Patent
US 9,994,007APPARATUS AND METHOD FOR GRAPHENE WET TRANSFER
Chulki KIM
US
Copyright © 2026 Matter42. All rights reserved.
Patent
Atlas literature
Patent
US 9,994,007Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view showing an apparatus for graphene wet transfer according to an embodiment of the present disclosure.
FIG. 2 is an exploded perspective view showing an apparatus for graphene wet transfer according to an embodiment of the present disclosure.
FIG. 3 is a cross-sectional view showing a barrier structure and a substrate frame, employed at the apparatus for graphene wet transfer according to an …
FIG. 4 is a flowchart for illustrating a method for graphene wet transfer according to an embodiment of the present disclosure.
FIGS. 5A to 5 C are diagrams for illustrating a process of transferring graphene to a target substrate, based on the cross-sectional view of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus for graphene wet transfer, comprising: a reservoir body having at least two reservoirs; a barrier structure located on any one of the at least two reservoirs and having at least one separated space formed; and a substrate frame located between -the barrier structure and the reservoir body, and having at least one substrate accommodation groove for accommodating a target substrate to which graphenes i s-are transferred, wherein each reservoir of the at least two reservoirs is filled with a solution for a wet transfer process, and the graphenes isare separately located in each separated space in a floating state in the solution. Currently amended
The apparatus for graphene wet transfer according to claim 1, further comprising a moving mechanism configured to allow the barrier structure to move in a horizontal direction between upper portions of the reservoirs. Original
The apparatus for graphene wet transfer according to claim 1, wherein a -lower surfaces of the graphenes fsa re bonded to a catalyst metal at which the graphenes ar ei s grown, and upper surfaces of the graphenes re bonded to a graphene support layer which supports the graphene s. Currently amended
The apparatus for graphene wet transfer according to claim 1, wherein each horizontal surface of the separated space has the same vertical axis as each horizontal surface of the substrate accommodation groove corresponding thereto. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate accommodation groove has a bottom surface with a predetermined slope. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate accommodation groove has a plurality of holes for draining the solution. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate frame is detachable. Original
The apparatus for graphene wet transfer according to claim 1, wherein the at least two reservoirs are separated by at least one dividing wall from each other, and wherein an upper portion of the dividing wall is made of a shielding material in order to minimize movement of the solution while the barrier structure is moving between upper portions of the reservoirs. Original
The apparatus for graphene wet transfer according to claim 1, wherein each of the at least two reservoirs further includes at least one valve for introducing the solution into the reservoir or discharging the solution out of the reservoir. Original
The apparatus for graphene wet transfer according to claim 1, further comprising a level control pipe connected to each of the at least two reservoirs to adjust a level of a solution filled in each reservoir. Original
A method for graphene wet transfer, comprising: etching a catalyst metal bonded to a lower surface of graphene by locating a barrier structure on a first reservoir filled with an etching solution and locating the graphene separately in each separated space of the barrier structure in a floating state in the etching solution; washing the etching solution by horizontally moving the barrier structure from the first reservoir onto a second reservoir filled with a washing solution; and transferring the graphene to a corresponding target substrate by locating a substrate frame accommodating at least one target substrate on horizontally moving the barrier structure from the first reservoir, and discharging the washing barrier structure is moving from the first reservoir reservoir to the first reservoir, the graphene is floating state in the etching solution or the washing the first reservoir filled with the washing solution, second reservoir onto the substrate frame of solution from the first reservoir, wherein while the to the second reservoir or from the second separately located in each separated space in a solution. Withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
graphene wet transfer apparatus
Materials described outside the worked examples.
graphene
wet transfer solution
catalyst metal
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,994,007Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view showing an apparatus for graphene wet transfer according to an embodiment of the present disclosure.
FIG. 2 is an exploded perspective view showing an apparatus for graphene wet transfer according to an embodiment of the present disclosure.
FIG. 3 is a cross-sectional view showing a barrier structure and a substrate frame, employed at the apparatus for graphene wet transfer according to an …
FIG. 4 is a flowchart for illustrating a method for graphene wet transfer according to an embodiment of the present disclosure.
FIGS. 5A to 5 C are diagrams for illustrating a process of transferring graphene to a target substrate, based on the cross-sectional view of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus for graphene wet transfer, comprising: a reservoir body having at least two reservoirs; a barrier structure located on any one of the at least two reservoirs and having at least one separated space formed; and a substrate frame located between -the barrier structure and the reservoir body, and having at least one substrate accommodation groove for accommodating a target substrate to which graphenes i s-are transferred, wherein each reservoir of the at least two reservoirs is filled with a solution for a wet transfer process, and the graphenes isare separately located in each separated space in a floating state in the solution. Currently amended
The apparatus for graphene wet transfer according to claim 1, further comprising a moving mechanism configured to allow the barrier structure to move in a horizontal direction between upper portions of the reservoirs. Original
The apparatus for graphene wet transfer according to claim 1, wherein a -lower surfaces of the graphenes fsa re bonded to a catalyst metal at which the graphenes ar ei s grown, and upper surfaces of the graphenes re bonded to a graphene support layer which supports the graphene s. Currently amended
The apparatus for graphene wet transfer according to claim 1, wherein each horizontal surface of the separated space has the same vertical axis as each horizontal surface of the substrate accommodation groove corresponding thereto. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate accommodation groove has a bottom surface with a predetermined slope. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate accommodation groove has a plurality of holes for draining the solution. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate frame is detachable. Original
The apparatus for graphene wet transfer according to claim 1, wherein the at least two reservoirs are separated by at least one dividing wall from each other, and wherein an upper portion of the dividing wall is made of a shielding material in order to minimize movement of the solution while the barrier structure is moving between upper portions of the reservoirs. Original
The apparatus for graphene wet transfer according to claim 1, wherein each of the at least two reservoirs further includes at least one valve for introducing the solution into the reservoir or discharging the solution out of the reservoir. Original
The apparatus for graphene wet transfer according to claim 1, further comprising a level control pipe connected to each of the at least two reservoirs to adjust a level of a solution filled in each reservoir. Original
A method for graphene wet transfer, comprising: etching a catalyst metal bonded to a lower surface of graphene by locating a barrier structure on a first reservoir filled with an etching solution and locating the graphene separately in each separated space of the barrier structure in a floating state in the etching solution; washing the etching solution by horizontally moving the barrier structure from the first reservoir onto a second reservoir filled with a washing solution; and transferring the graphene to a corresponding target substrate by locating a substrate frame accommodating at least one target substrate on horizontally moving the barrier structure from the first reservoir, and discharging the washing barrier structure is moving from the first reservoir reservoir to the first reservoir, the graphene is floating state in the etching solution or the washing the first reservoir filled with the washing solution, second reservoir onto the substrate frame of solution from the first reservoir, wherein while the to the second reservoir or from the second separately located in each separated space in a solution. Withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
graphene wet transfer apparatus
Materials described outside the worked examples.
graphene
wet transfer solution
catalyst metal
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,994,007Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view showing an apparatus for graphene wet transfer according to an embodiment of the present disclosure.
FIG. 2 is an exploded perspective view showing an apparatus for graphene wet transfer according to an embodiment of the present disclosure.
FIG. 3 is a cross-sectional view showing a barrier structure and a substrate frame, employed at the apparatus for graphene wet transfer according to an …
FIG. 4 is a flowchart for illustrating a method for graphene wet transfer according to an embodiment of the present disclosure.
FIGS. 5A to 5 C are diagrams for illustrating a process of transferring graphene to a target substrate, based on the cross-sectional view of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus for graphene wet transfer, comprising: a reservoir body having at least two reservoirs; a barrier structure located on any one of the at least two reservoirs and having at least one separated space formed; and a substrate frame located between -the barrier structure and the reservoir body, and having at least one substrate accommodation groove for accommodating a target substrate to which graphenes i s-are transferred, wherein each reservoir of the at least two reservoirs is filled with a solution for a wet transfer process, and the graphenes isare separately located in each separated space in a floating state in the solution. Currently amended
The apparatus for graphene wet transfer according to claim 1, further comprising a moving mechanism configured to allow the barrier structure to move in a horizontal direction between upper portions of the reservoirs. Original
The apparatus for graphene wet transfer according to claim 1, wherein a -lower surfaces of the graphenes fsa re bonded to a catalyst metal at which the graphenes ar ei s grown, and upper surfaces of the graphenes re bonded to a graphene support layer which supports the graphene s. Currently amended
The apparatus for graphene wet transfer according to claim 1, wherein each horizontal surface of the separated space has the same vertical axis as each horizontal surface of the substrate accommodation groove corresponding thereto. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate accommodation groove has a bottom surface with a predetermined slope. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate accommodation groove has a plurality of holes for draining the solution. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate frame is detachable. Original
The apparatus for graphene wet transfer according to claim 1, wherein the at least two reservoirs are separated by at least one dividing wall from each other, and wherein an upper portion of the dividing wall is made of a shielding material in order to minimize movement of the solution while the barrier structure is moving between upper portions of the reservoirs. Original
The apparatus for graphene wet transfer according to claim 1, wherein each of the at least two reservoirs further includes at least one valve for introducing the solution into the reservoir or discharging the solution out of the reservoir. Original
The apparatus for graphene wet transfer according to claim 1, further comprising a level control pipe connected to each of the at least two reservoirs to adjust a level of a solution filled in each reservoir. Original
A method for graphene wet transfer, comprising: etching a catalyst metal bonded to a lower surface of graphene by locating a barrier structure on a first reservoir filled with an etching solution and locating the graphene separately in each separated space of the barrier structure in a floating state in the etching solution; washing the etching solution by horizontally moving the barrier structure from the first reservoir onto a second reservoir filled with a washing solution; and transferring the graphene to a corresponding target substrate by locating a substrate frame accommodating at least one target substrate on horizontally moving the barrier structure from the first reservoir, and discharging the washing barrier structure is moving from the first reservoir reservoir to the first reservoir, the graphene is floating state in the etching solution or the washing the first reservoir filled with the washing solution, second reservoir onto the substrate frame of solution from the first reservoir, wherein while the to the second reservoir or from the second separately located in each separated space in a solution. Withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
graphene wet transfer apparatus
Materials described outside the worked examples.
graphene
wet transfer solution
catalyst metal
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
Patent
Atlas literature
Patent
US 9,994,007Patent drawings and their descriptions. Click a drawing to enlarge it.
FIG. 1 is a perspective view showing an apparatus for graphene wet transfer according to an embodiment of the present disclosure.
FIG. 2 is an exploded perspective view showing an apparatus for graphene wet transfer according to an embodiment of the present disclosure.
FIG. 3 is a cross-sectional view showing a barrier structure and a substrate frame, employed at the apparatus for graphene wet transfer according to an …
FIG. 4 is a flowchart for illustrating a method for graphene wet transfer according to an embodiment of the present disclosure.
FIGS. 5A to 5 C are diagrams for illustrating a process of transferring graphene to a target substrate, based on the cross-sectional view of
Claims define the patent's legal scope. Independent claims stand alone; dependent claims (nested) narrow them. Click a claim to expand its dependents.
An apparatus for graphene wet transfer, comprising: a reservoir body having at least two reservoirs; a barrier structure located on any one of the at least two reservoirs and having at least one separated space formed; and a substrate frame located between -the barrier structure and the reservoir body, and having at least one substrate accommodation groove for accommodating a target substrate to which graphenes i s-are transferred, wherein each reservoir of the at least two reservoirs is filled with a solution for a wet transfer process, and the graphenes isare separately located in each separated space in a floating state in the solution. Currently amended
The apparatus for graphene wet transfer according to claim 1, further comprising a moving mechanism configured to allow the barrier structure to move in a horizontal direction between upper portions of the reservoirs. Original
The apparatus for graphene wet transfer according to claim 1, wherein a -lower surfaces of the graphenes fsa re bonded to a catalyst metal at which the graphenes ar ei s grown, and upper surfaces of the graphenes re bonded to a graphene support layer which supports the graphene s. Currently amended
The apparatus for graphene wet transfer according to claim 1, wherein each horizontal surface of the separated space has the same vertical axis as each horizontal surface of the substrate accommodation groove corresponding thereto. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate accommodation groove has a bottom surface with a predetermined slope. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate accommodation groove has a plurality of holes for draining the solution. Original
The apparatus for graphene wet transfer according to claim 1, wherein the substrate frame is detachable. Original
The apparatus for graphene wet transfer according to claim 1, wherein the at least two reservoirs are separated by at least one dividing wall from each other, and wherein an upper portion of the dividing wall is made of a shielding material in order to minimize movement of the solution while the barrier structure is moving between upper portions of the reservoirs. Original
The apparatus for graphene wet transfer according to claim 1, wherein each of the at least two reservoirs further includes at least one valve for introducing the solution into the reservoir or discharging the solution out of the reservoir. Original
The apparatus for graphene wet transfer according to claim 1, further comprising a level control pipe connected to each of the at least two reservoirs to adjust a level of a solution filled in each reservoir. Original
A method for graphene wet transfer, comprising: etching a catalyst metal bonded to a lower surface of graphene by locating a barrier structure on a first reservoir filled with an etching solution and locating the graphene separately in each separated space of the barrier structure in a floating state in the etching solution; washing the etching solution by horizontally moving the barrier structure from the first reservoir onto a second reservoir filled with a washing solution; and transferring the graphene to a corresponding target substrate by locating a substrate frame accommodating at least one target substrate on horizontally moving the barrier structure from the first reservoir, and discharging the washing barrier structure is moving from the first reservoir reservoir to the first reservoir, the graphene is floating state in the etching solution or the washing the first reservoir filled with the washing solution, second reservoir onto the substrate frame of solution from the first reservoir, wherein while the to the second reservoir or from the second separately located in each separated space in a solution. Withdrawn
Layer stacks claimed or described, ordered top of device to substrate.
graphene wet transfer apparatus
Materials described outside the worked examples.
graphene
wet transfer solution
catalyst metal
Additional fabrication and treatment steps described in the patent.
Related documents with shared materials, methods, properties, or citations.
graphene support layer
catalyst metal (Pt, Ni, Cu)
graphene support layer polymer (teflon, PET, PDMS)
Methods of manufacturing and transferring larger-sized graphene
graphene support layer
catalyst metal (Pt, Ni, Cu)
graphene support layer polymer (teflon, PET, PDMS)
Methods of manufacturing and transferring larger-sized graphene
graphene support layer
catalyst metal (Pt, Ni, Cu)
graphene support layer polymer (teflon, PET, PDMS)
Methods of manufacturing and transferring larger-sized graphene
graphene support layer
catalyst metal (Pt, Ni, Cu)
graphene support layer polymer (teflon, PET, PDMS)
Methods of manufacturing and transferring larger-sized graphene