Patent
US 10,661,542METHOD FOR TRANSFERRING GRAPHENE
Yong Ki KIM
US
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Patent
Atlas literature
Patent
US 10,661,542Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. That is, even when the PVC film is used instead of the thermal release film 155 shown in
FIG. 2. According to the exemplary embodiment of the present invention, the metal sheet 151 is etched and removed, and the thermal release film 155 of which the …
FIG. 3 is a schematic diagram of an inlet roller of
FIG. 4 is a schematic diagram of a roller seal used in the graphene transfer process according to the exemplary embodiment of the present invention. [Best Mode …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for transferring graphene comprising: passing a metal sheet having graphene on one surface and a first protective film on the graphene and a transfer receiving sheet having a second protective film on one surface, through respective inlet rollers in an inlet of a vacuum chamber providing a vacuum atmosphere, to remove the first protective film and the second protective film, conveying the metal sheet and the transfer receiving sheet to an outlet of a-the vacuum chamber t adhering and transferring the graphene to the one surface of the transfer receiving sheet by contacting the one surface of the transfer receiving sheet with the graphene of the metal sheet by outlet rollers in the outlet of the vacuum chamber, discharging the graphene to the outlet of the vacuum chamber; and removing the metal sheet from the transfer receiving sheet by passing the metal sheet, the metal sheet being bonded to the transfer receiving sheet having the adhered graphene, through an etching solution; wherein at least one of heat and pressure is applied to the transferring of the graphene onto the transfer receiving sheet, a base material film to which the graphene is directly transferred through thermocompression is used as the transfer receiving sheet, the metal sheet having the graphene, and the transfer receiving sheet, are provided in a roll form, the first protective film of the metal sheet and the second protective film of the transfer receiving sheet are separated from each other while passing through separation inlet rollers to be discharged to an inlet side of the vacuum chamber, the vacuum chamber is a first vacuum chamber, and a thermal release film is used as the transfer receiving sheet, the method further comprising: supplying the thermal release film with the adhered graphene and the base material film, the base material film to have the graphene adhered thereto, to an inside of a second vacuum chamber providing a vacuum atmosphere, conveying the supplied thermal release film and base material film to an outlet of the second vacuum chamber. and separating the graphene from the thermal release film by contacting the graphene of the thermal release film and the base material film with outlet rollers in the outlet of the second vacuum chamber and transferring the graphene to the base material film, wherein while the thermal release film and the bonded metal sheet pass through an etching vessel containing an etching solution, the metal sheet is removed by etching, the metal sheet is guided to the etching vessel by a first etching guiding roller on an upper portion of the etching vessel, guided to the upper portion of the etching vessel by an etching roller in the etching vessel, and guided and conveyed to a winding roller wound with the thermal release film, the rm al release film having only remaining graphene, by a second etching guiding roller which is spaced apart from the first etching guiding roller, a vacuum curtain is provided to provide vacuum pressure between at least one of the inlet rollers and the outlet rollers and the first vacuum chamber and second vacuum chamber to prevent gas from flowing into the first vacuum chamber and second vacuum chamber, grooves are provided on a wall portion of the first vacuum chamber and second vacuum chamber so that at least one of the inlet rollers and the outlet rollers is inserted and rotated, and a deformable polymer layer is coated on at least one of the inlet rollers or the outlet rollers to remove a gap between the at least one of the inlet rollers or the outlet rollers by the passing metal film or transfer receiving sheet. Currently amended
2-11. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene transfer apparatus
Materials described outside the worked examples.
graphene
metal sheet
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 10,661,542Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. That is, even when the PVC film is used instead of the thermal release film 155 shown in
FIG. 2. According to the exemplary embodiment of the present invention, the metal sheet 151 is etched and removed, and the thermal release film 155 of which the …
FIG. 3 is a schematic diagram of an inlet roller of
FIG. 4 is a schematic diagram of a roller seal used in the graphene transfer process according to the exemplary embodiment of the present invention. [Best Mode …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for transferring graphene comprising: passing a metal sheet having graphene on one surface and a first protective film on the graphene and a transfer receiving sheet having a second protective film on one surface, through respective inlet rollers in an inlet of a vacuum chamber providing a vacuum atmosphere, to remove the first protective film and the second protective film, conveying the metal sheet and the transfer receiving sheet to an outlet of a-the vacuum chamber t adhering and transferring the graphene to the one surface of the transfer receiving sheet by contacting the one surface of the transfer receiving sheet with the graphene of the metal sheet by outlet rollers in the outlet of the vacuum chamber, discharging the graphene to the outlet of the vacuum chamber; and removing the metal sheet from the transfer receiving sheet by passing the metal sheet, the metal sheet being bonded to the transfer receiving sheet having the adhered graphene, through an etching solution; wherein at least one of heat and pressure is applied to the transferring of the graphene onto the transfer receiving sheet, a base material film to which the graphene is directly transferred through thermocompression is used as the transfer receiving sheet, the metal sheet having the graphene, and the transfer receiving sheet, are provided in a roll form, the first protective film of the metal sheet and the second protective film of the transfer receiving sheet are separated from each other while passing through separation inlet rollers to be discharged to an inlet side of the vacuum chamber, the vacuum chamber is a first vacuum chamber, and a thermal release film is used as the transfer receiving sheet, the method further comprising: supplying the thermal release film with the adhered graphene and the base material film, the base material film to have the graphene adhered thereto, to an inside of a second vacuum chamber providing a vacuum atmosphere, conveying the supplied thermal release film and base material film to an outlet of the second vacuum chamber. and separating the graphene from the thermal release film by contacting the graphene of the thermal release film and the base material film with outlet rollers in the outlet of the second vacuum chamber and transferring the graphene to the base material film, wherein while the thermal release film and the bonded metal sheet pass through an etching vessel containing an etching solution, the metal sheet is removed by etching, the metal sheet is guided to the etching vessel by a first etching guiding roller on an upper portion of the etching vessel, guided to the upper portion of the etching vessel by an etching roller in the etching vessel, and guided and conveyed to a winding roller wound with the thermal release film, the rm al release film having only remaining graphene, by a second etching guiding roller which is spaced apart from the first etching guiding roller, a vacuum curtain is provided to provide vacuum pressure between at least one of the inlet rollers and the outlet rollers and the first vacuum chamber and second vacuum chamber to prevent gas from flowing into the first vacuum chamber and second vacuum chamber, grooves are provided on a wall portion of the first vacuum chamber and second vacuum chamber so that at least one of the inlet rollers and the outlet rollers is inserted and rotated, and a deformable polymer layer is coated on at least one of the inlet rollers or the outlet rollers to remove a gap between the at least one of the inlet rollers or the outlet rollers by the passing metal film or transfer receiving sheet. Currently amended
2-11. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene transfer apparatus
Materials described outside the worked examples.
graphene
metal sheet
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 10,661,542Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. That is, even when the PVC film is used instead of the thermal release film 155 shown in
FIG. 2. According to the exemplary embodiment of the present invention, the metal sheet 151 is etched and removed, and the thermal release film 155 of which the …
FIG. 3 is a schematic diagram of an inlet roller of
FIG. 4 is a schematic diagram of a roller seal used in the graphene transfer process according to the exemplary embodiment of the present invention. [Best Mode …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for transferring graphene comprising: passing a metal sheet having graphene on one surface and a first protective film on the graphene and a transfer receiving sheet having a second protective film on one surface, through respective inlet rollers in an inlet of a vacuum chamber providing a vacuum atmosphere, to remove the first protective film and the second protective film, conveying the metal sheet and the transfer receiving sheet to an outlet of a-the vacuum chamber t adhering and transferring the graphene to the one surface of the transfer receiving sheet by contacting the one surface of the transfer receiving sheet with the graphene of the metal sheet by outlet rollers in the outlet of the vacuum chamber, discharging the graphene to the outlet of the vacuum chamber; and removing the metal sheet from the transfer receiving sheet by passing the metal sheet, the metal sheet being bonded to the transfer receiving sheet having the adhered graphene, through an etching solution; wherein at least one of heat and pressure is applied to the transferring of the graphene onto the transfer receiving sheet, a base material film to which the graphene is directly transferred through thermocompression is used as the transfer receiving sheet, the metal sheet having the graphene, and the transfer receiving sheet, are provided in a roll form, the first protective film of the metal sheet and the second protective film of the transfer receiving sheet are separated from each other while passing through separation inlet rollers to be discharged to an inlet side of the vacuum chamber, the vacuum chamber is a first vacuum chamber, and a thermal release film is used as the transfer receiving sheet, the method further comprising: supplying the thermal release film with the adhered graphene and the base material film, the base material film to have the graphene adhered thereto, to an inside of a second vacuum chamber providing a vacuum atmosphere, conveying the supplied thermal release film and base material film to an outlet of the second vacuum chamber. and separating the graphene from the thermal release film by contacting the graphene of the thermal release film and the base material film with outlet rollers in the outlet of the second vacuum chamber and transferring the graphene to the base material film, wherein while the thermal release film and the bonded metal sheet pass through an etching vessel containing an etching solution, the metal sheet is removed by etching, the metal sheet is guided to the etching vessel by a first etching guiding roller on an upper portion of the etching vessel, guided to the upper portion of the etching vessel by an etching roller in the etching vessel, and guided and conveyed to a winding roller wound with the thermal release film, the rm al release film having only remaining graphene, by a second etching guiding roller which is spaced apart from the first etching guiding roller, a vacuum curtain is provided to provide vacuum pressure between at least one of the inlet rollers and the outlet rollers and the first vacuum chamber and second vacuum chamber to prevent gas from flowing into the first vacuum chamber and second vacuum chamber, grooves are provided on a wall portion of the first vacuum chamber and second vacuum chamber so that at least one of the inlet rollers and the outlet rollers is inserted and rotated, and a deformable polymer layer is coated on at least one of the inlet rollers or the outlet rollers to remove a gap between the at least one of the inlet rollers or the outlet rollers by the passing metal film or transfer receiving sheet. Currently amended
2-11. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene transfer apparatus
Materials described outside the worked examples.
graphene
metal sheet
Additional fabrication and treatment steps described in the patent.
Patent
Atlas literature
Patent
US 10,661,542Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. That is, even when the PVC film is used instead of the thermal release film 155 shown in
FIG. 2. According to the exemplary embodiment of the present invention, the metal sheet 151 is etched and removed, and the thermal release film 155 of which the …
FIG. 3 is a schematic diagram of an inlet roller of
FIG. 4 is a schematic diagram of a roller seal used in the graphene transfer process according to the exemplary embodiment of the present invention. [Best Mode …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A method for transferring graphene comprising: passing a metal sheet having graphene on one surface and a first protective film on the graphene and a transfer receiving sheet having a second protective film on one surface, through respective inlet rollers in an inlet of a vacuum chamber providing a vacuum atmosphere, to remove the first protective film and the second protective film, conveying the metal sheet and the transfer receiving sheet to an outlet of a-the vacuum chamber t adhering and transferring the graphene to the one surface of the transfer receiving sheet by contacting the one surface of the transfer receiving sheet with the graphene of the metal sheet by outlet rollers in the outlet of the vacuum chamber, discharging the graphene to the outlet of the vacuum chamber; and removing the metal sheet from the transfer receiving sheet by passing the metal sheet, the metal sheet being bonded to the transfer receiving sheet having the adhered graphene, through an etching solution; wherein at least one of heat and pressure is applied to the transferring of the graphene onto the transfer receiving sheet, a base material film to which the graphene is directly transferred through thermocompression is used as the transfer receiving sheet, the metal sheet having the graphene, and the transfer receiving sheet, are provided in a roll form, the first protective film of the metal sheet and the second protective film of the transfer receiving sheet are separated from each other while passing through separation inlet rollers to be discharged to an inlet side of the vacuum chamber, the vacuum chamber is a first vacuum chamber, and a thermal release film is used as the transfer receiving sheet, the method further comprising: supplying the thermal release film with the adhered graphene and the base material film, the base material film to have the graphene adhered thereto, to an inside of a second vacuum chamber providing a vacuum atmosphere, conveying the supplied thermal release film and base material film to an outlet of the second vacuum chamber. and separating the graphene from the thermal release film by contacting the graphene of the thermal release film and the base material film with outlet rollers in the outlet of the second vacuum chamber and transferring the graphene to the base material film, wherein while the thermal release film and the bonded metal sheet pass through an etching vessel containing an etching solution, the metal sheet is removed by etching, the metal sheet is guided to the etching vessel by a first etching guiding roller on an upper portion of the etching vessel, guided to the upper portion of the etching vessel by an etching roller in the etching vessel, and guided and conveyed to a winding roller wound with the thermal release film, the rm al release film having only remaining graphene, by a second etching guiding roller which is spaced apart from the first etching guiding roller, a vacuum curtain is provided to provide vacuum pressure between at least one of the inlet rollers and the outlet rollers and the first vacuum chamber and second vacuum chamber to prevent gas from flowing into the first vacuum chamber and second vacuum chamber, grooves are provided on a wall portion of the first vacuum chamber and second vacuum chamber so that at least one of the inlet rollers and the outlet rollers is inserted and rotated, and a deformable polymer layer is coated on at least one of the inlet rollers or the outlet rollers to remove a gap between the at least one of the inlet rollers or the outlet rollers by the passing metal film or transfer receiving sheet. Currently amended
2-11. Canceled
Canceled
Layer stacks claimed or described, ordered top of device to substrate.
graphene transfer apparatus
Materials described outside the worked examples.
graphene
metal sheet
Additional fabrication and treatment steps described in the patent.
thermal release film
base material film
etching solution
deformable polymer layer
thermal release film
base material film
etching solution
deformable polymer layer
thermal release film
base material film
etching solution
deformable polymer layer
thermal release film
base material film
etching solution
deformable polymer layer