Patent
US 10,690,615MICRO-NANO TEXTURED GRAPHENE-BASED BIONIC PH SENSOR AND PREPARATION METHOD THEREFOR
Kun XU
US
Copyright © 2026 Matter42. All rights reserved.
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a structure of the p 1-I sensor substrate.
FIG. 2 is a schematic of the biomimetic graphene-based p H sensor with micro/nano texturing surface. In these FIGURES, 1 is the substrate, 2 is the slot A, 3 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A biomi m etic graphene-based pH sensor with micro/nano texturing surface, wherein, the pH sensor consists of substrate (1), slot A (2), slot B (3), working electrode (4), reference electrode (5), copper contact A (6), copper contact B (7), inner lead A (8), and inner lead B (9); The upper and lower surfaces of the substrate (1) are respectively provided with a slot A (2) and a slot B (3); The working electrode (4) and reference electrode (5) are located in the slot A (2) and slot B (3) respectively; The bottom of w orking electrode (4) is connected with the inner lead A (8) through the copper contact A (6), while the top of reference electrode (5) is connected with the inner lead B (9) through the copper contact B (7); The working electrode (4) includes graphene A (401) and sensitive electrode material layer (402); The sensitive electrode material layer is located on the upper layer of the graphene A (401); The reference electrode (5) includes graphene B (501) and silver metal material layer (502); The silver metal material layer (502) is located below the graphene B (501); The upper surface of sensitive electrode material layer (402) and the lo w er surface of silver metal material layer (502) are both provided w ith micro -grooves or micro-pits.
A biomi me tic graphene-based p H sensor with mi c ro/nano texturing surface according to claim 1, wherein, the micro-grooves or micro-pits are nano-sized and the apparent contact angle is less than 5.
A biomi rn etic graphene-based pH sensor with micro/nano t exturin g surface according to claim 1 or claim 2, wherein, the sensitive electrode material layer (402) is one kind of main-group metal or main-group metal oxide.
The fabrication method of a biomi m etic graphene-based p IT sensor with micro/nano texturing surface according to clai m 3, wherein, includes the steps of: SI: Slotting on the two sides of the substrate (I) to prepare slot A (2) and slot B (3), then setting the copper contact A (6) and copper contact B (7) on the bottom of slot A (2) and slo t B (3), and connected with the inner le ad A (8) and inner lead B (9) respectively; S2: Graphene A (40 1) is deposited on the upper surface of copper contact A (6) and slot A (2), while graphene B (501) is deposited on the upper surface of copper contact B (7) and slot B (3); Coating the sensitive electrode material layer (40 2) on the u pper surface o f graphene A (401), then processing micro-grooves or micro-pits on the surface of the sensitive electrode material layer (402) to prepare the working electrode (4); S3: Depositing the silver metal material layer (502) on the lower surface of the graphene B (501) and processing micro-grooves or micro-pits on the surface of silver metal material layer (502); Then chlorinating the lower surface of the silver metal material layer (502) with FeC 3 solution; The graphene powder was dispersed in deionized water, and then was dispersed by ultrasound to prepare the graphene oxide modified film, which was dripped on the lower surface of the silver metal material layer (502) through pipette; Dried at room temperature to prepare the reference electrode (5); Then the biomi m etic graphene-based pH sensor with micro/nano texturing surface is prepared.
The fabrication method of a biomimetic graphene-based pH sensor with micro/nano texturing surface according to claim 5, wherein, in step S2, the fabrication method of graphene film is micro mechanical peeling transfer method and the thickness of the graphene film is 5 -1 Onm.
The fabrication method of a biomimetic graphene- b ased pH sensor with micro/nano texturing surface according to claim 5, wherein, the fabrication method of sensitive electrode material layer (402) in step S₂ and silver metal material layer (502) in step S₃ can be electrochemical deposition or physical vapor deposition, or chemical vapor deposition.
The fabrication method of a biomimetic graphene-based p H sensor with micro/nano texturing surface according to claim 5, wherein, the method of processing micro-grooves or micro-pits in step S₂ and S₃ can be femtosecond laser processing, plasma etching, electrochemical etching, or acid-base corrosion.
The fabrication method of a biomimetic graphene-based pH sensor with micro/nano texturing surface according to claim 5, wherein, the preparation method of the graphene oxide modified film in step S₃ is sol-gel method, and the thickness of the graphene oxide modified film is 10-20 nm.
Embodiments described in the patent, grouped by the materials and process steps they use.
6 materials3 process steps
Fabrication of biomimetic graphene-based pH sensor. Substrate slotted to form slot A and slot B with copper contacts. Graphene A (5 nm thick) deposited by micro mechanical peeling transfer on copper contact A and slot A. Antimony sensitive electrode material layer deposited on graphene A by magnetron sputtering (vacuum 3×10⁻⁴ Pa, process pressure 1 Pa, power 50 W, argon shielding gas, flow 39 sccm, time 40 min). Femtosecond laser used to process micro-pits on sensitive electrode material layer surface (hole depth ~80 nm, hole diameter ~2 μm). Silver metal material layer deposited on lower surface of graphene B; micro-pits processed; chlorinated with FeCl₃ solution; graphene oxide modified film dripped via pipette and dried at room temperature to form reference electrode.
Layer stacks claimed or described, ordered top of device to substrate.
biomimetic graphene-based pH sensor with micro/nano texturing surface
Materials described outside the worked examples.
main-group metal or main-group metal oxide
Ruthenium or ruthenium oxide
Iridium or iridium oxide
Palladium or palladium oxide
Titanium or titanium oxide
Tantalum or tantalum oxide
Tin or tin oxide
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
apparent contact angle of nano-sized micro-grooves or micro-pits | ≤ 5 degrees | sensitive electrode material layerAg |
graphene film thickness (claimed range) | 5–10 nm | graphene Agraphene B |
graphene oxide modified film thickness (claimed range) | 10–20 nm | graphene oxide modified film |
graphene A film thickness in Embodiment 1 | 5 nm | graphene A |
micro-pit hole depth on sensitive electrode material layer (Embodiment 1) | 80 nm | Sb |
micro-pit hole diameter on sensitive electrode material layer (Embodiment 1) | 2 μm | Sb |
Related documents with shared materials, methods, properties, or citations.
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a structure of the p 1-I sensor substrate.
FIG. 2 is a schematic of the biomimetic graphene-based p H sensor with micro/nano texturing surface. In these FIGURES, 1 is the substrate, 2 is the slot A, 3 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A biomi m etic graphene-based pH sensor with micro/nano texturing surface, wherein, the pH sensor consists of substrate (1), slot A (2), slot B (3), working electrode (4), reference electrode (5), copper contact A (6), copper contact B (7), inner lead A (8), and inner lead B (9); The upper and lower surfaces of the substrate (1) are respectively provided with a slot A (2) and a slot B (3); The working electrode (4) and reference electrode (5) are located in the slot A (2) and slot B (3) respectively; The bottom of w orking electrode (4) is connected with the inner lead A (8) through the copper contact A (6), while the top of reference electrode (5) is connected with the inner lead B (9) through the copper contact B (7); The working electrode (4) includes graphene A (401) and sensitive electrode material layer (402); The sensitive electrode material layer is located on the upper layer of the graphene A (401); The reference electrode (5) includes graphene B (501) and silver metal material layer (502); The silver metal material layer (502) is located below the graphene B (501); The upper surface of sensitive electrode material layer (402) and the lo w er surface of silver metal material layer (502) are both provided w ith micro -grooves or micro-pits.
A biomi me tic graphene-based p H sensor with mi c ro/nano texturing surface according to claim 1, wherein, the micro-grooves or micro-pits are nano-sized and the apparent contact angle is less than 5.
A biomi rn etic graphene-based pH sensor with micro/nano t exturin g surface according to claim 1 or claim 2, wherein, the sensitive electrode material layer (402) is one kind of main-group metal or main-group metal oxide.
The fabrication method of a biomi m etic graphene-based p IT sensor with micro/nano texturing surface according to clai m 3, wherein, includes the steps of: SI: Slotting on the two sides of the substrate (I) to prepare slot A (2) and slot B (3), then setting the copper contact A (6) and copper contact B (7) on the bottom of slot A (2) and slo t B (3), and connected with the inner le ad A (8) and inner lead B (9) respectively; S2: Graphene A (40 1) is deposited on the upper surface of copper contact A (6) and slot A (2), while graphene B (501) is deposited on the upper surface of copper contact B (7) and slot B (3); Coating the sensitive electrode material layer (40 2) on the u pper surface o f graphene A (401), then processing micro-grooves or micro-pits on the surface of the sensitive electrode material layer (402) to prepare the working electrode (4); S3: Depositing the silver metal material layer (502) on the lower surface of the graphene B (501) and processing micro-grooves or micro-pits on the surface of silver metal material layer (502); Then chlorinating the lower surface of the silver metal material layer (502) with FeC 3 solution; The graphene powder was dispersed in deionized water, and then was dispersed by ultrasound to prepare the graphene oxide modified film, which was dripped on the lower surface of the silver metal material layer (502) through pipette; Dried at room temperature to prepare the reference electrode (5); Then the biomi m etic graphene-based pH sensor with micro/nano texturing surface is prepared.
The fabrication method of a biomimetic graphene-based pH sensor with micro/nano texturing surface according to claim 5, wherein, in step S2, the fabrication method of graphene film is micro mechanical peeling transfer method and the thickness of the graphene film is 5 -1 Onm.
The fabrication method of a biomimetic graphene- b ased pH sensor with micro/nano texturing surface according to claim 5, wherein, the fabrication method of sensitive electrode material layer (402) in step S₂ and silver metal material layer (502) in step S₃ can be electrochemical deposition or physical vapor deposition, or chemical vapor deposition.
The fabrication method of a biomimetic graphene-based p H sensor with micro/nano texturing surface according to claim 5, wherein, the method of processing micro-grooves or micro-pits in step S₂ and S₃ can be femtosecond laser processing, plasma etching, electrochemical etching, or acid-base corrosion.
The fabrication method of a biomimetic graphene-based pH sensor with micro/nano texturing surface according to claim 5, wherein, the preparation method of the graphene oxide modified film in step S₃ is sol-gel method, and the thickness of the graphene oxide modified film is 10-20 nm.
Embodiments described in the patent, grouped by the materials and process steps they use.
6 materials3 process steps
Fabrication of biomimetic graphene-based pH sensor. Substrate slotted to form slot A and slot B with copper contacts. Graphene A (5 nm thick) deposited by micro mechanical peeling transfer on copper contact A and slot A. Antimony sensitive electrode material layer deposited on graphene A by magnetron sputtering (vacuum 3×10⁻⁴ Pa, process pressure 1 Pa, power 50 W, argon shielding gas, flow 39 sccm, time 40 min). Femtosecond laser used to process micro-pits on sensitive electrode material layer surface (hole depth ~80 nm, hole diameter ~2 μm). Silver metal material layer deposited on lower surface of graphene B; micro-pits processed; chlorinated with FeCl₃ solution; graphene oxide modified film dripped via pipette and dried at room temperature to form reference electrode.
Layer stacks claimed or described, ordered top of device to substrate.
biomimetic graphene-based pH sensor with micro/nano texturing surface
Materials described outside the worked examples.
main-group metal or main-group metal oxide
Ruthenium or ruthenium oxide
Iridium or iridium oxide
Palladium or palladium oxide
Titanium or titanium oxide
Tantalum or tantalum oxide
Tin or tin oxide
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
apparent contact angle of nano-sized micro-grooves or micro-pits | ≤ 5 degrees | sensitive electrode material layerAg |
graphene film thickness (claimed range) | 5–10 nm | graphene Agraphene B |
graphene oxide modified film thickness (claimed range) | 10–20 nm | graphene oxide modified film |
graphene A film thickness in Embodiment 1 | 5 nm | graphene A |
micro-pit hole depth on sensitive electrode material layer (Embodiment 1) | 80 nm | Sb |
micro-pit hole diameter on sensitive electrode material layer (Embodiment 1) | 2 μm | Sb |
Related documents with shared materials, methods, properties, or citations.
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a structure of the p 1-I sensor substrate.
FIG. 2 is a schematic of the biomimetic graphene-based p H sensor with micro/nano texturing surface. In these FIGURES, 1 is the substrate, 2 is the slot A, 3 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A biomi m etic graphene-based pH sensor with micro/nano texturing surface, wherein, the pH sensor consists of substrate (1), slot A (2), slot B (3), working electrode (4), reference electrode (5), copper contact A (6), copper contact B (7), inner lead A (8), and inner lead B (9); The upper and lower surfaces of the substrate (1) are respectively provided with a slot A (2) and a slot B (3); The working electrode (4) and reference electrode (5) are located in the slot A (2) and slot B (3) respectively; The bottom of w orking electrode (4) is connected with the inner lead A (8) through the copper contact A (6), while the top of reference electrode (5) is connected with the inner lead B (9) through the copper contact B (7); The working electrode (4) includes graphene A (401) and sensitive electrode material layer (402); The sensitive electrode material layer is located on the upper layer of the graphene A (401); The reference electrode (5) includes graphene B (501) and silver metal material layer (502); The silver metal material layer (502) is located below the graphene B (501); The upper surface of sensitive electrode material layer (402) and the lo w er surface of silver metal material layer (502) are both provided w ith micro -grooves or micro-pits.
A biomi me tic graphene-based p H sensor with mi c ro/nano texturing surface according to claim 1, wherein, the micro-grooves or micro-pits are nano-sized and the apparent contact angle is less than 5.
A biomi rn etic graphene-based pH sensor with micro/nano t exturin g surface according to claim 1 or claim 2, wherein, the sensitive electrode material layer (402) is one kind of main-group metal or main-group metal oxide.
The fabrication method of a biomi m etic graphene-based p IT sensor with micro/nano texturing surface according to clai m 3, wherein, includes the steps of: SI: Slotting on the two sides of the substrate (I) to prepare slot A (2) and slot B (3), then setting the copper contact A (6) and copper contact B (7) on the bottom of slot A (2) and slo t B (3), and connected with the inner le ad A (8) and inner lead B (9) respectively; S2: Graphene A (40 1) is deposited on the upper surface of copper contact A (6) and slot A (2), while graphene B (501) is deposited on the upper surface of copper contact B (7) and slot B (3); Coating the sensitive electrode material layer (40 2) on the u pper surface o f graphene A (401), then processing micro-grooves or micro-pits on the surface of the sensitive electrode material layer (402) to prepare the working electrode (4); S3: Depositing the silver metal material layer (502) on the lower surface of the graphene B (501) and processing micro-grooves or micro-pits on the surface of silver metal material layer (502); Then chlorinating the lower surface of the silver metal material layer (502) with FeC 3 solution; The graphene powder was dispersed in deionized water, and then was dispersed by ultrasound to prepare the graphene oxide modified film, which was dripped on the lower surface of the silver metal material layer (502) through pipette; Dried at room temperature to prepare the reference electrode (5); Then the biomi m etic graphene-based pH sensor with micro/nano texturing surface is prepared.
The fabrication method of a biomimetic graphene-based pH sensor with micro/nano texturing surface according to claim 5, wherein, in step S2, the fabrication method of graphene film is micro mechanical peeling transfer method and the thickness of the graphene film is 5 -1 Onm.
The fabrication method of a biomimetic graphene- b ased pH sensor with micro/nano texturing surface according to claim 5, wherein, the fabrication method of sensitive electrode material layer (402) in step S₂ and silver metal material layer (502) in step S₃ can be electrochemical deposition or physical vapor deposition, or chemical vapor deposition.
The fabrication method of a biomimetic graphene-based p H sensor with micro/nano texturing surface according to claim 5, wherein, the method of processing micro-grooves or micro-pits in step S₂ and S₃ can be femtosecond laser processing, plasma etching, electrochemical etching, or acid-base corrosion.
The fabrication method of a biomimetic graphene-based pH sensor with micro/nano texturing surface according to claim 5, wherein, the preparation method of the graphene oxide modified film in step S₃ is sol-gel method, and the thickness of the graphene oxide modified film is 10-20 nm.
Embodiments described in the patent, grouped by the materials and process steps they use.
6 materials3 process steps
Fabrication of biomimetic graphene-based pH sensor. Substrate slotted to form slot A and slot B with copper contacts. Graphene A (5 nm thick) deposited by micro mechanical peeling transfer on copper contact A and slot A. Antimony sensitive electrode material layer deposited on graphene A by magnetron sputtering (vacuum 3×10⁻⁴ Pa, process pressure 1 Pa, power 50 W, argon shielding gas, flow 39 sccm, time 40 min). Femtosecond laser used to process micro-pits on sensitive electrode material layer surface (hole depth ~80 nm, hole diameter ~2 μm). Silver metal material layer deposited on lower surface of graphene B; micro-pits processed; chlorinated with FeCl₃ solution; graphene oxide modified film dripped via pipette and dried at room temperature to form reference electrode.
Layer stacks claimed or described, ordered top of device to substrate.
biomimetic graphene-based pH sensor with micro/nano texturing surface
Materials described outside the worked examples.
main-group metal or main-group metal oxide
Ruthenium or ruthenium oxide
Iridium or iridium oxide
Palladium or palladium oxide
Titanium or titanium oxide
Tantalum or tantalum oxide
Tin or tin oxide
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
apparent contact angle of nano-sized micro-grooves or micro-pits | ≤ 5 degrees | sensitive electrode material layerAg |
graphene film thickness (claimed range) | 5–10 nm | graphene Agraphene B |
graphene oxide modified film thickness (claimed range) | 10–20 nm | graphene oxide modified film |
graphene A film thickness in Embodiment 1 | 5 nm | graphene A |
micro-pit hole depth on sensitive electrode material layer (Embodiment 1) | 80 nm | Sb |
micro-pit hole diameter on sensitive electrode material layer (Embodiment 1) | 2 μm | Sb |
Related documents with shared materials, methods, properties, or citations.
Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a structure of the p 1-I sensor substrate.
FIG. 2 is a schematic of the biomimetic graphene-based p H sensor with micro/nano texturing surface. In these FIGURES, 1 is the substrate, 2 is the slot A, 3 …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A biomi m etic graphene-based pH sensor with micro/nano texturing surface, wherein, the pH sensor consists of substrate (1), slot A (2), slot B (3), working electrode (4), reference electrode (5), copper contact A (6), copper contact B (7), inner lead A (8), and inner lead B (9); The upper and lower surfaces of the substrate (1) are respectively provided with a slot A (2) and a slot B (3); The working electrode (4) and reference electrode (5) are located in the slot A (2) and slot B (3) respectively; The bottom of w orking electrode (4) is connected with the inner lead A (8) through the copper contact A (6), while the top of reference electrode (5) is connected with the inner lead B (9) through the copper contact B (7); The working electrode (4) includes graphene A (401) and sensitive electrode material layer (402); The sensitive electrode material layer is located on the upper layer of the graphene A (401); The reference electrode (5) includes graphene B (501) and silver metal material layer (502); The silver metal material layer (502) is located below the graphene B (501); The upper surface of sensitive electrode material layer (402) and the lo w er surface of silver metal material layer (502) are both provided w ith micro -grooves or micro-pits.
A biomi me tic graphene-based p H sensor with mi c ro/nano texturing surface according to claim 1, wherein, the micro-grooves or micro-pits are nano-sized and the apparent contact angle is less than 5.
A biomi rn etic graphene-based pH sensor with micro/nano t exturin g surface according to claim 1 or claim 2, wherein, the sensitive electrode material layer (402) is one kind of main-group metal or main-group metal oxide.
The fabrication method of a biomi m etic graphene-based p IT sensor with micro/nano texturing surface according to clai m 3, wherein, includes the steps of: SI: Slotting on the two sides of the substrate (I) to prepare slot A (2) and slot B (3), then setting the copper contact A (6) and copper contact B (7) on the bottom of slot A (2) and slo t B (3), and connected with the inner le ad A (8) and inner lead B (9) respectively; S2: Graphene A (40 1) is deposited on the upper surface of copper contact A (6) and slot A (2), while graphene B (501) is deposited on the upper surface of copper contact B (7) and slot B (3); Coating the sensitive electrode material layer (40 2) on the u pper surface o f graphene A (401), then processing micro-grooves or micro-pits on the surface of the sensitive electrode material layer (402) to prepare the working electrode (4); S3: Depositing the silver metal material layer (502) on the lower surface of the graphene B (501) and processing micro-grooves or micro-pits on the surface of silver metal material layer (502); Then chlorinating the lower surface of the silver metal material layer (502) with FeC 3 solution; The graphene powder was dispersed in deionized water, and then was dispersed by ultrasound to prepare the graphene oxide modified film, which was dripped on the lower surface of the silver metal material layer (502) through pipette; Dried at room temperature to prepare the reference electrode (5); Then the biomi m etic graphene-based pH sensor with micro/nano texturing surface is prepared.
The fabrication method of a biomimetic graphene-based pH sensor with micro/nano texturing surface according to claim 5, wherein, in step S2, the fabrication method of graphene film is micro mechanical peeling transfer method and the thickness of the graphene film is 5 -1 Onm.
The fabrication method of a biomimetic graphene- b ased pH sensor with micro/nano texturing surface according to claim 5, wherein, the fabrication method of sensitive electrode material layer (402) in step S₂ and silver metal material layer (502) in step S₃ can be electrochemical deposition or physical vapor deposition, or chemical vapor deposition.
The fabrication method of a biomimetic graphene-based p H sensor with micro/nano texturing surface according to claim 5, wherein, the method of processing micro-grooves or micro-pits in step S₂ and S₃ can be femtosecond laser processing, plasma etching, electrochemical etching, or acid-base corrosion.
The fabrication method of a biomimetic graphene-based pH sensor with micro/nano texturing surface according to claim 5, wherein, the preparation method of the graphene oxide modified film in step S₃ is sol-gel method, and the thickness of the graphene oxide modified film is 10-20 nm.
Embodiments described in the patent, grouped by the materials and process steps they use.
6 materials3 process steps
Fabrication of biomimetic graphene-based pH sensor. Substrate slotted to form slot A and slot B with copper contacts. Graphene A (5 nm thick) deposited by micro mechanical peeling transfer on copper contact A and slot A. Antimony sensitive electrode material layer deposited on graphene A by magnetron sputtering (vacuum 3×10⁻⁴ Pa, process pressure 1 Pa, power 50 W, argon shielding gas, flow 39 sccm, time 40 min). Femtosecond laser used to process micro-pits on sensitive electrode material layer surface (hole depth ~80 nm, hole diameter ~2 μm). Silver metal material layer deposited on lower surface of graphene B; micro-pits processed; chlorinated with FeCl₃ solution; graphene oxide modified film dripped via pipette and dried at room temperature to form reference electrode.
Layer stacks claimed or described, ordered top of device to substrate.
biomimetic graphene-based pH sensor with micro/nano texturing surface
Materials described outside the worked examples.
main-group metal or main-group metal oxide
Ruthenium or ruthenium oxide
Iridium or iridium oxide
Palladium or palladium oxide
Titanium or titanium oxide
Tantalum or tantalum oxide
Tin or tin oxide
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
apparent contact angle of nano-sized micro-grooves or micro-pits | ≤ 5 degrees | sensitive electrode material layerAg |
graphene film thickness (claimed range) | 5–10 nm | graphene Agraphene B |
graphene oxide modified film thickness (claimed range) | 10–20 nm | graphene oxide modified film |
graphene A film thickness in Embodiment 1 | 5 nm | graphene A |
micro-pit hole depth on sensitive electrode material layer (Embodiment 1) | 80 nm | Sb |
micro-pit hole diameter on sensitive electrode material layer (Embodiment 1) | 2 μm | Sb |
Related documents with shared materials, methods, properties, or citations.