Patent
US 9,997,611GRAPHENE WIRING STRUCTURE AND METHOD FOR MANUFACTURING GRAPHENE WIRING STRUCTURE
Hisao MIYAZAKI
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,997,611Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. Each of the planar graphene sheets may partially contain carbon atoms having a pentagonal lattice structure, carbon atoms having a heptagonal lattice …
FIG. 2 illustrates a schematic cross-sectional view of the graphene wiring structure in which the first interlayer substance 2 and the second interlayer …
FIGS. 3 to 5. [0034] The member illustrated in the schematic process view of
FIG. 4 is a schematic cross-sectional view of the member illustrated in the schematic 10 process view of
FIG. 5 illustrates a form in which the metal halide 3 remains. When the metal oxyhalide is further G 90097942-US-A FTS 117 5-US-A oxidized, a generated metal …
FIG. 6 illustrates a schematic cross-sectional view of the 15 graphene wiring structure according to the second embodiment. The multilayered graphene 1, the …
FIG. 7 illustrates a schematic cross-sectional view of the graphene wiring structure according to the third 25 embodiment. The multilayered graphene 1, the …
FIG. 8 is illustrated based on assumption that a substrate is disposed on the lowermost surface of the multilayered graphene 1 5 Therefore, the fifth interlayer …
FIG. 9 is a schematic cross-sectional view of a graphene wiring structure according to an embodiment; G 90097942-US-A FTS 117 5-US-A [0014]
FIG. 10 illustrates a schematic cross-sectional view of the graphene wiring 15 structure according to the sixth embodiment. The graphene wiring structure …
FIG. 11 illustrates the substrate 11, the multilayered graphene 1 on the substrate 11, the interlayer substances 2 and 3 existing between layers of the …
FIG. 12. This indicates the interlayer substances 2 and 3 existing between layers of the multilayered graphene 1 25 [0068] Existence of the interlayer …
FIG. 13(A) clearly illustrates the multilayered graphene 1, the substrate 11, and the resin 12 using a broken G 90097942-US-A FTS 117 5-US-A line. Then, …
FIG. 15 13 (A);
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene wiring structure, comprising: a multilayered graphene having a plurality of planar graphene sheets laminated; [[and]] a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets 1 a substrate; and a metal portion on the substrate, wherein one end of each of the planar g raphene sheets is connected to the metal portion. Currently amended
The structure according to claim 1, wherein the metal oxyhalide is at least one of a metal oxychloride[[,]] and a metal oxyfluoride. Currently amended
The structure according to claim 1, wherein the metal oxyhalide includes at least one metal selected from the group consisting of Nb, Mo, Ta, W, and Bi as a metal of the metal oxyhalide. Original
The structure according to claim 1, further comprising a second interlayer substance between the plurality of planar graphene sheets, wherein the second interlayer substance is a halide of a metal contained in the metal oxyhalide. Original
The structure according to claim 1, further comprising a third interlayer substance between the plurality of planar graphene sheets, wherein the third interlayer substance is an oxide of a metal contained in the metal oxyhalide. Original
The structure according to claim 1, wherein the metal oxyhalide is at least one compound selected from the group consisting of NbOC 1 3, MoOC l 3, TaOC l 3, WOC l 4, BiOC l, Nb O 2 Cl, M o O 2 C l, Ta O 2 Cl, W O 2 C₁ 2, NbOF 3, MoOF 3, TaOF 3, MoOF 4, WO F 4, BiOF, Nb O 2 F, M o O 2 F, Ta O 2 F, M o O 2 F 2, and W 0 2 F 2. Original
(Withdrawn-Currently Amended): A method for manufacturing [[a]] t he graphene wiring structure of claim 1, comprising: inserting a metal halide between layers of a multilayered graphene having planar graphene sheets laminated; and oxidizing the multilayered graphene having planar graphene sheets laminated to form a first interlayer substance being a metal oxyhalide.
The structure according to claim 1, wherein the other end of each of the planar graphene sheets is not connected to the metal portion. New
The structure according to claim 1, wherein an interlayer distance between the planar graphene sheets is 0.7 nm to 1.0 nm. New
The structure according to claim 1, wherein the planar graphene sheets are grown from the metal portion as a catalyst. New
The structure according to claim 1, further comprising: a first insulating film and a second insulating film provided on the substrate such that the multilayered graphene is positioned between the first insulating film and the second insulating film. New
The structure according to claim 1, wherein the metal portion is formed of a metal or an alloy containing Fe, Ta, or Mo. New
The structure according to claim 1, wherein the substrate comprises a material having a hydrocarbon decomposition catalytic property and a carbon solid solution property. New
The structure according to claim 1, wherein the substrate comprises aluminum oxide (A 12O 3) or titanium oxide (Ti O 2). New
The structure according to claim 1, wherein the first interlayer substance is present between each of the plurality of planar graphene sheets. New
The structure according to claim 1, wherein the multilayered graphene has 10 to 100 of the planar graphene sheets, and has a thickness of from 5 nm to 50 nm. New
Layer stacks claimed or described, ordered top of device to substrate.
graphene wiring structure
Materials described outside the worked examples.
multilayered graphene
metal oxyhalide
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 12. This indicates the interlayer substances 2 and 3 existing between layers of the multilayered graphene 1 25 [0068] Existence of the interlayer …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
interlayer distance between planar graphene sheets | 0.7–1 | multilayered graphene |
Thickness | 0.7–1 nm |
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US 9,997,611Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. Each of the planar graphene sheets may partially contain carbon atoms having a pentagonal lattice structure, carbon atoms having a heptagonal lattice …
FIG. 2 illustrates a schematic cross-sectional view of the graphene wiring structure in which the first interlayer substance 2 and the second interlayer …
FIGS. 3 to 5. [0034] The member illustrated in the schematic process view of
FIG. 4 is a schematic cross-sectional view of the member illustrated in the schematic 10 process view of
FIG. 5 illustrates a form in which the metal halide 3 remains. When the metal oxyhalide is further G 90097942-US-A FTS 117 5-US-A oxidized, a generated metal …
FIG. 6 illustrates a schematic cross-sectional view of the 15 graphene wiring structure according to the second embodiment. The multilayered graphene 1, the …
FIG. 7 illustrates a schematic cross-sectional view of the graphene wiring structure according to the third 25 embodiment. The multilayered graphene 1, the …
FIG. 8 is illustrated based on assumption that a substrate is disposed on the lowermost surface of the multilayered graphene 1 5 Therefore, the fifth interlayer …
FIG. 9 is a schematic cross-sectional view of a graphene wiring structure according to an embodiment; G 90097942-US-A FTS 117 5-US-A [0014]
FIG. 10 illustrates a schematic cross-sectional view of the graphene wiring 15 structure according to the sixth embodiment. The graphene wiring structure …
FIG. 11 illustrates the substrate 11, the multilayered graphene 1 on the substrate 11, the interlayer substances 2 and 3 existing between layers of the …
FIG. 12. This indicates the interlayer substances 2 and 3 existing between layers of the multilayered graphene 1 25 [0068] Existence of the interlayer …
FIG. 13(A) clearly illustrates the multilayered graphene 1, the substrate 11, and the resin 12 using a broken G 90097942-US-A FTS 117 5-US-A line. Then, …
FIG. 15 13 (A);
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene wiring structure, comprising: a multilayered graphene having a plurality of planar graphene sheets laminated; [[and]] a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets 1 a substrate; and a metal portion on the substrate, wherein one end of each of the planar g raphene sheets is connected to the metal portion. Currently amended
The structure according to claim 1, wherein the metal oxyhalide is at least one of a metal oxychloride[[,]] and a metal oxyfluoride. Currently amended
The structure according to claim 1, wherein the metal oxyhalide includes at least one metal selected from the group consisting of Nb, Mo, Ta, W, and Bi as a metal of the metal oxyhalide. Original
The structure according to claim 1, further comprising a second interlayer substance between the plurality of planar graphene sheets, wherein the second interlayer substance is a halide of a metal contained in the metal oxyhalide. Original
The structure according to claim 1, further comprising a third interlayer substance between the plurality of planar graphene sheets, wherein the third interlayer substance is an oxide of a metal contained in the metal oxyhalide. Original
The structure according to claim 1, wherein the metal oxyhalide is at least one compound selected from the group consisting of NbOC 1 3, MoOC l 3, TaOC l 3, WOC l 4, BiOC l, Nb O 2 Cl, M o O 2 C l, Ta O 2 Cl, W O 2 C₁ 2, NbOF 3, MoOF 3, TaOF 3, MoOF 4, WO F 4, BiOF, Nb O 2 F, M o O 2 F, Ta O 2 F, M o O 2 F 2, and W 0 2 F 2. Original
(Withdrawn-Currently Amended): A method for manufacturing [[a]] t he graphene wiring structure of claim 1, comprising: inserting a metal halide between layers of a multilayered graphene having planar graphene sheets laminated; and oxidizing the multilayered graphene having planar graphene sheets laminated to form a first interlayer substance being a metal oxyhalide.
The structure according to claim 1, wherein the other end of each of the planar graphene sheets is not connected to the metal portion. New
The structure according to claim 1, wherein an interlayer distance between the planar graphene sheets is 0.7 nm to 1.0 nm. New
The structure according to claim 1, wherein the planar graphene sheets are grown from the metal portion as a catalyst. New
The structure according to claim 1, further comprising: a first insulating film and a second insulating film provided on the substrate such that the multilayered graphene is positioned between the first insulating film and the second insulating film. New
The structure according to claim 1, wherein the metal portion is formed of a metal or an alloy containing Fe, Ta, or Mo. New
The structure according to claim 1, wherein the substrate comprises a material having a hydrocarbon decomposition catalytic property and a carbon solid solution property. New
The structure according to claim 1, wherein the substrate comprises aluminum oxide (A 12O 3) or titanium oxide (Ti O 2). New
The structure according to claim 1, wherein the first interlayer substance is present between each of the plurality of planar graphene sheets. New
The structure according to claim 1, wherein the multilayered graphene has 10 to 100 of the planar graphene sheets, and has a thickness of from 5 nm to 50 nm. New
Layer stacks claimed or described, ordered top of device to substrate.
graphene wiring structure
Materials described outside the worked examples.
multilayered graphene
metal oxyhalide
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 12. This indicates the interlayer substances 2 and 3 existing between layers of the multilayered graphene 1 25 [0068] Existence of the interlayer …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
interlayer distance between planar graphene sheets | 0.7–1 | multilayered graphene |
Thickness | 0.7–1 nm |
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US 9,997,611Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. Each of the planar graphene sheets may partially contain carbon atoms having a pentagonal lattice structure, carbon atoms having a heptagonal lattice …
FIG. 2 illustrates a schematic cross-sectional view of the graphene wiring structure in which the first interlayer substance 2 and the second interlayer …
FIGS. 3 to 5. [0034] The member illustrated in the schematic process view of
FIG. 4 is a schematic cross-sectional view of the member illustrated in the schematic 10 process view of
FIG. 5 illustrates a form in which the metal halide 3 remains. When the metal oxyhalide is further G 90097942-US-A FTS 117 5-US-A oxidized, a generated metal …
FIG. 6 illustrates a schematic cross-sectional view of the 15 graphene wiring structure according to the second embodiment. The multilayered graphene 1, the …
FIG. 7 illustrates a schematic cross-sectional view of the graphene wiring structure according to the third 25 embodiment. The multilayered graphene 1, the …
FIG. 8 is illustrated based on assumption that a substrate is disposed on the lowermost surface of the multilayered graphene 1 5 Therefore, the fifth interlayer …
FIG. 9 is a schematic cross-sectional view of a graphene wiring structure according to an embodiment; G 90097942-US-A FTS 117 5-US-A [0014]
FIG. 10 illustrates a schematic cross-sectional view of the graphene wiring 15 structure according to the sixth embodiment. The graphene wiring structure …
FIG. 11 illustrates the substrate 11, the multilayered graphene 1 on the substrate 11, the interlayer substances 2 and 3 existing between layers of the …
FIG. 12. This indicates the interlayer substances 2 and 3 existing between layers of the multilayered graphene 1 25 [0068] Existence of the interlayer …
FIG. 13(A) clearly illustrates the multilayered graphene 1, the substrate 11, and the resin 12 using a broken G 90097942-US-A FTS 117 5-US-A line. Then, …
FIG. 15 13 (A);
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene wiring structure, comprising: a multilayered graphene having a plurality of planar graphene sheets laminated; [[and]] a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets 1 a substrate; and a metal portion on the substrate, wherein one end of each of the planar g raphene sheets is connected to the metal portion. Currently amended
The structure according to claim 1, wherein the metal oxyhalide is at least one of a metal oxychloride[[,]] and a metal oxyfluoride. Currently amended
The structure according to claim 1, wherein the metal oxyhalide includes at least one metal selected from the group consisting of Nb, Mo, Ta, W, and Bi as a metal of the metal oxyhalide. Original
The structure according to claim 1, further comprising a second interlayer substance between the plurality of planar graphene sheets, wherein the second interlayer substance is a halide of a metal contained in the metal oxyhalide. Original
The structure according to claim 1, further comprising a third interlayer substance between the plurality of planar graphene sheets, wherein the third interlayer substance is an oxide of a metal contained in the metal oxyhalide. Original
The structure according to claim 1, wherein the metal oxyhalide is at least one compound selected from the group consisting of NbOC 1 3, MoOC l 3, TaOC l 3, WOC l 4, BiOC l, Nb O 2 Cl, M o O 2 C l, Ta O 2 Cl, W O 2 C₁ 2, NbOF 3, MoOF 3, TaOF 3, MoOF 4, WO F 4, BiOF, Nb O 2 F, M o O 2 F, Ta O 2 F, M o O 2 F 2, and W 0 2 F 2. Original
(Withdrawn-Currently Amended): A method for manufacturing [[a]] t he graphene wiring structure of claim 1, comprising: inserting a metal halide between layers of a multilayered graphene having planar graphene sheets laminated; and oxidizing the multilayered graphene having planar graphene sheets laminated to form a first interlayer substance being a metal oxyhalide.
The structure according to claim 1, wherein the other end of each of the planar graphene sheets is not connected to the metal portion. New
The structure according to claim 1, wherein an interlayer distance between the planar graphene sheets is 0.7 nm to 1.0 nm. New
The structure according to claim 1, wherein the planar graphene sheets are grown from the metal portion as a catalyst. New
The structure according to claim 1, further comprising: a first insulating film and a second insulating film provided on the substrate such that the multilayered graphene is positioned between the first insulating film and the second insulating film. New
The structure according to claim 1, wherein the metal portion is formed of a metal or an alloy containing Fe, Ta, or Mo. New
The structure according to claim 1, wherein the substrate comprises a material having a hydrocarbon decomposition catalytic property and a carbon solid solution property. New
The structure according to claim 1, wherein the substrate comprises aluminum oxide (A 12O 3) or titanium oxide (Ti O 2). New
The structure according to claim 1, wherein the first interlayer substance is present between each of the plurality of planar graphene sheets. New
The structure according to claim 1, wherein the multilayered graphene has 10 to 100 of the planar graphene sheets, and has a thickness of from 5 nm to 50 nm. New
Layer stacks claimed or described, ordered top of device to substrate.
graphene wiring structure
Materials described outside the worked examples.
multilayered graphene
metal oxyhalide
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 12. This indicates the interlayer substances 2 and 3 existing between layers of the multilayered graphene 1 25 [0068] Existence of the interlayer …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
interlayer distance between planar graphene sheets | 0.7–1 | multilayered graphene |
Thickness | 0.7–1 nm |
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US 9,997,611Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1. Each of the planar graphene sheets may partially contain carbon atoms having a pentagonal lattice structure, carbon atoms having a heptagonal lattice …
FIG. 2 illustrates a schematic cross-sectional view of the graphene wiring structure in which the first interlayer substance 2 and the second interlayer …
FIGS. 3 to 5. [0034] The member illustrated in the schematic process view of
FIG. 4 is a schematic cross-sectional view of the member illustrated in the schematic 10 process view of
FIG. 5 illustrates a form in which the metal halide 3 remains. When the metal oxyhalide is further G 90097942-US-A FTS 117 5-US-A oxidized, a generated metal …
FIG. 6 illustrates a schematic cross-sectional view of the 15 graphene wiring structure according to the second embodiment. The multilayered graphene 1, the …
FIG. 7 illustrates a schematic cross-sectional view of the graphene wiring structure according to the third 25 embodiment. The multilayered graphene 1, the …
FIG. 8 is illustrated based on assumption that a substrate is disposed on the lowermost surface of the multilayered graphene 1 5 Therefore, the fifth interlayer …
FIG. 9 is a schematic cross-sectional view of a graphene wiring structure according to an embodiment; G 90097942-US-A FTS 117 5-US-A [0014]
FIG. 10 illustrates a schematic cross-sectional view of the graphene wiring 15 structure according to the sixth embodiment. The graphene wiring structure …
FIG. 11 illustrates the substrate 11, the multilayered graphene 1 on the substrate 11, the interlayer substances 2 and 3 existing between layers of the …
FIG. 12. This indicates the interlayer substances 2 and 3 existing between layers of the multilayered graphene 1 25 [0068] Existence of the interlayer …
FIG. 13(A) clearly illustrates the multilayered graphene 1, the substrate 11, and the resin 12 using a broken G 90097942-US-A FTS 117 5-US-A line. Then, …
FIG. 15 13 (A);
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A graphene wiring structure, comprising: a multilayered graphene having a plurality of planar graphene sheets laminated; [[and]] a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets 1 a substrate; and a metal portion on the substrate, wherein one end of each of the planar g raphene sheets is connected to the metal portion. Currently amended
The structure according to claim 1, wherein the metal oxyhalide is at least one of a metal oxychloride[[,]] and a metal oxyfluoride. Currently amended
The structure according to claim 1, wherein the metal oxyhalide includes at least one metal selected from the group consisting of Nb, Mo, Ta, W, and Bi as a metal of the metal oxyhalide. Original
The structure according to claim 1, further comprising a second interlayer substance between the plurality of planar graphene sheets, wherein the second interlayer substance is a halide of a metal contained in the metal oxyhalide. Original
The structure according to claim 1, further comprising a third interlayer substance between the plurality of planar graphene sheets, wherein the third interlayer substance is an oxide of a metal contained in the metal oxyhalide. Original
The structure according to claim 1, wherein the metal oxyhalide is at least one compound selected from the group consisting of NbOC 1 3, MoOC l 3, TaOC l 3, WOC l 4, BiOC l, Nb O 2 Cl, M o O 2 C l, Ta O 2 Cl, W O 2 C₁ 2, NbOF 3, MoOF 3, TaOF 3, MoOF 4, WO F 4, BiOF, Nb O 2 F, M o O 2 F, Ta O 2 F, M o O 2 F 2, and W 0 2 F 2. Original
(Withdrawn-Currently Amended): A method for manufacturing [[a]] t he graphene wiring structure of claim 1, comprising: inserting a metal halide between layers of a multilayered graphene having planar graphene sheets laminated; and oxidizing the multilayered graphene having planar graphene sheets laminated to form a first interlayer substance being a metal oxyhalide.
The structure according to claim 1, wherein the other end of each of the planar graphene sheets is not connected to the metal portion. New
The structure according to claim 1, wherein an interlayer distance between the planar graphene sheets is 0.7 nm to 1.0 nm. New
The structure according to claim 1, wherein the planar graphene sheets are grown from the metal portion as a catalyst. New
The structure according to claim 1, further comprising: a first insulating film and a second insulating film provided on the substrate such that the multilayered graphene is positioned between the first insulating film and the second insulating film. New
The structure according to claim 1, wherein the metal portion is formed of a metal or an alloy containing Fe, Ta, or Mo. New
The structure according to claim 1, wherein the substrate comprises a material having a hydrocarbon decomposition catalytic property and a carbon solid solution property. New
The structure according to claim 1, wherein the substrate comprises aluminum oxide (A 12O 3) or titanium oxide (Ti O 2). New
The structure according to claim 1, wherein the first interlayer substance is present between each of the plurality of planar graphene sheets. New
The structure according to claim 1, wherein the multilayered graphene has 10 to 100 of the planar graphene sheets, and has a thickness of from 5 nm to 50 nm. New
Layer stacks claimed or described, ordered top of device to substrate.
graphene wiring structure
Materials described outside the worked examples.
multilayered graphene
metal oxyhalide
Measurements and analyses referenced in the patent, with their drawing references.
FIG. 12. This indicates the interlayer substances 2 and 3 existing between layers of the multilayered graphene 1 25 [0068] Existence of the interlayer …
Performance values and ranges asserted in the specification or claims.
| Property | Value | Material |
|---|---|---|
interlayer distance between planar graphene sheets | 0.7–1 | multilayered graphene |
Thickness | 0.7–1 nm |
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Unconventional Spin-orbit Torques by Two-dimensional Multilayered MXenes for Future Nonvolatile Magnetic Memories
Momentum-resolved electronic structures and strong electronic correlations in graphene-like nitride superconductors
metal oxychloride
metal oxyfluoride
metal halide (second interlayer substance)
metal oxide (third interlayer substance)
NbOCl₃
MoOCl₃
TaOCl₃
WOCl₄
BiOCl
NbO₂Cl
MoO₂Cl
TaO₂Cl
WO₂Cl₂
NbOF₃
MoOF₃
TaOF₃
MoOF₄
WOF₄
BiOF
NbO₂F
MoO₂F
TaO₂F
MoO₂F₂
WO₂F₂
metal or alloy containing Fe, Ta, or Mo
aluminum oxide
Al₂O₃
titanium oxide
TiO₂
FIG. 13(A) clearly illustrates the multilayered graphene 1, the substrate 11, and the resin 12 using a broken G 90097942-US-A FTS 117 5-US-A line. Then, …
| — |
Thickness | 5–50 nm | — |
metal oxychloride
metal oxyfluoride
metal halide (second interlayer substance)
metal oxide (third interlayer substance)
NbOCl₃
MoOCl₃
TaOCl₃
WOCl₄
BiOCl
NbO₂Cl
MoO₂Cl
TaO₂Cl
WO₂Cl₂
NbOF₃
MoOF₃
TaOF₃
MoOF₄
WOF₄
BiOF
NbO₂F
MoO₂F
TaO₂F
MoO₂F₂
WO₂F₂
metal or alloy containing Fe, Ta, or Mo
aluminum oxide
Al₂O₃
titanium oxide
TiO₂
FIG. 13(A) clearly illustrates the multilayered graphene 1, the substrate 11, and the resin 12 using a broken G 90097942-US-A FTS 117 5-US-A line. Then, …
| — |
Thickness | 5–50 nm | — |
metal oxychloride
metal oxyfluoride
metal halide (second interlayer substance)
metal oxide (third interlayer substance)
NbOCl₃
MoOCl₃
TaOCl₃
WOCl₄
BiOCl
NbO₂Cl
MoO₂Cl
TaO₂Cl
WO₂Cl₂
NbOF₃
MoOF₃
TaOF₃
MoOF₄
WOF₄
BiOF
NbO₂F
MoO₂F
TaO₂F
MoO₂F₂
WO₂F₂
metal or alloy containing Fe, Ta, or Mo
aluminum oxide
Al₂O₃
titanium oxide
TiO₂
FIG. 13(A) clearly illustrates the multilayered graphene 1, the substrate 11, and the resin 12 using a broken G 90097942-US-A FTS 117 5-US-A line. Then, …
| — |
Thickness | 5–50 nm | — |
metal oxychloride
metal oxyfluoride
metal halide (second interlayer substance)
metal oxide (third interlayer substance)
NbOCl₃
MoOCl₃
TaOCl₃
WOCl₄
BiOCl
NbO₂Cl
MoO₂Cl
TaO₂Cl
WO₂Cl₂
NbOF₃
MoOF₃
TaOF₃
MoOF₄
WOF₄
BiOF
NbO₂F
MoO₂F
TaO₂F
MoO₂F₂
WO₂F₂
metal or alloy containing Fe, Ta, or Mo
aluminum oxide
Al₂O₃
titanium oxide
TiO₂
FIG. 13(A) clearly illustrates the multilayered graphene 1, the substrate 11, and the resin 12 using a broken G 90097942-US-A FTS 117 5-US-A line. Then, …
| — |
Thickness | 5–50 nm | — |