Patent
US 11,327,041Title: PH SENSING TECHNIQUE BASED ON GRAPHENE ELECTRODES r f e eld ect rode
JOHNSON, Alan T., PING, Jing lei
21 September 2017·US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 11,327,041Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 provides an exemplary workflow of the device-fabrication process and the as- fabricated flexible devices; [0014]
FIG. 2 provides an exemplary setup for characterizing the pH sensing properties of the graphene electrode with the electrometer; [0015]
FIG. 3 provides real-time Faradaic charge transfer for various pH values measured by the electrometer (the solid lines are linear-fit); [0016]
FIG. 4 provides an exemplary dependence of Faradaic current to pH value-hollow symbols represent the Faradaic current measured as the pH reversed; and [0017]
FIG. 5 provides a relative steady-state Faradaic current for serum as compared to the PBS baseline in the pH range 6.06-7.60.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A sensor device, comprising: a substrate layer; an electrode disposed on the substrate layer, the electrode comprising a conductive contact disposed on the substrate, an amount of graphene disposed on the conductive contact, and an amount of passivation material _, the amount of passivation material having a window formed therein so as to expose a sensing portion of the graphen; and a processing train configured to measure Faradaic charge transfer between the graphene of the electrode and a sample in contact with the graphene of the electrode, the processing train determining a pH of the sample from the Faradaic charge transfer between the graphene of the electrode and the sample. Currently amended
The sensor device of claim 1, wherein the substrate layer comprises a polymer. Original
The sensor device of claim 1, wherein the sensor device includes only a single electrode. Currently amended
The sensor device of claim 1, wherein the graphene electrode comprises single-layer graphene. Previously presented
The sensor device of claim 1, wherein the graphene electrode comprises a cross-sectional dimension in the range of from 10 micrometers to 10,000 micrometers. Previously presented
The sensor device of claim 1, wherein the passivation material is characterized as being an electrical insulator. Previously presented
The sensor device of claim 1, wherein the passivation material is characterized as being a photoresist. Previously presented
The sensor device of claim 1, wherein the window has a cross- sectional dimension in the range of from about 1 micrometer to about 10,000 micrometers. Previously presented
The device of claim 1, wherein the device is characterized as biocompatible. New
Canceled
Canceled
A method of measuring an electronic characteristic of a sample, comprising: contacting the sample to a sensing portion of the graphene electrode of a device, the device comprising a substrate layer; the substrate being at least partially surmounted by a conductive contact; a graphene electrode in electronic communication with the conductive contact; and an amount of passivation material being disposed atop the graphene electrode, the amount of passivation material having a window formed therein so as to define a sensing portion of the graphene electrode and to expose the sensing portion of the graphene electrode to the environment exterior to the sensor device; without application of a gate voltage or a source-drain bias, measuring a Faradaic current associated with contact between the sample and the sensing portion of the graphene electrode; and estimating a pH of the sample based on the measured Faradaic current. Currently amended
The method of claim 12, wherein the sample has a volume of less than about 1000 microliters. Previously presented
The method of claim 12, wherein the method is performed in vivo. New
Canceled
Canceled
Canceled
A method, comprising: estimating a pH of a sample from a Faradaic current associated with contacting the sample and a graphene electrode, wherein the graphene electrode is the graphene electrode of a device, the device comprising a substrate; the substrate being at least partially surmounted by a conductive contact; a- the g raphene electrode in electronic communication with the conductive contact; and an amount of passivation material being disposed atop the graphene electrode, the amount of passivation material having a window formed therein so as to define a sensing portion of the graphene electrode and to expose the sensing portion of the graphene electrode to the sample contacted to the device. Currently amended
The method of claim 17, wherein the sample has a volume of less than about 1000 microliters. Previously presented
The method of claim 17, wherein the method is performed in vivo. New
The method of claim -1-9_ 7, wherein the Faradaic current has an absolute value of less than about 1 pA. Currently amended
Canceled
Canceled
A method of fabricating a device, comprising: disposing an amount of graphene on a substrate, the disposing being performed so as to place the graphene into electronic communication with a conductive contact; disposing an insulating material atop the graphene; defining a window in the insulating material so as to define a sensing portion of the graphene; and placing the graphene into electronic communication with a processing train configured to measure a Faradaic current related to charge transfer between the graphene and a sample in contact with the sensing portion of the graphene. Previously presented
The method of claim 23, wherein the substrate is a polyimide. Previously presented
The method of claim 23, wherein the Faradaic current has an absolute value of less than about 1 pA. New
Embodiments described in the patent, grouped by the materials and process steps they use.
5 materials1 process step
Gold contacts were pre-fabricated on a flexible Kapton polyimide substrate. An inch-size graphene sheet synthesized via ambient pressure chemical vapor deposition on copper was transferred to the substrate and fabricated into electrodes using photolithography and oxygen plasma etching. A 7 micrometer thick SU-8 (2007, Microchem) biocompatible passivation layer was created to cover the gold electrode with a 100 µm x 100 µm window exposing the graphene electrode. An electrometer measured charge transfer between the graphene electrode and ~10⁻² L 150 mM NaCl aqueous solutions with various pH values; the Faradaic current extracted from five-second charge-transferring measurement decreases monotonically with pH.
Layer stacks claimed or described, ordered top of device to substrate.
graphene pH sensor electrode
Materials described outside the worked examples.
passivation material
polymer substrate
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
time to achieve ~0.1 pH unit precision at pH~7 | 5 seconds | graphene |
Patent
Atlas literature
Patent
US 11,327,041Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 provides an exemplary workflow of the device-fabrication process and the as- fabricated flexible devices; [0014]
FIG. 2 provides an exemplary setup for characterizing the pH sensing properties of the graphene electrode with the electrometer; [0015]
FIG. 3 provides real-time Faradaic charge transfer for various pH values measured by the electrometer (the solid lines are linear-fit); [0016]
FIG. 4 provides an exemplary dependence of Faradaic current to pH value-hollow symbols represent the Faradaic current measured as the pH reversed; and [0017]
FIG. 5 provides a relative steady-state Faradaic current for serum as compared to the PBS baseline in the pH range 6.06-7.60.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A sensor device, comprising: a substrate layer; an electrode disposed on the substrate layer, the electrode comprising a conductive contact disposed on the substrate, an amount of graphene disposed on the conductive contact, and an amount of passivation material _, the amount of passivation material having a window formed therein so as to expose a sensing portion of the graphen; and a processing train configured to measure Faradaic charge transfer between the graphene of the electrode and a sample in contact with the graphene of the electrode, the processing train determining a pH of the sample from the Faradaic charge transfer between the graphene of the electrode and the sample. Currently amended
The sensor device of claim 1, wherein the substrate layer comprises a polymer. Original
The sensor device of claim 1, wherein the sensor device includes only a single electrode. Currently amended
The sensor device of claim 1, wherein the graphene electrode comprises single-layer graphene. Previously presented
The sensor device of claim 1, wherein the graphene electrode comprises a cross-sectional dimension in the range of from 10 micrometers to 10,000 micrometers. Previously presented
The sensor device of claim 1, wherein the passivation material is characterized as being an electrical insulator. Previously presented
The sensor device of claim 1, wherein the passivation material is characterized as being a photoresist. Previously presented
The sensor device of claim 1, wherein the window has a cross- sectional dimension in the range of from about 1 micrometer to about 10,000 micrometers. Previously presented
The device of claim 1, wherein the device is characterized as biocompatible. New
Canceled
Canceled
A method of measuring an electronic characteristic of a sample, comprising: contacting the sample to a sensing portion of the graphene electrode of a device, the device comprising a substrate layer; the substrate being at least partially surmounted by a conductive contact; a graphene electrode in electronic communication with the conductive contact; and an amount of passivation material being disposed atop the graphene electrode, the amount of passivation material having a window formed therein so as to define a sensing portion of the graphene electrode and to expose the sensing portion of the graphene electrode to the environment exterior to the sensor device; without application of a gate voltage or a source-drain bias, measuring a Faradaic current associated with contact between the sample and the sensing portion of the graphene electrode; and estimating a pH of the sample based on the measured Faradaic current. Currently amended
The method of claim 12, wherein the sample has a volume of less than about 1000 microliters. Previously presented
The method of claim 12, wherein the method is performed in vivo. New
Canceled
Canceled
Canceled
A method, comprising: estimating a pH of a sample from a Faradaic current associated with contacting the sample and a graphene electrode, wherein the graphene electrode is the graphene electrode of a device, the device comprising a substrate; the substrate being at least partially surmounted by a conductive contact; a- the g raphene electrode in electronic communication with the conductive contact; and an amount of passivation material being disposed atop the graphene electrode, the amount of passivation material having a window formed therein so as to define a sensing portion of the graphene electrode and to expose the sensing portion of the graphene electrode to the sample contacted to the device. Currently amended
The method of claim 17, wherein the sample has a volume of less than about 1000 microliters. Previously presented
The method of claim 17, wherein the method is performed in vivo. New
The method of claim -1-9_ 7, wherein the Faradaic current has an absolute value of less than about 1 pA. Currently amended
Canceled
Canceled
A method of fabricating a device, comprising: disposing an amount of graphene on a substrate, the disposing being performed so as to place the graphene into electronic communication with a conductive contact; disposing an insulating material atop the graphene; defining a window in the insulating material so as to define a sensing portion of the graphene; and placing the graphene into electronic communication with a processing train configured to measure a Faradaic current related to charge transfer between the graphene and a sample in contact with the sensing portion of the graphene. Previously presented
The method of claim 23, wherein the substrate is a polyimide. Previously presented
The method of claim 23, wherein the Faradaic current has an absolute value of less than about 1 pA. New
Embodiments described in the patent, grouped by the materials and process steps they use.
5 materials1 process step
Gold contacts were pre-fabricated on a flexible Kapton polyimide substrate. An inch-size graphene sheet synthesized via ambient pressure chemical vapor deposition on copper was transferred to the substrate and fabricated into electrodes using photolithography and oxygen plasma etching. A 7 micrometer thick SU-8 (2007, Microchem) biocompatible passivation layer was created to cover the gold electrode with a 100 µm x 100 µm window exposing the graphene electrode. An electrometer measured charge transfer between the graphene electrode and ~10⁻² L 150 mM NaCl aqueous solutions with various pH values; the Faradaic current extracted from five-second charge-transferring measurement decreases monotonically with pH.
Layer stacks claimed or described, ordered top of device to substrate.
graphene pH sensor electrode
Materials described outside the worked examples.
passivation material
polymer substrate
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
time to achieve ~0.1 pH unit precision at pH~7 | 5 seconds | graphene |
Patent
Atlas literature
Patent
US 11,327,041Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 provides an exemplary workflow of the device-fabrication process and the as- fabricated flexible devices; [0014]
FIG. 2 provides an exemplary setup for characterizing the pH sensing properties of the graphene electrode with the electrometer; [0015]
FIG. 3 provides real-time Faradaic charge transfer for various pH values measured by the electrometer (the solid lines are linear-fit); [0016]
FIG. 4 provides an exemplary dependence of Faradaic current to pH value-hollow symbols represent the Faradaic current measured as the pH reversed; and [0017]
FIG. 5 provides a relative steady-state Faradaic current for serum as compared to the PBS baseline in the pH range 6.06-7.60.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A sensor device, comprising: a substrate layer; an electrode disposed on the substrate layer, the electrode comprising a conductive contact disposed on the substrate, an amount of graphene disposed on the conductive contact, and an amount of passivation material _, the amount of passivation material having a window formed therein so as to expose a sensing portion of the graphen; and a processing train configured to measure Faradaic charge transfer between the graphene of the electrode and a sample in contact with the graphene of the electrode, the processing train determining a pH of the sample from the Faradaic charge transfer between the graphene of the electrode and the sample. Currently amended
The sensor device of claim 1, wherein the substrate layer comprises a polymer. Original
The sensor device of claim 1, wherein the sensor device includes only a single electrode. Currently amended
The sensor device of claim 1, wherein the graphene electrode comprises single-layer graphene. Previously presented
The sensor device of claim 1, wherein the graphene electrode comprises a cross-sectional dimension in the range of from 10 micrometers to 10,000 micrometers. Previously presented
The sensor device of claim 1, wherein the passivation material is characterized as being an electrical insulator. Previously presented
The sensor device of claim 1, wherein the passivation material is characterized as being a photoresist. Previously presented
The sensor device of claim 1, wherein the window has a cross- sectional dimension in the range of from about 1 micrometer to about 10,000 micrometers. Previously presented
The device of claim 1, wherein the device is characterized as biocompatible. New
Canceled
Canceled
A method of measuring an electronic characteristic of a sample, comprising: contacting the sample to a sensing portion of the graphene electrode of a device, the device comprising a substrate layer; the substrate being at least partially surmounted by a conductive contact; a graphene electrode in electronic communication with the conductive contact; and an amount of passivation material being disposed atop the graphene electrode, the amount of passivation material having a window formed therein so as to define a sensing portion of the graphene electrode and to expose the sensing portion of the graphene electrode to the environment exterior to the sensor device; without application of a gate voltage or a source-drain bias, measuring a Faradaic current associated with contact between the sample and the sensing portion of the graphene electrode; and estimating a pH of the sample based on the measured Faradaic current. Currently amended
The method of claim 12, wherein the sample has a volume of less than about 1000 microliters. Previously presented
The method of claim 12, wherein the method is performed in vivo. New
Canceled
Canceled
Canceled
A method, comprising: estimating a pH of a sample from a Faradaic current associated with contacting the sample and a graphene electrode, wherein the graphene electrode is the graphene electrode of a device, the device comprising a substrate; the substrate being at least partially surmounted by a conductive contact; a- the g raphene electrode in electronic communication with the conductive contact; and an amount of passivation material being disposed atop the graphene electrode, the amount of passivation material having a window formed therein so as to define a sensing portion of the graphene electrode and to expose the sensing portion of the graphene electrode to the sample contacted to the device. Currently amended
The method of claim 17, wherein the sample has a volume of less than about 1000 microliters. Previously presented
The method of claim 17, wherein the method is performed in vivo. New
The method of claim -1-9_ 7, wherein the Faradaic current has an absolute value of less than about 1 pA. Currently amended
Canceled
Canceled
A method of fabricating a device, comprising: disposing an amount of graphene on a substrate, the disposing being performed so as to place the graphene into electronic communication with a conductive contact; disposing an insulating material atop the graphene; defining a window in the insulating material so as to define a sensing portion of the graphene; and placing the graphene into electronic communication with a processing train configured to measure a Faradaic current related to charge transfer between the graphene and a sample in contact with the sensing portion of the graphene. Previously presented
The method of claim 23, wherein the substrate is a polyimide. Previously presented
The method of claim 23, wherein the Faradaic current has an absolute value of less than about 1 pA. New
Embodiments described in the patent, grouped by the materials and process steps they use.
5 materials1 process step
Gold contacts were pre-fabricated on a flexible Kapton polyimide substrate. An inch-size graphene sheet synthesized via ambient pressure chemical vapor deposition on copper was transferred to the substrate and fabricated into electrodes using photolithography and oxygen plasma etching. A 7 micrometer thick SU-8 (2007, Microchem) biocompatible passivation layer was created to cover the gold electrode with a 100 µm x 100 µm window exposing the graphene electrode. An electrometer measured charge transfer between the graphene electrode and ~10⁻² L 150 mM NaCl aqueous solutions with various pH values; the Faradaic current extracted from five-second charge-transferring measurement decreases monotonically with pH.
Layer stacks claimed or described, ordered top of device to substrate.
graphene pH sensor electrode
Materials described outside the worked examples.
passivation material
polymer substrate
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
time to achieve ~0.1 pH unit precision at pH~7 | 5 seconds | graphene |
Patent
Atlas literature
Patent
US 11,327,041Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 provides an exemplary workflow of the device-fabrication process and the as- fabricated flexible devices; [0014]
FIG. 2 provides an exemplary setup for characterizing the pH sensing properties of the graphene electrode with the electrometer; [0015]
FIG. 3 provides real-time Faradaic charge transfer for various pH values measured by the electrometer (the solid lines are linear-fit); [0016]
FIG. 4 provides an exemplary dependence of Faradaic current to pH value-hollow symbols represent the Faradaic current measured as the pH reversed; and [0017]
FIG. 5 provides a relative steady-state Faradaic current for serum as compared to the PBS baseline in the pH range 6.06-7.60.
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A sensor device, comprising: a substrate layer; an electrode disposed on the substrate layer, the electrode comprising a conductive contact disposed on the substrate, an amount of graphene disposed on the conductive contact, and an amount of passivation material _, the amount of passivation material having a window formed therein so as to expose a sensing portion of the graphen; and a processing train configured to measure Faradaic charge transfer between the graphene of the electrode and a sample in contact with the graphene of the electrode, the processing train determining a pH of the sample from the Faradaic charge transfer between the graphene of the electrode and the sample. Currently amended
The sensor device of claim 1, wherein the substrate layer comprises a polymer. Original
The sensor device of claim 1, wherein the sensor device includes only a single electrode. Currently amended
The sensor device of claim 1, wherein the graphene electrode comprises single-layer graphene. Previously presented
The sensor device of claim 1, wherein the graphene electrode comprises a cross-sectional dimension in the range of from 10 micrometers to 10,000 micrometers. Previously presented
The sensor device of claim 1, wherein the passivation material is characterized as being an electrical insulator. Previously presented
The sensor device of claim 1, wherein the passivation material is characterized as being a photoresist. Previously presented
The sensor device of claim 1, wherein the window has a cross- sectional dimension in the range of from about 1 micrometer to about 10,000 micrometers. Previously presented
The device of claim 1, wherein the device is characterized as biocompatible. New
Canceled
Canceled
A method of measuring an electronic characteristic of a sample, comprising: contacting the sample to a sensing portion of the graphene electrode of a device, the device comprising a substrate layer; the substrate being at least partially surmounted by a conductive contact; a graphene electrode in electronic communication with the conductive contact; and an amount of passivation material being disposed atop the graphene electrode, the amount of passivation material having a window formed therein so as to define a sensing portion of the graphene electrode and to expose the sensing portion of the graphene electrode to the environment exterior to the sensor device; without application of a gate voltage or a source-drain bias, measuring a Faradaic current associated with contact between the sample and the sensing portion of the graphene electrode; and estimating a pH of the sample based on the measured Faradaic current. Currently amended
The method of claim 12, wherein the sample has a volume of less than about 1000 microliters. Previously presented
The method of claim 12, wherein the method is performed in vivo. New
Canceled
Canceled
Canceled
A method, comprising: estimating a pH of a sample from a Faradaic current associated with contacting the sample and a graphene electrode, wherein the graphene electrode is the graphene electrode of a device, the device comprising a substrate; the substrate being at least partially surmounted by a conductive contact; a- the g raphene electrode in electronic communication with the conductive contact; and an amount of passivation material being disposed atop the graphene electrode, the amount of passivation material having a window formed therein so as to define a sensing portion of the graphene electrode and to expose the sensing portion of the graphene electrode to the sample contacted to the device. Currently amended
The method of claim 17, wherein the sample has a volume of less than about 1000 microliters. Previously presented
The method of claim 17, wherein the method is performed in vivo. New
The method of claim -1-9_ 7, wherein the Faradaic current has an absolute value of less than about 1 pA. Currently amended
Canceled
Canceled
A method of fabricating a device, comprising: disposing an amount of graphene on a substrate, the disposing being performed so as to place the graphene into electronic communication with a conductive contact; disposing an insulating material atop the graphene; defining a window in the insulating material so as to define a sensing portion of the graphene; and placing the graphene into electronic communication with a processing train configured to measure a Faradaic current related to charge transfer between the graphene and a sample in contact with the sensing portion of the graphene. Previously presented
The method of claim 23, wherein the substrate is a polyimide. Previously presented
The method of claim 23, wherein the Faradaic current has an absolute value of less than about 1 pA. New
Embodiments described in the patent, grouped by the materials and process steps they use.
5 materials1 process step
Gold contacts were pre-fabricated on a flexible Kapton polyimide substrate. An inch-size graphene sheet synthesized via ambient pressure chemical vapor deposition on copper was transferred to the substrate and fabricated into electrodes using photolithography and oxygen plasma etching. A 7 micrometer thick SU-8 (2007, Microchem) biocompatible passivation layer was created to cover the gold electrode with a 100 µm x 100 µm window exposing the graphene electrode. An electrometer measured charge transfer between the graphene electrode and ~10⁻² L 150 mM NaCl aqueous solutions with various pH values; the Faradaic current extracted from five-second charge-transferring measurement decreases monotonically with pH.
Layer stacks claimed or described, ordered top of device to substrate.
graphene pH sensor electrode
Materials described outside the worked examples.
passivation material
polymer substrate
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
time to achieve ~0.1 pH unit precision at pH~7 | 5 seconds | graphene |
polyimide
single-layer graphene
insulating material
| 1000–10000000 nm |
| — |
Thickness | 5–100 µm | — |
Thickness | 10–50 µm | — |
Thickness | 10–10000 µm | — |
Thickness | 1–1000 µm | — |
Thickness | 1–10000 µm | — |
Thickness | 100–1000 µm | — |
Thickness | 200–900 µm | — |
Thickness | 300–800 µm | — |
Thickness | 400–700 µm | — |
Thickness | 500–600 µm | — |
Thickness | 10–900 µm | — |
Thickness | 50–500 µm | — |
Thickness | 100–300 µm | — |
Thickness | 10–1000 µm | — |
Thickness | 100–900 µm | — |
Thickness | 200–800 µm | — |
Thickness | 300–700 µm | — |
Thickness | 400–600 µm | — |
Duration | ≤ 5 seconds | — |
Pressure | ≤ 1 pA | — |
polyimide
single-layer graphene
insulating material
| 1000–10000000 nm |
| — |
Thickness | 5–100 µm | — |
Thickness | 10–50 µm | — |
Thickness | 10–10000 µm | — |
Thickness | 1–1000 µm | — |
Thickness | 1–10000 µm | — |
Thickness | 100–1000 µm | — |
Thickness | 200–900 µm | — |
Thickness | 300–800 µm | — |
Thickness | 400–700 µm | — |
Thickness | 500–600 µm | — |
Thickness | 10–900 µm | — |
Thickness | 50–500 µm | — |
Thickness | 100–300 µm | — |
Thickness | 10–1000 µm | — |
Thickness | 100–900 µm | — |
Thickness | 200–800 µm | — |
Thickness | 300–700 µm | — |
Thickness | 400–600 µm | — |
Duration | ≤ 5 seconds | — |
Pressure | ≤ 1 pA | — |
polyimide
single-layer graphene
insulating material
| 1000–10000000 nm |
| — |
Thickness | 5–100 µm | — |
Thickness | 10–50 µm | — |
Thickness | 10–10000 µm | — |
Thickness | 1–1000 µm | — |
Thickness | 1–10000 µm | — |
Thickness | 100–1000 µm | — |
Thickness | 200–900 µm | — |
Thickness | 300–800 µm | — |
Thickness | 400–700 µm | — |
Thickness | 500–600 µm | — |
Thickness | 10–900 µm | — |
Thickness | 50–500 µm | — |
Thickness | 100–300 µm | — |
Thickness | 10–1000 µm | — |
Thickness | 100–900 µm | — |
Thickness | 200–800 µm | — |
Thickness | 300–700 µm | — |
Thickness | 400–600 µm | — |
Duration | ≤ 5 seconds | — |
Pressure | ≤ 1 pA | — |
polyimide
single-layer graphene
insulating material
| 1000–10000000 nm |
| — |
Thickness | 5–100 µm | — |
Thickness | 10–50 µm | — |
Thickness | 10–10000 µm | — |
Thickness | 1–1000 µm | — |
Thickness | 1–10000 µm | — |
Thickness | 100–1000 µm | — |
Thickness | 200–900 µm | — |
Thickness | 300–800 µm | — |
Thickness | 400–700 µm | — |
Thickness | 500–600 µm | — |
Thickness | 10–900 µm | — |
Thickness | 50–500 µm | — |
Thickness | 100–300 µm | — |
Thickness | 10–1000 µm | — |
Thickness | 100–900 µm | — |
Thickness | 200–800 µm | — |
Thickness | 300–700 µm | — |
Thickness | 400–600 µm | — |
Duration | ≤ 5 seconds | — |
Pressure | ≤ 1 pA | — |