Patent
Atlas literature
Patent
US 10,722,849Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic diagram of a possible embodiment of a passive flow controller device containing a valve element and a protective layer. [0008]
FIG. 2 is a schematic diagram of a possible embodiment of a passive flow controller device in an in-line configuration without a protective layer. [0009]
FIG. 3 is a schematic diagram of a possible embodiment of a passive flow controller device with a "T" shaped conduit configuration containing a protective layer. …
FIG. 4A is a schematic diagram of an end view of pipe of a possible embodiment of a passive flow controller device, which is integrated directly into a fluid …
FIG. 5 is a schematic diagram (view A-A) of a possible embodiment of a passive flow controller device containing a valve element. [0013]
FIG. 6 is a schematic diagram of a possible embodiment of a passive flow controller device containing a valve element and a protective layer. [0014]
FIG. 7 is a schematic diagram of an embodiment of a method for creating a valve element and applying a graphene-based layer as a coating. [0015]
FIG. 8 is a schematic diagram of an embodiment of a method for creating a valve element and applying a graphene-based layer via a filter methodology. [0016]
FIG. 9A and 9B shows two plots of flow rate as a function inlet pressure for the same embodiment to show repeatability and the ability of the element to reseal. …
FIG. 10 shows a plot of flow rate as a function of inlet pressure for an embodiment with more measurement numbers to show the ability of the valve element to …
FIG. 11 is another depiction of the same experimental data in Figure 10 showing the similarity of the valve's response once the valve was reclosed.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A valve element disposed between a gas pressure differential, comprising: (1) a separating wall placed between a gas at a higher pressure and a gas at a lower pressure, wherein the difference between the higher pressure and the lower pressure is a pressure differential, wherein the wa ll comprises an aperture a ll owing fluid communication between the gases; (2) a valve membrane occluding the aperture, wherein the membrane comprises a graphene-based layer and a porous support, wherein the graphene-based layer is deposited upon the porous support; wherein the graphene-based layer comprises graphene oxide and a crosslinker which creates covalent linkages between materials within the graphene-based layer, wherein the crosslinker comprises an alkyldiamine, an arylenediamine, polyvinyl alcohol, or a combination thereof; wherein the valve membrane a ll ows the gas at the higher pressure to begin to pass through the aperture when the pressure differential reaches an opening threshold. Currently amended
The valve element of claim 1, wherein the valve membrane precludes gas flow through the aperture when the pressure differential is at or below a closing threshold. Original
The valve element of claim 1, wherein the valve membrane allows for repeated opening and closing of gas flow in response to changes in the pressure differential. Previously presented
The valve element of claim 1,wherein the opening threshold increases with the increase in the thickness of the graphene-based layer. Previously presented
The valve element of claim 1, wherein the opening threshold is about 10 psi to about 100 p si. Previously presented
The valve element of claim 1, wherein the graphene-based layer comprises graphene oxide (GO). Currently amended
The valve element of claim 1, wherein the graphene-based layer has a thickness of about 10 nm to about 100 nm. Previously presented
The valve element of claim 1, wherein the graphene-based layer further comprises a crosslinker which creates covalent linkages between materials within the layer. Previously presented
The valve element of claim 1, wherein the graphene-based layer comprises a GO-MPD membrane prepared from graphene oxide (GO) and meta- phenylenediamine (MPD). Previously presented
The valve element of claim 1, wherein the graphene-based layer further comprises a polymer material. Previously presented
The valve element of claim 1 wherein the porous support comprises a polymer or hollow fibers. Previously presented
The valve element of claim 1, wherein the protecting layer. Currently amended
A passive flow controller device, comprising upstream gas pressure or gas flow passively based graphene-based layer is further coated with a the valve element of claim 1, regulating on upstream pressure. Previously presented
Canceled
Canceled
Canceled
Canceled
Canceled
Canceled
The valve element of claim [[17]] 1, wherein the arylenediamine is meta-phenylenediamine (MPD). Currently amended
Canceled
Canceled
Canceled
Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
pressure sensitive graphene-based valve element
passive flow controller device
No layer stack recorded.
Materials described outside the worked examples.
graphene oxide
crosslinker (alkyldiamine, arylenediamine, or polyvinyl alcohol)
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
opening threshold pressure range | 10–100 | — |
opening threshold pressure range (narrower) | 20–30 | — |
closing threshold pressure upper bound |
Patent
Atlas literature
Patent
US 10,722,849Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic diagram of a possible embodiment of a passive flow controller device containing a valve element and a protective layer. [0008]
FIG. 2 is a schematic diagram of a possible embodiment of a passive flow controller device in an in-line configuration without a protective layer. [0009]
FIG. 3 is a schematic diagram of a possible embodiment of a passive flow controller device with a "T" shaped conduit configuration containing a protective layer. …
FIG. 4A is a schematic diagram of an end view of pipe of a possible embodiment of a passive flow controller device, which is integrated directly into a fluid …
FIG. 5 is a schematic diagram (view A-A) of a possible embodiment of a passive flow controller device containing a valve element. [0013]
FIG. 6 is a schematic diagram of a possible embodiment of a passive flow controller device containing a valve element and a protective layer. [0014]
FIG. 7 is a schematic diagram of an embodiment of a method for creating a valve element and applying a graphene-based layer as a coating. [0015]
FIG. 8 is a schematic diagram of an embodiment of a method for creating a valve element and applying a graphene-based layer via a filter methodology. [0016]
FIG. 9A and 9B shows two plots of flow rate as a function inlet pressure for the same embodiment to show repeatability and the ability of the element to reseal. …
FIG. 10 shows a plot of flow rate as a function of inlet pressure for an embodiment with more measurement numbers to show the ability of the valve element to …
FIG. 11 is another depiction of the same experimental data in Figure 10 showing the similarity of the valve's response once the valve was reclosed.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A valve element disposed between a gas pressure differential, comprising: (1) a separating wall placed between a gas at a higher pressure and a gas at a lower pressure, wherein the difference between the higher pressure and the lower pressure is a pressure differential, wherein the wa ll comprises an aperture a ll owing fluid communication between the gases; (2) a valve membrane occluding the aperture, wherein the membrane comprises a graphene-based layer and a porous support, wherein the graphene-based layer is deposited upon the porous support; wherein the graphene-based layer comprises graphene oxide and a crosslinker which creates covalent linkages between materials within the graphene-based layer, wherein the crosslinker comprises an alkyldiamine, an arylenediamine, polyvinyl alcohol, or a combination thereof; wherein the valve membrane a ll ows the gas at the higher pressure to begin to pass through the aperture when the pressure differential reaches an opening threshold. Currently amended
The valve element of claim 1, wherein the valve membrane precludes gas flow through the aperture when the pressure differential is at or below a closing threshold. Original
The valve element of claim 1, wherein the valve membrane allows for repeated opening and closing of gas flow in response to changes in the pressure differential. Previously presented
The valve element of claim 1,wherein the opening threshold increases with the increase in the thickness of the graphene-based layer. Previously presented
The valve element of claim 1, wherein the opening threshold is about 10 psi to about 100 p si. Previously presented
The valve element of claim 1, wherein the graphene-based layer comprises graphene oxide (GO). Currently amended
The valve element of claim 1, wherein the graphene-based layer has a thickness of about 10 nm to about 100 nm. Previously presented
The valve element of claim 1, wherein the graphene-based layer further comprises a crosslinker which creates covalent linkages between materials within the layer. Previously presented
The valve element of claim 1, wherein the graphene-based layer comprises a GO-MPD membrane prepared from graphene oxide (GO) and meta- phenylenediamine (MPD). Previously presented
The valve element of claim 1, wherein the graphene-based layer further comprises a polymer material. Previously presented
The valve element of claim 1 wherein the porous support comprises a polymer or hollow fibers. Previously presented
The valve element of claim 1, wherein the protecting layer. Currently amended
A passive flow controller device, comprising upstream gas pressure or gas flow passively based graphene-based layer is further coated with a the valve element of claim 1, regulating on upstream pressure. Previously presented
Canceled
Canceled
Canceled
Canceled
Canceled
Canceled
The valve element of claim [[17]] 1, wherein the arylenediamine is meta-phenylenediamine (MPD). Currently amended
Canceled
Canceled
Canceled
Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
pressure sensitive graphene-based valve element
passive flow controller device
No layer stack recorded.
Materials described outside the worked examples.
graphene oxide
crosslinker (alkyldiamine, arylenediamine, or polyvinyl alcohol)
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
opening threshold pressure range | 10–100 | — |
opening threshold pressure range (narrower) | 20–30 | — |
closing threshold pressure upper bound |
Patent
Atlas literature
Patent
US 10,722,849Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic diagram of a possible embodiment of a passive flow controller device containing a valve element and a protective layer. [0008]
FIG. 2 is a schematic diagram of a possible embodiment of a passive flow controller device in an in-line configuration without a protective layer. [0009]
FIG. 3 is a schematic diagram of a possible embodiment of a passive flow controller device with a "T" shaped conduit configuration containing a protective layer. …
FIG. 4A is a schematic diagram of an end view of pipe of a possible embodiment of a passive flow controller device, which is integrated directly into a fluid …
FIG. 5 is a schematic diagram (view A-A) of a possible embodiment of a passive flow controller device containing a valve element. [0013]
FIG. 6 is a schematic diagram of a possible embodiment of a passive flow controller device containing a valve element and a protective layer. [0014]
FIG. 7 is a schematic diagram of an embodiment of a method for creating a valve element and applying a graphene-based layer as a coating. [0015]
FIG. 8 is a schematic diagram of an embodiment of a method for creating a valve element and applying a graphene-based layer via a filter methodology. [0016]
FIG. 9A and 9B shows two plots of flow rate as a function inlet pressure for the same embodiment to show repeatability and the ability of the element to reseal. …
FIG. 10 shows a plot of flow rate as a function of inlet pressure for an embodiment with more measurement numbers to show the ability of the valve element to …
FIG. 11 is another depiction of the same experimental data in Figure 10 showing the similarity of the valve's response once the valve was reclosed.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A valve element disposed between a gas pressure differential, comprising: (1) a separating wall placed between a gas at a higher pressure and a gas at a lower pressure, wherein the difference between the higher pressure and the lower pressure is a pressure differential, wherein the wa ll comprises an aperture a ll owing fluid communication between the gases; (2) a valve membrane occluding the aperture, wherein the membrane comprises a graphene-based layer and a porous support, wherein the graphene-based layer is deposited upon the porous support; wherein the graphene-based layer comprises graphene oxide and a crosslinker which creates covalent linkages between materials within the graphene-based layer, wherein the crosslinker comprises an alkyldiamine, an arylenediamine, polyvinyl alcohol, or a combination thereof; wherein the valve membrane a ll ows the gas at the higher pressure to begin to pass through the aperture when the pressure differential reaches an opening threshold. Currently amended
The valve element of claim 1, wherein the valve membrane precludes gas flow through the aperture when the pressure differential is at or below a closing threshold. Original
The valve element of claim 1, wherein the valve membrane allows for repeated opening and closing of gas flow in response to changes in the pressure differential. Previously presented
The valve element of claim 1,wherein the opening threshold increases with the increase in the thickness of the graphene-based layer. Previously presented
The valve element of claim 1, wherein the opening threshold is about 10 psi to about 100 p si. Previously presented
The valve element of claim 1, wherein the graphene-based layer comprises graphene oxide (GO). Currently amended
The valve element of claim 1, wherein the graphene-based layer has a thickness of about 10 nm to about 100 nm. Previously presented
The valve element of claim 1, wherein the graphene-based layer further comprises a crosslinker which creates covalent linkages between materials within the layer. Previously presented
The valve element of claim 1, wherein the graphene-based layer comprises a GO-MPD membrane prepared from graphene oxide (GO) and meta- phenylenediamine (MPD). Previously presented
The valve element of claim 1, wherein the graphene-based layer further comprises a polymer material. Previously presented
The valve element of claim 1 wherein the porous support comprises a polymer or hollow fibers. Previously presented
The valve element of claim 1, wherein the protecting layer. Currently amended
A passive flow controller device, comprising upstream gas pressure or gas flow passively based graphene-based layer is further coated with a the valve element of claim 1, regulating on upstream pressure. Previously presented
Canceled
Canceled
Canceled
Canceled
Canceled
Canceled
The valve element of claim [[17]] 1, wherein the arylenediamine is meta-phenylenediamine (MPD). Currently amended
Canceled
Canceled
Canceled
Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
pressure sensitive graphene-based valve element
passive flow controller device
No layer stack recorded.
Materials described outside the worked examples.
graphene oxide
crosslinker (alkyldiamine, arylenediamine, or polyvinyl alcohol)
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
opening threshold pressure range | 10–100 | — |
opening threshold pressure range (narrower) | 20–30 | — |
closing threshold pressure upper bound |
Patent
Atlas literature
Patent
US 10,722,849Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic diagram of a possible embodiment of a passive flow controller device containing a valve element and a protective layer. [0008]
FIG. 2 is a schematic diagram of a possible embodiment of a passive flow controller device in an in-line configuration without a protective layer. [0009]
FIG. 3 is a schematic diagram of a possible embodiment of a passive flow controller device with a "T" shaped conduit configuration containing a protective layer. …
FIG. 4A is a schematic diagram of an end view of pipe of a possible embodiment of a passive flow controller device, which is integrated directly into a fluid …
FIG. 5 is a schematic diagram (view A-A) of a possible embodiment of a passive flow controller device containing a valve element. [0013]
FIG. 6 is a schematic diagram of a possible embodiment of a passive flow controller device containing a valve element and a protective layer. [0014]
FIG. 7 is a schematic diagram of an embodiment of a method for creating a valve element and applying a graphene-based layer as a coating. [0015]
FIG. 8 is a schematic diagram of an embodiment of a method for creating a valve element and applying a graphene-based layer via a filter methodology. [0016]
FIG. 9A and 9B shows two plots of flow rate as a function inlet pressure for the same embodiment to show repeatability and the ability of the element to reseal. …
FIG. 10 shows a plot of flow rate as a function of inlet pressure for an embodiment with more measurement numbers to show the ability of the valve element to …
FIG. 11 is another depiction of the same experimental data in Figure 10 showing the similarity of the valve's response once the valve was reclosed.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A valve element disposed between a gas pressure differential, comprising: (1) a separating wall placed between a gas at a higher pressure and a gas at a lower pressure, wherein the difference between the higher pressure and the lower pressure is a pressure differential, wherein the wa ll comprises an aperture a ll owing fluid communication between the gases; (2) a valve membrane occluding the aperture, wherein the membrane comprises a graphene-based layer and a porous support, wherein the graphene-based layer is deposited upon the porous support; wherein the graphene-based layer comprises graphene oxide and a crosslinker which creates covalent linkages between materials within the graphene-based layer, wherein the crosslinker comprises an alkyldiamine, an arylenediamine, polyvinyl alcohol, or a combination thereof; wherein the valve membrane a ll ows the gas at the higher pressure to begin to pass through the aperture when the pressure differential reaches an opening threshold. Currently amended
The valve element of claim 1, wherein the valve membrane precludes gas flow through the aperture when the pressure differential is at or below a closing threshold. Original
The valve element of claim 1, wherein the valve membrane allows for repeated opening and closing of gas flow in response to changes in the pressure differential. Previously presented
The valve element of claim 1,wherein the opening threshold increases with the increase in the thickness of the graphene-based layer. Previously presented
The valve element of claim 1, wherein the opening threshold is about 10 psi to about 100 p si. Previously presented
The valve element of claim 1, wherein the graphene-based layer comprises graphene oxide (GO). Currently amended
The valve element of claim 1, wherein the graphene-based layer has a thickness of about 10 nm to about 100 nm. Previously presented
The valve element of claim 1, wherein the graphene-based layer further comprises a crosslinker which creates covalent linkages between materials within the layer. Previously presented
The valve element of claim 1, wherein the graphene-based layer comprises a GO-MPD membrane prepared from graphene oxide (GO) and meta- phenylenediamine (MPD). Previously presented
The valve element of claim 1, wherein the graphene-based layer further comprises a polymer material. Previously presented
The valve element of claim 1 wherein the porous support comprises a polymer or hollow fibers. Previously presented
The valve element of claim 1, wherein the protecting layer. Currently amended
A passive flow controller device, comprising upstream gas pressure or gas flow passively based graphene-based layer is further coated with a the valve element of claim 1, regulating on upstream pressure. Previously presented
Canceled
Canceled
Canceled
Canceled
Canceled
Canceled
The valve element of claim [[17]] 1, wherein the arylenediamine is meta-phenylenediamine (MPD). Currently amended
Canceled
Canceled
Canceled
Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
pressure sensitive graphene-based valve element
passive flow controller device
No layer stack recorded.
Materials described outside the worked examples.
graphene oxide
crosslinker (alkyldiamine, arylenediamine, or polyvinyl alcohol)
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
opening threshold pressure range | 10–100 | — |
opening threshold pressure range (narrower) | 20–30 | — |
closing threshold pressure upper bound |
meta-phenylenediamine (MPD)
GO-MPD membrane
polymer material
polyvinyl alcohol (PVA)
porous support (polymer or hollow fibers)
| ≤ 30 |
| — |
closing threshold pressure range | 10–15 | — |
graphene-based layer thickness range | 10–100 | graphene oxide |
graphene-based layer thickness range (narrower) | 10–20 | graphene oxide |
Thickness | 10–100 nm | — |
Duration | 900–7200 s | — |
Temperature | 50–120 °C | — |
Duration | 1800–43200 s | — |
Duration | 1–6 hours | — |
Pressure | 10–15 psi | — |
Pressure | 10–100 psi | — |
Pressure | 10–20 psi | — |
Pressure | 20–30 psi | — |
Pressure | 30–40 psi | — |
Thickness | 10–15 nm | — |
Thickness | 15–20 nm | — |
Pressure | 10–50 psi | — |
Pressure | 20–25 psi | — |
Pressure | 40–50 psi | — |
Pressure | 10–30 psi | — |
Thickness | 10–50 nm | — |
Thickness | 50–100 nm | — |
Thickness | 20–50 nm | — |
Thickness | 10–30 nm | — |
Thickness | 100–500 nm | — |
Thickness | 100–200 nm | — |
Thickness | 200–500 nm | — |
Temperature | 40–90 °C | — |
Temperature | 40–50 °C | — |
Temperature | 50–60 °C | — |
Temperature | 60–70 °C | — |
Temperature | 70–90 °C | — |
Temperature | 50–100 °C | — |
Temperature | 100–120 °C | — |
Duration | 30–60 minutes | — |
Duration | 1–2 hours | — |
Pressure | ≤ 1e-30 psi | — |
Pressure | ≤ 30 psi | — |
Pressure | ≥ 50 psi | — |
Pressure | ≥ 55 psi | — |
meta-phenylenediamine (MPD)
GO-MPD membrane
polymer material
polyvinyl alcohol (PVA)
porous support (polymer or hollow fibers)
| ≤ 30 |
| — |
closing threshold pressure range | 10–15 | — |
graphene-based layer thickness range | 10–100 | graphene oxide |
graphene-based layer thickness range (narrower) | 10–20 | graphene oxide |
Thickness | 10–100 nm | — |
Duration | 900–7200 s | — |
Temperature | 50–120 °C | — |
Duration | 1800–43200 s | — |
Duration | 1–6 hours | — |
Pressure | 10–15 psi | — |
Pressure | 10–100 psi | — |
Pressure | 10–20 psi | — |
Pressure | 20–30 psi | — |
Pressure | 30–40 psi | — |
Thickness | 10–15 nm | — |
Thickness | 15–20 nm | — |
Pressure | 10–50 psi | — |
Pressure | 20–25 psi | — |
Pressure | 40–50 psi | — |
Pressure | 10–30 psi | — |
Thickness | 10–50 nm | — |
Thickness | 50–100 nm | — |
Thickness | 20–50 nm | — |
Thickness | 10–30 nm | — |
Thickness | 100–500 nm | — |
Thickness | 100–200 nm | — |
Thickness | 200–500 nm | — |
Temperature | 40–90 °C | — |
Temperature | 40–50 °C | — |
Temperature | 50–60 °C | — |
Temperature | 60–70 °C | — |
Temperature | 70–90 °C | — |
Temperature | 50–100 °C | — |
Temperature | 100–120 °C | — |
Duration | 30–60 minutes | — |
Duration | 1–2 hours | — |
Pressure | ≤ 1e-30 psi | — |
Pressure | ≤ 30 psi | — |
Pressure | ≥ 50 psi | — |
Pressure | ≥ 55 psi | — |
meta-phenylenediamine (MPD)
GO-MPD membrane
polymer material
polyvinyl alcohol (PVA)
porous support (polymer or hollow fibers)
| ≤ 30 |
| — |
closing threshold pressure range | 10–15 | — |
graphene-based layer thickness range | 10–100 | graphene oxide |
graphene-based layer thickness range (narrower) | 10–20 | graphene oxide |
Thickness | 10–100 nm | — |
Duration | 900–7200 s | — |
Temperature | 50–120 °C | — |
Duration | 1800–43200 s | — |
Duration | 1–6 hours | — |
Pressure | 10–15 psi | — |
Pressure | 10–100 psi | — |
Pressure | 10–20 psi | — |
Pressure | 20–30 psi | — |
Pressure | 30–40 psi | — |
Thickness | 10–15 nm | — |
Thickness | 15–20 nm | — |
Pressure | 10–50 psi | — |
Pressure | 20–25 psi | — |
Pressure | 40–50 psi | — |
Pressure | 10–30 psi | — |
Thickness | 10–50 nm | — |
Thickness | 50–100 nm | — |
Thickness | 20–50 nm | — |
Thickness | 10–30 nm | — |
Thickness | 100–500 nm | — |
Thickness | 100–200 nm | — |
Thickness | 200–500 nm | — |
Temperature | 40–90 °C | — |
Temperature | 40–50 °C | — |
Temperature | 50–60 °C | — |
Temperature | 60–70 °C | — |
Temperature | 70–90 °C | — |
Temperature | 50–100 °C | — |
Temperature | 100–120 °C | — |
Duration | 30–60 minutes | — |
Duration | 1–2 hours | — |
Pressure | ≤ 1e-30 psi | — |
Pressure | ≤ 30 psi | — |
Pressure | ≥ 50 psi | — |
Pressure | ≥ 55 psi | — |
meta-phenylenediamine (MPD)
GO-MPD membrane
polymer material
polyvinyl alcohol (PVA)
porous support (polymer or hollow fibers)
| ≤ 30 |
| — |
closing threshold pressure range | 10–15 | — |
graphene-based layer thickness range | 10–100 | graphene oxide |
graphene-based layer thickness range (narrower) | 10–20 | graphene oxide |
Thickness | 10–100 nm | — |
Duration | 900–7200 s | — |
Temperature | 50–120 °C | — |
Duration | 1800–43200 s | — |
Duration | 1–6 hours | — |
Pressure | 10–15 psi | — |
Pressure | 10–100 psi | — |
Pressure | 10–20 psi | — |
Pressure | 20–30 psi | — |
Pressure | 30–40 psi | — |
Thickness | 10–15 nm | — |
Thickness | 15–20 nm | — |
Pressure | 10–50 psi | — |
Pressure | 20–25 psi | — |
Pressure | 40–50 psi | — |
Pressure | 10–30 psi | — |
Thickness | 10–50 nm | — |
Thickness | 50–100 nm | — |
Thickness | 20–50 nm | — |
Thickness | 10–30 nm | — |
Thickness | 100–500 nm | — |
Thickness | 100–200 nm | — |
Thickness | 200–500 nm | — |
Temperature | 40–90 °C | — |
Temperature | 40–50 °C | — |
Temperature | 50–60 °C | — |
Temperature | 60–70 °C | — |
Temperature | 70–90 °C | — |
Temperature | 50–100 °C | — |
Temperature | 100–120 °C | — |
Duration | 30–60 minutes | — |
Duration | 1–2 hours | — |
Pressure | ≤ 1e-30 psi | — |
Pressure | ≤ 30 psi | — |
Pressure | ≥ 50 psi | — |
Pressure | ≥ 55 psi | — |
