Patent
US 9,905,4181,3-butadiene
C₄H₆
1,3-hexadiene
C₆H₁₀
pyrene
C₁₆H₁₀
naphthalene
C₁₀H₈
anthracene
C₁₄H₁₀
coronene
C₂₄H₁₂
parylene
benzene
C₆H₆
| 5–20 nm |
| — |
Pressure | 0.9–1.1 atm | — |
Thickness | 170–260 nm | — |
Duration | 15–180 s | — |
Thickness | ≤ 10 nm | — |
Thickness | ≤ 5 nm | — |
Thickness | ≥ 5 nm | — |
1,3-butadiene
C₄H₆
1,3-hexadiene
C₆H₁₀
pyrene
C₁₆H₁₀
naphthalene
C₁₀H₈
anthracene
C₁₄H₁₀
coronene
C₂₄H₁₂
parylene
benzene
C₆H₆
| 5–20 nm |
| — |
Pressure | 0.9–1.1 atm | — |
Thickness | 170–260 nm | — |
Duration | 15–180 s | — |
Thickness | ≤ 10 nm | — |
Thickness | ≤ 5 nm | — |
Thickness | ≥ 5 nm | — |
1,3-butadiene
C₄H₆
1,3-hexadiene
C₆H₁₀
pyrene
C₁₆H₁₀
naphthalene
C₁₀H₈
anthracene
C₁₄H₁₀
coronene
C₂₄H₁₂
parylene
benzene
C₆H₆
| 5–20 nm |
| — |
Pressure | 0.9–1.1 atm | — |
Thickness | 170–260 nm | — |
Duration | 15–180 s | — |
Thickness | ≤ 10 nm | — |
Thickness | ≤ 5 nm | — |
Thickness | ≥ 5 nm | — |
1,3-butadiene
C₄H₆
1,3-hexadiene
C₆H₁₀
pyrene
C₁₆H₁₀
naphthalene
C₁₀H₈
anthracene
C₁₄H₁₀
coronene
C₂₄H₁₂
parylene
benzene
C₆H₆
| 5–20 nm |
| — |
Pressure | 0.9–1.1 atm | — |
Thickness | 170–260 nm | — |
Duration | 15–180 s | — |
Thickness | ≤ 10 nm | — |
Thickness | ≤ 5 nm | — |
Thickness | ≥ 5 nm | — |