Patent
US 10,124,565polyimide (PI) film
optical protective layer
metal catalytic substrate
copper foil
Cu
methane
CH₄
graphene layer thickness | ≤ 1 nanometer | C |
graphene conductive film total thickness | 10–30 microns | — |
graphene light absorptivity | 2.3 % | C |
graphene thermal conductivity coefficient | 5300 W/m·K | C |
graphene electronic mobility at normal temperature | ≥ 15000 cm2/V·s | C |
graphene electrical resistivity | 0.000001 Ω·cm | C |
graphene monolayer thickness | 0.335 nanometer | C |
Duration | 2–10 minutes | — |
Duration | 30–60 minutes | — |
Thickness | 45–55 nm | — |
Pressure | 400–600 mTorr | — |
Duration | 5–10 minutes | — |
Thickness | 50–300 µm | — |
polyimide (PI) film
optical protective layer
metal catalytic substrate
copper foil
Cu
methane
CH₄
graphene layer thickness | ≤ 1 nanometer | C |
graphene conductive film total thickness | 10–30 microns | — |
graphene light absorptivity | 2.3 % | C |
graphene thermal conductivity coefficient | 5300 W/m·K | C |
graphene electronic mobility at normal temperature | ≥ 15000 cm2/V·s | C |
graphene electrical resistivity | 0.000001 Ω·cm | C |
graphene monolayer thickness | 0.335 nanometer | C |
Duration | 2–10 minutes | — |
Duration | 30–60 minutes | — |
Thickness | 45–55 nm | — |
Pressure | 400–600 mTorr | — |
Duration | 5–10 minutes | — |
Thickness | 50–300 µm | — |
polyimide (PI) film
optical protective layer
metal catalytic substrate
copper foil
Cu
methane
CH₄
graphene layer thickness | ≤ 1 nanometer | C |
graphene conductive film total thickness | 10–30 microns | — |
graphene light absorptivity | 2.3 % | C |
graphene thermal conductivity coefficient | 5300 W/m·K | C |
graphene electronic mobility at normal temperature | ≥ 15000 cm2/V·s | C |
graphene electrical resistivity | 0.000001 Ω·cm | C |
graphene monolayer thickness | 0.335 nanometer | C |
Duration | 2–10 minutes | — |
Duration | 30–60 minutes | — |
Thickness | 45–55 nm | — |
Pressure | 400–600 mTorr | — |
Duration | 5–10 minutes | — |
Thickness | 50–300 µm | — |
polyimide (PI) film
optical protective layer
metal catalytic substrate
copper foil
Cu
methane
CH₄
graphene layer thickness | ≤ 1 nanometer | C |
graphene conductive film total thickness | 10–30 microns | — |
graphene light absorptivity | 2.3 % | C |
graphene thermal conductivity coefficient | 5300 W/m·K | C |
graphene electronic mobility at normal temperature | ≥ 15000 cm2/V·s | C |
graphene electrical resistivity | 0.000001 Ω·cm | C |
graphene monolayer thickness | 0.335 nanometer | C |
Duration | 2–10 minutes | — |
Duration | 30–60 minutes | — |
Thickness | 45–55 nm | — |
Pressure | 400–600 mTorr | — |
Duration | 5–10 minutes | — |
Thickness | 50–300 µm | — |