Patent
US 9,012,939indium-containing active layer
eutectic bond metal layer
undoped aluminum-gallium-nitride (LRL sublayer)
AlGaN
silicon substrate
Si
| 1000 nm |
GaN |
GaN sublayer thickness lower bound | 100 nm | GaN |
AlGaN:Si intervening sublayer thickness upper bound | 25 nm | AlGaN:Si |
AlGaN:Si intervening sublayer silicon concentration lower bound | 1e19 atoms/cm3 | AlGaN:Si |
Blue LED emission wavelength range | — | indium-containing active layer |
n-type layer sheet resistance lower bound | 15 ohm/sq | GaN |
Thickness | 35–250 um | — |
Thickness | 440–490 nm | — |
— | 3.4–6.2 eV | — |
Thickness | 0.2–1.5 mm | — |
Thickness | 0.5–3 mm | — |
Thickness | ≤ 1 nm | — |
Thickness | ≤ 300 nm | — |
Thickness | ≤ 2000 nm | — |
Thickness | ≤ 25 nm | — |
Thickness | ≤ 200 nm | — |
Thickness | ≥ 50 nm | — |
Temperature | ≥ 280 °C | — |
Thickness | ≥ 2000 nm | — |
indium-containing active layer
eutectic bond metal layer
undoped aluminum-gallium-nitride (LRL sublayer)
AlGaN
silicon substrate
Si
| 1000 nm |
GaN |
GaN sublayer thickness lower bound | 100 nm | GaN |
AlGaN:Si intervening sublayer thickness upper bound | 25 nm | AlGaN:Si |
AlGaN:Si intervening sublayer silicon concentration lower bound | 1e19 atoms/cm3 | AlGaN:Si |
Blue LED emission wavelength range | — | indium-containing active layer |
n-type layer sheet resistance lower bound | 15 ohm/sq | GaN |
Thickness | 35–250 um | — |
Thickness | 440–490 nm | — |
— | 3.4–6.2 eV | — |
Thickness | 0.2–1.5 mm | — |
Thickness | 0.5–3 mm | — |
Thickness | ≤ 1 nm | — |
Thickness | ≤ 300 nm | — |
Thickness | ≤ 2000 nm | — |
Thickness | ≤ 25 nm | — |
Thickness | ≤ 200 nm | — |
Thickness | ≥ 50 nm | — |
Temperature | ≥ 280 °C | — |
Thickness | ≥ 2000 nm | — |
indium-containing active layer
eutectic bond metal layer
undoped aluminum-gallium-nitride (LRL sublayer)
AlGaN
silicon substrate
Si
| 1000 nm |
GaN |
GaN sublayer thickness lower bound | 100 nm | GaN |
AlGaN:Si intervening sublayer thickness upper bound | 25 nm | AlGaN:Si |
AlGaN:Si intervening sublayer silicon concentration lower bound | 1e19 atoms/cm3 | AlGaN:Si |
Blue LED emission wavelength range | — | indium-containing active layer |
n-type layer sheet resistance lower bound | 15 ohm/sq | GaN |
Thickness | 35–250 um | — |
Thickness | 440–490 nm | — |
— | 3.4–6.2 eV | — |
Thickness | 0.2–1.5 mm | — |
Thickness | 0.5–3 mm | — |
Thickness | ≤ 1 nm | — |
Thickness | ≤ 300 nm | — |
Thickness | ≤ 2000 nm | — |
Thickness | ≤ 25 nm | — |
Thickness | ≤ 200 nm | — |
Thickness | ≥ 50 nm | — |
Temperature | ≥ 280 °C | — |
Thickness | ≥ 2000 nm | — |
indium-containing active layer
eutectic bond metal layer
undoped aluminum-gallium-nitride (LRL sublayer)
AlGaN
silicon substrate
Si
| 1000 nm |
GaN |
GaN sublayer thickness lower bound | 100 nm | GaN |
AlGaN:Si intervening sublayer thickness upper bound | 25 nm | AlGaN:Si |
AlGaN:Si intervening sublayer silicon concentration lower bound | 1e19 atoms/cm3 | AlGaN:Si |
Blue LED emission wavelength range | — | indium-containing active layer |
n-type layer sheet resistance lower bound | 15 ohm/sq | GaN |
Thickness | 35–250 um | — |
Thickness | 440–490 nm | — |
— | 3.4–6.2 eV | — |
Thickness | 0.2–1.5 mm | — |
Thickness | 0.5–3 mm | — |
Thickness | ≤ 1 nm | — |
Thickness | ≤ 300 nm | — |
Thickness | ≤ 2000 nm | — |
Thickness | ≤ 25 nm | — |
Thickness | ≤ 200 nm | — |
Thickness | ≥ 50 nm | — |
Temperature | ≥ 280 °C | — |
Thickness | ≥ 2000 nm | — |