Patent
US 9,868,640germane
GeH₄
methane
CH₄
germanium
Ge
| — |
Pressure | 0.1–200 Torr | — |
Pressure | 10–30 Torr | — |
Temperature | 200–900 °C | — |
Generalized Phase Diagrams for Graphene CVD growth on Copper
germane
GeH₄
methane
CH₄
germanium
Ge
| — |
Pressure | 0.1–200 Torr | — |
Pressure | 10–30 Torr | — |
Temperature | 200–900 °C | — |
Generalized Phase Diagrams for Graphene CVD growth on Copper
germane
GeH₄
methane
CH₄
germanium
Ge
| — |
Pressure | 0.1–200 Torr | — |
Pressure | 10–30 Torr | — |
Temperature | 200–900 °C | — |
Generalized Phase Diagrams for Graphene CVD growth on Copper
germane
GeH₄
methane
CH₄
germanium
Ge
| — |
Pressure | 0.1–200 Torr | — |
Pressure | 10–30 Torr | — |
Temperature | 200–900 °C | — |
Generalized Phase Diagrams for Graphene CVD growth on Copper