Patent
US 10,593,438SOLAR CELL FRONT SIDE SILVER PASTE DOPED WITH MODIFIED GRAPHENE AND PREPARATION METHOD THEREOF
Peng Zhu
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,593,438Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A solar cell front side silver paste doped with modified graphene, comprising: 0.1-5 parts by weight of surface modified graphene, 88-91 parts by weight of silver powder, 5-15 parts by weight of organic binder, 1-5 parts by weight of a first organic solvent, and 1-3 parts by weight of glass powder, wherein the surface modified graphene is graphene with a surface modified by one or more surface modifiers selected the group consisting of titanate coupling agent, alum in ate coupling agent, silane coupling agent and zircoaluminate coupling agent; and wherein the surface modified g raphene comprises 85-99 parts by wei g ht of g raphene and 1-15 parts by wei g ht of the one or more surface modifiers. Currently amended
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the silver powder is composed of 85-99 parts of micron-sized spherical silver powder and 1-15 parts of nano-sized silver powder, wherein the average particle size of the micron-sized spherical silver powder is 1.0-2.0 pm, and the average particle size of the nano-sized silver powder is 20-100 nm. Original
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the organic binder includes 10-20 parts by weight of polymer and 80-90 parts by weight of a second organic solvent, and wherein the polymer is one or more members of the group consisting of ethyl cellulose, acrylic resin and polyethylene resin, and the organic solvent is two or more members of the group consisting of butyl carbitol, terpineol, tributyl citrate and propylene glycol butyl ether. Previously presented
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the glass powder comprises 1-10 parts by weight of B203, 0-5 parts by weight of Cr₂ 0 3, 20-60 parts by weight of PbO, 0-5 parts by weight of Si O 2, 50-80 parts by weight of Te O 2 and 0-20 parts by weight of B i 203; wherein the glass powder has a particle size D₅₀ of 0.5-2 pm; and wherein a melting point of the glass powder is 250-450 * C. Previously presented
The preparation method of a solar cell front side silver paste doped with modified graphene according to claim 1, comprising: (1) preparing of modified graphene having 85-99 parts by weight of graphene and 1-15 parts by weight of surface modifier and mixing, and ultrasonically dispersing the mixture with an ultrasonic dispersion machine for 20-60 m in, filtering and drying to provide the modified graphene; (2) preparing of an organic binder having 10-20 parts by weight of polymer and 80-90 parts by weight of organic solvent and mixing, and dispersing the mixture with a dispersion machine for 50-70 m in to dissolve the polymer, and such that a transparent and homogeneous organic binder is obtained; (3) preparing of a glass powder having 1-10 parts by weight of B203,0-5 parts by weight of Cr₂ 0 3,20-60 parts by weight of PbO, 0-5 parts by weight of Si O 2,50-80 parts by weight of Te O 2 and 0-20 parts by weight of B i 203 and mixing, and heating the mixture in a high temperature muffle furnace at 800 -1 200 * C for 40-60 m in, quenching with deionized water after being melted, ball-milling for 2.5-10 h, sieving with a 300 mesh screen, such that a glass powder with a particle size D₅₀ less than 2 pm is obtained; (4) preparing of a solar cell front side silver paste having 0.1-5 parts by weight of modified graphene, 5-15 parts by weight of organic binder and 1-3 parts by weight of glass powder and mixing, and then dispersing with a dispersion machine at the speed of 500-800 rpm for 10-30 m in; adding 88-91 parts by weight of silver powder, and dispersing the mixture with a dispersion machine at the speed of 800-1000 rpm for 30- 50 m in, grinding the mixture with a three-roller grinding machine 15 times, followed by adding of 1-3 parts by weight of organic solvent, which is composed of two or more members of the group consisting of butyl carbitol, terpineol, tributyl citrate and propylene glycol butyl ether, dispersing the mixture with a high speed dispersion machine for 5-20 min, such that a finished paste is obtained and packed for further use. Withdrawn
The application of a solar cell front side silver paste doped with modified graphene according to Claim 1, screen printing the solar cell front side silver paste with a 360 mesh screen on a 125mmx125 mm monocrystalline silicon wafer to form an electrode film, and then sintering the printed monocrystalline silicon wafer in a muffle furnace, the sintering peak temperature being 780 0 C. Withdrawn
The solar cell front side silver paste doped with modified graphene according to claim 1, wherein the graphene has a two-dimensional planar structure. Previously presented
The solar cell front side silver paste doped with modified graphene according to claim 1, wherein the surface modifiers are selected from the group consisting of p g g luminate coupling agent, and zircoaluminate coupling agent. Currently amended
Canceled
Canceled
Embodiments described in the patent, grouped by the materials and process steps they use.
6 materials4 process steps
Solar cell front side silver paste comprising 0.1 part modified graphene (85 parts graphene + 1 part surface modifier), 88 parts silver powder (85 parts micron-sized 1.0 µm + 1 part nano-sized 20 nm), 5 parts organic binder (10 parts polymer + 80 parts organic solvent), 2 parts organic solvent, 1 part glass powder (1 part B₂O3, 20 parts PbO, 50 parts TeO2; D50=0.5 µm). Preparation: modified graphene by ultrasonic dispersion for 20 min; organic binder by dispersion for 50 min; glass powder by muffle furnace at 800°C for 40 min, quench, ball-mill 2.5 h, 300 mesh screen; paste by sequential dispersion and three-roller grinding.
Layer stacks claimed or described, ordered top of device to substrate.
solar cell front side electrode
Materials described outside the worked examples.
monocrystalline silicon wafer
Si
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
contact resistance of crystalline silicon solar cell with modified graphene paste | 0.0018 Ω | surface modified graphene |
Pressure |
Patent
Atlas literature
Patent
US 10,593,438Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A solar cell front side silver paste doped with modified graphene, comprising: 0.1-5 parts by weight of surface modified graphene, 88-91 parts by weight of silver powder, 5-15 parts by weight of organic binder, 1-5 parts by weight of a first organic solvent, and 1-3 parts by weight of glass powder, wherein the surface modified graphene is graphene with a surface modified by one or more surface modifiers selected the group consisting of titanate coupling agent, alum in ate coupling agent, silane coupling agent and zircoaluminate coupling agent; and wherein the surface modified g raphene comprises 85-99 parts by wei g ht of g raphene and 1-15 parts by wei g ht of the one or more surface modifiers. Currently amended
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the silver powder is composed of 85-99 parts of micron-sized spherical silver powder and 1-15 parts of nano-sized silver powder, wherein the average particle size of the micron-sized spherical silver powder is 1.0-2.0 pm, and the average particle size of the nano-sized silver powder is 20-100 nm. Original
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the organic binder includes 10-20 parts by weight of polymer and 80-90 parts by weight of a second organic solvent, and wherein the polymer is one or more members of the group consisting of ethyl cellulose, acrylic resin and polyethylene resin, and the organic solvent is two or more members of the group consisting of butyl carbitol, terpineol, tributyl citrate and propylene glycol butyl ether. Previously presented
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the glass powder comprises 1-10 parts by weight of B203, 0-5 parts by weight of Cr₂ 0 3, 20-60 parts by weight of PbO, 0-5 parts by weight of Si O 2, 50-80 parts by weight of Te O 2 and 0-20 parts by weight of B i 203; wherein the glass powder has a particle size D₅₀ of 0.5-2 pm; and wherein a melting point of the glass powder is 250-450 * C. Previously presented
The preparation method of a solar cell front side silver paste doped with modified graphene according to claim 1, comprising: (1) preparing of modified graphene having 85-99 parts by weight of graphene and 1-15 parts by weight of surface modifier and mixing, and ultrasonically dispersing the mixture with an ultrasonic dispersion machine for 20-60 m in, filtering and drying to provide the modified graphene; (2) preparing of an organic binder having 10-20 parts by weight of polymer and 80-90 parts by weight of organic solvent and mixing, and dispersing the mixture with a dispersion machine for 50-70 m in to dissolve the polymer, and such that a transparent and homogeneous organic binder is obtained; (3) preparing of a glass powder having 1-10 parts by weight of B203,0-5 parts by weight of Cr₂ 0 3,20-60 parts by weight of PbO, 0-5 parts by weight of Si O 2,50-80 parts by weight of Te O 2 and 0-20 parts by weight of B i 203 and mixing, and heating the mixture in a high temperature muffle furnace at 800 -1 200 * C for 40-60 m in, quenching with deionized water after being melted, ball-milling for 2.5-10 h, sieving with a 300 mesh screen, such that a glass powder with a particle size D₅₀ less than 2 pm is obtained; (4) preparing of a solar cell front side silver paste having 0.1-5 parts by weight of modified graphene, 5-15 parts by weight of organic binder and 1-3 parts by weight of glass powder and mixing, and then dispersing with a dispersion machine at the speed of 500-800 rpm for 10-30 m in; adding 88-91 parts by weight of silver powder, and dispersing the mixture with a dispersion machine at the speed of 800-1000 rpm for 30- 50 m in, grinding the mixture with a three-roller grinding machine 15 times, followed by adding of 1-3 parts by weight of organic solvent, which is composed of two or more members of the group consisting of butyl carbitol, terpineol, tributyl citrate and propylene glycol butyl ether, dispersing the mixture with a high speed dispersion machine for 5-20 min, such that a finished paste is obtained and packed for further use. Withdrawn
The application of a solar cell front side silver paste doped with modified graphene according to Claim 1, screen printing the solar cell front side silver paste with a 360 mesh screen on a 125mmx125 mm monocrystalline silicon wafer to form an electrode film, and then sintering the printed monocrystalline silicon wafer in a muffle furnace, the sintering peak temperature being 780 0 C. Withdrawn
The solar cell front side silver paste doped with modified graphene according to claim 1, wherein the graphene has a two-dimensional planar structure. Previously presented
The solar cell front side silver paste doped with modified graphene according to claim 1, wherein the surface modifiers are selected from the group consisting of p g g luminate coupling agent, and zircoaluminate coupling agent. Currently amended
Canceled
Canceled
Embodiments described in the patent, grouped by the materials and process steps they use.
6 materials4 process steps
Solar cell front side silver paste comprising 0.1 part modified graphene (85 parts graphene + 1 part surface modifier), 88 parts silver powder (85 parts micron-sized 1.0 µm + 1 part nano-sized 20 nm), 5 parts organic binder (10 parts polymer + 80 parts organic solvent), 2 parts organic solvent, 1 part glass powder (1 part B₂O3, 20 parts PbO, 50 parts TeO2; D50=0.5 µm). Preparation: modified graphene by ultrasonic dispersion for 20 min; organic binder by dispersion for 50 min; glass powder by muffle furnace at 800°C for 40 min, quench, ball-mill 2.5 h, 300 mesh screen; paste by sequential dispersion and three-roller grinding.
Layer stacks claimed or described, ordered top of device to substrate.
solar cell front side electrode
Materials described outside the worked examples.
monocrystalline silicon wafer
Si
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
contact resistance of crystalline silicon solar cell with modified graphene paste | 0.0018 Ω | surface modified graphene |
Pressure |
Patent
Atlas literature
Patent
US 10,593,438Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A solar cell front side silver paste doped with modified graphene, comprising: 0.1-5 parts by weight of surface modified graphene, 88-91 parts by weight of silver powder, 5-15 parts by weight of organic binder, 1-5 parts by weight of a first organic solvent, and 1-3 parts by weight of glass powder, wherein the surface modified graphene is graphene with a surface modified by one or more surface modifiers selected the group consisting of titanate coupling agent, alum in ate coupling agent, silane coupling agent and zircoaluminate coupling agent; and wherein the surface modified g raphene comprises 85-99 parts by wei g ht of g raphene and 1-15 parts by wei g ht of the one or more surface modifiers. Currently amended
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the silver powder is composed of 85-99 parts of micron-sized spherical silver powder and 1-15 parts of nano-sized silver powder, wherein the average particle size of the micron-sized spherical silver powder is 1.0-2.0 pm, and the average particle size of the nano-sized silver powder is 20-100 nm. Original
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the organic binder includes 10-20 parts by weight of polymer and 80-90 parts by weight of a second organic solvent, and wherein the polymer is one or more members of the group consisting of ethyl cellulose, acrylic resin and polyethylene resin, and the organic solvent is two or more members of the group consisting of butyl carbitol, terpineol, tributyl citrate and propylene glycol butyl ether. Previously presented
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the glass powder comprises 1-10 parts by weight of B203, 0-5 parts by weight of Cr₂ 0 3, 20-60 parts by weight of PbO, 0-5 parts by weight of Si O 2, 50-80 parts by weight of Te O 2 and 0-20 parts by weight of B i 203; wherein the glass powder has a particle size D₅₀ of 0.5-2 pm; and wherein a melting point of the glass powder is 250-450 * C. Previously presented
The preparation method of a solar cell front side silver paste doped with modified graphene according to claim 1, comprising: (1) preparing of modified graphene having 85-99 parts by weight of graphene and 1-15 parts by weight of surface modifier and mixing, and ultrasonically dispersing the mixture with an ultrasonic dispersion machine for 20-60 m in, filtering and drying to provide the modified graphene; (2) preparing of an organic binder having 10-20 parts by weight of polymer and 80-90 parts by weight of organic solvent and mixing, and dispersing the mixture with a dispersion machine for 50-70 m in to dissolve the polymer, and such that a transparent and homogeneous organic binder is obtained; (3) preparing of a glass powder having 1-10 parts by weight of B203,0-5 parts by weight of Cr₂ 0 3,20-60 parts by weight of PbO, 0-5 parts by weight of Si O 2,50-80 parts by weight of Te O 2 and 0-20 parts by weight of B i 203 and mixing, and heating the mixture in a high temperature muffle furnace at 800 -1 200 * C for 40-60 m in, quenching with deionized water after being melted, ball-milling for 2.5-10 h, sieving with a 300 mesh screen, such that a glass powder with a particle size D₅₀ less than 2 pm is obtained; (4) preparing of a solar cell front side silver paste having 0.1-5 parts by weight of modified graphene, 5-15 parts by weight of organic binder and 1-3 parts by weight of glass powder and mixing, and then dispersing with a dispersion machine at the speed of 500-800 rpm for 10-30 m in; adding 88-91 parts by weight of silver powder, and dispersing the mixture with a dispersion machine at the speed of 800-1000 rpm for 30- 50 m in, grinding the mixture with a three-roller grinding machine 15 times, followed by adding of 1-3 parts by weight of organic solvent, which is composed of two or more members of the group consisting of butyl carbitol, terpineol, tributyl citrate and propylene glycol butyl ether, dispersing the mixture with a high speed dispersion machine for 5-20 min, such that a finished paste is obtained and packed for further use. Withdrawn
The application of a solar cell front side silver paste doped with modified graphene according to Claim 1, screen printing the solar cell front side silver paste with a 360 mesh screen on a 125mmx125 mm monocrystalline silicon wafer to form an electrode film, and then sintering the printed monocrystalline silicon wafer in a muffle furnace, the sintering peak temperature being 780 0 C. Withdrawn
The solar cell front side silver paste doped with modified graphene according to claim 1, wherein the graphene has a two-dimensional planar structure. Previously presented
The solar cell front side silver paste doped with modified graphene according to claim 1, wherein the surface modifiers are selected from the group consisting of p g g luminate coupling agent, and zircoaluminate coupling agent. Currently amended
Canceled
Canceled
Embodiments described in the patent, grouped by the materials and process steps they use.
6 materials4 process steps
Solar cell front side silver paste comprising 0.1 part modified graphene (85 parts graphene + 1 part surface modifier), 88 parts silver powder (85 parts micron-sized 1.0 µm + 1 part nano-sized 20 nm), 5 parts organic binder (10 parts polymer + 80 parts organic solvent), 2 parts organic solvent, 1 part glass powder (1 part B₂O3, 20 parts PbO, 50 parts TeO2; D50=0.5 µm). Preparation: modified graphene by ultrasonic dispersion for 20 min; organic binder by dispersion for 50 min; glass powder by muffle furnace at 800°C for 40 min, quench, ball-mill 2.5 h, 300 mesh screen; paste by sequential dispersion and three-roller grinding.
Layer stacks claimed or described, ordered top of device to substrate.
solar cell front side electrode
Materials described outside the worked examples.
monocrystalline silicon wafer
Si
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
contact resistance of crystalline silicon solar cell with modified graphene paste | 0.0018 Ω | surface modified graphene |
Pressure |
Patent
Atlas literature
Patent
US 10,593,438Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A solar cell front side silver paste doped with modified graphene, comprising: 0.1-5 parts by weight of surface modified graphene, 88-91 parts by weight of silver powder, 5-15 parts by weight of organic binder, 1-5 parts by weight of a first organic solvent, and 1-3 parts by weight of glass powder, wherein the surface modified graphene is graphene with a surface modified by one or more surface modifiers selected the group consisting of titanate coupling agent, alum in ate coupling agent, silane coupling agent and zircoaluminate coupling agent; and wherein the surface modified g raphene comprises 85-99 parts by wei g ht of g raphene and 1-15 parts by wei g ht of the one or more surface modifiers. Currently amended
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the silver powder is composed of 85-99 parts of micron-sized spherical silver powder and 1-15 parts of nano-sized silver powder, wherein the average particle size of the micron-sized spherical silver powder is 1.0-2.0 pm, and the average particle size of the nano-sized silver powder is 20-100 nm. Original
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the organic binder includes 10-20 parts by weight of polymer and 80-90 parts by weight of a second organic solvent, and wherein the polymer is one or more members of the group consisting of ethyl cellulose, acrylic resin and polyethylene resin, and the organic solvent is two or more members of the group consisting of butyl carbitol, terpineol, tributyl citrate and propylene glycol butyl ether. Previously presented
A solar cell front side silver paste doped with modified graphene according to claim 1, wherein the glass powder comprises 1-10 parts by weight of B203, 0-5 parts by weight of Cr₂ 0 3, 20-60 parts by weight of PbO, 0-5 parts by weight of Si O 2, 50-80 parts by weight of Te O 2 and 0-20 parts by weight of B i 203; wherein the glass powder has a particle size D₅₀ of 0.5-2 pm; and wherein a melting point of the glass powder is 250-450 * C. Previously presented
The preparation method of a solar cell front side silver paste doped with modified graphene according to claim 1, comprising: (1) preparing of modified graphene having 85-99 parts by weight of graphene and 1-15 parts by weight of surface modifier and mixing, and ultrasonically dispersing the mixture with an ultrasonic dispersion machine for 20-60 m in, filtering and drying to provide the modified graphene; (2) preparing of an organic binder having 10-20 parts by weight of polymer and 80-90 parts by weight of organic solvent and mixing, and dispersing the mixture with a dispersion machine for 50-70 m in to dissolve the polymer, and such that a transparent and homogeneous organic binder is obtained; (3) preparing of a glass powder having 1-10 parts by weight of B203,0-5 parts by weight of Cr₂ 0 3,20-60 parts by weight of PbO, 0-5 parts by weight of Si O 2,50-80 parts by weight of Te O 2 and 0-20 parts by weight of B i 203 and mixing, and heating the mixture in a high temperature muffle furnace at 800 -1 200 * C for 40-60 m in, quenching with deionized water after being melted, ball-milling for 2.5-10 h, sieving with a 300 mesh screen, such that a glass powder with a particle size D₅₀ less than 2 pm is obtained; (4) preparing of a solar cell front side silver paste having 0.1-5 parts by weight of modified graphene, 5-15 parts by weight of organic binder and 1-3 parts by weight of glass powder and mixing, and then dispersing with a dispersion machine at the speed of 500-800 rpm for 10-30 m in; adding 88-91 parts by weight of silver powder, and dispersing the mixture with a dispersion machine at the speed of 800-1000 rpm for 30- 50 m in, grinding the mixture with a three-roller grinding machine 15 times, followed by adding of 1-3 parts by weight of organic solvent, which is composed of two or more members of the group consisting of butyl carbitol, terpineol, tributyl citrate and propylene glycol butyl ether, dispersing the mixture with a high speed dispersion machine for 5-20 min, such that a finished paste is obtained and packed for further use. Withdrawn
The application of a solar cell front side silver paste doped with modified graphene according to Claim 1, screen printing the solar cell front side silver paste with a 360 mesh screen on a 125mmx125 mm monocrystalline silicon wafer to form an electrode film, and then sintering the printed monocrystalline silicon wafer in a muffle furnace, the sintering peak temperature being 780 0 C. Withdrawn
The solar cell front side silver paste doped with modified graphene according to claim 1, wherein the graphene has a two-dimensional planar structure. Previously presented
The solar cell front side silver paste doped with modified graphene according to claim 1, wherein the surface modifiers are selected from the group consisting of p g g luminate coupling agent, and zircoaluminate coupling agent. Currently amended
Canceled
Canceled
Embodiments described in the patent, grouped by the materials and process steps they use.
6 materials4 process steps
Solar cell front side silver paste comprising 0.1 part modified graphene (85 parts graphene + 1 part surface modifier), 88 parts silver powder (85 parts micron-sized 1.0 µm + 1 part nano-sized 20 nm), 5 parts organic binder (10 parts polymer + 80 parts organic solvent), 2 parts organic solvent, 1 part glass powder (1 part B₂O3, 20 parts PbO, 50 parts TeO2; D50=0.5 µm). Preparation: modified graphene by ultrasonic dispersion for 20 min; organic binder by dispersion for 50 min; glass powder by muffle furnace at 800°C for 40 min, quench, ball-mill 2.5 h, 300 mesh screen; paste by sequential dispersion and three-roller grinding.
Layer stacks claimed or described, ordered top of device to substrate.
solar cell front side electrode
Materials described outside the worked examples.
monocrystalline silicon wafer
Si
Additional fabrication and treatment steps described in the patent.
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
contact resistance of crystalline silicon solar cell with modified graphene paste | 0.0018 Ω | surface modified graphene |
Pressure |
| 0.1–5 pa |
| — |
Pressure | 88–91 pa | — |
Pressure | 5–15 pa | — |
Pressure | 1–5 pa | — |
Pressure | 1–3 pa | — |
Pressure | 85–99 pa | — |
Pressure | 1–15 pa | — |
Thickness | 20–100 nm | — |
Pressure | 10–20 pa | — |
Pressure | 80–90 pa | — |
Pressure | 1–10 pa | — |
Pressure | 0–5 pa | — |
Pressure | 20–60 pa | — |
Pressure | 50–80 pa | — |
Pressure | 0–20 pa | — |
Duration | 5–20 min | — |
Temperature | 800–1200 °C | — |
Duration | 10–30 min | — |
| 0.1–5 pa |
| — |
Pressure | 88–91 pa | — |
Pressure | 5–15 pa | — |
Pressure | 1–5 pa | — |
Pressure | 1–3 pa | — |
Pressure | 85–99 pa | — |
Pressure | 1–15 pa | — |
Thickness | 20–100 nm | — |
Pressure | 10–20 pa | — |
Pressure | 80–90 pa | — |
Pressure | 1–10 pa | — |
Pressure | 0–5 pa | — |
Pressure | 20–60 pa | — |
Pressure | 50–80 pa | — |
Pressure | 0–20 pa | — |
Duration | 5–20 min | — |
Temperature | 800–1200 °C | — |
Duration | 10–30 min | — |
| 0.1–5 pa |
| — |
Pressure | 88–91 pa | — |
Pressure | 5–15 pa | — |
Pressure | 1–5 pa | — |
Pressure | 1–3 pa | — |
Pressure | 85–99 pa | — |
Pressure | 1–15 pa | — |
Thickness | 20–100 nm | — |
Pressure | 10–20 pa | — |
Pressure | 80–90 pa | — |
Pressure | 1–10 pa | — |
Pressure | 0–5 pa | — |
Pressure | 20–60 pa | — |
Pressure | 50–80 pa | — |
Pressure | 0–20 pa | — |
Duration | 5–20 min | — |
Temperature | 800–1200 °C | — |
Duration | 10–30 min | — |
| 0.1–5 pa |
| — |
Pressure | 88–91 pa | — |
Pressure | 5–15 pa | — |
Pressure | 1–5 pa | — |
Pressure | 1–3 pa | — |
Pressure | 85–99 pa | — |
Pressure | 1–15 pa | — |
Thickness | 20–100 nm | — |
Pressure | 10–20 pa | — |
Pressure | 80–90 pa | — |
Pressure | 1–10 pa | — |
Pressure | 0–5 pa | — |
Pressure | 20–60 pa | — |
Pressure | 50–80 pa | — |
Pressure | 0–20 pa | — |
Duration | 5–20 min | — |
Temperature | 800–1200 °C | — |
Duration | 10–30 min | — |