Patent
US 12,515,952 B2ammonia
NH₃
Particle Size 10 Area Percent | ≤ 3 µm | GaN |
Spherical Particle Fraction | 25–43.9 area % | GaN |
Oxygen Content | ≤ 0.5 atm % | GaN |
Average Primary Particle Size | ≥ 7 µm | GaN |
Average Primary Particle Size | ≤ 150 µm | GaN |
Secondary Particle Size First Peak Apex | ≤ 90 µm | GaN |
Secondary Particle First Peak Content Rate | ≥ 10 wt % | GaN |
Thickness | 10–100 µm | — |
Thickness | 5–10 µm | — |
Thickness | ≤ 5 µm | — |
Temperature | ≤ 200 °C | — |
Temperature | 1000–1100 °C | — |
Temperature | 1050–1200 °C | — |
Temperature | 1025–1075 °C | — |
Temperature | 1100–1150 °C | — |
Duration | ≥ 3 hours | — |
Duration | ≥ 6 hours | — |
Duration | ≥ 12 hours | — |
Cited non-patent literature · 3
ammonia
NH₃
Particle Size 10 Area Percent | ≤ 3 µm | GaN |
Spherical Particle Fraction | 25–43.9 area % | GaN |
Oxygen Content | ≤ 0.5 atm % | GaN |
Average Primary Particle Size | ≥ 7 µm | GaN |
Average Primary Particle Size | ≤ 150 µm | GaN |
Secondary Particle Size First Peak Apex | ≤ 90 µm | GaN |
Secondary Particle First Peak Content Rate | ≥ 10 wt % | GaN |
Thickness | 10–100 µm | — |
Thickness | 5–10 µm | — |
Thickness | ≤ 5 µm | — |
Temperature | ≤ 200 °C | — |
Temperature | 1000–1100 °C | — |
Temperature | 1050–1200 °C | — |
Temperature | 1025–1075 °C | — |
Temperature | 1100–1150 °C | — |
Duration | ≥ 3 hours | — |
Duration | ≥ 6 hours | — |
Duration | ≥ 12 hours | — |
Cited non-patent literature · 3
ammonia
NH₃
Particle Size 10 Area Percent | ≤ 3 µm | GaN |
Spherical Particle Fraction | 25–43.9 area % | GaN |
Oxygen Content | ≤ 0.5 atm % | GaN |
Average Primary Particle Size | ≥ 7 µm | GaN |
Average Primary Particle Size | ≤ 150 µm | GaN |
Secondary Particle Size First Peak Apex | ≤ 90 µm | GaN |
Secondary Particle First Peak Content Rate | ≥ 10 wt % | GaN |
Thickness | 10–100 µm | — |
Thickness | 5–10 µm | — |
Thickness | ≤ 5 µm | — |
Temperature | ≤ 200 °C | — |
Temperature | 1000–1100 °C | — |
Temperature | 1050–1200 °C | — |
Temperature | 1025–1075 °C | — |
Temperature | 1100–1150 °C | — |
Duration | ≥ 3 hours | — |
Duration | ≥ 6 hours | — |
Duration | ≥ 12 hours | — |
Cited non-patent literature · 3
ammonia
NH₃
Particle Size 10 Area Percent | ≤ 3 µm | GaN |
Spherical Particle Fraction | 25–43.9 area % | GaN |
Oxygen Content | ≤ 0.5 atm % | GaN |
Average Primary Particle Size | ≥ 7 µm | GaN |
Average Primary Particle Size | ≤ 150 µm | GaN |
Secondary Particle Size First Peak Apex | ≤ 90 µm | GaN |
Secondary Particle First Peak Content Rate | ≥ 10 wt % | GaN |
Thickness | 10–100 µm | — |
Thickness | 5–10 µm | — |
Thickness | ≤ 5 µm | — |
Temperature | ≤ 200 °C | — |
Temperature | 1000–1100 °C | — |
Temperature | 1050–1200 °C | — |
Temperature | 1025–1075 °C | — |
Temperature | 1100–1150 °C | — |
Duration | ≥ 3 hours | — |
Duration | ≥ 6 hours | — |
Duration | ≥ 12 hours | — |
Cited non-patent literature · 3