LARGE-AREA SINGLE- AND FEW-LAYER GRAPHENE ON ARBITRARY SUBSTRATES

Jing Kong

Patent

Atlas literature

Patent

US 8,535,553

LARGE-AREA SINGLE- AND FEW-LAYER GRAPHENE ON ARBITRARY SUBSTRATES

Jing Kong

Drawings

Patent drawings and their descriptions. Click a drawing to enlarge it.

FIG. 1

FIG. 1 illustrates the evaporation and deposition of a nickel ﬁlm on a thermally grown oxide layer on a silicon (Si) substrate.

FIG. 2

FIG. 2 illustrates the subsequent production of a graphene ﬁlm as the carbon-doped nickel ﬁlm is cooled down.

FIG. 3

FIG. 3 illustrates a full graphene coating on the nickel ﬁlm. 15

FIG. 4

FIG. 4 is an image of an as-deposited nickel ﬁlm.

FIG. 5

FIG. 5 is an image of that nickel ﬁlm after annealing is provided.

FIG. 6

FIG. 6 is an image of the annealed nickel ﬁlm coated with a graphene layer.

FIG. 7

FIGS. 7-10 illustrate the transfer of a few-layer graphene ﬁlm from the nickel-coated substrate to a target substrate. 20

FIG. 8

FIG. 8. The concentration of the HCI is, e.g., around 3 volume- % in water. The structure can be immersed in the HCI solution 22 for around 20 one hour to …

FIG. 9

FIG. 9 so that the target substrate 26 "picks up" the supported ﬁlm layer 24 on the water surface, 8 thereby producing a …

FIG. 10

FIG. 10, can include traces of polymethylmethacrylate on the graphene surface from its earlier adhesion to the polymethylmethacrylate layer 20. Since the …

FIG. 11

FIGS. 11-16 are optical images and atomic-force-microscopy characterizations of the few-layer graphene ﬁlm on a Si/SiO₂ substrate.

FIG. 12

FIG. 12. The lighter sections in this region correspond to a ﬁlm thickness of roughly 1 nm, as revealed by the corresponding height 15 measurements (

FIG. 13

FIG. 13. This thickness is typically assigned to a monolayer or bilayer of graphene on Si O2. The dark region corresponds to a 3.0 nm step, as 20 shown by the …

FIG. 14

FIG. 15

FIG. 15) of the same atomic- force-microscopy image (

FIG. 16

FIG. 16), obtained through atomic-force-microscopy images from the ﬁlm edge marked by the arrows in

FIG. 17

FIGS. 17-22 are high-resolution transmission-electron-microscope images illustrating the synthesized graphene ﬁlms with various numbers of layers.

FIG. 18

FIG. 18 is an intermediate magniﬁcation image showing two regions of the ﬁlm with diﬀerent thicknesses. The black arrow points to the edge between the thinner …

FIG. 19

FIG. 19 shows the edge of the ﬁlm that is only one layer in thickness.

FIG. 20

FIG. 20 shows the edge of 20 the ﬁlm that is three layers of thickness.

FIG. 21

FIG. 21 shows the edge of the ﬁlm that is four layers of thickness. Finally,

FIG. 22

FIG. 22 shows the edge of the ﬁlm that is eight layers of thickness. Similar folding has been reported previously for the transmission-electron-microscopy …

FIG. 23

FIGS. 23 and 24 are Raman spectra characterizations of the few-layer graphene ﬁlm on a 25 Si/SiO₂ substrate.

FIG. 24

FIG. 24), with a higher intensity than the G band, is the hallmark of monolayer graphene; and it is also observed here (

FIG. 25

FIGS. 25 and 26 show optical images of bare Ni ﬁlms with diﬀerent Ni grain sizes.

FIG. 26

FIG. 26 show optical images of bare Ni ﬁlms with diﬀerent Ni grain sizes.

FIG. 27

FIGS. 27 and 28 show optical images of the same Ni ﬁlms after a graphene ﬁlm was grown on their surfaces.

FIG. 28

FIG. 28 show optical images of the same Ni ﬁlms after a graphene ﬁlm was grown on their surfaces.

FIG. 29

FIGS. 29 and 30 show the graphene ﬁlms grown on the Ni ﬁlms above after being transferred to SiO 2/Si substrates.

FIG. 30

FIG. 30 show the graphene ﬁlms grown on the Ni ﬁlms above but transferred to SiO 2/Si. The darker areas near the grain boundaries (white arrows) correspond to …

FIG. 31

FIG. 31 shows optical images of graphene ﬁlms after being transferred to SiO 2/Si substrates. 5 In the accompanying drawings, like reference characters refer …

Claims

Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.

4 independent · 28 dependent

1
IndependentCpolymethylmethacrylate (PMMA)
A method for forming a single-layer or few-layer graphene ﬁlm comprising: forming a graphene ﬁlm having opposing surfaces, each with an area of at least 1 c on a surface of a growth substrate, wherein a ma j ority of the graphene ﬁlm has a thickness of 1 to 10 graphene layers; coating the graphene ﬁlm on the growth substrate with a protective support layer comprising a polymer; etching the surface of the growth substrate to release the graphene ﬁlm and the protective support layer from the growth substrate, the protective support layer maintaining the integrity of the graphene ﬁlm during and after its release from the growth substrate; applying the graphene ﬁlm and protective support layer onto a target substrate after release from the growth substrate; and removing the protective support layer from the graphene ﬁlm by exposing the protective support layer to a solvent after the graphene ﬁlm is applied to the target substrate.
1. 4
  Dependent← claim 1SiO₂
  The method of claim 1, wherein the growth substrate comprises a silica substrate or a silicon substrate coated with silica.
2. 23
  Dependent← claim 1CH₄C₂H₄alcoholCO
  The method of claim 1, wherein the graphene is deposited from a carbon source selected from methane, ethylene, alcohol, carbon monoxide, and combinations thereof.
3. 25
  Dependent← claim 1C
  The method of claim 1, wherein the graphene is deposited via chemical vapor deposition.
4. 27
  Dependent← claim 1polymethylmethacrylate (PMMA)
  The method of claim 1, wherein the protective support layer comprises polym ethyl m eth a crylate.
5. 28
  Dependent← claim 1C
  The method of claim 1, further comprising: generating patterns in the graphene via photolithography; and removing patterned areas in the graphene by etching.
6. 36
  Dependent← claim 1Cpolymethylmethacrylate (PMMA)
  The method of claim 1, further comprising protective support layer between release of the growth substrate and application of the graphene substrate. using a liquid to ﬂoat the graphene- ﬁlm-coated graphene and protective support layer from the and protective support layer to the target
2
Independent
2.
3
Independent
3.
26
Independent
-4- 26.

Materials

Materials described outside the worked examples.

graphene

Primary Film Material

polymethylmethacrylate (PMMA)

Protective Support Layer

Process steps

Additional fabrication and treatment steps described in the patent.

Cvd Growth

Step 1

Ambient

atmospheric pressure (slightly above 101.325 kPa)

Process details

notes:graphene film grows by surface segregation of carbon during cooling

method:atmospheric chemical vapor deposition

substrate:

Characterization

Measurements and analyses referenced in the patent, with their drawing references.

High-Resolution Transmission Electron Microscopy (HRTEM)

Atomic Force Microscopy (AFM)

Reported properties

Performance values and ranges asserted in the specification or claims.

Property	Value	Material
Film Area	1–2 cm2	C

Why these are connected

Related documents with shared materials, methods, properties, or citations.

LARGE-AREA SINGLE- AND FEW-LAYER GRAPHENE ON ARBITRARY SUBSTRATES | Matter42 Literature