Patent
US 10,224,427AlGaN/GaN HEMT with first and second insulating portions (claim 8 structure)
Transistor with high resistivity semiconductor layer and two-portion insulating region (claim 12 structure)
bottom spacer layer/first insulating portion
top insulating layer/second insulating portion
GaN
AlGaN
aluminum nitride
AlN
silicon nitride
SiN
silicon dioxide
SiO₂
sapphire
Al₂O₃
silicon carbide
SiC
AlxGa₁-xN buffer layer
AlxGa₁-xN
| 20–100 sccm |
| — |
— | 200–300 W | — |
Flow Rate | 8–10 sccm | — |
AlGaN/GaN HEMT with first and second insulating portions (claim 8 structure)
Transistor with high resistivity semiconductor layer and two-portion insulating region (claim 12 structure)
bottom spacer layer/first insulating portion
top insulating layer/second insulating portion
GaN
AlGaN
aluminum nitride
AlN
silicon nitride
SiN
silicon dioxide
SiO₂
sapphire
Al₂O₃
silicon carbide
SiC
AlxGa₁-xN buffer layer
AlxGa₁-xN
| 20–100 sccm |
| — |
— | 200–300 W | — |
Flow Rate | 8–10 sccm | — |
AlGaN/GaN HEMT with first and second insulating portions (claim 8 structure)
Transistor with high resistivity semiconductor layer and two-portion insulating region (claim 12 structure)
bottom spacer layer/first insulating portion
top insulating layer/second insulating portion
GaN
AlGaN
aluminum nitride
AlN
silicon nitride
SiN
silicon dioxide
SiO₂
sapphire
Al₂O₃
silicon carbide
SiC
AlxGa₁-xN buffer layer
AlxGa₁-xN
| 20–100 sccm |
| — |
— | 200–300 W | — |
Flow Rate | 8–10 sccm | — |
AlGaN/GaN HEMT with first and second insulating portions (claim 8 structure)
Transistor with high resistivity semiconductor layer and two-portion insulating region (claim 12 structure)
bottom spacer layer/first insulating portion
top insulating layer/second insulating portion
GaN
AlGaN
aluminum nitride
AlN
silicon nitride
SiN
silicon dioxide
SiO₂
sapphire
Al₂O₃
silicon carbide
SiC
AlxGa₁-xN buffer layer
AlxGa₁-xN
| 20–100 sccm |
| — |
— | 200–300 W | — |
Flow Rate | 8–10 sccm | — |