exposed surface of the multilayer substrate such that a set of bond pads on the IC die face away from the exposed surface of the multilayer substrate; printing a patterned layer of dielectric over the IC die and the conductive pad such that the set of bond pads and the conductive pad are exposed; printing a patterned layer of conductive ink to form a first printed ink planar interconnect line to couple a portion of the set of bond pads to the conductive pad; and wherein printing the patterned layer of conductive ink also forms a second printed ink planar interconnect line to couple a second portion of the set of bond pads to the second conductive pad. ∗ ∗ ∗ ∗ ∗
Device structures
Layer stacks claimed or described, ordered top of device to substrate.
circuit module with printed ink planar interconnect
mold encapsulation materialencapsulation
printed conductive inkprinted ink planar interconnect line
printed dielectric layerprinted dielectric layer
IC die (bonded dead-bug, bond pads up)IC die (bonded dead-bug, bond pads up)
ceramicceramic layer
multilayer substrate conductive patterned layers
Materials
Materials described outside the worked examples.
printed conductive ink
Planar Interconnect Line Material
copper particle printed ink
Cu
Planar Interconnect Line Material
silver or gold particle printed ink
Planar Interconnect Line Material
Process steps
Additional fabrication and treatment steps described in the patent.
1
Die Bonding And Printed Interconnect Fabrication
Step 1
Process details
steps:fabricate multilayer substrate with exposed surface, pattern first conductive layer to form conductive pad, pattern second conductive layer to form second conductive pad, bond IC die to exposed surface of multilayer substrate (dead-bug, bond pads facing away from substrate), print patterned layer of dielectric over IC die and conductive pad with bond pads and conductive pad exposed, print patterned layer of conductive ink to form first and second printed ink planar interconnect lines
Materials:printed conductive ink
Characterization
Measurements and analyses referenced in the patent, with their drawing references.
fet electrical
Fet Electrical
FIG. 3 is a schematic of an example segmented GaN FET transistor.
heat dispersing layer (bottom of multilayer substrate)heat dispersing layer (bottom of multilayer substrate)
gallium nitride (GaN)
GaN
FET Channel/Semiconductor Material
ceramic
Multilayer Substrate Core Layer
mold encapsulation material
Encapsulant
US 10,690,559 B110,690,559 B1 * 6/2020 Liu........................... G01L 1/18examiner
US 2004/0018712 A12004/0018712 A1 * 1/2004 Plas...................... H01L 23/481examiner
US 2007/0155057 A12007/0155057 A1 * 7/2007 Wang.................. H01L 23/5389examiner
US 2007/0228534 A12007/0228534 A1 * 10/2007 Uno........................ H01L 24/91examiner
US 2009/0173919 A12009/0173919 A1 * 7/2009 Webster............... C09D 11/101examiner
US 2012/0039066 A12012/0039066 A1 * 2/2012 Hatanaka............. G02B 5/0284examiner
US 2016/0093525 A12016/0093525 A1 * 3/2016 Cook.................. H01L 23/5389examiner
US 2016/0216548 A12016/0216548 A1 * 7/2016 Fujikawa............ H01L 27/1222examiner
US 2016/0240471 A12016/0240471 A1 * 8/2016 Klowak............ H01L 23/53228examiner
US 2016/0268190 A12016/0268190 A1 * 9/2016 McKnight-MacNeil....................examiner
Cited non-patent literature · 2
Set Definition & Meaning—Merriam-Webster.
MultiChip, Packages. “MultiChip, Packages”, Texas Instruments, Inc., Literature No. SNOA287, National Semiconductor, Apr. 2000, pp. 1-5. “Wire bonding”, Wikipedia, available at https://en.wikipedia.org/wiki/Wire_bonding on Mar. 26, 2020, pp. 1-4. Yong Xie and Paul Brohlin, “Optimizing GaN performance with an integrated driver”, Texas Instruments, Inc., SLYY085, Mar. 2016, pp. 1-7.
heat dispersing layer (bottom of multilayer substrate)heat dispersing layer (bottom of multilayer substrate)
gallium nitride (GaN)
GaN
FET Channel/Semiconductor Material
ceramic
Multilayer Substrate Core Layer
mold encapsulation material
Encapsulant
US 10,690,559 B110,690,559 B1 * 6/2020 Liu........................... G01L 1/18examiner
US 2004/0018712 A12004/0018712 A1 * 1/2004 Plas...................... H01L 23/481examiner
US 2007/0155057 A12007/0155057 A1 * 7/2007 Wang.................. H01L 23/5389examiner
US 2007/0228534 A12007/0228534 A1 * 10/2007 Uno........................ H01L 24/91examiner
US 2009/0173919 A12009/0173919 A1 * 7/2009 Webster............... C09D 11/101examiner
US 2012/0039066 A12012/0039066 A1 * 2/2012 Hatanaka............. G02B 5/0284examiner
US 2016/0093525 A12016/0093525 A1 * 3/2016 Cook.................. H01L 23/5389examiner
US 2016/0216548 A12016/0216548 A1 * 7/2016 Fujikawa............ H01L 27/1222examiner
US 2016/0240471 A12016/0240471 A1 * 8/2016 Klowak............ H01L 23/53228examiner
US 2016/0268190 A12016/0268190 A1 * 9/2016 McKnight-MacNeil....................examiner
Cited non-patent literature · 2
Set Definition & Meaning—Merriam-Webster.
MultiChip, Packages. “MultiChip, Packages”, Texas Instruments, Inc., Literature No. SNOA287, National Semiconductor, Apr. 2000, pp. 1-5. “Wire bonding”, Wikipedia, available at https://en.wikipedia.org/wiki/Wire_bonding on Mar. 26, 2020, pp. 1-4. Yong Xie and Paul Brohlin, “Optimizing GaN performance with an integrated driver”, Texas Instruments, Inc., SLYY085, Mar. 2016, pp. 1-7.
heat dispersing layer (bottom of multilayer substrate)heat dispersing layer (bottom of multilayer substrate)
gallium nitride (GaN)
GaN
FET Channel/Semiconductor Material
ceramic
Multilayer Substrate Core Layer
mold encapsulation material
Encapsulant
US 10,690,559 B110,690,559 B1 * 6/2020 Liu........................... G01L 1/18examiner
US 2004/0018712 A12004/0018712 A1 * 1/2004 Plas...................... H01L 23/481examiner
US 2007/0155057 A12007/0155057 A1 * 7/2007 Wang.................. H01L 23/5389examiner
US 2007/0228534 A12007/0228534 A1 * 10/2007 Uno........................ H01L 24/91examiner
US 2009/0173919 A12009/0173919 A1 * 7/2009 Webster............... C09D 11/101examiner
US 2012/0039066 A12012/0039066 A1 * 2/2012 Hatanaka............. G02B 5/0284examiner
US 2016/0093525 A12016/0093525 A1 * 3/2016 Cook.................. H01L 23/5389examiner
US 2016/0216548 A12016/0216548 A1 * 7/2016 Fujikawa............ H01L 27/1222examiner
US 2016/0240471 A12016/0240471 A1 * 8/2016 Klowak............ H01L 23/53228examiner
US 2016/0268190 A12016/0268190 A1 * 9/2016 McKnight-MacNeil....................examiner
Cited non-patent literature · 2
Set Definition & Meaning—Merriam-Webster.
MultiChip, Packages. “MultiChip, Packages”, Texas Instruments, Inc., Literature No. SNOA287, National Semiconductor, Apr. 2000, pp. 1-5. “Wire bonding”, Wikipedia, available at https://en.wikipedia.org/wiki/Wire_bonding on Mar. 26, 2020, pp. 1-4. Yong Xie and Paul Brohlin, “Optimizing GaN performance with an integrated driver”, Texas Instruments, Inc., SLYY085, Mar. 2016, pp. 1-7.
heat dispersing layer (bottom of multilayer substrate)heat dispersing layer (bottom of multilayer substrate)
gallium nitride (GaN)
GaN
FET Channel/Semiconductor Material
ceramic
Multilayer Substrate Core Layer
mold encapsulation material
Encapsulant
US 10,690,559 B110,690,559 B1 * 6/2020 Liu........................... G01L 1/18examiner
US 2004/0018712 A12004/0018712 A1 * 1/2004 Plas...................... H01L 23/481examiner
US 2007/0155057 A12007/0155057 A1 * 7/2007 Wang.................. H01L 23/5389examiner
US 2007/0228534 A12007/0228534 A1 * 10/2007 Uno........................ H01L 24/91examiner
US 2009/0173919 A12009/0173919 A1 * 7/2009 Webster............... C09D 11/101examiner
US 2012/0039066 A12012/0039066 A1 * 2/2012 Hatanaka............. G02B 5/0284examiner
US 2016/0093525 A12016/0093525 A1 * 3/2016 Cook.................. H01L 23/5389examiner
US 2016/0216548 A12016/0216548 A1 * 7/2016 Fujikawa............ H01L 27/1222examiner
US 2016/0240471 A12016/0240471 A1 * 8/2016 Klowak............ H01L 23/53228examiner
US 2016/0268190 A12016/0268190 A1 * 9/2016 McKnight-MacNeil....................examiner
Cited non-patent literature · 2
Set Definition & Meaning—Merriam-Webster.
MultiChip, Packages. “MultiChip, Packages”, Texas Instruments, Inc., Literature No. SNOA287, National Semiconductor, Apr. 2000, pp. 1-5. “Wire bonding”, Wikipedia, available at https://en.wikipedia.org/wiki/Wire_bonding on Mar. 26, 2020, pp. 1-4. Yong Xie and Paul Brohlin, “Optimizing GaN performance with an integrated driver”, Texas Instruments, Inc., SLYY085, Mar. 2016, pp. 1-7.