Patent
US 8,465,661METHOD OF PROCESSING GRAPHENE SHEET MATERIAL AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
Koji Asano
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 8,465,661Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. The processing apparatus is the same as the processing apparatus illustrated in F IGs. 1 an d 2 except that the gas feed pipes 1 8 of the activation …
FIG. 2 is a diagrammatic sectional view illustrating a main part of the processing apparatus of a graphene sheet material according to the embodiment; [0015]
FIG. 3 is a diagrammatic sectional vie w illustrating a second example of the processing apparatus of the graphene sheet material according to the present …
FIG. 4 is a diagrammatic sectional v iew illustrating a processi n g apparatus of a graphene sheet material according to further another example of the …
FIG. 5C). In the drawing, the inactivated edge is indicated by the x marks. [0091] Whether the edge of the graphene sheet material layer 52 has been …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
. canceled
: [[The]] A method of processing a graphene sheet material a rg c omprising: irradiating UV ra y to a graphene sheet material in a first atmosphere containing a firs t substance to activate the first substance and inactivate an edge of the graphene sheet material b y the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
: The method of processing a graphene sheet material according to claim 2, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material.
: The method of processing a graphene sheet material according to claim 4, wherein in removing the graphene sheet, the edge of the graphene sheet material is protected by the functional group from the activated second substance.
: The method of processing a graphene sheet material according to claim 4, wherein the functional group is F-, CF₃-, CF₃CF₂-, (CF₃)2CH-, (CH₃)3C-, CH₃-, CH₃CH₂-, (CH₃)2CH-, or (CH₃)3C-.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide and groups containing their mixtures.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the first atmosphere contains the first substance diluted with an inactive gas.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the UV ray is a vacuum UV ray.
: The method of processing a graphene sheet material according to claim 9, wherein the vacuum UV ray is generated by a vacuum UV lamp using at least one kind of material selected from the group consisting of xenon, krypton, argon or krypton chloride.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the graphene sheet material is a laminate of graphene sheets or partially chemically modified graphene sheets.
. canceled
: [[The]] A method of manufacturing an electronic device aeeedgtoelaim12- hefcomprising: 4 Application No. 13/228,785 Docket No. 111153 irradiatin g UV ra y to a graphene sheet material in a first atmosphere containing a firs t substance to activate the first substance and inactivate an edge of the graphene sheet material b y the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
: The method of manufacturing an electronic device according to claim 13, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains.
: The method of manufacturing an electronic device according to claim [[12]] 13, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material.
: The method of manufacturing an electronic device according to claim 15, wherein the functional group is F-, CF₃-, CF₃CF₂-, (CF₃)2CH-, (CH₃)3C-, CH₃-, CH₃CH₂-, (CH₃)2CH-, or (CH₃)3C-.
: The method of manufacturing an electronic device according to claim 15, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide
: The method of manufacturing an electronic first atmosphere contains the first substance diluted
: The method of manufacturing an electronic UV ray is a vacuum UV ray.
: The method of manufacturing an electronic vacuum UV ray is generated by a vacuum UV lamp from the group consisting of xenon, krypton, argon and groups containing their mixtures. device according to claim [[12]] 13, wherein the with an inactive gas. device according to claim [[12]] 13, wherein the device according to claim [[12]] 13, wherein the using at least one kind of material selected or krypton chloride.
Materials described outside the worked examples.
graphene sheet material
second substance containing oxygen
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 5C). In the drawing, the inactivated edge is indicated by the x marks. [0091] Whether the edge of the graphene sheet material layer 52 has been …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 0.2–500 mm | — |
Thickness | ≥ 315 nm |
Patent
Atlas literature
Patent
US 8,465,661Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. The processing apparatus is the same as the processing apparatus illustrated in F IGs. 1 an d 2 except that the gas feed pipes 1 8 of the activation …
FIG. 2 is a diagrammatic sectional view illustrating a main part of the processing apparatus of a graphene sheet material according to the embodiment; [0015]
FIG. 3 is a diagrammatic sectional vie w illustrating a second example of the processing apparatus of the graphene sheet material according to the present …
FIG. 4 is a diagrammatic sectional v iew illustrating a processi n g apparatus of a graphene sheet material according to further another example of the …
FIG. 5C). In the drawing, the inactivated edge is indicated by the x marks. [0091] Whether the edge of the graphene sheet material layer 52 has been …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
. canceled
: [[The]] A method of processing a graphene sheet material a rg c omprising: irradiating UV ra y to a graphene sheet material in a first atmosphere containing a firs t substance to activate the first substance and inactivate an edge of the graphene sheet material b y the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
: The method of processing a graphene sheet material according to claim 2, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material.
: The method of processing a graphene sheet material according to claim 4, wherein in removing the graphene sheet, the edge of the graphene sheet material is protected by the functional group from the activated second substance.
: The method of processing a graphene sheet material according to claim 4, wherein the functional group is F-, CF₃-, CF₃CF₂-, (CF₃)2CH-, (CH₃)3C-, CH₃-, CH₃CH₂-, (CH₃)2CH-, or (CH₃)3C-.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide and groups containing their mixtures.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the first atmosphere contains the first substance diluted with an inactive gas.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the UV ray is a vacuum UV ray.
: The method of processing a graphene sheet material according to claim 9, wherein the vacuum UV ray is generated by a vacuum UV lamp using at least one kind of material selected from the group consisting of xenon, krypton, argon or krypton chloride.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the graphene sheet material is a laminate of graphene sheets or partially chemically modified graphene sheets.
. canceled
: [[The]] A method of manufacturing an electronic device aeeedgtoelaim12- hefcomprising: 4 Application No. 13/228,785 Docket No. 111153 irradiatin g UV ra y to a graphene sheet material in a first atmosphere containing a firs t substance to activate the first substance and inactivate an edge of the graphene sheet material b y the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
: The method of manufacturing an electronic device according to claim 13, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains.
: The method of manufacturing an electronic device according to claim [[12]] 13, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material.
: The method of manufacturing an electronic device according to claim 15, wherein the functional group is F-, CF₃-, CF₃CF₂-, (CF₃)2CH-, (CH₃)3C-, CH₃-, CH₃CH₂-, (CH₃)2CH-, or (CH₃)3C-.
: The method of manufacturing an electronic device according to claim 15, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide
: The method of manufacturing an electronic first atmosphere contains the first substance diluted
: The method of manufacturing an electronic UV ray is a vacuum UV ray.
: The method of manufacturing an electronic vacuum UV ray is generated by a vacuum UV lamp from the group consisting of xenon, krypton, argon and groups containing their mixtures. device according to claim [[12]] 13, wherein the with an inactive gas. device according to claim [[12]] 13, wherein the device according to claim [[12]] 13, wherein the using at least one kind of material selected or krypton chloride.
Materials described outside the worked examples.
graphene sheet material
second substance containing oxygen
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 5C). In the drawing, the inactivated edge is indicated by the x marks. [0091] Whether the edge of the graphene sheet material layer 52 has been …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 0.2–500 mm | — |
Thickness | ≥ 315 nm |
Patent
Atlas literature
Patent
US 8,465,661Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. The processing apparatus is the same as the processing apparatus illustrated in F IGs. 1 an d 2 except that the gas feed pipes 1 8 of the activation …
FIG. 2 is a diagrammatic sectional view illustrating a main part of the processing apparatus of a graphene sheet material according to the embodiment; [0015]
FIG. 3 is a diagrammatic sectional vie w illustrating a second example of the processing apparatus of the graphene sheet material according to the present …
FIG. 4 is a diagrammatic sectional v iew illustrating a processi n g apparatus of a graphene sheet material according to further another example of the …
FIG. 5C). In the drawing, the inactivated edge is indicated by the x marks. [0091] Whether the edge of the graphene sheet material layer 52 has been …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
. canceled
: [[The]] A method of processing a graphene sheet material a rg c omprising: irradiating UV ra y to a graphene sheet material in a first atmosphere containing a firs t substance to activate the first substance and inactivate an edge of the graphene sheet material b y the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
: The method of processing a graphene sheet material according to claim 2, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material.
: The method of processing a graphene sheet material according to claim 4, wherein in removing the graphene sheet, the edge of the graphene sheet material is protected by the functional group from the activated second substance.
: The method of processing a graphene sheet material according to claim 4, wherein the functional group is F-, CF₃-, CF₃CF₂-, (CF₃)2CH-, (CH₃)3C-, CH₃-, CH₃CH₂-, (CH₃)2CH-, or (CH₃)3C-.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide and groups containing their mixtures.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the first atmosphere contains the first substance diluted with an inactive gas.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the UV ray is a vacuum UV ray.
: The method of processing a graphene sheet material according to claim 9, wherein the vacuum UV ray is generated by a vacuum UV lamp using at least one kind of material selected from the group consisting of xenon, krypton, argon or krypton chloride.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the graphene sheet material is a laminate of graphene sheets or partially chemically modified graphene sheets.
. canceled
: [[The]] A method of manufacturing an electronic device aeeedgtoelaim12- hefcomprising: 4 Application No. 13/228,785 Docket No. 111153 irradiatin g UV ra y to a graphene sheet material in a first atmosphere containing a firs t substance to activate the first substance and inactivate an edge of the graphene sheet material b y the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
: The method of manufacturing an electronic device according to claim 13, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains.
: The method of manufacturing an electronic device according to claim [[12]] 13, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material.
: The method of manufacturing an electronic device according to claim 15, wherein the functional group is F-, CF₃-, CF₃CF₂-, (CF₃)2CH-, (CH₃)3C-, CH₃-, CH₃CH₂-, (CH₃)2CH-, or (CH₃)3C-.
: The method of manufacturing an electronic device according to claim 15, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide
: The method of manufacturing an electronic first atmosphere contains the first substance diluted
: The method of manufacturing an electronic UV ray is a vacuum UV ray.
: The method of manufacturing an electronic vacuum UV ray is generated by a vacuum UV lamp from the group consisting of xenon, krypton, argon and groups containing their mixtures. device according to claim [[12]] 13, wherein the with an inactive gas. device according to claim [[12]] 13, wherein the device according to claim [[12]] 13, wherein the using at least one kind of material selected or krypton chloride.
Materials described outside the worked examples.
graphene sheet material
second substance containing oxygen
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 5C). In the drawing, the inactivated edge is indicated by the x marks. [0091] Whether the edge of the graphene sheet material layer 52 has been …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 0.2–500 mm | — |
Thickness | ≥ 315 nm |
Patent
Atlas literature
Patent
US 8,465,661Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. The processing apparatus is the same as the processing apparatus illustrated in F IGs. 1 an d 2 except that the gas feed pipes 1 8 of the activation …
FIG. 2 is a diagrammatic sectional view illustrating a main part of the processing apparatus of a graphene sheet material according to the embodiment; [0015]
FIG. 3 is a diagrammatic sectional vie w illustrating a second example of the processing apparatus of the graphene sheet material according to the present …
FIG. 4 is a diagrammatic sectional v iew illustrating a processi n g apparatus of a graphene sheet material according to further another example of the …
FIG. 5C). In the drawing, the inactivated edge is indicated by the x marks. [0091] Whether the edge of the graphene sheet material layer 52 has been …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
. canceled
: [[The]] A method of processing a graphene sheet material a rg c omprising: irradiating UV ra y to a graphene sheet material in a first atmosphere containing a firs t substance to activate the first substance and inactivate an edge of the graphene sheet material b y the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
: The method of processing a graphene sheet material according to claim 2, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material.
: The method of processing a graphene sheet material according to claim 4, wherein in removing the graphene sheet, the edge of the graphene sheet material is protected by the functional group from the activated second substance.
: The method of processing a graphene sheet material according to claim 4, wherein the functional group is F-, CF₃-, CF₃CF₂-, (CF₃)2CH-, (CH₃)3C-, CH₃-, CH₃CH₂-, (CH₃)2CH-, or (CH₃)3C-.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide and groups containing their mixtures.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the first atmosphere contains the first substance diluted with an inactive gas.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the UV ray is a vacuum UV ray.
: The method of processing a graphene sheet material according to claim 9, wherein the vacuum UV ray is generated by a vacuum UV lamp using at least one kind of material selected from the group consisting of xenon, krypton, argon or krypton chloride.
: The method of processing a graphene sheet material according to claim [[1]] 2, wherein the graphene sheet material is a laminate of graphene sheets or partially chemically modified graphene sheets.
. canceled
: [[The]] A method of manufacturing an electronic device aeeedgtoelaim12- hefcomprising: 4 Application No. 13/228,785 Docket No. 111153 irradiatin g UV ra y to a graphene sheet material in a first atmosphere containing a firs t substance to activate the first substance and inactivate an edge of the graphene sheet material b y the activated first substance; and irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
: The method of manufacturing an electronic device according to claim 13, further comprising: measuring a layer number of the graphene sheet contained in the graphene sheet material, wherein in removing the graphene sheet, the graphene sheet is so removed that a prescribed layer number of the graphene sheet remains.
: The method of manufacturing an electronic device according to claim [[12]] 13, wherein in inactivating the edge of the graphene sheet material, an end group bonded to the edge of the graphene sheet material is substituted with more stable functional group produced from the first substance to thereby inactivate the edge of the graphene sheet material.
: The method of manufacturing an electronic device according to claim 15, wherein the functional group is F-, CF₃-, CF₃CF₂-, (CF₃)2CH-, (CH₃)3C-, CH₃-, CH₃CH₂-, (CH₃)2CH-, or (CH₃)3C-.
: The method of manufacturing an electronic device according to claim 15, wherein the first substance contains at least one substance selected from the group consisting of saturated hydrocarbon, aromatic hydrocarbon, alkyl halide
: The method of manufacturing an electronic first atmosphere contains the first substance diluted
: The method of manufacturing an electronic UV ray is a vacuum UV ray.
: The method of manufacturing an electronic vacuum UV ray is generated by a vacuum UV lamp from the group consisting of xenon, krypton, argon and groups containing their mixtures. device according to claim [[12]] 13, wherein the with an inactive gas. device according to claim [[12]] 13, wherein the device according to claim [[12]] 13, wherein the using at least one kind of material selected or krypton chloride.
Materials described outside the worked examples.
graphene sheet material
second substance containing oxygen
Additional fabrication and treatment steps described in the patent.
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 5C). In the drawing, the inactivated edge is indicated by the x marks. [0091] Whether the edge of the graphene sheet material layer 52 has been …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
Thickness | 0.2–500 mm | — |
Thickness | ≥ 315 nm |
edge-inactivating functional group
first substance (saturated hydrocarbon, aromatic hydrocarbon, or alkyl halide)
graphene sheet material (laminate of graphene sheets or partially chemically modified graphene sheets)
saturated hydrocarbon (methane, ethane, propane, n-butane, isobutane, n-pentane, isopentane, neopentane, or derivatives)
aromatic hydrocarbon (benzene, toluene, xylene, ethylbenzene, or derivatives)
| — |
Thickness | ≥ 400 nm | — |
Thickness | ≥ 200 nm | — |
edge-inactivating functional group
first substance (saturated hydrocarbon, aromatic hydrocarbon, or alkyl halide)
graphene sheet material (laminate of graphene sheets or partially chemically modified graphene sheets)
saturated hydrocarbon (methane, ethane, propane, n-butane, isobutane, n-pentane, isopentane, neopentane, or derivatives)
aromatic hydrocarbon (benzene, toluene, xylene, ethylbenzene, or derivatives)
| — |
Thickness | ≥ 400 nm | — |
Thickness | ≥ 200 nm | — |
edge-inactivating functional group
first substance (saturated hydrocarbon, aromatic hydrocarbon, or alkyl halide)
graphene sheet material (laminate of graphene sheets or partially chemically modified graphene sheets)
saturated hydrocarbon (methane, ethane, propane, n-butane, isobutane, n-pentane, isopentane, neopentane, or derivatives)
aromatic hydrocarbon (benzene, toluene, xylene, ethylbenzene, or derivatives)
| — |
Thickness | ≥ 400 nm | — |
Thickness | ≥ 200 nm | — |
edge-inactivating functional group
first substance (saturated hydrocarbon, aromatic hydrocarbon, or alkyl halide)
graphene sheet material (laminate of graphene sheets or partially chemically modified graphene sheets)
saturated hydrocarbon (methane, ethane, propane, n-butane, isobutane, n-pentane, isopentane, neopentane, or derivatives)
aromatic hydrocarbon (benzene, toluene, xylene, ethylbenzene, or derivatives)
| — |
Thickness | ≥ 400 nm | — |
Thickness | ≥ 200 nm | — |