Patent
US 10,379,442METHOD OF MANUFACTURING GRAPHENE FILM AND GRAPHENE FILM MANUFACTURED THEREBY
Duck-Hwa NA
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 10,379,442Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic perspective view of graphene used in the present invention. [35] The term graphene used in the present specification denotes layer or …
FIGS. 2 through 10 illustrate that the catalyst metal 101, the cover film 140, and the target film 130 used to manufacture the graphene film are discontinuous …
FIG. 3, a process for forming graphene 110 is performed. [45] When the catalyst metal 101 is carried into a chamber, a carbon supply source in a gas phase is …
FIG. 4 in the electrolytic solution 2 perpen- dicularly to the liquid surface 2a, the graphene 110 and the support layer 120 are isolated at the liquid surface …
FIG. 5) is referred to as a photosensitive support layer 121 Hereinafter, differences from the previous embodiment are described. [77] The graphene 110 and the …
FIG. 7 may be manufactured as a graphene film through the same processes, and according to the embodiments of the present invention, the graphene 110 grown on …
FIG. 8, a doping process of the graphene 110 is performed. The doping may be performed in order to improve electric characteristics of the graphene 110 of the …
FIG. 9, a cover film 140 is attached onto the graphene 110. The cover film 140 protects the graphene 110 on which the doping material layer 111 is formed, and …
FIG. 10, a target film 130 is attached onto the support layer 120 [69] The target film 130 may be at least one of PET, polyimide (P I), polydimethyl- siloxane …
FIGS. 11 through 14 are side sectional views illustrating a method of manufacturing a graphene film, according to another embodiment of the present invention. …
FIG. 12, a photosensitive support layer pattern 121a is formed through exposure and developing processes by using a mask in which a pattern is formed. Since …
FIG. 13 to form a third graphene film 14 including the graphene pattern 110a. [83] After that, the doping process, the cover film forming process, the additional …
FIG. 14, the photosensitive support layer pattern 121a is removed 10 WO 2014/126298 PCT/K R₂₀₁₃/003615 from a stacked body 13 of
FIGS. 15 and 16 are side sectional views illustrating a method of manufacturing a graphene film, according to another embodiment of the present invention. Best …
FIG. 16, the tape 122 is removed to fabricate a fourth graphene film 16 consisting of the graphene 110 and the target film 130 [92] If the thermal release tape …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method of manufacturing a graphene film, the method comprising: preparing a catalyst metal having at least a surface on which graphene is formed; forming a support layer on the graphene; and isolating the graphene and the support layer from the catalyst metal by dipping a stacked body comprising the catalyst metal, the graphene and the support la y er in an electrolytic solution perpendicularly to a liquid surface of the electrolytic solution when a voltage is applied to the catalyst metal of the stacked body, wherein the electrolytic solution comprises a surfactant, and wherein the forming the support la y er is performed by coating the graphene with a support la y er forming material in a li q uid phase. Currently amended
: The method of claim 1, wherein the electrolytic solution contains sodium or a hydroxyl group (--OH). Original
: The method of claim 1, wherein the electrolytic solution comprises at least one of sodium hydroxide (Na O H), sodium carbonate (Na 2 CO 3), sodium phosphate (Na 3 PO 4), sodium silicate (Na 2 SiO 3), potassium hydroxide (KOH), calcium hydroxide (Ca(OH) 2), barium hydroxide (Ba(OH) 2), and magnesium hydroxide (Mg(OH) 2). Original
: The method of claim 1, wherein the support layer forming material comprises a photosensitive material. Original
: The method of claim 1, wherein the forming of the support layer is performed by attaching a tape to the graphene. Original
: The method of claim 1, wherein when the stacked b od is dipped in the electrolytic solution perpendicularly to the liquid surface of the electrolytic solution, the graphene and the support layer are isolated at the liquid surface and float on the liquid surface. Currently amended
: The method of claim 1, wherein a thickness of the support layer is about 1 pm to about pm. New
. Canceled
. Canceled
: A graphene film manufactured by a method comprising: forming a graphene film comprising graphene and a support layer on at least one surface of a catalyst metal; and isolating the graphene film from the catalyst metal by dipping a stacked body comprising the catalyst metal, the graphene and the support la y er in an electrolytic solution perpendicularly to a liquid surface of the electrolytic solution when a voltage is applied to the catalyst metal of the stacked body, wherein the electrolytic solution comprises a surfactant, and wherein the forming the support la y er is performed by coating the graphene with a support la y er forming material in a li q uid phase. Currently amended
: The graphene film of claim 13, further comprising a target film formed on the support layer. Original
: The graphene film of claim 13, wherein the graphene further comprises a doping material, and the graphene film further comprises a cover film formed on the graphene. Original
: The graphene film of claim 13, wherein the electrolytic solution contains sodium or a hydroxyl group (--OH). Original
: The graphene film of claim 13, wherein a thickness of the support layer is about 1 p m to about 60 pm. New
Layer stacks claimed or described, ordered top of device to substrate.
graphene film
Materials described outside the worked examples.
graphene
support layer
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 16, the tape 122 is removed to fabricate a fourth graphene film 16 consisting of the graphene 110 and the target film 130 [92] If the thermal release tape …
Patent
Atlas literature
Patent
US 10,379,442Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic perspective view of graphene used in the present invention. [35] The term graphene used in the present specification denotes layer or …
FIGS. 2 through 10 illustrate that the catalyst metal 101, the cover film 140, and the target film 130 used to manufacture the graphene film are discontinuous …
FIG. 3, a process for forming graphene 110 is performed. [45] When the catalyst metal 101 is carried into a chamber, a carbon supply source in a gas phase is …
FIG. 4 in the electrolytic solution 2 perpen- dicularly to the liquid surface 2a, the graphene 110 and the support layer 120 are isolated at the liquid surface …
FIG. 5) is referred to as a photosensitive support layer 121 Hereinafter, differences from the previous embodiment are described. [77] The graphene 110 and the …
FIG. 7 may be manufactured as a graphene film through the same processes, and according to the embodiments of the present invention, the graphene 110 grown on …
FIG. 8, a doping process of the graphene 110 is performed. The doping may be performed in order to improve electric characteristics of the graphene 110 of the …
FIG. 9, a cover film 140 is attached onto the graphene 110. The cover film 140 protects the graphene 110 on which the doping material layer 111 is formed, and …
FIG. 10, a target film 130 is attached onto the support layer 120 [69] The target film 130 may be at least one of PET, polyimide (P I), polydimethyl- siloxane …
FIGS. 11 through 14 are side sectional views illustrating a method of manufacturing a graphene film, according to another embodiment of the present invention. …
FIG. 12, a photosensitive support layer pattern 121a is formed through exposure and developing processes by using a mask in which a pattern is formed. Since …
FIG. 13 to form a third graphene film 14 including the graphene pattern 110a. [83] After that, the doping process, the cover film forming process, the additional …
FIG. 14, the photosensitive support layer pattern 121a is removed 10 WO 2014/126298 PCT/K R₂₀₁₃/003615 from a stacked body 13 of
FIGS. 15 and 16 are side sectional views illustrating a method of manufacturing a graphene film, according to another embodiment of the present invention. Best …
FIG. 16, the tape 122 is removed to fabricate a fourth graphene film 16 consisting of the graphene 110 and the target film 130 [92] If the thermal release tape …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method of manufacturing a graphene film, the method comprising: preparing a catalyst metal having at least a surface on which graphene is formed; forming a support layer on the graphene; and isolating the graphene and the support layer from the catalyst metal by dipping a stacked body comprising the catalyst metal, the graphene and the support la y er in an electrolytic solution perpendicularly to a liquid surface of the electrolytic solution when a voltage is applied to the catalyst metal of the stacked body, wherein the electrolytic solution comprises a surfactant, and wherein the forming the support la y er is performed by coating the graphene with a support la y er forming material in a li q uid phase. Currently amended
: The method of claim 1, wherein the electrolytic solution contains sodium or a hydroxyl group (--OH). Original
: The method of claim 1, wherein the electrolytic solution comprises at least one of sodium hydroxide (Na O H), sodium carbonate (Na 2 CO 3), sodium phosphate (Na 3 PO 4), sodium silicate (Na 2 SiO 3), potassium hydroxide (KOH), calcium hydroxide (Ca(OH) 2), barium hydroxide (Ba(OH) 2), and magnesium hydroxide (Mg(OH) 2). Original
: The method of claim 1, wherein the support layer forming material comprises a photosensitive material. Original
: The method of claim 1, wherein the forming of the support layer is performed by attaching a tape to the graphene. Original
: The method of claim 1, wherein when the stacked b od is dipped in the electrolytic solution perpendicularly to the liquid surface of the electrolytic solution, the graphene and the support layer are isolated at the liquid surface and float on the liquid surface. Currently amended
: The method of claim 1, wherein a thickness of the support layer is about 1 pm to about pm. New
. Canceled
. Canceled
: A graphene film manufactured by a method comprising: forming a graphene film comprising graphene and a support layer on at least one surface of a catalyst metal; and isolating the graphene film from the catalyst metal by dipping a stacked body comprising the catalyst metal, the graphene and the support la y er in an electrolytic solution perpendicularly to a liquid surface of the electrolytic solution when a voltage is applied to the catalyst metal of the stacked body, wherein the electrolytic solution comprises a surfactant, and wherein the forming the support la y er is performed by coating the graphene with a support la y er forming material in a li q uid phase. Currently amended
: The graphene film of claim 13, further comprising a target film formed on the support layer. Original
: The graphene film of claim 13, wherein the graphene further comprises a doping material, and the graphene film further comprises a cover film formed on the graphene. Original
: The graphene film of claim 13, wherein the electrolytic solution contains sodium or a hydroxyl group (--OH). Original
: The graphene film of claim 13, wherein a thickness of the support layer is about 1 p m to about 60 pm. New
Layer stacks claimed or described, ordered top of device to substrate.
graphene film
Materials described outside the worked examples.
graphene
support layer
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 16, the tape 122 is removed to fabricate a fourth graphene film 16 consisting of the graphene 110 and the target film 130 [92] If the thermal release tape …
Patent
Atlas literature
Patent
US 10,379,442Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic perspective view of graphene used in the present invention. [35] The term graphene used in the present specification denotes layer or …
FIGS. 2 through 10 illustrate that the catalyst metal 101, the cover film 140, and the target film 130 used to manufacture the graphene film are discontinuous …
FIG. 3, a process for forming graphene 110 is performed. [45] When the catalyst metal 101 is carried into a chamber, a carbon supply source in a gas phase is …
FIG. 4 in the electrolytic solution 2 perpen- dicularly to the liquid surface 2a, the graphene 110 and the support layer 120 are isolated at the liquid surface …
FIG. 5) is referred to as a photosensitive support layer 121 Hereinafter, differences from the previous embodiment are described. [77] The graphene 110 and the …
FIG. 7 may be manufactured as a graphene film through the same processes, and according to the embodiments of the present invention, the graphene 110 grown on …
FIG. 8, a doping process of the graphene 110 is performed. The doping may be performed in order to improve electric characteristics of the graphene 110 of the …
FIG. 9, a cover film 140 is attached onto the graphene 110. The cover film 140 protects the graphene 110 on which the doping material layer 111 is formed, and …
FIG. 10, a target film 130 is attached onto the support layer 120 [69] The target film 130 may be at least one of PET, polyimide (P I), polydimethyl- siloxane …
FIGS. 11 through 14 are side sectional views illustrating a method of manufacturing a graphene film, according to another embodiment of the present invention. …
FIG. 12, a photosensitive support layer pattern 121a is formed through exposure and developing processes by using a mask in which a pattern is formed. Since …
FIG. 13 to form a third graphene film 14 including the graphene pattern 110a. [83] After that, the doping process, the cover film forming process, the additional …
FIG. 14, the photosensitive support layer pattern 121a is removed 10 WO 2014/126298 PCT/K R₂₀₁₃/003615 from a stacked body 13 of
FIGS. 15 and 16 are side sectional views illustrating a method of manufacturing a graphene film, according to another embodiment of the present invention. Best …
FIG. 16, the tape 122 is removed to fabricate a fourth graphene film 16 consisting of the graphene 110 and the target film 130 [92] If the thermal release tape …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method of manufacturing a graphene film, the method comprising: preparing a catalyst metal having at least a surface on which graphene is formed; forming a support layer on the graphene; and isolating the graphene and the support layer from the catalyst metal by dipping a stacked body comprising the catalyst metal, the graphene and the support la y er in an electrolytic solution perpendicularly to a liquid surface of the electrolytic solution when a voltage is applied to the catalyst metal of the stacked body, wherein the electrolytic solution comprises a surfactant, and wherein the forming the support la y er is performed by coating the graphene with a support la y er forming material in a li q uid phase. Currently amended
: The method of claim 1, wherein the electrolytic solution contains sodium or a hydroxyl group (--OH). Original
: The method of claim 1, wherein the electrolytic solution comprises at least one of sodium hydroxide (Na O H), sodium carbonate (Na 2 CO 3), sodium phosphate (Na 3 PO 4), sodium silicate (Na 2 SiO 3), potassium hydroxide (KOH), calcium hydroxide (Ca(OH) 2), barium hydroxide (Ba(OH) 2), and magnesium hydroxide (Mg(OH) 2). Original
: The method of claim 1, wherein the support layer forming material comprises a photosensitive material. Original
: The method of claim 1, wherein the forming of the support layer is performed by attaching a tape to the graphene. Original
: The method of claim 1, wherein when the stacked b od is dipped in the electrolytic solution perpendicularly to the liquid surface of the electrolytic solution, the graphene and the support layer are isolated at the liquid surface and float on the liquid surface. Currently amended
: The method of claim 1, wherein a thickness of the support layer is about 1 pm to about pm. New
. Canceled
. Canceled
: A graphene film manufactured by a method comprising: forming a graphene film comprising graphene and a support layer on at least one surface of a catalyst metal; and isolating the graphene film from the catalyst metal by dipping a stacked body comprising the catalyst metal, the graphene and the support la y er in an electrolytic solution perpendicularly to a liquid surface of the electrolytic solution when a voltage is applied to the catalyst metal of the stacked body, wherein the electrolytic solution comprises a surfactant, and wherein the forming the support la y er is performed by coating the graphene with a support la y er forming material in a li q uid phase. Currently amended
: The graphene film of claim 13, further comprising a target film formed on the support layer. Original
: The graphene film of claim 13, wherein the graphene further comprises a doping material, and the graphene film further comprises a cover film formed on the graphene. Original
: The graphene film of claim 13, wherein the electrolytic solution contains sodium or a hydroxyl group (--OH). Original
: The graphene film of claim 13, wherein a thickness of the support layer is about 1 p m to about 60 pm. New
Layer stacks claimed or described, ordered top of device to substrate.
graphene film
Materials described outside the worked examples.
graphene
support layer
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 16, the tape 122 is removed to fabricate a fourth graphene film 16 consisting of the graphene 110 and the target film 130 [92] If the thermal release tape …
Patent
Atlas literature
Patent
US 10,379,442Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a schematic perspective view of graphene used in the present invention. [35] The term graphene used in the present specification denotes layer or …
FIGS. 2 through 10 illustrate that the catalyst metal 101, the cover film 140, and the target film 130 used to manufacture the graphene film are discontinuous …
FIG. 3, a process for forming graphene 110 is performed. [45] When the catalyst metal 101 is carried into a chamber, a carbon supply source in a gas phase is …
FIG. 4 in the electrolytic solution 2 perpen- dicularly to the liquid surface 2a, the graphene 110 and the support layer 120 are isolated at the liquid surface …
FIG. 5) is referred to as a photosensitive support layer 121 Hereinafter, differences from the previous embodiment are described. [77] The graphene 110 and the …
FIG. 7 may be manufactured as a graphene film through the same processes, and according to the embodiments of the present invention, the graphene 110 grown on …
FIG. 8, a doping process of the graphene 110 is performed. The doping may be performed in order to improve electric characteristics of the graphene 110 of the …
FIG. 9, a cover film 140 is attached onto the graphene 110. The cover film 140 protects the graphene 110 on which the doping material layer 111 is formed, and …
FIG. 10, a target film 130 is attached onto the support layer 120 [69] The target film 130 may be at least one of PET, polyimide (P I), polydimethyl- siloxane …
FIGS. 11 through 14 are side sectional views illustrating a method of manufacturing a graphene film, according to another embodiment of the present invention. …
FIG. 12, a photosensitive support layer pattern 121a is formed through exposure and developing processes by using a mask in which a pattern is formed. Since …
FIG. 13 to form a third graphene film 14 including the graphene pattern 110a. [83] After that, the doping process, the cover film forming process, the additional …
FIG. 14, the photosensitive support layer pattern 121a is removed 10 WO 2014/126298 PCT/K R₂₀₁₃/003615 from a stacked body 13 of
FIGS. 15 and 16 are side sectional views illustrating a method of manufacturing a graphene film, according to another embodiment of the present invention. Best …
FIG. 16, the tape 122 is removed to fabricate a fourth graphene film 16 consisting of the graphene 110 and the target film 130 [92] If the thermal release tape …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
: A method of manufacturing a graphene film, the method comprising: preparing a catalyst metal having at least a surface on which graphene is formed; forming a support layer on the graphene; and isolating the graphene and the support layer from the catalyst metal by dipping a stacked body comprising the catalyst metal, the graphene and the support la y er in an electrolytic solution perpendicularly to a liquid surface of the electrolytic solution when a voltage is applied to the catalyst metal of the stacked body, wherein the electrolytic solution comprises a surfactant, and wherein the forming the support la y er is performed by coating the graphene with a support la y er forming material in a li q uid phase. Currently amended
: The method of claim 1, wherein the electrolytic solution contains sodium or a hydroxyl group (--OH). Original
: The method of claim 1, wherein the electrolytic solution comprises at least one of sodium hydroxide (Na O H), sodium carbonate (Na 2 CO 3), sodium phosphate (Na 3 PO 4), sodium silicate (Na 2 SiO 3), potassium hydroxide (KOH), calcium hydroxide (Ca(OH) 2), barium hydroxide (Ba(OH) 2), and magnesium hydroxide (Mg(OH) 2). Original
: The method of claim 1, wherein the support layer forming material comprises a photosensitive material. Original
: The method of claim 1, wherein the forming of the support layer is performed by attaching a tape to the graphene. Original
: The method of claim 1, wherein when the stacked b od is dipped in the electrolytic solution perpendicularly to the liquid surface of the electrolytic solution, the graphene and the support layer are isolated at the liquid surface and float on the liquid surface. Currently amended
: The method of claim 1, wherein a thickness of the support layer is about 1 pm to about pm. New
. Canceled
. Canceled
: A graphene film manufactured by a method comprising: forming a graphene film comprising graphene and a support layer on at least one surface of a catalyst metal; and isolating the graphene film from the catalyst metal by dipping a stacked body comprising the catalyst metal, the graphene and the support la y er in an electrolytic solution perpendicularly to a liquid surface of the electrolytic solution when a voltage is applied to the catalyst metal of the stacked body, wherein the electrolytic solution comprises a surfactant, and wherein the forming the support la y er is performed by coating the graphene with a support la y er forming material in a li q uid phase. Currently amended
: The graphene film of claim 13, further comprising a target film formed on the support layer. Original
: The graphene film of claim 13, wherein the graphene further comprises a doping material, and the graphene film further comprises a cover film formed on the graphene. Original
: The graphene film of claim 13, wherein the electrolytic solution contains sodium or a hydroxyl group (--OH). Original
: The graphene film of claim 13, wherein a thickness of the support layer is about 1 p m to about 60 pm. New
Layer stacks claimed or described, ordered top of device to substrate.
graphene film
Materials described outside the worked examples.
graphene
support layer
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 16, the tape 122 is removed to fabricate a fourth graphene film 16 consisting of the graphene 110 and the target film 130 [92] If the thermal release tape …
electrolytic solution with surfactant
sodium hydroxide
NaOH
sodium carbonate
Na₂CO₃
sodium phosphate
Na₃PO₄
sodium silicate
Na₂SiO₃
potassium hydroxide
KOH
calcium hydroxide
Ca(OH)2
barium hydroxide
Ba(OH)2
magnesium hydroxide
Mg(OH)2
photosensitive material
tape
polycarbonate
polyimide
polyvinylidene fluoride
PVDF
polyethylene terephthalate
PET
catalyst metal
electrolytic solution with surfactant
sodium hydroxide
NaOH
sodium carbonate
Na₂CO₃
sodium phosphate
Na₃PO₄
sodium silicate
Na₂SiO₃
potassium hydroxide
KOH
calcium hydroxide
Ca(OH)2
barium hydroxide
Ba(OH)2
magnesium hydroxide
Mg(OH)2
photosensitive material
tape
polycarbonate
polyimide
polyvinylidene fluoride
PVDF
polyethylene terephthalate
PET
catalyst metal
electrolytic solution with surfactant
sodium hydroxide
NaOH
sodium carbonate
Na₂CO₃
sodium phosphate
Na₃PO₄
sodium silicate
Na₂SiO₃
potassium hydroxide
KOH
calcium hydroxide
Ca(OH)2
barium hydroxide
Ba(OH)2
magnesium hydroxide
Mg(OH)2
photosensitive material
tape
polycarbonate
polyimide
polyvinylidene fluoride
PVDF
polyethylene terephthalate
PET
catalyst metal
electrolytic solution with surfactant
sodium hydroxide
NaOH
sodium carbonate
Na₂CO₃
sodium phosphate
Na₃PO₄
sodium silicate
Na₂SiO₃
potassium hydroxide
KOH
calcium hydroxide
Ca(OH)2
barium hydroxide
Ba(OH)2
magnesium hydroxide
Mg(OH)2
photosensitive material
tape
polycarbonate
polyimide
polyvinylidene fluoride
PVDF
polyethylene terephthalate
PET
catalyst metal