Patent
US 9,973,111GRAPHENE SHEET AND NANOMECHANICAL RESONATOR
William D. Duncan
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,973,111Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 -2, schematic plan views of a portion of a graphene sheet 10 are shown according to exemplary embodiments. Graphene forms a lattice of carbon atoms 12, …
FIG. 2 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0012]
FIG. 3, a schematic elevation view of the graphene sheet 10 is shown, according to an exemplary embodiment. The graphene sheet 10 is shown to extend in plane …
FIG. 4 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0014]
FIG. 5 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0015]
FIGS. 6A-6 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0016]
FIGS. 7A-7 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0017]
FIGS. 8A-8 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0018]
FIGS. 9 and 10, a desired defect pattern may be induced by growing the graphene sheet on the topographical template. According to one embodiment, the …
FIG. 10, the topographical template may be used to form a waffle pattern in the graphene sheet 100. For example, the spatial distribution of defects may include …
FIG. 11 is a perspective view of a topographical template for inducing a desired spatial distribution of defects in a graphene sheet, shown according to an …
FIG. 12, a flowchart of a process 120 for tailoring the buckling properties of a graphene sheet is shown, according to an -11- 4815-6936-0176 Atty. Dkt. No. …
FIG. 13, a flowchart of a process 130 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 130 is …
FIG. 14, a flowchart of a process 140 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 140 is …
FIG. 15, a flowchart of a process 150 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 150 is …
FIG. 16 is a schematic elevational view of a nanomechanical resonator, shown according to an exemplary embodiment. [0026]
FIG. 17 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. [0027]
FIG. 18 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. [0028]
FIGS. 19A-19B are schematic plan and elevational views, respectively, of a nanomechanical resonator, shown according to another embodiment. [0029]
FIGS. 20A and 20B-20E are schematic plan and elevational views, respectively, of a nanomechanical resonator, shown according to another embodiment. [0030]
FIG. 21 is a block diagram of processing electronics, shown according to an exemplary embodiment. [0031]
FIG. 22 is a flowchart of a process for controlling the resonant frequency of a suspended graphene nanomechanical resonator, shown according to an exemplary …
FIG. 23, a flowchart of a process 230 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 24, a flowchart of a process 240 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 25, a flowchart of a process 250 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 26, a flowchart of a process 260 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 27, a flowchart of a process 270 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 28 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. DETA I LED DESCRIPTION [0038] Referring generally …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A nanomechanical resonator, comprising: processing electronics configured to control an actuator to actively control a resonant frequency of a portion of a graphene sheet by applying a variable out-of-plane force to the graphene sheet, the graphene sheet at least partially suspended from a support structure and having a carbon lattice that substantially defines a plane. Original
The resonator of claim 1, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is comparable with the width dimension. Original
The resonator of claim 1, wherein the actuator is configured to mechanically vary the out-of-plane force, and wherein the actuator comprises a piezoelectric actuator coupled to a support structure. Original
The resonator of claim 1, wherein the actuator is configured to change the resonant frequency of the graphene sheet to a new value. Original
The resonator of claim 1, wherein the actuator is configured to control the resonant frequency of the graphene sheet to a reference value in response to an environmental disturbance. Original
A method of controlling a resonant frequency of a graphene nanomechanical resonator, comprising: controlling, by processing electronics, an actuator to actively control a resonant frequency of a portion of a graphene sheet by applying an out-of-plane force to the graphene sheet, the graphene sheet at least partially suspended from a support structure and having a carbon lattice that substantially defines a plane. Original
The method of claim 12, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is at least three times greater than the width dimension. Original
The method of claim 12, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is at least ten times greater than the width dimension. 15. The method of claim 14, wherein the graphene sheet includes a first end and a second end disposed lengthwise opposite the first end, and wherein the graphene sheet is supported at the first end by the support structure. Original
The method of claim 12, wherein the graphene sheet is supported by a plurality of supports and is subject to an in-plane stress field. Original
The method of claim 15, further comprising a second support structure; wherein the second end of the graphene sheet is supported by the second support structure. Original
The method of claim 16, further comprising suspending the second end of the graphene sheet from the second support structure. Original
The method of claim 25, wherein varying the out-of-plane force comprises varying a support boundary condition. Original
The method of claim 26, wherein varying the support boundary condition modifies the resonant frequency of the resonator. Original
The method of claim 26, wherein varying the out-of-plane force increases coupling between the graphene sheet and at least one support structure. Original
The method of claim 26, wherein varying the out-of-plane force decreases coupling between the graphene sheet and at least one support structure. Original
The method of claim 26, wherein varying the out-of-plane force increases an unsupported length of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force decreases an unsupported length of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force uniformly varies the out-of-plane force over a width of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force uniformly varies the out-of-plane force over a perimeter of the graphene sheet. Original
The method of claim 26, wherein the out-of-plane force is limited to a specified region of the graphene sheet. SVG 15137971.10-31-2017.J₉G₄₇HOLRXEAPX1.CLM.5.1.2160.253.2206.288.svg 0.117 0.153 Chemistry Black and white 35. The method of claim 26, wherein the out-of-plane force is limited to a plurality of specified regions of the graphene sheet. Original
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomechanical resonator
Materials described outside the worked examples.
graphene sheet
Measurements and analyses referenced in the patent, with their drawing references.
durability, in any of a wide variety of colors, textures, and combinations. Additionally, in the subject description, the word "exemplary" is used to mean serving as an example, instance or illustration. Any embodiment or design described herein as "exemplary"
Patent
Atlas literature
Patent
US 9,973,111Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 -2, schematic plan views of a portion of a graphene sheet 10 are shown according to exemplary embodiments. Graphene forms a lattice of carbon atoms 12, …
FIG. 2 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0012]
FIG. 3, a schematic elevation view of the graphene sheet 10 is shown, according to an exemplary embodiment. The graphene sheet 10 is shown to extend in plane …
FIG. 4 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0014]
FIG. 5 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0015]
FIGS. 6A-6 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0016]
FIGS. 7A-7 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0017]
FIGS. 8A-8 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0018]
FIGS. 9 and 10, a desired defect pattern may be induced by growing the graphene sheet on the topographical template. According to one embodiment, the …
FIG. 10, the topographical template may be used to form a waffle pattern in the graphene sheet 100. For example, the spatial distribution of defects may include …
FIG. 11 is a perspective view of a topographical template for inducing a desired spatial distribution of defects in a graphene sheet, shown according to an …
FIG. 12, a flowchart of a process 120 for tailoring the buckling properties of a graphene sheet is shown, according to an -11- 4815-6936-0176 Atty. Dkt. No. …
FIG. 13, a flowchart of a process 130 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 130 is …
FIG. 14, a flowchart of a process 140 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 140 is …
FIG. 15, a flowchart of a process 150 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 150 is …
FIG. 16 is a schematic elevational view of a nanomechanical resonator, shown according to an exemplary embodiment. [0026]
FIG. 17 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. [0027]
FIG. 18 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. [0028]
FIGS. 19A-19B are schematic plan and elevational views, respectively, of a nanomechanical resonator, shown according to another embodiment. [0029]
FIGS. 20A and 20B-20E are schematic plan and elevational views, respectively, of a nanomechanical resonator, shown according to another embodiment. [0030]
FIG. 21 is a block diagram of processing electronics, shown according to an exemplary embodiment. [0031]
FIG. 22 is a flowchart of a process for controlling the resonant frequency of a suspended graphene nanomechanical resonator, shown according to an exemplary …
FIG. 23, a flowchart of a process 230 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 24, a flowchart of a process 240 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 25, a flowchart of a process 250 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 26, a flowchart of a process 260 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 27, a flowchart of a process 270 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 28 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. DETA I LED DESCRIPTION [0038] Referring generally …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A nanomechanical resonator, comprising: processing electronics configured to control an actuator to actively control a resonant frequency of a portion of a graphene sheet by applying a variable out-of-plane force to the graphene sheet, the graphene sheet at least partially suspended from a support structure and having a carbon lattice that substantially defines a plane. Original
The resonator of claim 1, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is comparable with the width dimension. Original
The resonator of claim 1, wherein the actuator is configured to mechanically vary the out-of-plane force, and wherein the actuator comprises a piezoelectric actuator coupled to a support structure. Original
The resonator of claim 1, wherein the actuator is configured to change the resonant frequency of the graphene sheet to a new value. Original
The resonator of claim 1, wherein the actuator is configured to control the resonant frequency of the graphene sheet to a reference value in response to an environmental disturbance. Original
A method of controlling a resonant frequency of a graphene nanomechanical resonator, comprising: controlling, by processing electronics, an actuator to actively control a resonant frequency of a portion of a graphene sheet by applying an out-of-plane force to the graphene sheet, the graphene sheet at least partially suspended from a support structure and having a carbon lattice that substantially defines a plane. Original
The method of claim 12, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is at least three times greater than the width dimension. Original
The method of claim 12, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is at least ten times greater than the width dimension. 15. The method of claim 14, wherein the graphene sheet includes a first end and a second end disposed lengthwise opposite the first end, and wherein the graphene sheet is supported at the first end by the support structure. Original
The method of claim 12, wherein the graphene sheet is supported by a plurality of supports and is subject to an in-plane stress field. Original
The method of claim 15, further comprising a second support structure; wherein the second end of the graphene sheet is supported by the second support structure. Original
The method of claim 16, further comprising suspending the second end of the graphene sheet from the second support structure. Original
The method of claim 25, wherein varying the out-of-plane force comprises varying a support boundary condition. Original
The method of claim 26, wherein varying the support boundary condition modifies the resonant frequency of the resonator. Original
The method of claim 26, wherein varying the out-of-plane force increases coupling between the graphene sheet and at least one support structure. Original
The method of claim 26, wherein varying the out-of-plane force decreases coupling between the graphene sheet and at least one support structure. Original
The method of claim 26, wherein varying the out-of-plane force increases an unsupported length of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force decreases an unsupported length of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force uniformly varies the out-of-plane force over a width of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force uniformly varies the out-of-plane force over a perimeter of the graphene sheet. Original
The method of claim 26, wherein the out-of-plane force is limited to a specified region of the graphene sheet. SVG 15137971.10-31-2017.J₉G₄₇HOLRXEAPX1.CLM.5.1.2160.253.2206.288.svg 0.117 0.153 Chemistry Black and white 35. The method of claim 26, wherein the out-of-plane force is limited to a plurality of specified regions of the graphene sheet. Original
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomechanical resonator
Materials described outside the worked examples.
graphene sheet
Measurements and analyses referenced in the patent, with their drawing references.
durability, in any of a wide variety of colors, textures, and combinations. Additionally, in the subject description, the word "exemplary" is used to mean serving as an example, instance or illustration. Any embodiment or design described herein as "exemplary"
Patent
Atlas literature
Patent
US 9,973,111Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 -2, schematic plan views of a portion of a graphene sheet 10 are shown according to exemplary embodiments. Graphene forms a lattice of carbon atoms 12, …
FIG. 2 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0012]
FIG. 3, a schematic elevation view of the graphene sheet 10 is shown, according to an exemplary embodiment. The graphene sheet 10 is shown to extend in plane …
FIG. 4 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0014]
FIG. 5 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0015]
FIGS. 6A-6 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0016]
FIGS. 7A-7 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0017]
FIGS. 8A-8 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0018]
FIGS. 9 and 10, a desired defect pattern may be induced by growing the graphene sheet on the topographical template. According to one embodiment, the …
FIG. 10, the topographical template may be used to form a waffle pattern in the graphene sheet 100. For example, the spatial distribution of defects may include …
FIG. 11 is a perspective view of a topographical template for inducing a desired spatial distribution of defects in a graphene sheet, shown according to an …
FIG. 12, a flowchart of a process 120 for tailoring the buckling properties of a graphene sheet is shown, according to an -11- 4815-6936-0176 Atty. Dkt. No. …
FIG. 13, a flowchart of a process 130 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 130 is …
FIG. 14, a flowchart of a process 140 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 140 is …
FIG. 15, a flowchart of a process 150 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 150 is …
FIG. 16 is a schematic elevational view of a nanomechanical resonator, shown according to an exemplary embodiment. [0026]
FIG. 17 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. [0027]
FIG. 18 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. [0028]
FIGS. 19A-19B are schematic plan and elevational views, respectively, of a nanomechanical resonator, shown according to another embodiment. [0029]
FIGS. 20A and 20B-20E are schematic plan and elevational views, respectively, of a nanomechanical resonator, shown according to another embodiment. [0030]
FIG. 21 is a block diagram of processing electronics, shown according to an exemplary embodiment. [0031]
FIG. 22 is a flowchart of a process for controlling the resonant frequency of a suspended graphene nanomechanical resonator, shown according to an exemplary …
FIG. 23, a flowchart of a process 230 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 24, a flowchart of a process 240 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 25, a flowchart of a process 250 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 26, a flowchart of a process 260 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 27, a flowchart of a process 270 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 28 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. DETA I LED DESCRIPTION [0038] Referring generally …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A nanomechanical resonator, comprising: processing electronics configured to control an actuator to actively control a resonant frequency of a portion of a graphene sheet by applying a variable out-of-plane force to the graphene sheet, the graphene sheet at least partially suspended from a support structure and having a carbon lattice that substantially defines a plane. Original
The resonator of claim 1, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is comparable with the width dimension. Original
The resonator of claim 1, wherein the actuator is configured to mechanically vary the out-of-plane force, and wherein the actuator comprises a piezoelectric actuator coupled to a support structure. Original
The resonator of claim 1, wherein the actuator is configured to change the resonant frequency of the graphene sheet to a new value. Original
The resonator of claim 1, wherein the actuator is configured to control the resonant frequency of the graphene sheet to a reference value in response to an environmental disturbance. Original
A method of controlling a resonant frequency of a graphene nanomechanical resonator, comprising: controlling, by processing electronics, an actuator to actively control a resonant frequency of a portion of a graphene sheet by applying an out-of-plane force to the graphene sheet, the graphene sheet at least partially suspended from a support structure and having a carbon lattice that substantially defines a plane. Original
The method of claim 12, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is at least three times greater than the width dimension. Original
The method of claim 12, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is at least ten times greater than the width dimension. 15. The method of claim 14, wherein the graphene sheet includes a first end and a second end disposed lengthwise opposite the first end, and wherein the graphene sheet is supported at the first end by the support structure. Original
The method of claim 12, wherein the graphene sheet is supported by a plurality of supports and is subject to an in-plane stress field. Original
The method of claim 15, further comprising a second support structure; wherein the second end of the graphene sheet is supported by the second support structure. Original
The method of claim 16, further comprising suspending the second end of the graphene sheet from the second support structure. Original
The method of claim 25, wherein varying the out-of-plane force comprises varying a support boundary condition. Original
The method of claim 26, wherein varying the support boundary condition modifies the resonant frequency of the resonator. Original
The method of claim 26, wherein varying the out-of-plane force increases coupling between the graphene sheet and at least one support structure. Original
The method of claim 26, wherein varying the out-of-plane force decreases coupling between the graphene sheet and at least one support structure. Original
The method of claim 26, wherein varying the out-of-plane force increases an unsupported length of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force decreases an unsupported length of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force uniformly varies the out-of-plane force over a width of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force uniformly varies the out-of-plane force over a perimeter of the graphene sheet. Original
The method of claim 26, wherein the out-of-plane force is limited to a specified region of the graphene sheet. SVG 15137971.10-31-2017.J₉G₄₇HOLRXEAPX1.CLM.5.1.2160.253.2206.288.svg 0.117 0.153 Chemistry Black and white 35. The method of claim 26, wherein the out-of-plane force is limited to a plurality of specified regions of the graphene sheet. Original
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomechanical resonator
Materials described outside the worked examples.
graphene sheet
Measurements and analyses referenced in the patent, with their drawing references.
durability, in any of a wide variety of colors, textures, and combinations. Additionally, in the subject description, the word "exemplary" is used to mean serving as an example, instance or illustration. Any embodiment or design described herein as "exemplary"
Patent
Atlas literature
Patent
US 9,973,111Patent drawings and their descriptions. Click a drawing to enlarge it.
FIGS. 1 -2, schematic plan views of a portion of a graphene sheet 10 are shown according to exemplary embodiments. Graphene forms a lattice of carbon atoms 12, …
FIG. 2 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0012]
FIG. 3, a schematic elevation view of the graphene sheet 10 is shown, according to an exemplary embodiment. The graphene sheet 10 is shown to extend in plane …
FIG. 4 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0014]
FIG. 5 is a schematic plan view of a portion of a graphene sheet, shown according to another embodiment. [0015]
FIGS. 6A-6 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0016]
FIGS. 7A-7 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0017]
FIGS. 8A-8 B are a schematic plan and elevational views, respectively, of a portion of a graphene sheet, shown according to another embodiment. [0018]
FIGS. 9 and 10, a desired defect pattern may be induced by growing the graphene sheet on the topographical template. According to one embodiment, the …
FIG. 10, the topographical template may be used to form a waffle pattern in the graphene sheet 100. For example, the spatial distribution of defects may include …
FIG. 11 is a perspective view of a topographical template for inducing a desired spatial distribution of defects in a graphene sheet, shown according to an …
FIG. 12, a flowchart of a process 120 for tailoring the buckling properties of a graphene sheet is shown, according to an -11- 4815-6936-0176 Atty. Dkt. No. …
FIG. 13, a flowchart of a process 130 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 130 is …
FIG. 14, a flowchart of a process 140 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 140 is …
FIG. 15, a flowchart of a process 150 for tailoring the buckling properties of a graphene sheet is shown, according to an exemplary embodiment. Process 150 is …
FIG. 16 is a schematic elevational view of a nanomechanical resonator, shown according to an exemplary embodiment. [0026]
FIG. 17 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. [0027]
FIG. 18 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. [0028]
FIGS. 19A-19B are schematic plan and elevational views, respectively, of a nanomechanical resonator, shown according to another embodiment. [0029]
FIGS. 20A and 20B-20E are schematic plan and elevational views, respectively, of a nanomechanical resonator, shown according to another embodiment. [0030]
FIG. 21 is a block diagram of processing electronics, shown according to an exemplary embodiment. [0031]
FIG. 22 is a flowchart of a process for controlling the resonant frequency of a suspended graphene nanomechanical resonator, shown according to an exemplary …
FIG. 23, a flowchart of a process 230 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 24, a flowchart of a process 240 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 25, a flowchart of a process 250 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 26, a flowchart of a process 260 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 27, a flowchart of a process 270 for controlling the resonant frequency of a suspended graphene nanomechanical resonator is shown, according to an …
FIG. 28 is a schematic elevational view of a nanomechanical resonator, shown according to another embodiment. DETA I LED DESCRIPTION [0038] Referring generally …
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
A nanomechanical resonator, comprising: processing electronics configured to control an actuator to actively control a resonant frequency of a portion of a graphene sheet by applying a variable out-of-plane force to the graphene sheet, the graphene sheet at least partially suspended from a support structure and having a carbon lattice that substantially defines a plane. Original
The resonator of claim 1, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is comparable with the width dimension. Original
The resonator of claim 1, wherein the actuator is configured to mechanically vary the out-of-plane force, and wherein the actuator comprises a piezoelectric actuator coupled to a support structure. Original
The resonator of claim 1, wherein the actuator is configured to change the resonant frequency of the graphene sheet to a new value. Original
The resonator of claim 1, wherein the actuator is configured to control the resonant frequency of the graphene sheet to a reference value in response to an environmental disturbance. Original
A method of controlling a resonant frequency of a graphene nanomechanical resonator, comprising: controlling, by processing electronics, an actuator to actively control a resonant frequency of a portion of a graphene sheet by applying an out-of-plane force to the graphene sheet, the graphene sheet at least partially suspended from a support structure and having a carbon lattice that substantially defines a plane. Original
The method of claim 12, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is at least three times greater than the width dimension. Original
The method of claim 12, wherein the graphene sheet includes a length dimension and a width dimension, and wherein the length dimension is at least ten times greater than the width dimension. 15. The method of claim 14, wherein the graphene sheet includes a first end and a second end disposed lengthwise opposite the first end, and wherein the graphene sheet is supported at the first end by the support structure. Original
The method of claim 12, wherein the graphene sheet is supported by a plurality of supports and is subject to an in-plane stress field. Original
The method of claim 15, further comprising a second support structure; wherein the second end of the graphene sheet is supported by the second support structure. Original
The method of claim 16, further comprising suspending the second end of the graphene sheet from the second support structure. Original
The method of claim 25, wherein varying the out-of-plane force comprises varying a support boundary condition. Original
The method of claim 26, wherein varying the support boundary condition modifies the resonant frequency of the resonator. Original
The method of claim 26, wherein varying the out-of-plane force increases coupling between the graphene sheet and at least one support structure. Original
The method of claim 26, wherein varying the out-of-plane force decreases coupling between the graphene sheet and at least one support structure. Original
The method of claim 26, wherein varying the out-of-plane force increases an unsupported length of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force decreases an unsupported length of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force uniformly varies the out-of-plane force over a width of the graphene sheet. Original
The method of claim 26, wherein varying the out-of-plane force uniformly varies the out-of-plane force over a perimeter of the graphene sheet. Original
The method of claim 26, wherein the out-of-plane force is limited to a specified region of the graphene sheet. SVG 15137971.10-31-2017.J₉G₄₇HOLRXEAPX1.CLM.5.1.2160.253.2206.288.svg 0.117 0.153 Chemistry Black and white 35. The method of claim 26, wherein the out-of-plane force is limited to a plurality of specified regions of the graphene sheet. Original
Layer stacks claimed or described, ordered top of device to substrate.
graphene nanomechanical resonator
Materials described outside the worked examples.
graphene sheet
Measurements and analyses referenced in the patent, with their drawing references.
durability, in any of a wide variety of colors, textures, and combinations. Additionally, in the subject description, the word "exemplary" is used to mean serving as an example, instance or illustration. Any embodiment or design described herein as "exemplary"